Источники / SiCtechnologyPropertiesApplication

268 ǮȑȓȓȐ Ǽ.Ǯ., ǯȓșȭȓȐ Ǯ.dz., ǯȜșȠȜȐȓȤ ǻ.ǿ., ǸȖȟȓșȓȐ ǰ.ǿ., ǸȜțȎȘȜȐȎ Ǿ.ǰ. Ȗ ȒȞ

ǾȖȟ. 9.13. ȀȓȚȝȓȞȎȠȡȞțȎȭȕȎȐȖȟȖȚȜȟȠȪ ȫșȓȘȠȞȜȟȜȝȞȜȠȖȐșȓțȖȭ ȜȏȞȎȕȤȜȐ ȘȓȞȎȚȖȘȖ, ȝȞȖȑȜȠȜȐșȓțțȜȗ Ȗȕ ȒȞȓȐȓȟȖțȩ ȏȡȘȎ (1)

Ȗ ȑȞȡȦȖ (2) [103]

ǾȖȟ. 9.14 Ȗ 9.15 ȖșșȬȟȠȞȖȞȡȬȠ ȐșȖȭțȖȓ ȚȎȘȞȜȟȠȞȡȘȠȡȞȩ ȘȓȞȎȚȖȘȖ țȎ ȐȓșȖȥȖțȡ ȠȓȞȚȜ-ȋDzǿ. ǸȜȫȢȢȖȤȖȓțȠ ǵȓȓȏȓȘȎ ȡ Ȑȟȓȣ ȜȏȞȎȕȤȜȐ ȖȚȓș ȜȠȞȖȤȎȠȓșȪțȜȓ ȕțȎȥȓțȖȓ, ȥȠȜ ȜȏȡȟșȜȐșȓțȜ n-ȠȖȝȜȚ ȫșȓȘȠȞȜȝȞȜȐȜȒțȜȟȠȖ. dzȑȜȎȏȟȜșȬȠțȎȭȐȓșȖȥȖțȎȐȜȕȞȎȟȠȎșȎȟȞȜȟȠȜȚ

ǾȖȟ. 9.14. ȀȓȚȝȓȞȎȠȡȞțȩȓ ȕȎȐȖȟȖȚȜȟȠȖ ȘȜȫȢȢȖȤȖȓțȠȎ ǵȓȓȏȓȘȎ Ȓșȭ ȜȏȞȎȕȤȜȐ ȠȖȝȎ-I, ȖȕȑȜȠȜȐșȓțțȩȣ Ȗȕ ȜșȪȣȖ (1), ȑȞȎȏȎ (2), ȑȞȡ-

ȦȖ (3), ȏȡȘȎ (4) Ȗ ȜȞȓȣȎ (5) [103]

ǾȖȟ. 9.15. ȀȓȚȝȓȞȎȠȡȞțȩȓȕȎȐȖȟȖȚȜȟȠȖ ȘȜȫȢȢȖȤȖȓțȠȎ ǵȓȓȏȓȘȎ Ȓșȭ ȜȏȞȎȕȤȜȐ ȠȖȝȎ-I Ȗ ȠȖȝȎ-II, ȖȕȑȜȠȜȐșȓțțȩȣ Ȗȕ ȜȞȓȣȎ (1 –

ȠȖȝ-I, 2 – ȠȖȝ-II, N=4, 3 – ȠȖȝII, N = 10) Ȗ ȏȡȘȎ (4 – ȠȖȝ-I, 5 – ȠȖȝ-II, N=5) [103]

ȠȓȚȝȓȞȎȠȡȞȩ Ȗ ȘȜȞȞȓșȖȞȜȐȎșȎ ȟȜ ȟȠȞȡȘȠȡȞȜȗ ȘȓȞȎȚȖȘȖ. ȁȐȓșȖȥȓțȖȓ ȥȖȟșȎ ȟșȜȓȐ ȝȞȖȐȜȒȖȠ Ș ȐȜȕȞȎȟȠȎțȖȬ ȘȜȫȢȢȖȤȖȓțȠȎ ǵȓȓȏȓȘȎ. ȁ ȜȏȞȎȕȤȜȐ II-ȠȖȝȎ ȟ ȥȖȟșȜȚ ȟșȜȓȐ 5 ȚȎȘȟȖȚȎșȪțȎȭ ȐȓșȖȥȖțȎ ȘȜȫȢȢȖȤȖȓțȠȎ ǵȓȓȏȓȘȎ ȒȜȟȠȖȑȎșȎ ȐȓșȖȥȖțȩ 200 ȚȘǰK 1.

ǸȜȫȢȢȖȤȖȓțȠ ȘȎȥȓȟȠȐȎ ȜȏȞȎȕȤȜȐ ȜȤȓțȖȐȎșȖ ȟ ȝȜȚȜȧȪȬ ȡȞȎȐțȓțȖȭ:

ȑȒȓ Z [K 1[, B [ǰ/K], S [OȚ¸Ț], M [ǰȠ¸Ț 1K 1].

ǰ ȠȎȏșȖȤȓ 9.7. ȝȞȓȒȟȠȎȐșȓțȩ ȒȎțțȩȓ ȝȜ ȠȓȝșȜȝȞȜȐȜȒțȜȟȠȖ ȝȜȞȖȟȠȜȗ SiC ȘȓȞȎȚȖȘȖ, ȝȜșȡȥȓțțȜȗ ȞȎȕșȖȥțȩȚȖ ȚȓȠȜȒȎȚȖ.

ǰȖȒțȜ, ȥȠȜȠȓȝșȜȝȞȜȐȜȒțȜȟȠȪȝȜȞȖȟȠȜȗSiC ȘȓȞȎȚȖȘȖ, ȝȜșȡȥȓțțȜȗ ȞȎȕșȖȥțȩȚȖ ȚȓȠȜȒȎȚȖ, ȐȎȞȪȖȞȡȓȠȟȭ Ȑ ȝȞȓȒȓșȎȣ 4 25 ǰȠ¸Ț 1K 1 ȝȞȖ Ȁ= 600°ǿ. ȋȠȖ ȕțȎȥȓțȖȭ ȖȟȝȜșȪȕȜȐȎțȩ Ȓșȭ ȜȤȓțȘȖ ȘȜȫȢȢȖȤȖȓțȠȎ ȘȎȥȓȟȠȐȎ ȏȖȜȚȜȞȢțȜȗ SiC ȘȓȞȎȚȖȘȖ. ǼȏȞȎȕȤȩ ȠȖȝȎ I, Ȗȕ-

ȑȜȠȜȐșȓțțȩȓ Ȗȕ ȒȞȓȐȓȟȖțȩ ȑȞȡȦȖ, ȝȜȘȎȕȎșȖ șȡȥȦȖȓ ȞȓȕȡșȪȠȎȠȩ.

Z= 1.2¸10 5 K 1 ȝȞȖ 700°ǿ.

ǼȔȖȒȎȓȠȟȭ, ȥȠȜ ȜȝȠȖȚȖȕȎȤȖȭ ȠȞȓȣȚȓȞțȜȗ ȝȜȞȖȟȠȜȗ ȟȠȞȡȘȠȡȞȩ ȘȓȞȎȚȖȘȖȖȝȜȐȩȦȓțȖȓȓȓȫșȓȘȠȞȜȝȞȜȐȜȒțȜȟȠȖ ȝȡȠȓȚșȓȑȖȞȜȐȎțȖȭ ȟȜȜȠȐȓȟȠȟȠȐȡȬȧȖȚȖ ȝȞȖȚȓȟȭȚȖ ȝȜȕȐȜșȖȠ ȝȜȐȩȟȖȠȪ ȠȓȞȚȜȫșȓȘȠȞȖȥȓȟȘȖȓ ȝȎȞȎȚȓȠȞȩ ȏȖȜȚȜȞȢțȜȗ ȘȓȞȎȚȖȘȖ.

270ǮȑȓȓȐ Ǽ.Ǯ., ǯȓșȭȓȐ Ǯ.dz., ǯȜșȠȜȐȓȤ ǻ.ǿ., ǸȖȟȓșȓȐ ǰ.ǿ., ǸȜțȎȘȜȐȎ Ǿ.ǰ. Ȗ ȒȞ

9.4.ǼȏșȎȟȠȖ ȝȞȖȚȓțȓțȖȭ ȘȎȞȏȖȒȘȞȓȚțȖȓȐȩȣ ȚȎȠȓȞȖȎșȜȐ

ȃȖȚȖȥȓȟȘȜȓ ȚȎȦȖțȜȟȠȞȜȓțȖȓ

ǸȓȞȎȚȖȘȎțȎȜȟțȜȐȓȘȎȞȏȖȒȎȘȞȓȚțȖȭȝȞȖȚȓțȭȓȠȟȭȒșȭȖȕȑȜȠȜȐșȓțȖȭȚȓȦȎșȜȘȖȦțȓȘȜȐ, ȡȝșȜȠțȖȠȓșȪțȩȣȘȜșȓȤ, ȒȓȠȎșȓȗțȎȟȜȟȜȐ, ȟȜȝȓș ȝȓȟȘȜȟȠȞȡȗțȜȗ ȜȥȖȟȠȘȖ, ȟȝȖȞȎșȪțȩȣ ȟȠȞȡȗțȩȣ ȢȜȞȟȡțȜȘ, ȕȎȧȖȠțȩȣ ȘȜȔȡȣȜȐ Ȓșȭ ȠȓȞȚȜȝȎȞ, ȢȡȞțȖȠȡȞȩ Ȓșȭ ȜȏȔȖȑȜȐȩȣ ȝȓȥȓȗ, ǶǸ-ȖȕșȡȥȎȠȓșȓȗ, ȞȎȕșȖȥțȩȣ ȦȠȡȤȓȞȜȐ, ȠȞȡȏȜȝȞȜȐȜȒȜȐ, ȞȎȏȜȠȎȬȧȖȣ, Ȑ ȠȜȚ ȥȖȟșȓ, Ȑ ȎȑȞȓȟȟȖȐțȩȣ ȟȞȓȒȎȣ Ȗ Ƞ. Ȓ.

