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Ʌɢɬɟɪɚɬɭɪɚ
1. Ɇ.ɋ. ɇɟɣɦɚɧ. Ʉɭɪɫ ɪɚɞɢɨɩɟɪɟɞɚɸɳɢɯ ɭɫɬɪɨɣɫɬɜ. Ɇ ɋɨɜɟɬɫɤɨɟ
ɪɚɞɢɨ,1965.
2. ȼ.Ⱥ. Ƚɚɥɤɢɧ. ɐɢɮɪɨɜɚɹ ɦɨɛɢɥɶɧɚɹ ɫɜɹɡɶ. Ɇɨɫɤɜɚ. Ƚɨɪɹɱɚɹ ɥɢɧɢɹ —
Ɍɟɥɟɤɨɦ, 2012.
3. ɋ.ɋ. Ƚɚɪɦɚɬɸɤ. Ɂɚɞɚɱɧɢɤ ɩɨ ɭɫɬɪɨɣɫɬɜɚɦ ɝɟɧɟɪɢɪɨɜɚɧɢɹ ɢ ɮɨɪɦɢɪɨɜɚɧɢɹ
ɪɚɞɢɨɫɢɝɧɚɥɨɜ. Ɇ. ɂɡɞɚɬɟɥɶɫɬɜɨ ȾɆɄ, 2012, 672 ɫ.
4. Ɉ.ȼ. Ƚɨɥɨɜɢɧ. ɍɫɬɪɨɣɫɬɜɚ ɝɟɧɟɪɢɪɨɜɚɧɢɹ, ɮɨɪɦɢɪɨɜɚɧɢɹ, ɩɪɢɟɦɚ ɢ
ɨɛɪɚɛɨɬɤɢ ɫɢɝɧɚɥɨɜ. Ƚɨɪɹɱɚɹ ɥɢɧɢɹ — Ɍɟɥɟɤɨɦ, 2014.
5. H. K. Gummel and H. C. Poon, "An Integral Charge Control Model of Bipolar
Transistors," Bell Sys. Tech. J., vol. 49, p. 827, May/June, 1970.
6. Angelov, "Chalmers Nonlinear HEMT and MESFET Model Extraction
Procedure, Part A,B," Chalmers University of Technology, Dept. of Microwave
Technology, Report no. 25, 26, 1996.
7. A. J. McCant, G. D. McCormack, and D. H. Smith, "An Improved GaAs FET
Model for SPICE," IEEE Trans. Microwave Theory Tech., Vol. MTT-38, p. 822,
June, 1990.
8. Ȼ.ȿ. ɉɟɬɪɨɜ, ȼ.Ⱥ. Ɋɨɦɚɧɸɤ. Ɋɚɞɢɨɩɟɪɟɞɚɸɳɢɟ ɭɫɬɪɨɣɫɬɜɚ ɧɚ
ɩɨɥɭɩɪɨɜɨɞɧɢɤɨɜɵɯ ɩɪɢɛɨɪɚɯ. —
9. Ɏ. ɋɟɱɢ, Ɇ. Ȼɭɞɠɚɬɬɢ. Ɇɨɳɧɵɟ ɬɜɟɪɞɨɬɟɥɶɧɵɟ ɋȼɑ ɭɫɢɥɢɬɟɥɢ.
Ɍɟɯɧɨɫɮɟɪɚ, Ɇɨɫɤɜɚ, 2016.
10. ȼ.Ⱥ. Ɋɨɦɚɧɸɤ. Ɉɫɧɨɜɵ ɪɚɞɢɨɫɜɹɡɢ. Ɇ. ɘɊȺɃɌ. ȼɵɫɲɟɟ ɨɛɪɚɡɨɜɚɧɢɟ.
2009.
11. ȼ.Ⱥ. Ɋɨɦɚɧɸɤ. ɋɢɧɬɟɡɚɬɨɪɵ ɱɚɫɬɨɬ ɧɚ ɨɫɧɨɜɟ ɚɜɬɨɝɟɧɟɪɚɬɨɪɨɜ ɫ ɎȺɉɑ.
Ɇ.: ɆɂɗɌ, 2005.
12. Hulsmann A. Advanced mHEMT technologies for spaɫe applications. 20 -th
International Symposium on Space Terahertz Technology. Charlotte sville, 2009.
