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424

Vacuum Systems

a hot-cathode gauge's volume is 100 cm3, 1% of the gas within the gauge is removed every second!54 It has been shown that if the conductivity of the connecting tube is >10 liters/sec, these affects are negligible.

If you are concerned specifically with accuracy, hot-cathode gauges show greater accuracy and reproducibility. However, it must be operated by an experienced technician in controlled conditions with repeated backing and degassing. Otherwise, the cold-cathode gauge will provide greater accuracy without constant attention. This is mostly attributed to the how the electrodes of the hot-cathode gauge do get hot during operation which in turn provides some incidental outgassing. The cold-cathode gauge operates at room temperatures and has no incidental outgassing.55

Electrical Warning: Ion gauges require high voltage, so common sense must be observed. For instance, do not pull on the cord when unplugging a gauge from a wall outlet, but instead pull on the electrical plug. Avoid spilling conducting liquids around the gauges. All pieces should be grounded; and if the unit has a threepronged outlet, do not cut off the ground or bypass it. Be sure to unplug the unit if it is being repaired. Replace worn and/or frayed cords immediately. Cover all bare (exposed) electrical leads with tape, tubing, shrink tubing, or plastic screw caps. Keep flammable liquids or gases away from electrical devices in case of sparks and/or electrical arcs. Because of the high voltages possible with ion gauges, dirt (and even fingerprints) can cause unexpected arcs. Therefore, keep the gauge surface clean. Turn off the gauge and its controller when helium leak testing because a discharge can be created around high-voltage feedthroughs, which in turn can destroy the gauges controller. Likewise, turn off the gauge and controller when checking for leaks on a glass system using a Tesla coil. The discharge can destroy the electrical circuits within the controller. Finally, if your vacuum system is mounted on a metal rack, ground the rack with grounding strap (braided copperplated wire) to plumbing or some other substantial ground. For proper contact, file off any paint or corrosion on the rack and the ground before attaching the grounding strap with a threaded hose clamp.

7.5.20 The Hot-Cathode Ion Gauge

The most common hot-cathode ion gauge (and the most common high-vacuum gauge used) is the Bayard-Alpert gauge. It can read vacuums between 10~3 and 10"10 torr. With special gauges, readings as low as 10"14 torr can be obtained. A diagram of its general structure is shown in Fig. 7.48. The hot-cathode gauge operates by heating a filament, which causes an emission of electrons. These electrons are attracted to a grid which is held to a high (+) potential that attracts the (- ) electrons. As electrons stream toward the grid, they collide with the gas molecules enroute, ripping off an electron and creating positive ions. The positive ions are attracted to the ion collector, collected, and counted. The positive ion current is measured in amperes from the gauge tube, but the hot-cathode gauge controller then interprets this count as vacuum reading. Hot-ion gauges are designed to be

Vacuum Gauges 7.5

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Ion

Grid collector

Filament

Fig. 7.48 The Bayard-Alpert hot-cathode gauge. From Fundamentals of Vacuum Science and Technology, p. 92, by G. Lewin, McGraw-Hill, New York, 1965, reproduced with permission.

gas-specific* Currently, the gauges are accurate to within ± 20% for their specific gas type.

Early versions of the hot-cathode ion gauge used a large cylinder for the ion collector. This design was limited to a vacuum measurement of only approximately 10"4 torr. Nottingham56 proposed that when electrons struck the grid, soft X-rays were created. The X-rays then struck the large ion collector cylinder, which in turn caused photoelectrons to flow back to the grid. This action created a current in the external circuit of the ion gauge that was indistinguishable from the ion flow. Thus, the gauge was actually reading lower vacuums, but the excess electronic noise was masking the reading and producing artificially higher readings. By decreasing the size of the ion collector, Bayard and Alpert significantly decreased the electronic noise, vastly improving the quality and accuracy of the hot-cathode ion gauge.

The standard material used for filaments within a hot-ion gauge is tungsten.* Unfortunately, a tungsten filament can easily burn out if a gauge is turned on when the pressure is too high within a system. Because of this idiosyncrasy, a thermocouple or Pirani gauge may be connected to a relay that shuts off power to the ion gauge if a loss of vacuum is detected. This addition is strongly recommended. (Some controllers provide automatic switching between a thermocouple and an ion gauge to allow for continuous readings between atmospheric and 10~10 torr.)

*Most gauges are designed to read specific pressures in nitrogen atmospheres.

f Tungsten filaments can create large quantities of CO and CO2 during operation, which may, or may not, affect your work. It is possible to obtain Bayard-Alpert gauges that can be preheated, or baked out, prior to use to limit this problem.