ǺȎȦȖțȜȟȠȞȜȓțȖȓ

Ƕȕ SiC ȘȓȞȎȚȖȘȖ ȖȕȑȜȠȎȐșȖȐȎȬȠ ȟȐȎȞȜȥțȩȓ ȟȜȝșȎ, ȑȎȕȜȐȩȓ ȟȜȝșȎ Ȗ ȒȖȢȢȡȕȜȞȩ, ȫșȓȘȠȞȜȖȕȜșȭȠȜȞȩ, ȟȜȝȞȜȠȖȐșȓțȖȭ, ȠȓȞȚȖȟȠȜȞȩ. ǸȜȚȝȜȕȖȤȖȜțȩȓ ȚȎȠȓȞȖȎșȩ ȝȞȖȚȓțȭȬȠȟȭ Ȓșȭ ȖȕȑȜȠȜȐșȓțȖȭ ȐȟȠȎȐȜȘ Ȓșȭ ȞȓȔȡȧȓȑȜ ȖțȟȠȞȡȚȓțȠȎ, ȝȜȐȜȞȜȠțȩȣ ȘȜȚȝȜȕȖȤȖȜțțȩȣ ȞȓȔȡȧȖȣ ȐȟȠȎȐȜȘ Ȗ Ƞ. Ȓ. ǺȎȠȓȞȖȎșȩ Ȓșȭ ȞȓȔȡȧȓȑȜ ȖțȟȠȞȡȚȓțȠȎ ȒȜșȔțȩ ȜȏșȎȒȎȠȪ ȟșȓȒȡȬȧȖȚȖ ȟȐȜȗȟȠȐȎȚȖ:

(1)ȐȩȟȜȘȜȗ ȠȐȓȞȒȜȟȠȪȬ Ȗ ȒȜșȑȜȐȓȥțȜȟȠȪȬ;

(2)ȜȠȟȡȠȟȠȐȖȓȚ ȣȖȚȖȥȓȟȘȖȣ ȞȓȎȘȤȖȗ ȟ ȜȏȞȎȏȎȠȩȐȎȓȚȩȚȖ ȚȎȠȓȞȖȎșȎȚȖ;

(3)ȠȓȚȝȓȞȎȠȡȞțȜȗ ȟȠȜȗȘȜȟȠȪȬ, țȓȜȏȣȜȒȖȚȜȗ ȝȞȖ ȐȩȟȜȘȜȟȘȜȞȜȟȠțȜȗ ȜȏȞȎȏȜȠȘȓ;

(4)țȖȕȘȜȗ ȣȞȡȝȘȜȟȠȪȬ.

ǼȏȩȥțȜȘȓȞȎȚȖȘȎȟȜȜȠȐȓȠȟȠȐȡȓȠȣȎȞȎȘȠȓȞȖȟȠȖȘȎȚ(1)–(3), ȖȒșȭ ȖȟȝȜșȪȕȜȐȎțȖȭ ȓȓ Ȑ ȘȎȥȓȟȠȐȓ ȖțȟȠȞȡȚȓțȠȎ țȓȜȏȣȜȒȖȚȜ ȝȜțȖȕȖȠȪ ȓȓ ȣȞȡȝȘȜȟȠȪ. ǰȝȜȟșȓȒțȓȓȐȞȓȚȭȘȓȞȎȚȖȥȓȟȘȖȗȖțȟȠȞȡȚȓțȠ ȝȞȖȚȓțȭ- ȓȠȟȭȒșȭȟȘȜȞȜȟȠțȜȗȜȏȞȎȏȜȠȘȖȥȡȑȡțȎȖȕ-ȕȎȐȩȟȜȘȜȗȠȓȚȝȓȞȎȠȡȞțȜȗ ȟȠȜȗȘȜȟȠȖ ȞȭȒȎ ȘȓȞȎȚȖȥȓȟȘȖȣ ȚȎȠȓȞȖȎșȜȐ. Ǹ țȖȚ ȜȠțȜȟȭȠȟȭ ȟȚȓȟȖ ȜȘȟȖȒȎ ȎșȬȚȖțȖȭ ȟ ȐȖȟȘȓȞȎȚȖ SiC. ǰ ȞȎȏȜȠȓ [125] ȖȟȟșȓȒȜȐȎțȩ Ȗ ȝȜȘȎȕȎțȩȐȩȟȜȘȖȓȫȘȟȝșȡȎȠȎȤȖȜțțȩȓȝȎȞȎȚȓȠȞȩȞȓȔȡȧȖȣȖțȟȠȞȡȚȓțȠȜȐ țȎ ȜȟțȜȐȓ țȜȐȜȑȜ ȚȎȠȓȞȖȎșȎ SiC–SiAlON. dzȑȜ ȖȕȑȜȠȎȐșȖȐȎșȖ ȟȝȞȖȚȓțȓțȖȓȚ ȖȑȜșȪȥȎȠȩȣ ȘȞȖȟȠȎșșȜȐ C-SiC ȖȝȜȞȜȦȘȎB-SiC. ǹȡȥȦȓȗ ȡȟȠȜȗȥȖȐȜȟȠȪȬ Ș ȖȕțȜȟȡ ȜȏșȎȒȎș ȚȎȠȓȞȖȎș ȟ 10 vol% SiC.

ǮȐȠȜȚȜȏȖșȪțȎȭ ȝȞȜȚȩȦșȓțțȜȟȠȪ

ǸȜȚȝȜȕȖȠȩ țȎ ȜȟțȜȐȓ ȡȑșȓȞȜȒțȩȣ ȐȜșȜȘȜț Ȗ ȘȎȞȏȖȒȎ ȘȞȓȚțȖȭ SiC(C/C-SiC) ȝȜ ȟȐȜȖȚ ȠȞȖȏȜșȜȑȖȥȓȟȘȖȚ ȣȎȞȎȘȠȓȞȖȟȠȖȘȎȚ ȝȞȓȐȜȟȣȜȒȭȠ

ȟȓȞȩȗȥȡȑȡțȖȡȑșȓȞȜȒ-ȡȑșȓȞȜȒțȩȓȘȜȚȝȜȕȖȤȖȜțțȩȓȚȎȠȓȞȖȎșȩ. ǿȜȥȓȠȎțȖȓțȖȕȘȜȑȜȡȒȓșȪțȜȑȜȐȓȟȎ, ȐȩȟȜȘȜȗȡȟȠȜȗȥȖȐȜȟȠȖȘ ȠȓȞȚȖȥȓȟȘȖȚȝȓȞȓȑȞȡȕȘȎȚ, ȐȩȟȜȘȜȚȡȟȜȝȞȜȠȖȐșȓțȖȬȘȖȟȠȖȞȎțȖȬȒȓșȎȓȠȫȠȖȚȎȠȓȞȖȎșȩșȡȥȦȖȚȖȘȎțȒȖȒȎȠȎȚȖȒșȭȖȕȑȜȠȜȐșȓțȖȭȟȖȟȠȓȚȠȜȞȚȜȔȓțȖȭ [126]. ǼȟțȜȐțȩȓ ȠȞȓȏȜȐȎțȖȭ Ș ȚȎȠȓȞȖȎșȎȚ Ȓșȭ ȠȜȞȚȜȕțȩȣ ȟȖȟȠȓȚ:

ȟȠȎȏȖșȪțȩȓ ȒȖțȎȚȖȥȓȟȘȖȓ Ȗ ȟȠȎȠȖȥȓȟȘȖȓ ȘȜȫȢȢȖȤȖȓțȠȩ ȠȞȓțȖȭ;

ȐȩȟȜȘȎȭȡȟȠȜȗȥȖȐȜȟȠȪȘȖȕțȜȟȡȐȠȓȥȓțȖȓȐȟȓȑȜȐȞȓȚȓțȖȫȘȟȝșȡȎȠȎȤȖȖ ȠȜȞȚȜȕțȩȣ ȟȖȟȠȓȚ;

țȖȕȘȖȗ Ȑȓȟ;

țȖȕȘȎȭ ȟȠȜȖȚȜȟȠȪ.

ǰ țȎȟȠȜȭȧȓȓ ȐȞȓȚȭ ȠȎȘȖȓ ȘȜȚȝȎțȖȖ, ȘȎȘ ȂȓȞȞȎȞȖ, ǽȜȞȦȓ Ȗ DzȎȗȚșȓȞ-ǸȞȎȗȟșȓȞȜȟțȎȧȎȬȠȟȝȜȞȠȖȐțȩȓȚȜȒȓșȖȎȐȠȜȚȜȏȖșȓȗȘȓ- ȞȎȚȖȥȓȟȘȖȚȖȠȜȞȚȜȕțȩȚȖȟȖȟȠȓȚȎȚȖ. ǾȭȒȢȖȞȚȝȞȖȖȕȑȜȠȜȐșȓțȖȭ ȠȜȞȚȜȕțȩȣ ȒȖȟȘȜȐ Ȓșȭ ȎȐȠȜȚȜȏȖșȓȗ ȡȔȓ ȖȟȝȜșȪȕȡȓȠ ȘȜȚȝȜȕȖȠȩ SiC (C/C-SiC), ȎȞȚȖȞȜȐȎțțȩȓ ȡȑșȓȞȜȒțȩȚȖ ȐȜșȜȘțȎȚȖ.

ǻȎ ȞȖȟ. 9.16 ȝȞȓȒȟȠȎȐșȓțȜ ȒȖȟȘȜȐȜȓ ȟȤȓȝșȓțȖȓ ȢȖȞȚȩ ǽȜȞȦȓ ȒșȭȚȜȒȓșȖCarrera GT. DzȖȟȘȟȤȓȝșȓțȖȭȖȕȑȜȠȜȐșȓțȖȕȚȎȠȞȖȥțȜȑȜ ȘȜȚȝȜȕȖȠȎȠȖȠȎțȎ/ȐȜșȜȘțȎC/C–SiC, ȜȠșȖȥȎȓȠȟȭȐȩȟȜȘȜȗȖȕțȜȟȜȟȠȜȗȘȜȟȠȪȬ Ȗ ȜȏȓȟȝȓȥȖȐȎȓȠ ȝȖȘȜȐȩȗ ȘȞȡȠȭȧȖȗ ȚȜȚȓțȠ ȏȜșȓȓ 1000 ǻȚ. ǺȎșȩȗ ȒȖȎȚȓȠȞ ȒȖȟȘȎ ȟȤȓȝșȓțȖȭ, 169 ȚȚ, ȝȜȕȐȜșȭȓȠ ȡȚȓțȪȦȖȠȪ ȞȎȕȚȓȞȩ ȘȜȞȜȏȘȖ ȝȓȞȓȒȎȥ, ȟțȖȔȎȓȠ Ȑȓȟ Ȗ ȡșȡȥȦȎȓȠ ȒȖțȎȚȖȘȡ ȒȐȖȑȎȠȓșȭ [127].