Ɇ.: ȼɵɫɲɚɹ ɲɤɨɥɚ, 1989.
141
ɋɨɞɟɪɠɚɧɢɟ
ȼɜɟɞɟɧɢɟ. ɋɢɝɧɚɥɵ ɢ ɷɥɟɦɟɧɬɵ ɪɚɞɢɨɬɟɯɧɢɱɟɫɤɢɯ ɰɟɩɟɣ ............................ 3
ɋɢɝɧɚɥɵ ................................................................................................................. 3
ɗɥɟɦɟɧɬɵ ɪɚɞɢɨɬɟɯɧɢɱɟɫɤɢɯ ɰɟɩɟɣ ............................................................... 6
1. ɉɟɪɟɞɚɬɱɢɤɢ ɢ ɩɪɢɟɦɧɢɤɢ .............................................................................. 11
1.1. Ɋɚɞɢɨɩɟɪɟɞɚɬɱɢɤ .......................................................................................... 11
1.1.1. Ɏɭɧɤɰɢɨɧɚɥɶɧɵɟ ɫɯɟɦɵ ɪɚɞɢɨɩɟɪɟɞɚɬɱɢɤɨɜ .................................... 11
1.1.2. Ɉɫɧɨɜɧɵɟ ɩɚɪɚɦɟɬɪɵ ɪɚɞɢɨɩɟɪɟɞɚɬɱɢɤɨɜ ....................................... 14
1.2. Ɋɚɞɢɨɩɪɢɟɦɧɢɤ ............................................................................................ 16
1.2.1. Ɏɭɧɤɰɢɨɧɚɥɶɧɵɟ ɫɯɟɦɵ ɪɚɞɢɨɩɪɢɟɦɧɢɤɨɜ......................................... 16
1.2.2. Ɉɫɧɨɜɧɵɟ ɩɚɪɚɦɟɬɪɵ ɪɚɞɢɨɩɪɢɟɦɧɢɤɚ ............................................. 21
1.2.3. ɂɡɛɢɪɚɬɟɥɶɧɨɫɬɶ ɩɪɢɟɦɧɢɤɨɜ ............................................................ 22
1.2.4. Ɉɫɧɨɜɧɵɟ ɭɫɬɪɨɣɫɬɜɚ ɩɟɪɟɞɚɬɱɢɤɨɜ ɢ ɩɪɢɟɦɧɢɤɨɜ ........................ 24
2. ɍɫɢɥɢɬɟɥɢ ɦɨɳɧɨɫɬɢ ....................................................................................... 27
2.1. Ⱥɤɬɢɜɧɵɟ ɷɥɟɦɟɧɬɵ ɭɫɢɥɢɬɟɥɟɣ ɦɨɳɧɨɫɬɢ .............................................. 28
2.1.1. Ȼɢɩɨɥɹɪɧɵɣ ɬɪɚɧɡɢɫɬɨɪ BJT. ............................................................. 29
2.1.2. ɉɨɥɟɜɨɣ ɬɪɚɧɡɢɫɬɨɪ MESFET ............................................................ 33
2.2. ȼɧɟɲɧɢɟ ɰɟɩɢ ɚɤɬɢɜɧɨɝɨ ɷɥɟɦɟɧɬɚ ɜ ɭɫɢɥɢɬɟɥɟ ....................................... 36
2.2.1. ɐɟɩɢ ɩɢɬɚɧɢɹ ɢ ɫɦɟɳɟɧɢɹ ................................................................... 36
2.2.2. ɋɨɝɥɚɫɭɸɳɢɟ ɰɟɩɢ ɭɫɢɥɢɬɟɥɟɣ ɦɨɳɧɨɫɬɢ ........................................ 38
2.3. ɏɚɪɚɤɬɟɪɢɫɬɢɤɢ ɢ ɩɚɪɚɦɟɬɪɵ ɭɫɢɥɢɬɟɥɟɣ ɦɨɳɧɨɫɬɢ .............................. 41
