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Basic Semiconductor and Metal-Oxide-Semiconductor (MOS) Physics

63

points x = l and x = l are considered as in [1], which are one mean free path away from x = 0. The flux due to the semiconductor carriers at x = 0 due to carriers moving from x = l is given by

ηleftright =

1

vthn(l)

(2.27)

2

 

 

 

The “1/2” term is because only half of the carriers move to the left while the other half moves to the right. The flux due to the semiconductor carriers at x = 0 due to carriers moving from x = +l is given by

 

1

 

(2.28)

ηrightleft =

2 vthn(+l)

 

The total flux of carriers at x = 0 may be obtained by subtracting the flux due to carriers moving from right to left from the flux of carriers moving from left to right:

η = ηleftright − ηrightleft =

1

vth {n(l) n(+l)}

(2.29)

2

 

 

 

Considering small mean free path, the carrier density derivative may be obtained as

η = −lvth

n(+l) n(l)

= −vthl dn

(2.30)

 

2l

dx

 

The diffusion current density for electrons may be obtained by multiplying the flux with the charge of an electron:

Jn = −qη = qvthl dn

(2.31)

dx

 

Let the diffusion constant, Dn , be equal to the product of thermal velocity, vth, and the mean free path, l:

Jn = qDn

dn

(2.32)

 

dx

 

For holes the diffusion current density is given as

Jp = −qDp

dp

(2.33)

 

dx

 

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Technology Computer Aided Design: Simulation for VLSI MOSFET

2.5.3  Total Drift-Diffusion Current

Based on the concepts derived in the previous sections, we can now establish the drift-diffusion equations [3,20]. The total hole current density in a semiconductor is composed of the sum of the drift and the diffusion components of current. Similarly, the total electron current density in a semiconductor is composed of the sum of the drift and the diffusion components of current. For electrons the total current density is given as

Jn = qDn

dn + qn nE

(2.34)

 

dx

 

 

Similarly for holes,

 

 

 

Jp = −qDp

dp

+ qpµpE

(2.35)

 

dx

 

 

The total current is the sum of the electron and hole current densities multiplied by the area, A, perpendicular to the current direction:

Itot = A(Jp + Jn )

(2.36)

2.5.4  Einstein Relation

In a non-uniformly doped semiconductor the doping concentration decreases with increase in x. As a result, diffusion of majority carriers takes place from a high concentration to a low concentration region along the +x direction. The flow of electrons leaves behind positively charged donor ions. The separation of positive and negative charges creates an electric field in the direction opposite to the diffusion process. At equilibrium the induced electric field prevents further diffusion.

When taking the electric field along the x direction, the energy bands are as shown in Figure 2.11. The potential energy increases in the direction of the electric field. The electrostatic potential, which varies in the opposite direction as it is defined in terms of positive charges, is given by

V(x) = −

E(x)

 

(2.37)

q

 

 

 

From the definition of electric field

 

E(x) = − dV(x)

 

 

dx

 

Basic Semiconductor and Metal-Oxide-Semiconductor (MOS) Physics

65

Electric field

Conduction band

Ei

Valence band

x

FIGURE 2.11

Energy band diagram of a semiconductor in the presence of an electric field E(x).

Considering Ei as a convenient reference, the electron potential energy may be related to E(x) as

E(x) = −

dV(x)

= −

d

 

Ei

 

=

1 dEi

 

 

 

 

 

 

 

 

(2.38)

dx

 

 

q dx

 

 

dx

(−q)

 

 

Since the band diagram indicates electron energies, we know that the slope of this band must be such that electrons drift downhill in the field. Therefore E points uphill in the band diagram. At equilibrium no current flows. Putting

Jp = qpµpΕ − qDp

 

dp

= 0

 

(2.39)

 

 

 

 

 

 

 

 

 

dx

 

 

 

we get

 

 

 

 

 

 

 

 

 

 

 

 

 

Ε(x) =

 

Dp

 

1

 

dp(x)

 

(2.40)

 

µp

 

p(x)

 

 

dx

 

 

 

 

 

 

 

 

 

Also,

 

 

 

 

 

 

 

 

 

 

 

 

 

p0 = nie(Ei EF )/kT

 

 

 

so

 

 

 

 

 

 

 

 

 

 

 

 

 

Ε(x) =

Dp

1

 

 

dEi

dEF

 

(2.41)

 

 

 

 

 

 

 

 

 

 

p

 

 

 

 

 

 

dx

 

 

KT dx

 

 

 

 

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Technology Computer Aided Design: Simulation for VLSI MOSFET

The equilibrium Fermi level does not vary with x. So

 

dEF

= 0

 

 

dx

 

 

 

and

 

 

 

 

 

 

dEi

= qE(x)

 

dx

 

 

 

 

Thus the equation takes the form

D

=

kT

. The relationship between drift

 

q

parameter (μ) and diffusion parameter (D) is given by the Einstein relationship.