ǾȖȟ. 9.16. ȀȜȞȚȜȕțȜȗȒȖȟȘȢȖȞȚȩ ǽȜȞȦȓ [127]

272 ǮȑȓȓȐ Ǽ.Ǯ., ǯȓșȭȓȐ Ǯ.dz., ǯȜșȠȜȐȓȤ ǻ.ǿ., ǸȖȟȓșȓȐ ǰ.ǿ., ǸȜțȎȘȜȐȎ Ǿ.ǰ. Ȗ ȒȞ

ǸȜȟȚȜțȎȐȠȖȘȎ Ȗ ȎȐȖȎȤȖȭ

ǮȐȖȎȘȜȟȚȖȥȓȟȘȖȗ ȤȓțȠȞ (DLR) Ȑ ȆȠȡȠȑȎȞȠȓ (DZȓȞȚȎțȖȭ) ȞȎȕȞȎȏȎȠȩȐȎȓȠ (C/C-SiC) ȘȜȚȝȜȕȖȠȩ Ȓșȭ ȝȞȖȚȓțȓțȖȭ Ȑ ȘȜȟȚȜțȎȐȠȖȘȓ. ǽȓȞȐȩȓ ȞȎȕȞȎȏȜȠȘȖ ȏȩșȖ țȎȝȞȎȐșȓțȩ țȎ ȖȕȑȜȠȜȐșȓțȖȓ ȠȓȝșȜȐȩȣ ȫȘȞȎțȜȐ. ǽșȎțȖȞȡȓȠȟȭ ȖȟȝȜșȪȕȜȐȎȠȪ țȜȟȜȐȜȗ ȕȎȧȖȠțȩȗ ȫȘȞȎț Ȗȕ ȘȜȚȝȜȕȖȠȎ (C/C-SiC) Ȓșȭ ȘȜȞȎȏșȭ-țȜȟȖȠȓșȭ Ȓșȭ ǺȓȔȒȡțȎȞȜȒțȜȗ ȘȜȟȚȖȥȓȟȘȜȗ ȟȠȎțȤȖȖ [127, 100].

ǾȖȟ. 9.17. ǹȜȝȎȠȘȎ ȠȡȞȏȖțȩ Ȗȕ SiC/SiC ȚȎȠȞȖȥțȜȑȜ ȘȜȚȝȜȕȖ-

ȠȎ [129]

ǰȞȎȘȓȠțȜȗȠȓȣțȖȘȓȘȎȞȏȖȒȘȞȓȚțȖȓȐȩȓȚȎȠȓȞȖȎșȩȖȟȝȜșȪȕȡȬȠȟȭ

ȐȘȎȥȓȟȠȐȓ ȞȡșȓȐȩȣ ȕȎȟșȜțȜȘ ȞȓȎȘȠȖȐțȩȣ ȒȐȖȑȎȠȓșȓȗ. ǼțȖ ȝȞȖȚȓțȭȬȠȟȭ Ȓșȭ ȖȕȚȓțȓțȖȭ țȎȝȞȎȐșȓțȖȭ ȠȭȑȖ ȠȐȓȞȒȜȠȜȝșȖȐțȩȣ ȞȎȘȓȠ. ǰȟșȓȒȟȠȐȖȓ ȕțȎȥȖȠȓșȪțȩȣ ȠȓȞȚȖȥȓȟȘȖȣ Ȗ ȚȓȣȎțȖȥȓȟȘȖȣ țȎȑȞȡȕȜȘ ȐȞȓȚȭ ȞȎȏȜȠȩ ȠȎȘȖȣ ȕȎȟșȜțȜȘ țȓ ȝȞȓȐȩȦȎȓȠ țȓȟȘȜșȪȘȖȣ ȚȖțȡȠ. ǿȜȐȞȓȚȓțțȩȓ ȕȎȟșȜțȘȖ Ȓșȭ ȫȠȖȣ Ȥȓșȓȗ ȖȕȑȜȠȎȐșȖȐȎȬȠ Ȗȕ (C/C-SiC) ȘȜȚȝȜȕȖȠȜȐ, ȝȜȘȞȩȠȩȣ ȕȎȧȖȠțȩȚ ȟșȜȓȚ CVD ȘȎȞȏȖȒȎ ȘȞȓȚțȖȭ.

ȂȖșȪȠȞȩ Ȓșȭ ȑȜȞȭȥȖȣ ȟȡȏȟȠȎțȤȖȗ, ȠȓȝșȜȜȏȚȓțțȩȓ ȫșȓȚȓțȠȩ, ȑȜȞȓșȘȖ Ȗ ȒȞ.

ǰȩȟȜȘȜȝȜȞȖȟȠȎȭ ȘȓȞȎȚȖȘȎȜȏșȎȒȎȓȠȡțȖȘȎșȪțȜȗ ȘȜȚȏȖțȎȤȖȓȗ ȟȐȜȗȟȠȐ: ȐȩȟȜȘȎȭ ȝȜȞȖȟȠȜȟȠȪ, ȚȎșȩȗ ȡȒȓșȪțȩȗ Ȑȓȟ, ȐȩȟȜȘȎȭ ȝȞȜțȖȤȎȓȚȜȟȠȪ, ȐȩȟȜȘȎȭ ȠȓȚȝȓȞȎȠȡȞțȎȭ ȡȟȠȜȗȥȖȐȜȟȠȪ, ȚȎșȩȓ ȠȓȝșȜȝȞȜȐȜȒțȜȟȠȪ, ȫșȓȘȠȞȜȝȞȜȐȜȒțȜȟȠȪ Ȗ ȠȓȝșȜȓȚȘȜȟȠȪ. ȋȠȖ ȟȐȜȗȟȠȐȎ ȚȜȑȡȠ ȖȚȓȠȪ ȞȭȒ ȜȏșȎȟȠȓȗ ȝȞȖȚȓțȓțȖȭ: ȢȖșȪȠȞȎȤȖȭ ȞȎȟȝșȎȐșȓțțȩȣ ȚȓȠȎșșȜȐ, ȢȖșȪȠȞȎȤȖȭ ȑȜȞȭȥȖȣ ȑȎȕȜȐ, ȠȓȝșȜȜȏȚȓțțȩȓ ȫșȓȚȓțȠȩ, țȜȟȖȠȓșȖ ȘȎȠȎșȖȕȎȠȜȞȜȐ, ȝȜȞȖȟȠȩȓ ȑȜȞȓșȘȖ, ȒȖȕȓșȪțȩȓ șȜȐȡȦȘȖ ȘȜȝȜȠȖ Ȗ ȟȜșțȓȥțȩȓ ȘȜșșȓȘȠȜȞȩ ȖȕșȡȥȓțȖȭ.

ǼȒțȜ Ȗȕ ȟȝȓȤȖȢȖȥȓȟȘȖȣ ȝȞȖȚȓțȓțȖȗ ȐȩȟȜȘȜȝȜȞȖȟȠȩȣ ȟȖȟȠȓȚ – ȑȜȞȓșȘȖ. DZȜȞȓțȖȓ Ȑ ȝȜȞȖȟȠȜȚ țȜȟȖȠȓșȓ ȖȚȓȓȠ ȞȭȒ ȝȞȓȖȚȡȧȓȟȠȐ ȝȜ ȟȞȎȐțȓțȖȬ ȟ ȑȜȞȓșȘȎȚȖ ȟ ȜȠȘȞȩȠȩȚ ȝșȎȚȓțȓȚ: ȐȩȟȜȘȎȭ ȝșȜȠțȜȟȠȪ ȫțȓȞȑȖȖ, ȡȟȠȜȗȥȖȐȜȟȠȪ ȑȜȞȓțȖȭ Ȗ ȐȩȟȜȘȖȗ ȝȜȘȎȕȎȠȓșȪ

274 ǮȑȓȓȐ Ǽ.Ǯ., ǯȓșȭȓȐ Ǯ.dz., ǯȜșȠȜȐȓȤ ǻ.ǿ., ǸȖȟȓșȓȐ ǰ.ǿ., ǸȜțȎȘȜȐȎ Ǿ.ǰ. Ȗ ȒȞ

ȐȜȒțȜȟȠȪȘȎȞȏȖȒȎȘȞȓȚțȖȭȟȝȜȟȜȏȟȠȐȡȓȠȑȜȚȜȑȓțȖȕȎȤȖȖșȜȘȎșȪțȩȣ ȠȓȚȝȓȞȎȠȡȞțȩȣ ȑȞȎȒȖȓțȠȜȐ Ȑ ȞȎȏȜȥȓȗ ȕȜțȓ.

ǺȓȠȎșșȡȞȑȖȭ

ǯșȎȑȜȒȎȞȭ ȐȩȟȜȘȜȗ ȣȖȚȖȥȓȟȘȜȗ ȟȠȜȗȘȜȟȠȖ, ȜȑțȓȡȝȜȞțȜȟȠȖ Ȗ ȖȕțȜȟȜȟȠȜȗȘȜȟȠȖ, ȘȎȞȏȖȒ ȘȞȓȚțȖȭ țȎȣȜȒȖȠ ȝȞȖȚȓțȓțȖȓ Ȑ ȘȎȥȓȟȠȐȓ ȜȑțȓȡȝȜȞȎ Ȑ ȚȓȠȎșșȡȞȑȖȖ Ȗ ȚȎȦȖțȜȟȠȞȜȓțȖȖ Ȓșȭ ȢȡȠȓȞȜȐȘȖ ȠȓȞȚȖȥȓȟȘȖȣȝȓȥȓȗ. DzșȭȝȓȥțȜȗȢȡȞțȖȠȡȞȩ ȖȟȝȜșȪȕȡȓȠȟȭ «ȞȓȘȞȖȟȠȎșșȖȕȜȐȎțțȩȗ» ȘȎȞȏȖȒ ȘȞȓȚțȖȭ CRYSTAR.

ǶǸ ȖȕșȡȥȎȠȓșȖ Ȗ țȎȑȞȓȐȎȠȓșȖ

Dzșȭ ȞȎȏȜȠȩ Ȑ ȐȩȟȜȘȜȠȓȚȝȓȞȎȠȡȞțȩȣ ȝȓȥȎȣ ȝȞȖ ȠȓȚȝȓȞȎȠȡȞȎȣ 1200–1450°ǿ ȥȎȟȠȜ ȖȟȝȜșȪȕȡȬȠȟȭ țȎȑȞȓȐȎȠȓșȖ Ȗȕ ȘȎȞȏȖȒȎ ȘȞȓȚțȖȭ, ȠȎȘȘȎȘ ȖȟȝȜșȪȕȜȐȎțȖȓȒȞȡȑȖȣȚȎȠȓȞȖȎșȜȐșȖȏȜȠȞȓȏȡȓȠȟȝȓȤȖȎșȪțȩȣ ȡȟșȜȐȖȗ ȫȘȟȝșȡȎȠȎȤȖȖ (ȐȜșȪȢȞȎȚ, ȑȞȎȢȖȠ, ȚȜșȖȏȒȓț), șȖȏȜ țȓȤȓșȓȟȜȜȏȞȎȕțȜȝȜȫȘȜțȜȚȖȥȓȟȘȖȚȟȜȜȏȞȎȔȓțȖȭȚ, țȎȝȞȖȚȓȞ, ȝȞȖȚȓțȓțȖȓ ȝșȎȠȖțȩ. ǻȎȑȞȓȐȎȠȓșȖȖȕȘȎȞȏȖȒȎȘȞȓȚțȖȭȖȕȑȜȠȎȐșȖȐȎȬȠȖȕȝȜȞȜȦȘȜȐ SiC ȚȓȠȜȒȎȚȖ ȑȜȞȭȥȓȑȜ ȝȞȓȟȟȜȐȎțȖȭ Ȗ ȦșȖȘȓȞțȜȑȜ șȖȠȪȭ. ǸȞȜȚȓ ȠȜȑȜ, ȟȠȓȞȔțȖ ȖȕSiC ȘȓȞȎȚȖȘȖȖȟȝȜșȪȕȡȬȠȟȭ ȐȜȝȠȖȥȓȟȘȖȣ ȝȞȖȏȜȞȎȣ Ȑ ȘȎȥȓȟȠȐȓ ȖȟȠȜȥțȖȘȜȐ ȖțȢȞȎȘȞȎȟțȜȑȜ ȖȕșȡȥȓțȖȭ (ȑșȜȏȎȞȩ).

