Добавил:
Опубликованный материал нарушает ваши авторские права? Сообщите нам.
Вуз: Предмет: Файл:

Patterson, Bailey - Solid State Physics Introduction to theory

.pdf
Скачиваний:
1117
Добавлен:
08.01.2014
Размер:
7.07 Mб
Скачать

316 6 Semiconductors

where n(E) is the number of states per unit volume of real space with energy E and dVk is the volume of k-space with energy between E and E + dE. Since we have derived (see Sect. 3.2.3)

dn(E) =

2

 

 

dVk ,

 

 

 

(2π)3

 

 

D(E) =

1

 

dVk

,

4π3

 

 

 

 

dE

 

for

2

E = 2me k 2 ,

with a spherical energy surface,

Vk = 43 πk3 ,

so we get (6.131).

We know that an ellipsoid with semimajor axes a, b, and c has volume V = 4πabc/3. So for Si with an energy represented by ((6.110) with origin shifted so k0 = 0)

 

 

 

 

1

 

2

2

 

 

2

 

 

 

E =

kx

+ k y

+

kz

 

,

 

2

 

m

m

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

T

 

 

L

 

 

the volume in k-space with energy E is

 

 

 

 

 

 

 

4

 

2m2 / 3m1/ 3 3/ 2

 

 

V =

 

 

π

 

 

T

L

 

 

 

E3/ 2 .

3

 

 

 

2

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

So

 

1

 

 

2(m2 m

L

)1/ 3 3 / 2

 

D(E) =

 

 

T

 

 

E .

2π

2

 

 

2

 

 

 

 

 

 

 

 

 

 

 

 

Since we have six ellipsoids like this, we must replace in (6.131)

(6.132)

(6.133)

(m )3 / 2 by 6(m

m2 )1/ 2

,

e

 

L T

 

or

 

 

 

m

by 62 / 3(m m2 )1/ 3

 

e

L T

 

for the electron density of states effective mass.

6.1 Electron Motion

317

 

 

Power Absorption in Cyclotron Resonance (A)

Here we show how a resonant frequency gives a maximum in the power absorption versus field, as for example in Fig. 6.7. We will calculate the power absorption by evaluating the complex conductivity. We use (6.86) with v being the drift velocity of the appropriate charge carrier with effective mass m* and charge q = −e. This equation neglects interactions between charge carriers in semiconductors since the carrier density is low and they can stay out of each others way. In (6.86), τ is the relaxation time and the 1/τ terms take care of the damping effect of collisions. As usual the carriers will be assumed to be quasifree (free electrons with an effective mass to include lattice effects) and we assume that the wave packets describing the carriers spread little so the carriers can be treated classically.

Let the B field be a static field along the z-axis and let E = Exeiωti be the planepolarized electric field. Solutions of the form

v(t) = veiωt ,

(6.134)

will be sought. Then (6.86) may be written in component form as

m (iω)vx = qEx + qvy B

m

vx ,

(6.135)

 

 

 

 

τ

 

 

m (iω)vy = −qvx B

m

vy .

(6.136)

τ

 

 

 

 

If we assume the carriers are electrons then j = nevx(–e) = σEx so the complex conductivity is

σ = −

enevx

,

(6.137)

 

 

Ex

 

where ne is the concentration of electrons. By solving (6.136) and (6.137) we find

σ =σ0

[1+ (ωc2 ω2 )τ 2 ] + 2ω2τ 2

+ iσ0

ωτ[1+ (ωc2 ω2 )τ 2 2]

, (6.138)

[1

+ (ωc2

ω2 )τ 2 ]2

+ 4ω2τ 2

[1+ (ωc2

ω2 )τ 2 ]2

+ 4ω2τ 2

 

 

 

where σ0 = nee2τ/m* is the dc conductivity and ωc = eB/m*.

The rate at which energy is lost (per unit volume) due to Joule heating is j·E = jxEx. But

Re( jx ) = Re(σEx )

= Re[(σr + iσi )(Ex cosωt + iEx sinωt)] (6.139) =σr Ex cosωt σi Ex sinωt .

So

Re( jx ) Re(Ec ) = Ex2 (σr cos2 ωt σi cosωt sinωt) .