2.3.1. ɏɚɪɚɤɬɟɪɢɫɬɢɤɢ ɍɆ ........................................................................... 41
2.3.2. ɉɚɪɚɦɟɬɪɵ ɍɆ .................................................................................... 42
2.4. Ɋɟɠɢɦɵ ɪɚɛɨɬɵ ɚɤɬɢɜɧɨɝɨ ɷɥɟɦɟɧɬɚ ......................................................... 45
2.4.1. Ʌɢɧɟɣɧɵɣ ɪɟɠɢɦ ɪɚɛɨɬɵ ɬɪɚɧɡɢɫɬɨɪɚ ........................................... 46
2.4.2. ɇɟɥɢɧɟɣɧɵɣ ɪɟɠɢɦ ɪɚɛɨɬɵ ɬɪɚɧɡɢɫɬɨɪɚ ....................................... 49
2.4.3. ɄɉȾ ɬɪɚɧɡɢɫɬɨɪɚ ɜ ɭɫɢɥɢɬɟɥɟ .......................................................... 50
2.4.4. ȼɵɯɨɞɧɚɹ ɦɨɳɧɨɫɬɶ ɢ ɤɨɷɮɮɢɰɢɟɧɬ ɭɫɢɥɟɧɢɹ ................................ 52
2.4.5. Ʉɥɚɫɫɢɮɢɤɚɰɢɹ ɪɟɠɢɦɨɜ ɪɚɛɨɬɵ ɬɪɚɧɡɢɫɬɨɪɚ ɜ ɭɫɢɥɢɬɟɥɟ ......... 53
3. Ⱥɜɬɨɝɟɧɟɪɚɬɨɪɵ ................................................................................................ 55
3.1. Ɇɟɯɚɧɢɡɦ ɪɚɛɨɬɵ ɚɜɬɨɝɟɧɟɪɚɬɨɪɚ ............................................................. 55
3.2. ɍɫɥɨɜɢɹ ɜɨɡɛɭɠɞɟɧɢɹ ɢ ɭɫɬɨɣɱɢɜɨɝɨ ɫɭɳɟɫɬɜɨɜɚɧɢɹ ɫɬɚɰɢɨɧɚɪɧɨɝɨ
ɪɟɠɢɦɚ ɤɨɥɟɛɚɧɢɣ ɜ ɚɜɬɨɝɟɧɟɪɚɬɨɪɟ ................................................................ 57
3.3. Ⱦɨɥɝɨɜɪɟɦɟɧɧɚɹ ɫɬɚɛɢɥɶɧɨɫɬɶ ɱɚɫɬɨɬɵ ɤɨɥɟɛɚɧɢɣ .................................. 60
3.4. ɒɭɦɵ ɚɜɬɨɝɟɧɟɪɚɬɨɪɨɜ ............................................................................... 62
3.5. Ʉɜɚɪɰɟɜɵɟ ɝɟɧɟɪɚɬɨɪɵ ................................................................................ 65
3.6. Ƚɟɧɟɪɚɬɨɪɵ, ɭɩɪɚɜɥɹɟɦɵɟ ɧɚɩɪɹɠɟɧɢɟɦ ................................................... 68
142
8. Ɇɟɬɨɞɵ ɭɥɭɱɲɟɧɢɹ ɩɚɪɚɦɟɬɪɨɜ ɩɪɢɟɦɨɩɟɪɟɞɚɸɳɢɯ ɭɫɬɪɨɣɫɬɜ
4. ɋɢɧɬɟɡɚɬɨɪɵ ɱɚɫɬɨɬ ......................................................................................... 71
4.1. ɋɢɫɬɟɦɚ ɎȺɉɑ ɚɜɬɨɝɟɧɟɪɚɬɨɪɨɜ. .............................................................. 71
4.2. ɋɬɪɭɤɬɭɪɧɚɹ ɫɯɟɦɚ ɫɢɫɬɟɦɵ ɎȺɉɑ ɚɜɬɨɝɟɧɟɪɚɬɨɪɨɜ .............................. 73
