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Gary S. Coyne - A Practical Guide to Materials, Equipment, and Technique.pdf
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428

Vacuum Systems

leads and running a Tesla coil on the gauge. However, it is best to simply replace the gauge.60

7.5.21 Cleaning Hot-Cathode Ion Gauges61

The cleaning technique used for hot-cathode ion gauges depends on the shape, structure, and composition of the gauge. Hot-cathode gauges are so sensitive that any cleaning will alter or damage the sensitivity of the gauge. You can minimize gauge damage if the cleaning is performed by electrical heating while the gauge is in a high-vacuum condition. This heat cleaning or baking out can be done by grounding the ion collector and applying a Tesla coil to each of the electrodes within the gauge. Important: Be sure that the controller is off when doing this operation. Otherwise the charge from the Tesla coil may destroy the controller.

Chemical cleaning requires the removal of the gauge from the system and a general (gentle) rinsing with distilled water. If the gauge has a deposit that is blue or silver gray, the contamination is probably tungsten oxide or molybdenum oxide. This deposit can be cleaned as follows:

1.Soak the gauge in a 10-20% sodium carbonate solution. Gently heating the solution to 30°C will accelerate the cleaning process, which should take about 15 minutes.

Table 7.13 Thermionic Ionization Gauge Sensitivity/'

Relative to that for Nitrogen*

Hydrogen

0.47

 

0.53

Helium

0.16

Neon

0.24

Nitrogen

1.00

Argon

1.19

Carbon monoxide

1.07

Carbon dioxide

1.37

Water vapor

0.89

Oxygen

0.85

Krypton

1.9

Xenon

2.7

Mercury vapor

3.4

Narcoil-40 vapor

13

° True gauge sensitivity is typeand model-specific. Accurate sensitivity tables for your gauge should be supplied by the manufacturer. This table is supplied for reference only.

* Reprinted from Vacuum,Vol. 13, H.A. Tasman, A.J.H. Boerboom, and J. Kistemaker, "Vacuum Techniques in Conjunction with Mass Spectrometry," © 1963, p. 43. with kind permission from Elsevier Science Ltd, The Boulevard, Langford Lane, Kidlington OX5 1GB, UK.

Vacuum Gauges 7.5

429

2.Rinse with copious amounts of water, then let the gauge soak for about a half-hour filled with distilled water. Repeat the distilled water soak two more times.

If the deposit is brown, the offending contamination is probably cracked hydrocarbon vapor. This deposit can be cleaned as follows:

1.Soak the gauge in a 10% solution of potassium hydroxide and let it stand for about a half-hour. This soaking may have to be repeated with a fresh potassium hydroxide solution.

2.If there is a discoloration of the electrodes, gently shake some hydrogen peroxide in the gauge until the discoloration disappears.

3.Water spots can be removed with an oxidizer such as any substitute for chromic acid (see Sec. 4.1.9). Do not use chromic acid because it is a toxic waste.

4.Rinse with copious amounts of water, then let the gauge soak for about a half-hour filled with distilled water. Repeat the distilled water soak two more times.

7.5.22The Cold-Cathode Ion Gauge

The cold-cathode [a.k.a. Penning gauge, Philips gauge, or PIG (Philips ionization gauge)] requires a high-potential field for removing electrons from the (cold) cathode. This same principle is used in the magnetron and the inverted magnetron. In the cold-cathode gauge, the center loop is an anode (see Fig. 7.49) and it is maintained at a very high electrical potential (2-10 kV). The two plates are cathodes and are grounded. Electrons travel from the cathodes to the anode, ionizing molecules on their way. A U- or circular-shaped magnet is placed over the cathodes. The magnetic field formed by the magnets forces the electrons to take a longer route than they otherwise would.* Thus, they come into contact with a greater number of gas molecules and create a greater number of ions.

Magnetic

field

H

\7

Fig. 7.49 Basic electrode layout of the Penning gauge. From Fundamentals of Vacuum Science and Technology, by G. Lewin McGraw-Hill, New York, 1965 (Fig. 5-4), reproduced with permission.

* At 10~10 torr, it can require 20 minutes for an electron to travel from the cathode to the anode.

430

Vacuum Systems

The range of the cold-cathode gauge is about 10"2 to 10"10 torr. Initiating the discharge within the cold-cathode gauge at lower vacuum ranges (>106 torr) is typically fast, within seconds. However, at lower pressures (10~8 to 10"10 torr) it can take hours for the discharge to begin. You may wish to start your cold-cathode gauge at higher pressures and leave it on as the pressure drops to maintain the discharge.

The cold-cathode gauge can act like a sputtering ion pump just as the hot-cath- ode gauge. However, it can pump nitrogen 10-100 times faster than a hot-cathode gauge. A cold-cathode gauge can pump nitrogen at rates of 0.1-0.5 liters/sec. Thus, if the connection tube to the gauge is too small in diameter, the gauge will remove the nitrogen from the area of the gauge faster than the system can equilibrate. The gauge will then read a greater vacuum than actually exists within the system.

Like a hot-cathode gauge, the cold-cathode gauge can be maintained longer between cleanings if a cold trap is placed between the gauge and the system. However, the gauge will indicate pressures lower than really exist within your system due to the cryogenic pumping capabilities of the cold trap. In addition, it will also slow the speed required for the system and the gauge to come to equilibrium. When installing the gauge, do not position the opening of the gauge to face the cold trap because momentary warming of the trap will cause evaporating frozen material to contaminate the gauge. When mounting the gauge on a vacuum system, be sure to angle the gauge so that the opening faces down. This angling will prevent particulate matter from falling into the gauge.

Do not leave the gauge on for extended periods of time, especially when the pressure is only about 10~2 torr. Otherwise the gauge can contaminate quickly. Likewise, do not let the gauge run continuously while the system is roughing down. Brief use will limit the effects of the pumping action of the gauge.

7.5.23 Cleaning Cold-Cathode Ion Gauges63

Some cold-cathode gauges can be taken apart. If you have one of these gauges, it is possible to carefully sand any surface contamination off the grid with a finegrade glass-sanding paper (do not use a metal file that could leave metal filings within the gauge. These filings can cause major problems during use). The gauge should then be rinsed with appropriate solvents followed by rinses of distilled water and then methanol. After the gauge is reassembled, be prepared to realign the magnet (follow the manufacturer's guidelines).

If your gauge is glass-bodied, it cannot be taken apart and you are limited to the chemical cleaning processes mentioned for the hot-cathode ion gauge.

7.5.24 The Momentum Transfer Gauge (MTG)

The momentum transfer gauge (MTG) was first developed as a lab curiosity in 1962. It uses the principle of gas viscosity to slow a spinning ball bearing that is

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