(6.140)

318 6 Semiconductors

The average energy (over a cycle) dissipated per unit volume is thus

________________

= 1

σr | E |2 ,

 

 

 

 

P

= Re( jx ) Re(Ec )

(6.141)

 

 

 

 

 

 

 

 

 

2

 

 

 

 

 

 

where |E| ≡ Ex. Thus

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

2

 

 

 

2

 

 

 

 

 

 

 

σ

 

 

1+ gc

+ g

 

 

,

P Re

σ0

 

2

g

2

)

2

+ 4g

2

 

 

 

 

 

 

 

(1+ gc

 

 

 

 

where g = ωτand gc = ωcτ. We get a peak when g = gc. If there is more than one resonance there is more than one maximum as we have already noted. See Fig. 6.7.

 

6 L3

 

Γ2'

 

 

 

 

Γ2'

 

4

 

 

 

 

 

 

 

 

L1

 

Γ

 

 

 

 

Γ15

 

2

Si

 

15

 

 

 

 

 

 

 

 

Γ

'

X1

 

 

Γ25'

 

0 L3'

 

25

 

 

 

 

 

 

 

 

 

 

 

 

 

 

–2

 

 

 

 

X4

 

 

 

 

 

 

 

 

 

 

 

 

 

–4

 

 

 

 

 

 

 

 

 

–6

 

 

 

 

X1

 

 

 

 

–8 L1

 

 

 

 

 

 

 

 

 

 

 

 

 

 

–10 L2'

 

 

 

 

 

 

 

–12

 

 

Γ

 

 

 

 

Γ1

 

 

1

 

 

 

 

 

 

L

Λ

 

Γ

 

X

U,K

Σ

Γ

 

4 L4,5

Γ

 

 

 

 

 

Γ

 

 

L6

 

8

 

 

 

 

8

 

2

Ge

Γ6

 

 

 

 

Γ

 

 

 

 

 

 

 

 

6

 

L6

 

Γ

 

X5

 

Γ7

 

0

 

 

Γ87

 

Γ8

(eV)

L4,5

 

Γ7

 

 

 

 

Γ7

–2

 

 

 

 

 

 

 

 

 

 

 

 

 

ENERGY

 

L6

 

 

 

X5

 

 

 

–4

 

 

 

 

 

 

 

 

–6

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

–8

L6

 

 

 

X5

 

 

 

 

 

 

 

 

 

 

 

 

 

–10 L6

 

 

 

 

 

 

 

 

–12

Λ

Γ6

 

 

 

 

Γ6

 

L

 

Γ

 

X

U,K

Σ

Γ

Fig. 6.8. Band structures for Si and Ge. For silicon two results are presented: nonlocal pseudopotential (solid line) and local pseudopotential (dotted line). Adaptation reprinted with permission from Cheliokowsky JR and Cohen ML, Phys Rev B 14, 556 (1976). Copyright 1976 by the American Physical Society

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

6.2 Examples of Semiconductors

319

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

Fig. 6.9. Theoretical pseudopotential electronic valence densities of states compared with experiment for Si and Ge. Adaptation reprinted with permission from Cheliokowsky JR and Cohen ML, Phys Rev B 14, 556 (1976). Copyright 1976 by the American Physical Society

6.2 Examples of Semiconductors

6.2.1Models of Band Structure for Si, Ge and II-VI and III-V Materials (A)

First let us give some band structure and density of states for Si and Ge. See Fig. 6.8 and Fig. 6.9. The figures illustrate two points. First, that model calculation tools using the pseudopotential (see “The Pseudopotential Method” under Sect. 3.2.3) have been able to realistically model actual semiconductors. Second, that the models we often use (such as the simplified pseudopotential) are oversimplified but still useful

320 6 Semiconductors

in getting an idea about the complexities involved. As discussed by Cohen and Chelikowsky [6.8], optical properties have been very useful in obtaining experimental results about actual band structures.

For very complicated cases, models are still useful. A model by Kane has been found useful for many II-VI and III-V semiconductors [6.16]. It yields a conduction band that is not parabolic, as well as having both heavy and light holes and a split-off band as shown in Fig. 6.10. It even applies to pseudobinary alloys such as mercury cadmium telluride (MCT) provided one uses a virtual crystal approximation (VCA), in which alloy disorder later can be put in as a perturbation, e.g. to discuss mobility. In the VCA, Hg1–xCdxTe is replaced by ATe, where A is some “average” atom representing the Hg and Cd.