Ƚɟɧɟɪɚɬɨɪ, ɭɩɪɚɜɥɹɟɦɵɣ ɧɚɩɪɹɠɟɧɢɟɦ ...................................................... 73
4.3. Ɉɩɟɪɚɬɨɪɧɵɣ ɤɨɷɮɮɢɰɢɟɧɬ ɩɟɪɟɞɚɱɢ ɫɢɫɬɟɦɵ ɎȺɉɑ ............................ 75
4.4. Ⱥɦɩɥɢɬɭɞɧɨ-ɱɚɫɬɨɬɧɚɹ ɯɚɪɚɤɬɟɪɢɫɬɢɤɚ ɫɢɫɬɟɦɵ ɎȺɉɑ
ɚɜɬɨɝɟɧɟɪɚɬɨɪɨɜ .................................................................................................. 76
4.5. ɋɢɧɬɟɡɚɬɨɪɵ ɱɚɫɬɨɬ ɧɚ ɨɫɧɨɜɟ ɚɜɬɨɝɟɧɟɪɚɬɨɪɨɜ, ɨɯɜɚɱɟɧɧɵɯ ɰɟɩɶɸ
ɎȺɉɑ .................................................................................................................. 78
4.6. Ɏɚɡɨɜɵɣ ɲɭɦ ɫɢɧɬɟɡɚɬɨɪɨɜ ɱɚɫɬɨɬ ............................................................ 79
4.7. ɍɫɬɨɣɱɢɜɨɫɬɶ ɫɢɧɬɟɡɚɬɨɪɨɜ ɱɚɫɬɨɬ ............................................................ 82
4.8. Ɇɢɤɪɨɫɯɟɦɵ ɫɢɧɬɟɡɚɬɨɪɨɜ ɱɚɫɬɨɬ ............................................................. 83
4.9. ɉɨɥɧɨɫɬɶɸ ɰɢɮɪɨɜɵɟ ɫɢɧɬɟɡɚɬɨɪɵ ɱɚɫɬɨɬ ............................................... 84
5. Ɇɨɞɭɥɹɬɨɪɵ ....................................................................................................... 86
5.1. Ɇɨɞɭɥɹɰɢɹ ɚɧɚɥɨɝɨɜɵɦɢ ɜɢɞɟɨɫɢɝɧɚɥɚɦɢ................................................ 87
5.1.1. Ⱥɦɩɥɢɬɭɞɧɚɹ ɦɨɞɭɥɹɰɢɹ ɚɧɚɥɨɝɨɜɵɦ ɜɢɞɟɨɫɢɝɧɚɥɨɦ ....................... 87
5.1.2. ɑɚɫɬɨɬɧɚɹ ɦɨɞɭɥɹɰɢɹ ɚɧɚɥɨɝɨɜɵɦ ɜɢɞɟɨɫɢɝɧɚɥɨɦ .......................... 88
5.1.3. Ɏɚɡɨɜɚɹ ɦɨɞɭɥɹɰɢɹ ɚɧɚɥɨɝɨɜɵɦ ɜɢɞɟɨɫɢɝɧɚɥɨɦ ............................... 91
5.2. Ɇɨɞɭɥɹɰɢɹ ɰɢɮɪɨɜɵɦɢ ɜɢɞɟɨɫɢɝɧɚɥɚɦɢ .................................................. 91
5.2.1. Ⱥɦɩɥɢɬɭɞɧɚɹ ɦɨɞɭɥɹɰɢɹ ɰɢɮɪɨɜɵɦ ɜɢɞɟɨɫɢɝɧɚɥɨɦ ......................... 91
5.2.2. ɑɚɫɬɨɬɧɚɹ ɦɨɞɭɥɹɰɢɹ ɰɢɮɪɨɜɵɦ ɜɢɞɟɨɫɢɝɧɚɥɨɦ ............................ 92
5.2.3. Ɏɚɡɨɜɚɹ ɦɨɞɭɥɹɰɢɹ ɰɢɮɪɨɜɵɦ ɜɢɞɟɨɫɢɝɧɚɥɨɦ .................................. 93
5.3. Ɉɫɭɳɟɫɬɜɥɟɧɢɟ ɦɨɞɭɥɹɰɢɢ ɰɢɮɪɨɜɵɦɢ ɜɢɞɟɨɫɢɝɧɚɥɚɦɢ ....................... 94
5.4. ɍɥɭɱɲɟɧɢɟ ɤɚɱɟɫɬɜɚ ɦɨɞɭɥɹɰɢɢ ɰɢɮɪɨɜɵɦɢ ɜɢɞɟɨɫɢɝɧɚɥɚɦɢ............... 96