2.6  Carrier Recombination and Generation

Recombination is a process by which the electrons occupy the empty states associated with holes. The carriers as a result disappear. The energy released is the difference between the initial state energy and the final state energy of the electrons. The energy is emitted in the form of a photon for radiative recombination. For non-radiative recombination, it is transmitted to one or more phonons, and for Auger recombination it is transferred as kinetic energy to another electron [1,2,21]. The different processes are shown in Figure 2.12.

Ec

E

Et

Ev

Trap Aided

Band-to-band

Auger

Recombination

Recombination

Recombination

FIGURE 2.12

Carrier recombination mechanisms in semiconductors.

Basic Semiconductor and Metal-Oxide-Semiconductor (MOS) Physics

67

In band-to-band recombination an electron moves from the conduction band into the valence band state associated with the hole. In case of direct band-gap semiconductors, it is a case of radiative transition. In trap-assisted recombination, the electrons fall into the band gaps caused by some defects or some foreign atoms. The electrons occupying those band gaps move into an empty valence band state, thus completing the recombination process. So this is a two-step transition of an electron from the conduction to the valence band called Shockley-Read-Hall (SRH) recombination. Auger recombination is a process of recombination of an electron and a hole with the resultant energy given to another electron or hole. Auger recombination is different from band-to-band recombination due to this third electron or hole. All the recombination processes when reversed cause carrier generation instead of recombination. A single expression can be used to describe both generation and recombination processes. Generation of carriers by light absorption is a process that does not have recombination associated with it. This process is referred to as ionization. Impact ionization also belongs to this category. The different generation mechanisms are shown in Figure 2.13.

If the photon energy is large, an electron from the valence band may move into the conduction band generating an electron-hole pair as a result. This photon energy must be larger than the band-gap energy for electron-hole pair generation. Kinetic energy (Eph Eg) is added to the electron and the hole due to absorption of the photon.

Carrier generation due to high-energy charged particles is similar except that the available energy may be far greater than the band-gap energy causing multiple electron-hole pairs generation. The high-energy particle gradually loses its energy and eventually stops [5,22].

Impact ionization is the counterpart of Auger recombination. It is caused by an electron/hole with energy, much greater/smaller than the conduction/ valence band edge. The process is shown in Figure 2.14.

The excess energy is transmitted to generate an electron-hole pair in band transition [23]. Avalanche multiplication is caused in semiconductor diodes

Conduction

band

Eph > Eg

Eg

 

Valence

band

Generation by Absorption

Charged

of Light

Particle

 

Ionization

FIGURE 2.13

Carrier generation due to light absorption and ionization due to high-energy particles.

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Technology Computer Aided Design: Simulation for VLSI MOSFET

Electric field E

Conduction band

Valence band

FIGURE 2.14

Impact ionization and avalanche multiplication of electrons and holes in the presence of a large electric field.

under high reverse bias as a result of this generation process. The accelerated carriers gain kinetic energy that is given off to an electron in the valence band, causing an electron-hole pair. The two electrons created in the process can create two more electrons causing an avalanche multiplication effect. Both electrons as well as holes take part in avalanche multiplication.

2.7  Continuity Equation and Solution

The continuity equation describes a basic concept, namely that a change in carrier density over time is due to the difference between the incoming and outgoing flux of carriers plus the generation and minus the recombination. If a volume of space is considered in which charge transport and recombination are taking place, we have the simple equality as in Figure 2.15(a). As a result of consideration of particle current, Net rate of particle fllow = Particle fllow rate due to current − Particle loss rate due to recombination + Particle gain due to generation.

Thus a continuity equation is based on the conservation of mobile charges [24]:

n

t

p

t

=1 Jn Rn + Gn q x

 

(2.42)

= −

1

 

Jp

Rp + Gp

 

 

 

q x

where Gn and Gp are the electron and hole generation rates, Rn and Rp are the electron and the hole recombination rates, and Jxn and Jxp are the net flux of mobile charges in and out of x.

Basic Semiconductor and Metal-Oxide-Semiconductor (MOS) Physics

69

 

Current is conserved

Incoming

Outgoing

current

current

Small volume in which generation and recombination occurs

(a)

Jn(x)

Jn(x + x)

 

Area of the

 

face, A

x

x

 

(b)

FIGURE 2.15

(a) A conceptual description of the continuity equation. (b) Geometry used to develop the current continuity equation.

A solution to these equations can be obtained by substituting the expression for the electron and hole current. This then yields two partial differential equations as a function of the electron density, the hole density, and the electric field. The electric field is obtained from Gauss’s law as in Figure 2.15(b).