Fig. 6.10. Energy bands for zincblende lattice structure

If one solves the secular equation of the Kane [6.16] model, one finds the following equation for the conduction, light holes, and split-off band:

E3 + ( Eg )E2 (Eg

+ P2k 2 )E

2

P2k 2 = 0 ,

(6.142)

3

 

 

 

 

6.2 Examples of Semiconductors 321

where is a constant representing the spin-orbit splitting, Eg is the bandgap, and P is a constant representing a momentum matrix element. With the energy origin chosen to be at the top of the valence band, if >> Eg and Pk, and including heavy holes, one can show:

 

2

k

2

 

1

 

2

 

8P

2

k

2

E = Eg +

 

 

+

 

+

 

 

2m

2

 

Eg

 

3

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

Eg for the conduction band,(6.143)

 

 

 

 

 

E = −

 

 

2k 2

, for the heavy holes,

(6.144)

 

 

 

 

 

2mhh

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

2

k

2

 

1

 

 

2

 

 

8P

2

k

2

 

 

 

 

E = −

 

 

 

 

+

 

 

 

 

for the light holes, and

(6.145)

2m

2

 

Eg

 

 

3

 

 

Eg

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

E = −

 

 

2k 2

 

 

P2k

2

 

for the split-off band.

(6.146)

 

 

 

2m

 

 

3Eg

+ 3

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

In the above, m is the mass of a free electron (Kane [6.16]).

Knowing the E vs. k relation, as long as E depends only on |k|, the density of states per unit volume is given by

D(E)dE = 2 ×

 

4πk 2dk

,

(6.147)

 

(2π)3

 

 

 

 

 

or

 

 

 

 

 

 

D(E) =

h2dk

.

 

(6.148)

π

2dE

 

 

 

 

 

Finally, for the conduction band, if ħ2k2/2m is negligible compared to the other terms, we can show for the conduction band that

 

E

Eg

 

 

 

 

 

2

k

2

 

 

E

 

=

 

 

 

 

,

(6.149)

 

 

 

 

 

 

 

 

 

 

 

Eg

 

 

 

 

2m1

 

 

 

 

 

 

 

 

where

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

m

 

=

3 2

 

E

g

.

 

 

(6.150)

 

 

 

 

 

 

 

1

 

4P2

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

This clearly leads to changes in effective mass from the parabolic case (E k2).

322 6 Semiconductors

Brief properties of MCT, as an example of a II-VI alloy, [6.5, 6.7] showing its importance:

1.A pseudobinary II-VI compound with structure isomorphic to zincblende.

2.Hg1–xCdxTe forms a continuous range of solid solutions between the semimetals HgTe and CdTe. The bandgap is tunable from 0 to about 1.6 eV as x varies from about 0.15 (at low temperature) to 1.0. The bandgap also depends on temperature, increasing (approximately) linearly with temperature for a fixed value of x.

3.Useful as an infrared detector at liquid nitrogen temperature in the wavelength 8–12 micrometers, which is an atmospheric window. A higher operating temperature than alternative materials and MCT has high detectivity, fast response, high sensitivity, IC compatible and low power.

4.The band structure involves mixing of unperturbed valence and conduction band wave function, as derived by the Kane theory. They have nonparabolic bands, which makes their analysis more difficult.

5.Typical carriers have small effective mass (about 10−2 free-electron mass), which implies large mobility and enhances their value as IR detectors.

6.At higher temperatures (well above 77 K) the main electron scattering mechanism is the scattering by longitudinal optic modes. These modes are polar modes as discussed in Sect. 10.10. This scattering process is inelastic, and it makes the calculation of electron mobility by the Boltzmann equation more difficult (noniterated techniques for solving this equation do not work). At low temperatures the scattering may be dominated by charged impurities. See Yu and Cardona [6.44, p. 207]. See also Problem 6.7.

7.The small bandgap and relatively high concentration of carriers make it necessary to include screening in the calculation of the scattering of carriers by several interactions.

8.It is a candidate for growth in microgravity in order to make a more perfect crystal.