5.4.1. Ɇɧɨɝɨɭɪɨɜɧɟɜɚɹ ɦɨɞɭɥɹɰɢɹ. ................................................................ 97
5.4.2. ɋɝɥɚɠɢɜɚɧɢɟ ɢɦɩɭɥɶɫɨɜ ...................................................................... 98
5.5. Ɉɫɨɛɟɧɧɨɫɬɢ ɫɢɝɧɚɥɨɜ ɩɪɢ ɪɚɡɥɢɱɧɵɯ ɜɢɞɚɯ ɰɢɮɪɨɜɨɣ ɦɨɞɭɥɹɰɢɢ. ..... 99
5.5. ɂɦɩɭɥɶɫɧɚɹ ɦɨɞɭɥɹɰɢɹ ............................................................................. 100
6. ɉɪɟɨɛɪɚɡɨɜɚɬɟɥɢ ɱɚɫɬɨɬɵ ............................................................................. 105
6.1. ɋɦɟɫɢɬɟɥɢ ɱɚɫɬɨɬ ...................................................................................... 106
6.2. ɋɨɫɬɚɜ, ɩɚɪɚɦɟɬɪɵ ɢ ɯɚɪɚɤɬɟɪɢɫɬɢɤɢ ɫɦɟɫɢɬɟɥɟɣ ɱɚɫɬɨɬ ...................... 107
6.3 ɋɦɟɫɢɬɟɥɶ ɱɚɫɬɨɬ ɧɚ ɨɞɧɨɦ ɞɢɨɞɟ ............................................................ 109
6.4. Ȼɚɥɚɧɫɧɵɣ ɫɦɟɫɢɬɟɥɶ ɱɚɫɬɨɬ ɧɚ ɞɢɨɞɚɯ .................................................. 110
6.5. Ⱦɜɨɣɧɨɣ ɛɚɥɚɧɫɧɵɣ ɫɦɟɫɢɬɟɥɶ ɱɚɫɬɨɬ ɧɚ ɞɢɨɞɚɯ ................................... 111
6.6. Ɍɪɚɧɡɢɫɬɨɪɧɵɟ ɫɦɟɫɢɬɟɥɢ ɱɚɫɬɨɬ ............................................................ 113
6.7. ɉɪɟɨɛɪɚɡɨɜɚɬɟɥɶ ɱɚɫɬɨɬɵ ɫ ɩɨɞɚɜɥɟɧɢɟɦ ɡɟɪɤɚɥɶɧɨɝɨ ɤɚɧɚɥɚ ɜ
ɪɚɞɢɨɩɪɢɟɦɧɢɤɟ ............................................................................................... 116
7. Ⱦɟɦɨɞɭɥɹɬɨɪɵ ................................................................................................. 118
7.1. Ⱦɟɦɨɞɭɥɹɬɨɪɵ ɚɧɚɥɨɝɨɜɵɯ ɪɚɞɢɨɫɢɝɧɚɥɨɜ. ............................................ 119
143
Ɋɨɦɚɧɸɤ ȼ.Ⱥ. Ⱥɧɚɥɨɝɨɜɵɟ ɭɫɬɪɨɣɫɬɜɚ ɩɪɢɟɦɨɩɟɪɟɞɚɬɱɢɤɨɜ
7.1.1. Ⱥɦɩɥɢɬɭɞɧɵɟ ɞɟɬɟɤɬɨɪɵ ................................................................. 119
7.1.2. Ɏɚɡɨɜɵɣ ɞɟɬɟɤɬɨɪ ............................................................................ 122
7.1.3. ɑɚɫɬɨɬɧɵɟ ɞɟɬɟɤɬɨɪɵ .................................................................... 123
7.2. Ⱦɟɦɨɞɭɥɹɬɨɪɵ ɰɢɮɪɨɜɵɯ ɪɚɞɢɨɫɢɝɧɚɥɨɜ ............................................... 123
8. Ɇɟɬɨɞɵ ɭɥɭɱɲɟɧɢɹ ɩɚɪɚɦɟɬɪɨɜ ɩɪɢɟɦɨɩɟɪɟɞɚɸɳɢɯ ɭɫɬɪɨɣɫɬɜ .......... 126