Let us now collect the various terms in this continuity equation. If δn is the excess carrier density in the region, the recombination rate R in the volume A x may be written approximately as

R =

δn A x

(2.43)

 

τn

 

 

where τn is the electron recombination time per excess particle due to both the radiative and the non-radiative components. The particle fllow rate into the same volume due to the current density Jn(x) is given by the difference of particle current coming into the region and the particle current leaving the region:

Jn (x)

 

Jn (x +

x)

1

Jn (x)

 

 

 

 

 

A

 

 

x A

(−e)

(−e)

 

e x

 

 

 

 

 

70 Technology Computer Aided Design: Simulation for VLSI MOSFET

If G is the generation rate per unit volume, the generation rate in the volume A · x is GA x. δn/τn is the net recombination rate of electrons and U = G R—that is, Rate of electron buildup (U) = Increase in electron concentration in xA per unit time (G) – recombination rate (R). The rates of electron

buildup in volume A ·

x is then

 

 

 

 

 

 

 

A

n(x,t)

∂δn

=

1 Jn (x)

δn

x

 

 

 

 

 

t

t

e

x

 

 

 

 

 

τn

As x approaches zero, we can write equations in the derivative form for electrons and holes as

∂δn

=

1 Jn(x)

δn

 

t

 

e

 

x

 

 

τn

(2.44)

∂δp

 

 

1 Jp (x)

δp

= −

 

t

 

 

e

x

 

 

τp

 

Using these expressions, the diffusion currents are

Jn(diff ) = eDn ∂δn

x

Jp (diff ) = −eDp ∂δp

(2.45)

x

Thetime-dependentcontinuityequationforelectronsandholes,validseparately:

∂δn

= Dn

2 δn

δn

 

t

x2

τn

(2.46)

 

 

 

∂δp

 

 

2 δp

 

δp

= Dp

 

 

t

 

x2

τp

 

 

 

 

 

These equations are used to study the steady-state charge profiile in p-n diodes and bipolar transistors. In steady state,

2 δn = δn = δn

x2 Dnτn L2n

(2.47)

2 δp = δp = δp

x2 Dpτp L2p

Basic Semiconductor and Metal-Oxide-Semiconductor (MOS) Physics

71

Here is the diffusion length for electrons, and Lp is the diffusion length for holes. Considering the case where an excess electron density δn(0) is maintained at x = 0, at point L in the semiconductor, the excess carrier density is maintained at δ(L). The general solution of the above second-order differential equation is

δn(x) = A1ex Ln + A2ex Ln

(2.48)

When L >> Ln and δn(L) = 0 , the semiconductor is much longer than Ln , for example in the case of the long p-n diode. A1 and A2 can be found from the boundary conditions. For a large value of x, δn = 0 at x = ∞ and so A1 = 0. Similarly δn = 0 = δn(0) at x = 0 giving A2 = δn(0) . The solution of the equation is given by

δnp (x) = δnp (0)e

x

Ln

(2.49)

 

It is seen from the above equation that the carrier density decays exponentially in the semiconductor.

However, when L << Ln , the carrier density is linear from one boundary value to the other because over a short distance exponential can be approximated as linear. When excess carriers are injected into a thick semiconductor sample, both diffusion and recombination take place. Ln represents the distance over which the injected carrier density falls to 1/e of its original value. It also represents the average distance an electron diffuses before recombination.

The probability that an electron survives up to a distance x without recombination is given by

δnp (x) = ex Ln

δnp (0)

The steady-state distribution of excess holes causes diffusion and a hole current in the direction of decreasing concentration.

Jp (x) = −qDp

δp

= q DP δp(x)

(2.50)

 

δx

Lp

 

It will be useful for the current calculation of the p-n junction where the injection of minority carriers across a junction will lead to exponential distribution.

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Technology Computer Aided Design: Simulation for VLSI MOSFET

2.8  Mobility and Scattering

The relationship between the velocity of electrons and the applied electric fiield is complex. When the electric field is low, the relationship is in a simple form. The distance versus time trajectory of an electron is shown in Figure 2.16. Considering d as the distance traveled in time t, the electron motion is described by

d = vt v = μE

The velocity of electron v is proportional to the electric fiield applied, and μ is the mobility. For a large electric fiield the relation between the velocity and the applied fiield is not so simple [2–4] and will be discussed later.

When no electric field is applied externally, the occupation of a state with momentum +ħk is the same as that with momentum −ħk. So no current flows in this case as the momentum gets canceled out. Figure 2.17(a) shows the distribution function in momentum space. When an electric fiield is applied, the electron distribution shifts, as shown schematically in Figure 2.17(a), and there is a net momentum of the electrons. Current flows as a result.

For perfect and rigid crystal, no scattering of the electron takes place. On application of an external electric fiield E, the electron behaves as a “free” electron in the absence of scattering. However, there are always imperfections due to which electrons scatter. The process is shown in Figure 2.17(b). The average behavior of the electrons represents the transport properties of the electrons.

Electric field E

Movement of electron in a crystal

Electron

Distance Travelled by

Time Taken

FIGURE 2.16

d = vt

Also, v = µE

A typical electron trajectory in a sample, and the distance versus time plot.