8. Answer the questions to text b.

1. What can you say of unbalanced magnetron?

2. When can the plasma generation be significantly increased?

3. When did it become possible to examine the growth morphology of the deposited coating?

4. What does the ‘Thornton Diagram’ illustrate?

6. What became possible with the invention of scanning electron microscope?

7. What does stand for the abbreviation “SEM”?

8. What does the sputtering pressure determine?

9. What does stand for the abbreviation “SZM”?

10. How high can be the pressure in the sputtering chamber?

Comprehension Check – 2

9. Fill in the correct prepositions, then choose any of samples and make the complete sentences. Look through the texts A and B again.

1) magnetic fields were parallel __ the sputtering target surface

2) the confined electrons were used __ developing the “surface magnetron” sputtering configuration.

3) Clarke developed a sputtering source using a magnetic tunnel __ the inside __a cylindrical surface

4) Chapin is credited __ being the inventor of the planar magnetron

5) the ion bombardment of the substrate was low that resulted __ poor quality films.

6) the problem was partially solved __ adding auxiliary ionization

7) Thornton published the SZM model __evaporated coatings.

8) the diagram is known __ the ‘Thornton Diagram’

10. Make sure you know the meanings of these words. Match the words with their definitions.

a) density; b) deposit; c) film; d) flux; e) fusion; f) invent

1) relation of weight to volume and is measured in units of kilograms per cubic meter.

2) a substance added to a solid to assist in its fusion.

3) a mixing or uniting of different things into one.

4) create or design something not existing before.

5) a thin layer or coating.

6) a coating of metal deposited on something, usually by an electric current.

11. Match the words with the synonyms (text a).

1) realize 5) low a) accomplish e) arise

2) continue 6) superior b) employ f) upper

3) use 7) widespread c) persist g) prevalent

4) emerge 8) major d) weak h) chief

12. Match the same words with the antonyms (text a).

1) realized 5) low a) stop e) high

2) continue 6) superior b) unrealized f) usual

3) use 7) widespread c) conserve g) unknown

4) emerge 8) major d) vanish h) secondary

13. Translate the text on theory and practical use of pvd coatings, study the structure of TiAln. Make its technical and non-technical description.

Hard materials suitable for thin films are predominantly but not entirely carbides, nitrides, borides and silicides. It is also groups of metals from the periodic table. The first generation of hard PVD coatings were single metal nitrides such as TiN, CrN, and ZrN. They have been exploited commercially because of their higher hardness compared to high-speed steel and cemented carbide and for decorative purposes. ZrCN for example is used to simulate gold in decorative applications such as watch cases. Alloyed elements are known to improve oxidation resistance, e.g. TiALN. This improvement in temperature resistance was achieved by introducing other elements such as Cr, Al or Y, into the TiN lattice. PVD coating development continued through deposition of multi- layers and super-lattices. At present, scientists study nano-composite coatings.

Artist’s impression of the structure of TiALCN