ǰȜȓțțȎȭ ȠȓȣțȖȘȎ

ǰ țȎȟȠȜȭȧȓȓ ȐȞȓȚȭ Ȑ ǾȜȟȟȖȖ ȝȞȜȖȕȐȜȒȭȠȟȭ ȘȓȞȎȚȖȥȓȟȘȖȓ ȝșȎȟȠȖțȩ Ȓșȭ ȟȞȓȒȟȠȐ ȖțȒȖȐȖȒȡȎșȪțȜȗ ȕȎȧȖȠȩ (ȏȞȜțȓȫșȓȚȓțȠȩ, ȏȞȜțȓȧȖȠȩ) ȚȜțȜȝȎțȓșȖ [132].

ǮȠȜȚțȎȭ ȫțȓȞȑȓȠȖȘȎ

ǾȎȕȐȖȠȖȓ ȎȠȜȚțȜȗ ȫțȓȞȑȓȠȖȘȖ ȝȞȖȐșȓȘșȜ ȝȓȞȐȜȟȠȓȝȓțțȜȓ ȐțȖȚȎțȖȓ Ș ȚȎȠȓȞȖȎșȎȚ, ȜȏȓȟȝȓȥȖȐȎȬȧȖȚ țȜȞȚȎșȪțȜȓ ȢȡțȘȤȖȜțȖȞȜȐȎțȖȓ Ȗ ȕȎȧȖȠȡ ȭȒȓȞțȩȣ ȞȓȎȘȠȜȞȜȐ ȞȎȕșȖȥțȜȑȜ ȠȖȝȎ, țȎȥȖțȎȭ ȜȠ ȠȞȎȒȖȤȖȜțțȩȣ, ȞȎȏȜȠȎȬȧȖȣțȎȚȓȒșȓțțȩȣ țȓȗȠȞȜțȎȣ, ȖȘȜțȥȎȭ ȠȓȞȚȜȭȒȓȞțȩȚȖ. ǿȞȓȒȖ ȫȠȖȣ ȚȎȠȓȞȖȎșȜȐ ȐȖȒțȜȓ ȚȓȟȠȜ ȕȎțȖȚȎȓȠ ȟȝȓȤȖȎșȪțȎȭ ȘȓȞȎȚȖȘȎ.

ǺȎșȩȓȐȓȟȎȎȠȜȚȜȐȖțȎșȖȥȖȓȡȑșȓȞȜȒȎ, ȎȘȠȖȐțȜȝȜȑșȜȧȎȬȧȓȑȜ țȓȗȠȞȜțȩ, Ȑ ȟȜȥȓȠȎțȖȖ ȟ ȞȎȒȖȎȤȖȜțțȜȗ ȟȠȜȗȘȜȟȠȪȬ ȝȜȕȐȜșȭȬȠ ȖȟȝȜșȪȕȜȐȎȠȪSiC ȐȘȎȥȓȟȠȐȓȚȎȠȓȞȖȎșȎȒșȭȜȏșȖȤȜȐȘȖȟȠȓțȜȘȎȠȜȚțȩȣ Ȗ ȠȓȞȚȜȭȒȓȞțȩȣ ȞȓȎȘȠȜȞȜȐ. ǽȜȫȠȜȚȡ, ȘȓȞȎȚȖȘȎ țȎ ȏȎȕȓ ȘȎȞȏȖȒȎ ȘȞȓȚțȖȭȝȓȞȟȝȓȘȠȖȐțȎȒșȭȖȟȝȜșȪȕȜȐȎțȖȭȐȫțȓȞȑȓȠȖȘȓ. ǰȭȒȓȞțȩȣ

ȫțȓȞȑȓȠȖȥȓȟȘȖȣȡȟȠȎțȜȐȘȎȣȟȞȓȒȖȝȞȜȥȖȣȚȎȠȓȞȖȎșȜȐȖȟȝȜșȪȕȡȓȠȟȭ ȘȎȞȏȖȒȘȞȓȚțȓȐȎȭȘȓȞȎȚȖȘȎȒșȭȠȓȝșȜȖȕȜșȭȤȖȖȜȏȜșȜȥȓȘȠȓȝșȜȐȩȒȓșȭȬȧȖȣ ȫșȓȚȓțȠȜȐ, ȠȓȝșȜȐȜȗ Ȗ ȫșȓȘȠȞȖȥȓȟȘȜȗ ȖȕȜșȭȤȖȖ ȝȓȞȐȜȗ ȟȠȓțȘȖ ȝșȎȕȚȓțțȜȗ ȘȎȚȓȞȩ Ȗ ȒȞ.

ǰ ȞȎȏȜȠȓ [133] ȞȎȟȟȚȜȠȞȓțȩ ȟȜȐȞȓȚȓțțȜȓ ȟȜȟȠȜȭțȖȓ ȞȎȏȜȠ ȝȜ ȖȟȝȜșȪȕȜȐȎțȖȬ SiC Ȑ ȎȠȜȚțȜȗ ȫțȓȞȑȓȠȖȘȓ Ȑ ȘȎȥȓȟȠȐȓ ȕȎȧȖȠțȩȣ ȫșȓȚȓțȠȜȐ Ȑ ȠȓȞȚȜȭȒȓȞțȩȣ ȞȓȎȘȠȜȞȎȣ Ȗ ȐȜȕȚȜȔțȜȟȠȪ ȝȞȖȚȓțȓțȖȭ Ȗȣ Ȑ ȏșȖȔȎȗȦȓȓ ȐȞȓȚȭ Ȑ ȝȞȜȑȞȎȚȚȓ ȞȎȕȞȎȏȜȠȘȖ ǺȓȔȒȡțȎȞȜȒțȜȑȜ ȠȓȞȚȜȭȒȓȞțȜȑȜȫȘȟȝȓȞȖȚȓțȠȎșȪțȜȑȜȞȓȎȘȠȜȞȎ(International Thermonuclear Experimental Reactor – ITER) [134]. ǶȕȎțȎșȖȕȎ[135] ȟșȓȒȡȓȠ,

ȥȠȜ ȖȟȟșȓȒȜȐȎțȖȭ Ȑ ȜȏșȎȟȠȖ ȞȎȕȞȎȏȜȠȘȖ ȠȎȘȖȣ ȘȜȚȝȜȕȖȠȜȐ Ȓșȭ ȖȟȝȜșȪȕȜȐȎțȖȭ Ȗȣ Ȑ ȠȓȞȚȜȭȒȓȞțȩȣ Ȗ ȐȩȟȜȘȜȠȓȚȝȓȞȎȠȡȞțȩȣ ȎȠȜȚțȩȣ ȞȓȎȘȠȜȞȎȣ ȞȎȕȐȖȐȎȬȠȟȭ ȜȥȓțȪ ȖțȠȓțȟȖȐțȜ. ǿ ȜȒțȜȗ ȟȠȜȞȜțȩ, ȖȒȓȠ ȞȎȕȐȖȠȖȓ Ȗ ȟȜȐȓȞȦȓțȟȠȐȜȐȎțȖȓ ȠȓȣțȜșȜȑȖȗ ȝȜșȡȥȓțȖȭ SiCf/SiC-ȚȎ- ȠȓȞȖȎșȜȐ ȟ ȤȓșȪȬ ȝȞȖȏșȖȔȓțȖȭ Ș ȠȞȓȏȜȐȎțȖȭȚ, ȝȞȓȒȨȭȐșȭȓȚȩȚ Ș ȠȎȘȖȚȚȎȠȓȞȖȎșȎȚ(ȠȎȏșȖȤȎ9.8) ȒșȭȖȣȖȟȝȜșȪȕȜȐȎțȖȭȐȘȎȥȓȟȠȐȓ

ȀȎȏșȖȤȎ 9.8. ǿȐȜȗȟȠȐȎ ȘȜȚȝȜȕȖȠȎ SiC/SiC, ȝȜșȡȥȓțțȜȑȜ ȝȜ ȚȓȠȜȒȡ NITE, ȝȜ ȟȞȎȐțȓțȖȬ ȟ ȠȞȓȏȜȐȎțȖȭȚȖ Ȓșȭ ȚȎȠȓȞȖȎșȜȐ, ȝȞȓȒțȎȕțȎȥȓțțȩȣ Ȓșȭ ȒșȖȠȓșȪțȜȗ ȫȘȟȝșȡȎȠȎȤȖȖ ȠȓȞȚȜȭȒȓȞțȩȣ ȞȓȎȘȠȜȞȜȐ [135]

ǻȓȜȏșȡȥȓțțȩȗ;2/3 ȝȞȓȒȓșȎ ȡȝȞȡȑȜȟȠȖ ȝȞȖ ȞȎȟȠȭȔȓțȖȖ;

ȜȤȓțȘȎ Ȓșȭ 10-ȘȖșȜȑȞȎȚȚȜȐȜȗ ȝȎȞȠȖȖ

276 ǮȑȓȓȐ Ǽ.Ǯ., ǯȓșȭȓȐ Ǯ.dz., ǯȜșȠȜȐȓȤ ǻ.ǿ., ǸȖȟȓșȓȐ ǰ.ǿ., ǸȜțȎȘȜȐȎ Ǿ.ǰ. Ȗ ȒȞ

ȟȜȟȠȎȐțȩȣ ȥȎȟȠȓȗ ȐțȡȠȞȓțțȖȣ ȫșȓȚȓțȠȜȐ ȠȓȞȚȜȭȒȓȞțȜȑȜ ȞȓȎȘȠȜȞȎ. ǿ ȒȞȡȑȜȗȟȠȜȞȜțȩ, ȝȞȜȐȜȒȭȠȟȭȫȘȟȝȓȞȖȚȓțȠȩȝȜȚȜȒȓșȖȞȜȐȎțȖȬȐȜȕȒȓȗȟȠȐȖȭ ȡȟșȜȐȖȗ ȠȓȞȚȜȭȒȓȞțȜȑȜ ȞȓȎȘȠȜȞȎ (ȐȩȟȜȘȖȓ ȠȓȚȝȓȞȎȠȡȞȩ, țȓȗȠȞȜțțȜȓ ȜȏșȡȥȓțȖȓ, ȏȜȚȏȎȞȒȖȞȜȐȘȎȎȠȜȚȎȚȖȖȕȜȠȜȝȜȐȐȜȒȜȞȜȒȎ Ȗ ȖȜțȎȚȖ ȑȓșȖȭ Ȗ Ƞ. Ȓ.).