The figures below may further illustrate II-VI and III-V semiconductors, which have a zincblende structure. Figure 6.11 shows two interpenetrating lattices in the zincblende structure. Figure 6.12 shows the first Brillouin zone. Figure 6.13 sketches results for GaAs (which is zincblende in structure) which can be compared to Si and Ge (see Fig. 6.8). The study of complex compound semiconductors is far from complete.4

4 See, e.g., Patterson [6.30].

 

6.2 Examples of Semiconductors

323

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

Fig. 6.11. Zincblende lattice structure. The shaded sites are occupied by one type of ion, the unshaded by another type

[001]

kz

 

 

 

 

X

 

 

 

 

L

 

 

Γ

 

[010]

 

 

 

 

 

X

ky

[100]

X

 

 

kx

 

L

 

 

 

[111]

 

Fig. 6.12. First Brillouin zone for zincblende lattice structure. Certain symmetry points are denoted with the usual notation

324 6 Semiconductors

L

Γ

X

GaAs Eg

k (111)

0

k (100)

 

 

 

 

 

 

 

Fig. 6.13. Sketch of the band structure of GaAs in two important directions. Note that in the valence bands there are both light and heavy holes. For more details see Cohen and Chelikowsky [6.8]

Density of States for Effective Hole Masses (A)

If we have light and heavy holes with energies

 

 

E

 

=

2k 2

,

 

 

 

 

 

 

l,h

 

 

 

2mlh

 

 

 

 

 

 

 

 

 

 

 

Eh,h

 

 

=

2k 2

 

,

 

 

 

 

 

 

 

2mhh

 

 

 

 

 

 

 

 

 

each will give a density of states and these density of states will add so we must replace in an equation analogous to (6.131),

(m )3/ 2

by m3/ 2

+ m3/ 2 .

h

lh

hh

Alternatively, the effective hole mass for density of states is given by the replacement of

m by (m3/ 2

+ m3/ 2 )2 / 3 .

h

lh

hh

6.2.2 Comments about GaN (A)

GaN is a III-V material that has been of much interest lately. It is a direct wide bandgap semiconductor (3.44 electron volts at 300 K). It has applications in blue and UV light emitters (LEDs) and detectors. It forms a heterostructure (see

6.3 Semiconductor Device Physics

325

 

 

Sect. 12.4) with AlGaN and thus HFETs (heterostructure field effect transistors) have been made. Transistors of both high power and high frequency have been produced with GaN. It also has good mechanical properties, and can work at higher temperature as well as having good thermal conductivity and a high breakdown field. GaN has become very important for recent advances in solid-state lighting. Studies of dopants, impurities, and defects are important for improving the light-emitting efficiency.

GaN is famous for its use in making blue lasers. See Nakamura et al [6.26], Pankove and Moustaka (eds) [6.28], and Willardson and Weber [6.43].

6.3 Semiconductor Device Physics

This Section will give only some of the flavor and some of the approximate device equations relevant to semiconductor applications. The book by Dalven [6.10] is an excellent introduction to this subject. So is the book by Fraser [6.14]. The most complete book is by Sze [6.41]. In recent years layered structures with quantum wells and other new effects are being used for semiconductor devices. See Chap. 12 and references [6.1, 6.19]

6.3.1 Crystal Growth of Semiconductors (EE, MET, MS)

The engineering of semiconductors has been as important as the science. By engineering we mean growth, purification, and controlled doping. In Chap. 12 we go a little further and talk of the band engineering of semiconductors. Here we wish to consider growth and related matters. For further details, see Streetman [6.40, p12ff]. Without the ability to grow extremely pure single crystal Si, the semiconductor industry as we know it would not have arisen. With relatively few electrons and holes, semiconductors are just too sensitive to impurities.

To obtain the desired pure crystal semiconductor, elemental Si, for example, is chemically deposited from compounds. Ingots are then poured that become polycrystalline on cooling.

Single crystals can be grown by starting with a seed crystal at one end and passing a molten zone down a “boat” containing the seed crystal (the molten zone technique), see Fig. 6.14.

Since the boat can introduce stresses (as well as impurities) an alternative method is to grow the crystal from the melt by pulling a rotating seed from it (the

Czochralski technique), see Fig. 6.14b.

Соседние файлы в предмете Химия