- •6.1 Resistive Displacement Sensors
- •Types of Precision Potentiometers
- •Resistive Element
- •Electrical Characteristics
- •Mechanical Characteristics
- •Mechanical Mounting Methods
- •Implementation
- •6.2 Inductive Displacement Sensors
- •The Single-Coil Linear Variable-Reluctance Sensor
- •The Variable-Differential Reluctance Sensor
- •Variable-Reluctance Tachogenerators
- •Microsyn
- •Synchros
- •Variable-Coupling Transducers
- •Induction Potentiometer
- •Appendix to Section 6.2
- •Variable Distance Displacement Sensors
- •Variable Area Displacement Sensors
- •Variable Dielectric Displacement Sensors
- •Aluminum Type Capacitive Humidity Sensors
- •Tantalum Type Capacitive Humidity Sensors
- •Silicon Type Capacitive Humidity Sensors
- •Polymer Type Capacitive Humidity Sensors
- •Capacitive Moisture Sensors
- •Pulse Width Modulation
- •Square Wave Linearization
- •Feedback Linearization
- •Oscillator Circuits
- •Appendix to Section 6.3
- •6.4 Piezoelectric Transducers and Sensors
- •Single Crystals
- •Piezoelectric Ceramics
- •Perovskites
- •Processing of Piezoelectric Ceramics
- •Piezoelectric Polymers
- •Piezoelectric Ceramic/Polymer Composites
- •Suppliers of Piezoelectric Materials
- •6.5 Laser Interferometer Displacement Sensors
- •Longitudinal Zeeman Effect
- •Two-Frequency Heterodyne Interferometer
- •Single-Mode Homodyne Interferometer
- •6.6 Bore Gaging Displacement Sensors
- •Gages That Control Dimensions
- •Gages That Control Geometry
- •6.7 Time-of-Flight Ultrasonic Displacement Sensors
- •Ultrasound Transducers
- •6.8 Optical Encoder Displacement Sensors
- •Absolute Encoders
- •Incremental Encoders Quadrature Signals
- •Geometric Masking
- •Diffraction-Based Encoders
- •6.9 Magnetic Displacement Sensors
- •6.10 Synchro/Resolver Displacement Sensors
- •Equipment Needed for Testing Resolvers
- •Multispeed Units
- •Applications
- •Resolver-to-Digital Conversion
- •Bandwidth Optimization
- •Encoder Emulation
- •Determining Position Lag Error Due to Acceleration
- •Large Step Settling Time
- •Time Constants
- •6.11 Optical Fiber Displacement Sensors
- •Principle of Operation
- •Fabrication Techniques
- •Bragg Grating Sensors
- •Limitations of Bragg Grating Strain Sensors
- •Principle of Operation
- •Fabrication Procedure
- •Temperature Sensitivity of Long-Period Gratings
- •Knife-Edge Photodetector
- •Bicell Detector
- •Continuous Position Sensor
- •References
FIGURE 6.123 Ratio of difference voltage to sum voltage vs. displacement for Sitek 1L10 continuous PSD.
The disadvantages due to small laser beam sizes and small displacements are overcome by the continuous PSDs. Since these devices are typically much larger (available in several-inch diameters), they typically have longer risetimes than the other PSDs. However, the Sitek 1L10, with a 10 mm linear active range has a measured upper half-power frequency of 3 MHz.
In applications where the output signal from a PSD must be linearly proportional to the displacement of the beam, analog-divider operational amplifiers to obtain Vd/Vs in real time are used to extend the range of linearity of the device. Unfortunately, the frequency response of these amplifiers are often the frequency-response-limiting factors of the PSD system. In cases where high-frequency response is important, Vd alone can often be used if care is taken to operate in the linear range of the device. For large static displacements that are of the order of the size of the detector, Vd and Vs can be recorded with computer-controlled data acquisition, the calibration characteristic numerically fitted to a polynomial, and then any voltage from the detector can be related to beam position.
The noise limitations in OBD sensing are due to the laser, the nature of the reflecting surface, and the PSD. Lasers with good amplitude stability are to be preferred, but this is not an important contribution to noise when Vd/Vs is used to infer displacement. Laser beam-pointing stability, on the other hand, is important. If the reflecting surface is that of a typical solid, then negligible noise is introduced on reflection; this may not be true for a reflector such as a pellicle, where Brownian motion of the surface may be significant. The noise limitations of the PSD are the usual ones associated with the photodetector and the amplifiers.
References
1.A. C. Boccara, D. Fournier, and J. Badoz, Appl. Phys. Lett., 30, 933, 1983.
2.G. C. Wetsel, Jr. and S. A. Stotts, Appl. Phys. Lett., 42, 931, 1983.
3.e.g.: D. Fournier and A. C. Boccara, Scanned Image Microscopy, E. A. Ash, Ed., London: Academic Press, 1980, 347-351; J. C. Murphy and L. C. Aaamodt, Appl. Phys. Lett., 39, 519, 1981; G. C. Wetsel, Jr. and F. A. McDonald, Appl. Phys. Lett., 41, 926, 1982.
4.M. A. Olmstead, S. Kohn, N. M. Amer, D. Fournier, and A. C. Boccara, Appl. Phys. A, 132, 68, 1983.
©1999 by CRC Press LLC
5.G. Meyer and N. M. Amer, Appl. Phys. Lett., 53, 1045, 1988.
6.J. C. Murphy and G. C. Wetsel, Jr., Mater. Evaluation, 44, 1224, 1986.
7.G. C. Wetsel, Jr., S. E. McBride, R. J. Warmack, and B. Van de Sande, Appl. Phys. Lett., 55, 528, 1989.
8.S. E. McBride and G. C. Wetsel, Jr., Surface-displacement imaging using optical beam deflection,
Review of Progress in Quantitative Nondestructive Evaluation, Vol. 9A, D. O. Thompson and D. E. Chimenti, (Eds.), New York: Plenum, 1990, 909-916.
9.Burleigh Instruments, Inc., Fishers, NY 14453.
10.United Detector Technology, 12525 Chadron Ave., Hawthorne, CA 90250.
11.On-Trak Photonics Inc., 20321 Lake Forest Dr., Lake Forest, CA 92630.
© 1999 by CRC Press LLC