ǶȟȟșȓȒȜȐȎșȜȟȪȞȎȟȦȖȞȓțȖȓȘȎȞȏȖȒȎȘȞȓȚțȖȭȝȜȒȐȜȕȒȓȗȟȠȐȖȓȚ țȓȗȠȞȜțțȜȑȜȜȏșȡȥȓțȖȭ. ǰȩȟȜȘȎȭȡȟȠȜȗȥȖȐȜȟȠȪ ȚȜțȜȘȞȖȟȠȎșșȖȥȓȟȘȜȑȜȘȎȞȏȖȒȎȘȞȓȚțȖȭȘȐȜȕȒȓȗȟȠȐȖȬȝȞȜȒȜșȔȖȠȓșȪțȜȑȜȜȏșȡȥȓțȖȭ țȓȗȠȞȜțȎȚȖ, ȝȜ-ȐȖȒȖȚȜȚȡ, ȟȜȐȓȞȦȓțțȜ țȓȕȎȐȖȟȖȠțȖȜȠȝȜșȖȠȖȝȎ, țȖ ȜȠ ȜȞȖȓțȠȎȤȖȖ ȘȞȖȟȠȎșșȜȐ. ǽȞȖ ȒȜȕȓ ȜȘȜșȜ 3¸1020 ȟȚ 2 ȖȕȚȓțȓțȖȗ ȞȎȕȚȓȞȜȐ ȜȏȞȎȕȤȜȐ țȓ țȎȏșȬȒȎȓȠȟȭ, ȥȠȜ ȕȎȟȠȎȐșȭȓȠ ȝȜșȎȑȎȠȪ, ȥȠȜ ȚȓȔȒȡ ȜȏȞȎȕȜȐȎțȖȓȚ ȞȎȒȖȎȤȖȜțțȩȣ ȝȜȐȞȓȔȒȓțȖȗ Ȗ Ȗȣ ȕȎșȓȥȖȐȎțȖȓȚ, ȟȢȜȞȚȖȞȜȐȎșȜȟȪ ȞȎȐțȜȐȓȟȖȓ, ȥȓȚȡ ȟȝȜȟȜȏȟȠȐȡȓȠ ȝȜȐȩȦȓțțȎȭ ȠȓȚȝȓȞȎȠȡȞȎ. ǿșȓȒȡȓȠ ȜȠȚȓȠȖȠȪ, ȥȠȜ Ȑ ȟșȡȥȎȓ ȝȞȖȚȓțȓțȖȭ ȣȖȚȖȥȓȟȘȖ țȓȜȒțȜȞȜȒțȩȣ ȘȜȚȝȜȕȖȤȖȜțțȩȣ ȚȎȠȓȞȖȎșȜȐ, ȐșȖȭțȖȓ țȓȗȠȞȜțțȜȑȜȜȏșȡȥȓțȖȭȞȎȕșȖȥțȜȒșȭȜȠȒȓșȪțȩȣȘȜȚȝȜțȓțȠ. ǻȎȘȜȝșȓțȖȓȑȎȕȜȐȖȟȠȞȡȘȠȡȞțȩȣȒȓȢȓȘȠȜȐȐȩȕȩȐȎȓȠȞȎȟȝȡȣȎțȖȓ, ȟȘȜȞȜȟȠȪ ȘȜȠȜȞȜȑȜ Ȓșȭ țȓȘȜȠȜȞȩȣ ȠȖȝȜȐ SiC/SiC-ȘȜȚȝȜȕȖȠȜȐ ȜȘȎȕȩȐȎȓȠȟȭ ȞȎȕșȖȥțȜȗ Ȓșȭ ȞȎȕțȩȣ ȘȜȚȝȜțȓțȠ, ȥȠȜ ȝȞȖȐȜȒȖȠ Ș ȡȣȡȒȦȓțȖȬ Ȗȣ ȚȓȣȎțȖȥȓȟȘȖȣ ȟȐȜȗȟȠȐ.

ǰ ȝȜȟșȓȒțȖȓ ȒȓȟȭȠȖșȓȠȖȭ ȃȃ-ȑȜ ȐȓȘȎ ȞȭȒ țȎȤȖȜțȎșȪțȩȣ Ȗ ȚȓȔȒȡțȎȞȜȒțȩȣȜȞȑȎțȖȕȎȤȖȗ, ȐȠȜȚȥȖȟșȓǺǮDZǮȀȋ(Internatinal Atomic Energy Agency – IAEA) ȝȞȖșȎȑȎȬȠ ȕțȎȥȖȠȓșȪțȩȓ ȡȟȖșȖȭ ȝȜ ȞȎȕȞȎȏȜȠȘȓ ȖțȓȞȠțȜȑȜ ȚȎȠȞȖȥțȜȑȜ ȑȜȞȬȥȓȑȜ (Inert Matrix Fuel – IMF) țȎ ȜȟțȜȐȓȝșȡȠȜțȖȭȖȒȞȡȑȖȣȠȞȎțȟȡȞȎțȜȐȩȣȫșȓȚȓțȠȜȐȒșȭȭȒȓȞțȩȣ ȞȓȎȘȠȜȞȜȐ. ǼȒțȖȚ Ȗȕ ȘȎțȒȖȒȎȠȜȐ Ȓșȭ ȖȕȑȜȠȜȐșȓțȖȭ IMF ȭȐșȭȓȠȟȭ ȘȎȞȏȖȒ ȘȞȓȚțȖȭ. [136, 137]. ǰ [138] ȝȞȖȐȓȒȓțȩ ȒȎțțȩȓ ȝȜ ȟȐȜȗȟȠȐȎȚ ȜȏșȡȥȓțțȜȑȜ Ȗ țȓ ȜȏșȡȥȓțțȜȑȜ SiC Ȓșȭ ȜȤȓțȘȖ ȐȜȕȚȜȔțȜȟȠȖ ȖȟȝȜșȪȕȜȐȎțȖȭ ȫȠȜȑȜ ȚȎȠȓȞȖȎșȎ Ȑ ȠȓȝșȜȐȩȒȓșȭȬȧȖȣ ȫșȓȚȓțȠȎȣ ȞȓȎȘȠȜȞȜȐ (TRISO). ȁȟȠȎțȜȐșȓțȜ, ȥȠȜ ȞȭȒ ȣȎȞȎȘȠȓȞȖȟȠȖȘ ȓȧȓ țȓ ȝȜșțȜȟȠȪȬ ȟȜȜȠȐȓȠȟȠȐȡȓȠ țȓȜȏȣȜȒȖȚȩȚ ȝȎȞȎȚȓȠȞȎȚ, ȜȒțȎȘȜ ȓȟȠȪ ȝȓȞȟȝȓȘȠȖȐȩȒșȭȡșȡȥȦȓțȖȭȣȎȞȎȘȠȓȞȖȟȠȖȘȚȎȠȓȞȖȎșȜȐ[139, 140]. dzȧȓ Ȑ ȘȜțȤȓ 70 ȑ. ȝȞȜȦșȜȑȜ ȐȓȘȎ ȘȎȞȏȖȒ ȘȞȓȚțȖȭ ȝȞȖȚȓțȭșȟȭ Ȓșȭ ȕȎȧȖȠțȜȑȜȝȜȘȞȩȠȖȭȚȖȘȞȜȦȎȞȖȘȜȐȒȓșȭȧȓȑȜȟȭȡȞȎțȎ. ǻȎ ȦȎȞȖȘȖ ȚȓȠȜȒȜȚ CVD ȝȜȟșȓȒȜȐȎȠȓșȪțȜ țȎțȜȟȖșȖ ȕȎȧȖȠțȩȗ ȟșȜȗ ȝȖȞȜȡȑșȓȞȜȒȎ, ȘȎȞȏȖȒȎ ȘȞȓȚțȖȭ Ȗ ȜȝȭȠȪ ȝȖȞȜȡȑșȓȞȜȒȎ. ǶȟȝȜșȪȕȜȐȎșȟȭ ȚȓȠȖșȠȞȖȣșȜȞȟȖșȎț Ȑ ȝȜȠȜȘȓ ȐȜȒȜȞȜȒȎ [141].

ǿȜȐȞȓȚȓțțȩȓ ȞȓȎȘȠȜȞȩ ȜȠțȜȟȭȠȟȭ ȘȜ ȐȠȜȞȜȚȡ Ȗ ȠȞȓȠȪȓȚȡ ȝȜȘȜșȓțȖȬ. ǻȓȒȎȐțȜȝȞȖțȭȠȎȚȓȔȒȡțȎȞȜȒțȎȭȝȞȜȑȞȎȚȚȎ«ǶțȖȤȖȎȠȖȐȎ ȥȓȠȐȓȞȠȜȑȜȝȜȘȜșȓțȖȭ» (Generation IV initiative) ȝȜȞȎȕȞȎȏȜȠȘȓȦȓȟȠȖ ȠȖȝȜȐ ȭȒȓȞțȩȣ ȞȓȎȘȠȜȞȜȐ [142]. ǰ ȝȞȜȑȞȎȚȚȓ ȡȥȎȟȠȐȡȬȠ dzȐȞȜȟȜȬȕ, ǿȆǮ, ǾȜȟȟȖȭ, ǸȖȠȎȗ, ȍȝȜțȖȭ, ȂȞȎțȤȖȭ, ǸȎțȎȒȎ Ȗ ȞȭȒ ȒȞȡȑȖȣ ȟȠȞȎț. ǰ 2021 ȑ. ȝșȎțȖȞȡȓȠȟȭ ȕȎȝȡȟȠȖȠȪ ȐȩȟȜȘȜȠȓȚȝȓȞȎȠȡȞțȩȗ ȞȓȎȘȠȜȞ(Very High Temperature Reactor – VHTR) ȜȠțȜȟȭȧȖȗȟȭȘ ȏȡ-

ȒȡȧȓȚȡ ȝȜȘȜșȓțȖȬ ȭȒȓȞțȩȣ ȝȞȜȖȕȐȜȒȟȠȐ (Next Generation Nuclear Plant – NGNP). ȋȠȜ ȞȓȎȘȠȜȞ ȟ ȑȞȎțȡșȖȞȜȐȎțțȩȚ ȠȜȝșȖȐȜȚ (Pebble bed reactor). ȀȜȝșȖȐȜ, ȝȞȓȒȟȠȎȐșȭȓȠ ȟȜȏȜȗ, ȦȎȞȖȘȖ Ȗȕ ȞȎȟȧȓȝșȭȬȧȓȑȜȟȭ ȚȎȠȓȞȖȎșȎ (235U), ȝȜȘȞȩȠȜȑȜ ȟșȜȓȚ ȘȎȞȏȖȒȎ ȘȞȓȚțȖȭ.