8.1. ɋɩɨɫɨɛɵ ɭɜɟɥɢɱɟɧɢɹ ɜɵɯɨɞɧɨɣ ɦɨɳɧɨɫɬɢ ɭɫɢɥɢɬɟɥɟɣ ......................... 126
8.2. ɉɪɢɧɰɢɩ ɭɜɟɥɢɱɟɧɢɹ ɤɨɷɮɮɢɰɢɟɧɬɚ ɩɨɥɟɡɧɨɝɨ ɞɟɣɫɬɜɢɹ
ɬɪɚɧɡɢɫɬɨɪɚ ....................................................................................................... 128
8.2.1. Ɋɚɛɨɬɚ ɬɪɚɧɡɢɫɬɨɪɚ ɜ ɪɟɠɢɦɟ F ................................................... 130
8.2.2. Ɏɨɪɦɢɪɨɜɚɧɢɟ ɜɵɯɨɞɧɨɝɨ ɧɚɩɪɹɠɟɧɢɹ ɫɨɜɨɤɭɩɧɨɫɬɶɸ
LC-ɤɨɧɬɭɪɨɜ ................................................................................................. 131
8.2.3. Ɏɨɪɦɢɪɨɜɚɧɢɟ ɜɵɯɨɞɧɨɝɨ ɧɚɩɪɹɠɟɧɢɹ ɫ ɩɨɦɨɳɶɸ ɨɬɪɟɡɤɚ
ɩɟɪɟɞɚɸɳɟɣ ɥɢɧɢɢ ........................................................................................ 132
8.3. ɍɜɟɥɢɱɟɧɢɟ ɪɚɛɨɱɢɯ ɱɚɫɬɨɬ ɢ ɜɵɯɨɞɧɨɣ ɦɨɳɧɨɫɬɢ ɭɫɬɪɨɣɫɬɜ ɩɭɬɟɦ
ɩɪɢɦɟɧɟɧɢɹ ɛɨɥɟɟ ɫɨɜɟɪɲɟɧɧɵɯ ɚɤɬɢɜɧɵɯ ɷɥɟɦɟɧɬɨɜ ................................. 134
8.3.1. Ȼɢɩɨɥɹɪɧɵɣ ɬɪɚɧɡɢɫɬɨɪ ɫ ɝɟɬɟɪɨɩɟɪɟɯɨɞɨɦ HBT. ........................ 134
8.3.2. ɉɨɥɟɜɨɣ ɬɪɚɧɡɢɫɬɨɪ HEMT .............................................................. 135
8.3.3. ɋɪɚɜɧɟɧɢɟ ɚɤɬɢɜɧɵɯ ɷɥɟɦɟɧɬɨɜ ....................................................... 136
8.4. ɉɪɢɦɟɧɟɧɢɟ ɛɨɥɟɟ ɫɨɜɟɪɲɟɧɧɵɯ ɩɨɥɭɩɪɨɜɨɞɧɢɤɨɜɵɯ ɦɚɬɟɪɢɚɥɨɜ ..... 137
Ɂɚɤɥɸɱɟɧɢɟ .......................................................................................................... 140
Ʌɢɬɟɪɚɬɭɪɚ ........................................................................................................... 141
ɋɨɞɟɪɠɚɧɢɟ .......................................................................................................... 142
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ɈɈɈ ɄɌɄ «Ƚɚɥɚɤɬɢɤɚ»
115487, ɝ. Ɇɨɫɤɜɚ, ɩɪɨɫɩɟɤɬ Ⱥɧɞɪɨɩɨɜɚ, ɞ. 38
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ɈɈɈ «ɋɈɅɈɇ-ɉɪɟɫɫ»
115487, ɝ. Ɇɨɫɤɜɚ,
ɩɪ-ɤɬ Ⱥɧɞɪɨɩɨɜɚ, ɞɨɦ 38, ɩɨɦɟɳɟɧɢɟ ʋ 8, ɤɨɦɧɚɬɚ ʋ 2.
Ɏɨɪɦɚɬ 60×88/16. Ɉɛɴɟɦ 9 ɩ.ɥ. Ɍɢɪɚɠ 100 ɷɤɡ.
ȼ. Ɇɢɬɢɧ
144
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