426 Vacuum Systems

Another common filament material used in hot-cathode ion gauges is thoriated iridium (ThO2 on iridium). These filaments are used if there is any likelihood that the system will be exposed to accidental bursts of atmosphere. However, if exposed to hydrocarbons or halocarbons, their emissions can radically change. Use of a silicon oil in the diffusion pump is required with these filiments. Recalibration of these filaments is constantly required.

Studies by McCulloh and Tilford57 found that dual tungsten filaments exhibited better linearity and also exhibited sensitivities which were in closer agreement to those stated by the manufacturer. Filaments made out of thoriated iridium demonstrated linearity differences as great as 30%. These differences were evident in standard as well as nude gauges.*

Sensitivity variations can be due to (at least in part) the proximity of the top of the filament to the cylindrical envelope of the grid spiral (Hirata et al.).58 This sensitivity is why (in part) gauges should not be roughly handled or dropped. If the filament changes its location within the gauge, the readings will vary from what they were before the mishandling. Any data that were obtained before such an incident may then need to be redone or re-calibrated to agree with later data.

Magnetic fields, depending on their strength and orientation, can also influence ion gauge readings. Studies by Hseuh59 showed that a magnetic field can change an electron's path even though changes in the collection of ions were negligible. A magnetic field has the least effect when it is parallel to the gauge. It has the greatest effect when the gauge is perpendicular to the magnetic field. However, the alignment of the electric field relative to a magnetic field is complicated. Optimally, it is best to keep magnetic fields away from Bayard-Alpert gauges.

There are several general rules to follow that will make the operation of a hotcathode ion gauge as trouble-free as possible. Implementation of these rules cannot guarantee success, but ignoring them will ensure problems:

1.Always connect the gauge as close as possible to the area where measurements need to be made. The farther away the gauge is from the point of measurement, the longer the lag time before the system and the

gauge come to equilibrium. The greater the vacuum (> 10~5 torr), the more pronounced this effect.

2.On glass systems, the ion gauge is attached to the line by a connecting piece of glass, a glass to metal seal, or some type of Swagelok®. Regardless of how the gauge is attached, try to keep this connection as short as possible with as large a diameter of tubing as possible (>1 inch). Do not use any connection with a smaller diameter than that supplied on the gauge. A cold trap placed between the gauge and line will

*A "nude" gauge has no protective cover and, rather than being attached to a vacuum system, it is mounted in the vacuum system. This difference prevents any lag in response time from pressure variations through a tube and eliminates the effects of ion-gauge pumping. The main disadvantage is that there is no way to shut off the gauge from the line itself, so there is no way of protecting the gauge from any potential contaminating materials. Nude gauges are not available for glass systems.

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help protect the gauge from condensable vapors. However, it will indicate pressures lower than really exist within your system due to the cryogenic pumping capabilities of the cold trap. In addition, it will also slow the speed required for the system and the gauge to come to equilibrium.

3.On metal systems, you have two choices: Connect the ion gauge by connecting tubing (same tubing size rules apply from Point 2), or use a nude gauge.

4.The ion gauge is gas- (see Table 7.13) and temperature-dependent. Therefore, if your lab has temperature swings and/or you vary the gases within your system, constant recalibration may be required. Table 7.13 (and others like it) can only provide a benchmark for making corrections because your system is not likely to have pure gas samples. In addition, variations between gauges of the same type (but from different manufacturers) can be quite large while the differences between gauges of different designs can be phenomenal. For the most accurate interpretation of your gauges readings, obtain calibration tables from the gauges manufacturer.

5.Never turn a gauge on until the pressure is below 1 um or less. You must have a second gauge for higher pressures (for example, a Pirani or thermocouple gauge).

6.The hot-cathode gauge must be outgassed every time the gauge is

exposed to the atmosphere for an extended period of time, or at pressures near the base pressure of operation (10~5 torr). The outgassing cannot be done at any higher pressure than 10"5 torr, and it can be per-

formed either by providing a current to the grid within the gauge (which can often be supplied by the gauge controller) or by electron bombardment. Note that some gauges can only be resistively heated or electron bombardment degassed. Gauges that require outgassing will read a pressure higher than really exists. The amount of error is dependent on the degree of outgassing required.

Regardless of the outgassing approach used, filament temperatures of about 800°C are required. Initially, a new gauge may need to be outgassed for some 1520 minutes. If a gauge is showing evidence (i.e., dirty electrodes) that outgassing may be required again, some 15 seconds should suffice. During degassing, the ion gauge envelope becomes very hot. Be sure that the gauge is mounted in such a fashion that accidental contact with technicians or flammable materials is not possible.

If a gauge is outgassed at too high a pressure, a layer of metal (from the electrodes) may be deposited outside the gauge envelope (some controllers prevent degassing at too high a pressure). This condition can cause the insulation to become "leaky." A temporary solution can be achieved by grounding the electrical

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