ǼȝȠȖȘȎ

ǰȝȜȟșȓȒțȖȓȑȜȒȩȘȎȞȏȖȒȘȞȓȚțȖȭȖȟȝȜșȪȕȡȓȠȟȭȐȘȎȥȓȟȠȐȓȚȎȠȓȞȖȎșȎ Ȓșȭ ȖȕȑȜȠȜȐșȓțȖȭ ȜȝȠȖȥȓȟȘȖȣ ȫșȓȚȓțȠȜȐ. ǽȞȓȖȚȡȧȓȟȠȐȎ SiC, ȘȎȘȚȎȠȓȞȖȎșȎȒșȭȜȝȠȖȥȓȟȘȖȣȫșȓȚȓțȠȜȐ – ȐȩȟȜȘȖȗȚȜȒȡșȪȡȝȞȡȑȜȟȠȖ, ȒȜȟȠȎȠȜȥțȜȚȎșȎȭȝȜȞȖȟȠȜȟȠȪ, țȖȕȘȖȗȘȜȫȢȢȖȤȖȓțȠȠȓȞȚȖȥȓȟȘȜȑȜ ȞȎȟȦȖȞȓțȖȭ, ȐȩȟȜȘȎȭȠȓȝșȜȝȞȜȐȜȒțȜȟȠȪ, ȜȠȟȡȠȟȠȐȖȓȠȜȘȟȖȥțȜȟȠȖȝȜ ȟȞȎȐțȓțȖȬ ȟ ȏȓȞȖșșȖȓȚ. ǵȓȞȘȎșȎ Ȗȕ ȘȎȞȏȖȒȎ ȘȞȓȚțȖȭ ȜȏșȎȒȎȬȠ ȡțȖȘȎșȪțȩȚ ȟȜȥȓȠȎțȖȓȚ ȚȎșȜȑȜ ȐȓȟȎ Ȗ ȐȩȟȜȘȜȗ ȟȠȎȏȖșȪțȜȟȠȖ ȑȓȜȚȓȠȞȖȥȓȟȘȖȣ ȝȎȞȎȚȓȠȞȜȐ. ǼțȖ ȖȚȓȬȠ ȜȥȓțȪ ȐȩȟȜȘȖȗ ȘȜȫȢȢȖȤȖȓțȠ ȜȠȞȎȔȓțȖȭȐȜȏșȎȟȠȖȐȎȘȡȡȚțȜȑȜȡșȪȠȞȎȢȖȜșȓȠȎ[144–148]. ǵȓȞȘȎșȎ ȚȜȑȡȠ ȡȟȝȓȦțȜ ȫȘȟȝșȡȎȠȖȞȜȐȎȠȪȟȭ Ȑ ȜȘȜșȜȕȓȚțȜȚ ȝȞȜȟȠȞȎțȟȠȐȓ. ǸȓȞȎȚȖȘȡțȎȜȟțȜȐȓSiC ȟȞȎȐțȖȠȓșȪțȜșȓȑȘȜȜȏȞȎȏȎȠȩȐȎȠȪȖȖȕȑȜȠȎȐșȖȐȎȠȪ șȓȑȘȖȓ ȘȜțȟȠȞȡȘȤȖȖ ȏȜșȪȦȖȣ ȞȎȕȚȓȞȜȐ. ǿ ȒȞȡȑȜȗ ȟȠȜȞȜțȩ, CVD SiC ȖȚȓȓȠ ȏȜșȪȦȡȬ ȝșȜȠțȜȟȠȪ, ȥȠȜ ȭȐșȭȓȠȟȭ țȓȜȏȣȜȒȖȚȩȚ Ȓșȭ ȐȩȟȜȘȜȘȎȥȓȟȠȐȓțțȜȑȜ Ȗ ȐȩȟȜȘȜȠȜȥțȜȑȜ ȝȜșȖȞȜȐȎțȖȭ. ǰ țȎȟȠȜȭȧȓȓ ȐȞȓȚȭȞȭȒȢȖȞȚȖȝȞȎȐȖȠȓșȪȟȠȐȓțțȩȣȜȞȑȎțȖȕȎȤȖȗȐǿȆǮ, ǾȜȟȟȖȖ, ȍȝȜțȖȖ ȝȞȜȖȕȐȜȒȭȠ ȜȝȠȖȥȓȟȘȖȓ ȒȓȠȎșȖ țȎ ȜȟțȜȐȓ ȘȎȞȏȖȒȎ ȘȞȓȚțȖȭ: Ȑ ȠȎȏșȖȤȓ 9.9. ȝȞȓȒȟȠȎȐșȓțȩ ȝȎȞȎȚȓȠȞȩ ȘȎȞȏȖȒ ȘȞȓȚțȖȓȐȩȣ ȚȎȠȓȞȖȎșȜȐ Ȓșȭ ȝȞȖȚȓțȓțȖȭ Ȑ ȜȝȠȖȥȓȟȘȖȣ ȡȟȠȞȜȗȟȠȐȎȣ. ǺȎȠȓȞȖȎș ȚȎȞȘȖPureSiCTM ȝȜșȡȥȓțȚȓȠȜȒȜȚȣȖȚȖȥȓȟȘȜȑȜȝȎȞȜȢȎȕțȜȑȜȜȟȎȔȒȓțȖȭ (CVD) ȖȜȠșȖȥȎȓȠȟȭȐȩȟȜȘȜȗȥȖȟȠȜȠȜȗ, Ȏ ȚȎȠȓȞȖȎșUltraSiCTM Single Phase Silicon Carbide ȜȝȠȖȚȖȕȖȞȜȐȎț ȝȜ ȝȜșȖȘȞȖȟȠȎșșȖȥȓȟȘȜȗ ȟȠȞȡȘȠȡȞȓ Ȗ ȜȠșȖȥȎȓȠȟȭ ȟȠȎȏȖșȪțȜȟȠȪȬ ȝȎȞȎȚȓȠȞȜȐ Ȑ ȦȖȞȜȘȜȚ ȠȓȚȝȓȞȎȠȡȞțȜȚ ȒȖȎȝȎȕȜțȓ, ȚȎșȩȚ ȘȜȫȢȢȖȤȖȓțȠȜȚ ȠȓȞȚȖȥȓȟȘȜȑȜ ȞȎȟȦȖȞȓțȖȭ Ȗ ȐȩȟȜȘȜȗ ȠȓȝșȜȝȞȜȐȜȒțȜȟȠȪȬ.

278 ǮȑȓȓȐ Ǽ.Ǯ., ǯȓșȭȓȐ Ǯ.dz., ǯȜșȠȜȐȓȤ ǻ.ǿ., ǸȖȟȓșȓȐ ǰ.ǿ., ǸȜțȎȘȜȐȎ Ǿ.ǰ. Ȗ ȒȞ

ȀȎȏșȖȤȎ 9.9. ǽȎȞȎȚȓȠȞȩ ȚȎȠȓȞȖȎșȜȐ ȢȖȞȚȩ CoorsTek, Inc. (USA)[149]

ǰ ȝȜȟșȓȒțȓȓ ȒȓȟȭȠȖșȓȠȖȓ ȞȎȕȞȎȏȎȠȩȐȎȓȠȟȭ ȞȭȒ ȝȞȜȓȘȠȜȐ ȝȜ ȟȜȕȒȎțȖȬȘȜȟȚȖȥȓȟȘȖȣȠȓșȓȟȘȜȝȜȐ. ȋȠȜȠȎȘȖȓȝȞȜȓȘȠȩȘȎȘ«ǽȜȖȟȘȜȐȖȘ ȖțȢȞȎȘȞȎȟțȩȣ ȜȏȨȓȘȠȜȐ» (Infrared Imaging Surveyor – IRIS) [150],

ȝȞȓȒșȜȔȓțțȩȗ ǶțȟȠȖȠȡȠȜȚ ȘȜȟȚȖȥȓȟȘȖȣ ȖȟȟșȓȒȜȐȎțȖȗ (ISAS), ȍȝȜțȖȭ Ȗ ȚȓȔȒȡțȎȞȜȒțȩȗ ȝȞȜȓȘȠ ȘȜȟȚȖȥȓȟȘȜȑȜ ȖțȢȞȎȘȞȎȟțȜȑȜ ȠȓșȓȟȘȜȝȎ (Space Infrared Telescope for Cosmology and Astrophysics – SPICA) [151]. ǽȞȜȓȘȠ SPICA ȞȎȕȞȎȏȎȠȩȐȎȓȠȟȭ ȟȜȐȚȓȟȠțȜ dzȐȞȜȝȓȗȟȘȖȚ ȘȜȟȚȖȥȓȟȘȖȚ ǮȑȓțȠȟȠȐȜȚ (ESA) Ȗ ǮȫȞȜȘȜȟȚȖȥȓȟȘȖȚ ȎȑȓțȠȟȠȐȜȚ ȍȝȜțȖȖ (JAXA). ǼȏȎ ȝȞȜȓȘȠȎ ȐȘșȬȥȎȬȠ, Ȑ ȠȜȚ ȥȖȟșȓ, ȞȎȕȞȎȏȜȠȘȡȞȓȢșȓȘȠȜȞȜȐȏȜșȪȦȖȣȚȎȟȦȠȎȏȜȐȟȎȝȓȞȠȡȞȜȗ(ȏȜșȓȓ 3 Ț) Ȓșȭ ȞȓȑȖȟȠȞȎȤȖȖ ȟșȎȏȩȣ ȟȐȓȠȜȐȩȣ ȝȜȠȜȘȜȐ Ȗȕ ȑșȡȏȜȘȜȑȜ ȘȜȟȚȜȟȎ. ǰ ȥȎȟȠțȜȟȠȖ, ȐȝȞȜȓȘȠȓSPICA ȝșȎțȖȞȡȓȠȟȭȖȕȑȜȠȜȐșȓțȖȓȠȓșȓȟȘȜȝȎ ȟ ȎȝȓȞȠȡȞȜȗ 3.5 Ț Ȓșȭ ȞȎȏȜȠȩ Ȑ ȒȎșȓȘȜȚ ȖțȢȞȎȘȞȎȟțȜȚ ȒȖȎȝȎȕȜțȓ (5 ȚȘȚ 200 ȚȘȚ) ȝȞȖ ȘȞȖȜȑȓțțȩȣ ȠȓȚȝȓȞȎȠȡȞȎȣ (4.5 Ǹ). ǻȎ ǵȓȚșȓ ȖȟȝȜșȪȕȜȐȎțȖȓ ȖțȢȞȎȘȞȎȟțȩȣ ȠȓșȓȟȘȜȝȜȐ ȝȞȎȘȠȖȥȓȟȘȖ țȓȐȜȕȚȜȔțȜ. ǰȜ-ȝȓȞȐȩȣ, ȎȠȚȜȟȢȓȞȎ ȝȜȑșȜȧȎȓȠ ȖțȢȞȎȘȞȎȟțȜȓ ȖȕșȡȥȓțȖȓ, Ȏ ȐȜ-ȐȠȜȞȩȣ, ȟȎȚ ȠȓșȓȟȘȜȝ ȝȞȖ ȘȜȚțȎȠțȜȗ ȠȓȚȝȓȞȎȠȡȞȓ ȖȕșȡȥȎȓȠ ȖțȢȞȎȘȞȎȟțȩȓ ȐȜșțȩ, ȕȎȑȞȭȕțȭȭ ȠȓȚ ȟȎȚȩȚ ȟȐȜȖ ȟȜȏȟȠȐȓțțȩȓ ȒȎțțȩȓ. ǰ ȟȐȭȕȖ ȟ ȫȠȖȚ, țȎ ȜȞȏȖȠȓ Ȓșȭ ȒȜȟȠȖȔȓțȖȭ ȐȩȟȜȘȜȗ ȥȡȐȟȠȐȖȠȓșȪțȜȟȠȖ Ȑȟȓ ȠȓșȓȟȘȜȝȩ ȒȜșȔțȩ ȜȣșȎȔȒȎȠȪȟȭ ȒȜ ȘȞȖȜȑȓțțȩȣ ȠȓȚȝȓȞȎȠȡȞ. ȀȓșȓȟȘȜȝSPICA ȒȜșȔȓțȏȩȠȪȕȎȝȡȧȓțțȎȜȞȏȖȠȡȐ ȠȜȥȘȡ ǹȎȑȞȎțȔȎ L2 Ȑ 2017 ȑ. ǺȎȟȟȎ ȠȓșȓȟȘȜȝȎ țȓ ȒȜșȔțȎ ȝȞȓȐȩȦȎȠȪ 700 Șȑ. Dzșȭ ȖȕȑȜȠȜȐșȓțȖȭȞȓȢșȓȘȠȜȞȎȞȎȟȟȚȎȠȞȖȐȎșȟȭ ȞȭȒȚȎȠȓȞȖȎșȜȐ: ȝșȎȐșȓțȩȗ ȘȐȎȞȤ, ȏȓȞȖșșȖȗ, ȘȎȞȏȖȒ ȘȞȓȚțȖȭ Ȗ ȚȎȠȞȖȥțȩȗ

