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UDC 537.2

GAS SENSITIVE PROPERTIES SnO2-ZnO THIN FILMS

V.V. Petrov1, E.M. Bayan2, V.Yu. Storozhenko3, Yu.N. Varzarev4, A.P.

Starnikova5, S.A. Khubezhov6

1Dr. tech. Sciences, Professor, vvp2005@inbox.ru

2Cand. chemical Sciences, Associate Professor, ek-bayan@yandex.ru

3Student, viktoriastorojenko@gmail.com

4Cand.Tech.Sci., lecturer, varzarevyuv@sfedu.ru

5Master’s Degree student, a.starnikova@mail.ru

Southern Federal University, Rostov-on-Don, Taganrog, Russia

6Cand. Phys.-Mat. Sciences, Researcher

North Ossetian State University, Vladikavkaz, Russia

This paper presents the results of a study of the gas-sensitive properties of thin (up to 100 nm) ZnO – SnO2 films with respect to carbon monoxide (II). It is shown that the effect of CO molecules leads to a change in the chemical composition of the films and the degradation of gas sensitive properties.

Keywords: gas sensitive properties, thin films, carbon monoxide (II).

Binary ZnO–SnO2 (ZTO) thin films with varying SnO2 concentrations were grown on glass substrate. The influence of various factors such as synthesis conditions and properties of the resulting films was studied. ZTO transparent films were obtained from organic compounds of zinc (II) and tin (IV) by low-temperature pyrolysis. Ii was determined that crystal structure formation starts at the temperature of 550 . Ii was found that the film materials obtained by this method are uniform, dense, distribution occurs over the entire surface. The thickness of the one-layer film is about 30 nm. The method allows to obtain films of a given thickness by layer-by-layer formation. The study of multilayer films showed that high-quality

material can be obtained by two to four times the application and the firing temperature of 500-600 °C.

The properties of the synthesized materials were studied by X-ray (ARL X’TRA dif- fractometer, CuK 1-radiation), surface morphology and elemental microanalysis (scanning electron microscope Nova Nanolab 600 with the system of energy-dispersive X-ray microanalysis EDAX GENESIS 6000i). Electrophysical and gas sensitive properties by carbon oxide (II) were measured using an automated installation for determining the parameters of gas sensors at the Center for Collective Use "Microsystem Technics and Integral Sensors" [1]. X-ray photoelectron spectroscopy (XPS) has been used to characterize the elemental and surface composition of the ZTO surface at a depth of several atomic layers (XPS) [2]. XPS makes it possible to determine the relaxation of the surface structure of the films as a result of exposure

to CO molecules. The studies were carried out in an ultrahigh vacuum (vacuum level no worse than 1,8∙10-9 mbar) K-Alpha ThermoScientific installation with a monochromatic X-

ray source Al-Kalpha with quantum energy hv = 1486.6 eV.

Studies of the gas-sensitive properties of the films were carried out on the structures on which V-Cu-Ni contacts were formed. Studies were carried out at a temperature of 300 oC. It was clear that at the first ten CO exposures with a concentration of 50 ppm, the sensor response was 34% of the initial resistance level. In further studies, the sensitivity dropped sharply to a level of no more than 10% when exposed to 1000 ppm.

When conducting XPS studies, it was found that in the process of holding the sensors in a gaseous environment, the chemical composition of the surface layers of the ZTO film degrades due to the chemical adsorption of CO molecules, which leads to the reduction of zinc and tin to metals due to the breakdown of metal oxide bonds. This, in turn, leads to the formation of hydroxides and zinc carbonates. In addition, desorption of tin compounds occurs from the surface layers of the films.

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