ȘȜȚȝȜȕȖȠ, ȎȞȚȖȞȜȐȎțțȩȗ ȡȑșȓȞȜȒțȩȚȖ ȐȜșȜȘțȎȚȖ. ǽȜ ȒȎțțȩȚ țȎ 2008 ȑ ȞȎȕȞȎȏȜȠȥȖȘȖ ȟȒȓșȎșȖ ȐȩȏȜȞ Ȑ ȝȜșȪȕȡ ȘȎȞȏȖȒȎ ȘȞȓȚțȖȭ. ǯȡȒȡȠ ȖȟȝȜșȪȕȜȐȎțȩ ȘȎȞȏȖȒȘȞȓȚțȖȓȐȩȓ ȚȎȠȓȞȖȎșȩ SiC100, HBSiC, C/SiC, ȞȓȎȘȤȖȜțțȜ ȟȖțȠȓȕȖȞȜȐȎțțȩȗ SiC Ȗ NT-SiC. [152, 153].

ǺȓȒȖȤȖțȎ

ǸȓȞȎȚȖȥȓȟȘȖȓ ȚȎȠȓȞȖȎșȩ ȜȏșȎȒȎȬȠ ȏȜșȪȦȓȗ ȏȖȜșȜȑȖȥȓȟȘȜȗ ȟȜȐȚȓȟȠȖȚȜȟȠȪȬ, ȥȓȚ ȚȓȠȎșșȩ Ȗ ȝȜșȖȚȓȞȩ, Ȗ ȫȠȜ ȝȜȕȐȜșȭȓȠ ȖȟȝȜșȪȕȜȐȎȠȪ Ȗȣ Ȑ ȚȓȒȖȤȖțȓ, ȘȎȘ Ȓșȭ ȖȚȝșȎțȠȎȤȖȖ ȖȟȘȡȟȟȠȐȓțțȩȣ ȜȞȑȎțȜȐ, ȠȎȘ Ȗ Ȑ ȘȎȥȓȟȠȐȓ ȘȜțȟȠȞȡȘȤȖȜțțȩȣ ȚȎȠȓȞȖȎșȜȐ Ȑ ȏȖȜȠȓȣțȜșȜȑȖȖ Ȗ ȑȓțțȜȗ ȖțȔȓțȓȞȖȖ. DZșȎȐțȩȗ țȓȒȜȟȠȎȠȜȘ ȠȞȎȒȖȤȖȜțțȩȣ ȜȞȠȜȝȓȒȖȥȓȟȘȖȣȚȎȠȓȞȖȎșȜȐȠȖȠȎțȎ, ȘȜȏȎșȪȠ-ȣȞȜȚȎȖțȓȞȔȎȐȓȬȧȓȗ ȟȠȎșȖ – Ȗȣ ȖȕțȎȦȖȐȎȓȚȜȟȠȪ. Ƕȕ-ȕȎ ȫȠȜȑȜ ȝȞȜȠȓȕȩ țȓȜȏȣȜȒȖȚȜ ȕȎȚȓțȭȠȪ ȥȓȞȓȕ 10–15 șȓȠ. ǽȜȐȓȞȣțȜȟȠȖ ȚȓȠȎșșȖȥȓȟȘȖȣ ȖȚȝșȎțȠȎȠȜȐ ȜȏȓȟȝȓȥȖȐȎȬȠ ȞȎȕșȖȥțȡȬ ȓȟȠȓȟȠȐȓțțȡȬ ȖțȠȓȑȞȎȤȖȬ ȟ ȘȜȟȠȪȬ ȖșȖ ȒȞȡȑȖȚȖ ȠȘȎțȭȚȖ ȜȞȑȎțȖȕȚȎ Ȑ ȕȎȐȖȟȖȚȜȟȠȖ ȜȠ ȏȖȜȟȜȐȚȓȟȠȖȚȜȟȠȖ ȚȎȠȓȞȖȎșȎȖȚȝșȎțȠȎȠȜȐ. ǽȜȫȠȜȚȡȠȞȓȏȡȓȠȟȭ ȚȓȣȎțȖȥȓȟȘȖȡȟȠȜȗȥȖȐȩȗ ȚȎȠȓȞȖȎș Ȓșȭ ȝȞȜȠȓȕȖȞȜȐȎțȖȭ, ȟ ȚȓțȪȦȓȗ ȖȕțȎȦȖȐȎȓȚȜȟȠȪȬ Ȗ ȟ șȡȥȦȓȗ ȏȖȜȟȜȐȚȓȟȠȖȚȜȟȠȪȬ. ǸȎȞȏȖȒ ȘȞȓȚțȖȭ ȜȏșȎȒȎȓȠ ȟȐȜȗȟȠȐȎȚȖ, ȘȜȠȜȞȩȓ ȕțȎȥȖȠȓșȪțȜ ȝȞȓȐȜȟȣȜȒȭȠ ȖȕȐȓȟȠțȩȓ ȚȎȠȓȞȖȎșȩ, ȖȟȝȜșȪȕȡȬȧȖȓȟȭ Ȓșȭ ȝȞȜȠȓȕȖȞȜȐȎțȖȭ. ǯșȎȑȜȒȎȞȭ ȐȩȟȜȘȜȗ ȡȟȠȜȗȥȖȐȜȟȠȖ ȘȎȞȏȖȒȎ ȘȞȓȚțȖȭ Ș ȔȓȟȠȘȖȚ ȣȖȚȖȥȓȟȘȖȚ Ȗ ȚȓȣȎțȖȥȓȟȘȖȚ ȐȜȕȒȓȗȟȠȐȖȭȚ, ȜțȜȥȓțȪȝȓȞȟȝȓȘȠȖȐȓțȒșȭȖȟȝȜșȪȕȜȐȎțȖȭȐȘȎȥȓȟȠȐȓ ȜȞȠȜȝȓȒȖȥȓȟȘȜȑȜ ȚȎȠȓȞȖȎșȎ. ǼȔȖȒȎȓȠȟȭ, ȥȠȜ ȏșȎȑȜȒȎȞȭ ȐȩȟȜȘȜȗ ȣȖȚȖȥȓȟȘȜȗ ȖțȓȞȠțȜȟȠȖ SiC ȏȡȒȓȠ ȜȏșȎȒȎȠȪ ȐȩȟȜȘȜȗ ȏȖȜȟȜȐȚȓȟȠȖȚȜȟȠȪȬ. ǻȎȥȎȠȩȖȟȟșȓȒȜȐȎțȖȭȏȖȜȟȜȐȚȓȟȠȖȚȜȟȠȖ SiC ȖȝȞȖȚȓțȓțȖȭ ȓȑȜȐȘȎȥȓȟȠȐȓȖȚȝșȎțȠȜȐ, ȏȓȕȤȓȚȓțȠțȩȣȟȜȓȒȖțȖȠȓșȪțȩȣȝȞȜȠȓȕȜȐ, ȐȘșȬȥȎȭȖȟȝȜșȪȕȜȐȎțȖȓȐȘȎȥȓȟȠȐȓȝȜȘȞȩȠȖȭ. ǰȘșȖțȖȥȓȟȘȖȣȡȟșȜȐȖȭ SiC ȖȟȝȜșȪȕȡȓȠȟȭ Ȑ ȘȎȥȓȟȠȐȓ ȝȜȘȞȩȠȖȭ Ȓșȭ ȟȠȓțȠȜȐ (for stents) Ȓșȭ ȝȜȐȩȦȓțȖȭ ȑȓȚȜȟȜȐȚȓȟȠȖȚȜȟȠȖ [154–158], Ȓșȭ ȝȜȘȞȩȠȖȭ ȠȖȠȎțȜȐȩȣ ȖȚȝșȎțȠȜȐ, Ȑ ȥȎȟȠțȜȟȠȖ, ȏȓȒȞȓțțȩȣ [159–162]. ǯșȎȑȜȒȎȞȭ ȖțȓȞȠțȜȟȠȖ SiC, Ȝț ȚȜȔȓȠ ȏȩȠȪ ȖțȠȓȑȞȖȞȜȐȎț Ȑ ȞȎȟȠȡȧȡȬ ȘȜȟȠȪ ȏȓȕ țȓȝȞȖȭȠțȜȟȠȓȗ, ȟȐȭȕȎțțȩȣ ȟ ȜȏȞȎȕȜȐȎțȖȓȚ ȝȞȜȒȡȘȠȜȐ ȖȕțȜȟȎ, ȜȘȖȟșȓțȖȭ Ȗ ȚȓȠȎșȜȕȖȟȎ, ȘȜȠȜȞȩȓ ȜȏȩȥțȜ ȝȞȜȖȟȣȜȒȭȠ ȟ ȖȚȝșȎțȠȖȞȜȐȎțțȩȚȖȚȎȠȓȞȖȎșȎȚȖ. ǰȞȎȏȜȠȓ[163] ȝȞȓȒșȜȔȓțȜȖȕȑȜȠȎȐșȖȐȎȠȪ ȕȡȏțȩȓ ȖȚȝșȎțȠȩ, ȝȜșțȜȟȠȪȬ ȖȕȑȜȠȜȐșȓțțȩȓ Ȗȕ ȘȎȞȏȖȒȎ ȘȞȓȚțȖȭ. ǶȟȟșȓȒȡȓȠȟȭ ȏȖȜȟȜȐȚȓȟȠȖȚȜȟȠȪ ȘȎȞȏȖȒȎ ȘȞȓȚțȖȭ. ǶȟȟșȓȒȜȐȎțȖȭ ȝȜȘȎȕȩȐȎȬȠ, ȥȠȜ SiC ȥȎȟȠȖȤȩ ȟȜȐȚȓȟȠȖȚȩ ȟ ȘȜȟȠȪȬ ȘȞȜșȖȘȜȐ, țȓ

280 ǮȑȓȓȐ Ǽ.Ǯ., ǯȓșȭȓȐ Ǯ.dz., ǯȜșȠȜȐȓȤ ǻ.ǿ., ǸȖȟȓșȓȐ ǰ.ǿ., ǸȜțȎȘȜȐȎ Ǿ.ǰ. Ȗ ȒȞ

ȐȩȕȩȐȎȬȠ ȎȑȞȓȑȎȤȖȬ ȚȎȘȞȜȢȎȑȜȐ, ȏȓȕȜȝȎȟțȩ Ȗ ȟȠȖȚȡșȖȞȡȬȠ ȞȜȟȠ ȘȜȟȠțȜȗ ȠȘȎțȖ [159]. ǻȓȟȚȜȠȞȭ țȎ ȝȓȞȟȝȓȘȠȖȐțȩȓ ȣȎȞȎȘȠȓȞȖȟȠȖȘȖ ȫȠȜȑȜ ȚȎȠȓȞȖȎșȎ Ȓșȭ ȓȑȜ ȦȖȞȜȘȜȑȜ ȝȞȖȚȓțȓțȖȭ țȓȜȏȣȜȒȖȚȩ ȑșȡȏȜȘȖȓȖȒșȖȠȓșȪțȩȓȖȟȟșȓȒȜȐȎțȖȭțȎȒȓȔțȜȟȠȖ– ȘșȬȥȓȐȜȑȜȝȎȞȎȚȓȠȞȎ Ȓșȭ ȝȞȎȘȠȖȥȓȟȘȜȑȜ ȝȞȖȚȓțȓțȖȭ.

SiC ȚȜȔȓȠ ȜȟȎȔȒȎȠȪȟȭ țȎ ȠȖȠȎțȜȐȜȗ ȝȜȐȓȞȣțȜȟȠȖ ȖȚȝșȎțȠȎȠȎ, țȎȝȞȖȚȓȞ, ȚȓȠȜȒȎȚȖȖȜțțȜ-șȡȥȓȐȜȑȜțȎȝȩșȓțȖȭ. ǶȒȓȭȖȟȝȜșȪȕȜȐȎțȖȭ ȘȎȞȏȖȒȎ ȘȞȓȚțȖȭ ȟȜȟȠȜȖȠ Ȑ ȠȜȚ, ȥȠȜȏȩ ȝȞȓȒȜȠȐȞȎȠȖȠȪ ȢȜȞȚȖȞȜȐȎțȖȓȥȎȟȠȖȤȖȕțȜȟȎȜȠȚȭȑȘȜȗȝȜȐȓȞȣțȜȟȠȖ ȠȖȠȎțȎ. SiC ȠȐȓȞȒȩȗ, ȔȓȟȠȘȖȗ Ȗ ȖȕțȜȟȜȡȟȠȜȗȥȖȐȩȗ ȘȓȞȎȚȖȥȓȟȘȖȗ ȚȎȠȓȞȖȎș, Ȗ ȓȑȜ ȢȖȕȖȥȓȟȘȖȓ ȟȐȜȗȟȠȐȎ ȝȞȎȘȠȖȥȓȟȘȖ țȓ ȒȓȑȞȎȒȖȞȡȬȠ, ȘȎȘ ȫȠȜ ȖȚȓȓȠ ȚȓȟȠȜ

ȡȑȖȒȞȜȘȟȖȎȝȎȠȖȠȎ. ǹȎȏȜȞȎȠȜȞțȩȓ ȖȟȟșȓȒȜȐȎțȖȭ in vivo Ȗ in vitro

ȐșȎȏȜȞȎȠȜȞțȩȣ ȡȟșȜȐȖȭȣ ȝȜȘȎȕȎșȖ, ȥȠȜ SiC Ȗ ȑȖȒȞȜȘȟȖȎȝȎȠȖȠ ȜȒȖțȎȘȜȐȜ ȏȖȜșȜȑȖȥȓȟȘȖ ȟȜȐȚȓȟȠȖȚȩ.

ǰȞȎȏȜȠȓ[164] ȝȞȓȒșȎȑȎȓȠȟȭȖȟȝȜșȪȕȜȐȎțȖȓȏȖȜȚȜȞȢțȜȗȘȓȞȎȚȖȘȖ Ȑ ȘȎȥȓȟȠȐȓ ȚȎȠȓȞȖȎșȎ Ȓșȭ ȕȡȏțȩȣ Ȗ ȜȞȠȜȝȓȒȖȥȓȟȘȖȣ ȖȚȝșȎțȠȜȐ țȎ ȜȟțȜȐȓ ȘȎȞȏȖȒȎ ȘȞȓȚțȖȭ ȟ ȝȜȘȞȩȠȖȓȚ ȏȖȜȎȘȠȖȐțȩȚ ȟȠȓȘșȜȚ. ǽȜȘȞȩȠȖȓ ȜȒțȜȞȜȒțȜȗ ȟȠȓȘșȭțțȜȗ ȝșȓțȘȜȗ ȟ ȣȜȞȜȦȖȚȖ ȎȒȑȓȕȖȜțțȩȚȖ ȟȐȜȗȟȠȐȎȚȖ ȜȟȡȧȓȟȠȐșȭșȜȟȪ ȟ ȝȜȚȜȧȪȬ ȫȘȟȖȚȓȞțȜȑȜ ArF ȖȚȝȡșȪȟțȜȑȜ șȎȕȓȞȎ. ȋȘȟȝȓȞȖȚȓțȠȩ in vitro Ȗ in vivo ȏȖȜȚȜȞȢțȜȗ SiC ȘȓȞȎȚȖȘȖțȎȏȎȕȓȒȞȓȐȓȟȖțȩȟȎȝȓșșȖ, ȝȞȜȐȓȒȓțȩȓȐȞȎȏȜȠȓ [165] ȝȜȘȎȕȎșȖ, ȥȠȜ ,ȏșȎȑȜȒȎȞȭ țȎșȖȥȖȬ ȐȕȎȖȚȜȟȐȭȕȎțțȜȗ ȖȓȞȎȞȣȖȥȓȟȘȜȗ ȝȜȞȖȟȠȜȗ ȟȠȞȡȘȠȡȞȓ, ȚȎȠȓȞȖȎș ȜȏșȎȒȎȓȠ ȐȩȟȜȘȜȗ ȏȖȜȟȜȐȚȓȟȠȖȚȜȟȠȪȬ, ȥȠȜ ȜȠȘȞȩȐȎȓȠ ȦȖȞȜȘȖȓ ȐȜȕȚȜȔțȜȟȠȖ Ȓșȭ ȝȞȖȚȓțȓțȖȭ

ȐȚȓȒȖȤȖțȓ.

ǺȖȘȞȜȫșȓȘȠȞȜȚȓȣȎțȖȥȓȟȘȖȓ ȟȖȟȠȓȚȩ (ǺȋǺǿ) – ȫȠȜ ȠȓȣțȜ-

șȜȑȖȖ Ȗ ȡȟȠȞȜȗȟȠȐȎ, ȜȏȨȓȒȖțȭȬȧȖȓ Ȑ ȟȓȏȓ ȚȖȘȞȜȫșȓȘȠȞȜțțȩȓ Ȗ ȚȖȘȞȜȚȓȣȎțȖȥȓȟȘȖȓ ȘȜȚȝȜțȓțȠȩ. ǰ ȜȏȕȜȞȎȣ [166, 167] ȞȎȟȟȚȜȠȞȓțȩ ȝȓȞȟȝȓȘȠȖȐȩ ȖȟȝȜșȪȕȜȐȎțȖȭ ȘȎȞȏȖȒȎ ȘȞȓȚțȖȭ Ȑ ȘȎȥȓȟȠȐȎ ȚȎȠȓȞȖȎșȎ Ȓșȭ ȖȕȑȜȠȜȐșȓțȖȭ ȟȓțȟȜȞȜȐ Ȗ MEMS. ǽȞȓȒȝȜșȎȑȎȓȠȟȭ, ȥȠȜ SiC ȏȡȒȓȠ ȖȑȞȎȠȪ ȐȎȔțȡȬ ȞȜșȪ Ȑ ȞȎȕȐȖȠȖȖ ȟȖȟȠȓȚ MEMS. Ǹ ȟȜȔȎșȓțȖȬ, ȟȐȜȗȟȠȐȎ, ȘȜȠȜȞȩȓ ȜȝȞȓȒȓșȭȬȠ ȏȜșȪȦȡȬ țȎȒȓȔțȜȟȠȪ SiC ȝȜ ȟȞȎȐțȓțȖȬ ȟ ȘȞȓȚțȖȓȚ, ȟ ȒȞȡȑȜȗ ȟȠȜȞȜțȩ, ȐȩȕȩȐȎȬȠ ȕțȎȥȖȠȓșȪțȩȓ ȠȓȣțȜșȜȑȖȥȓȟȘȖȓ ȕȎȠȞȡȒțȓțȖȭ ȖȕȑȜȠȜȐșȓțȖȭ MEMS ȟȠȞȡȘȠȡȞ. ȀȓȚ țȓ Țȓțȓȓ, țȎ ȜȟțȜȐȓ SiC ȏȡȒȡȠ ȞȎȕȞȎȏȜȠȎțȩ ȒȎȠȥȖȘȖ ȒȎȐșȓțȖȭ, ȎȘȟȓșȪȞȜȚȓȠȞȩ, ȞȓȕȜțȎȠȜȞȩȖȒȞȡȑȖȓȝȞȖȏȜȞȩȒșȭȔȓȟȠȘȖȣȡȟșȜȐȖȗ ȫȘȟȝșȡȎȠȎȤȖȖ. ǽȜȘȎȕȎțȎ ȐȜȕȚȜȔțȜȟȠȪ ȖȕȑȜȠȜȐșȓțȖȭ țȎ SiC ȚȖȘȞȜȞȓȕȜțȎȠȜȞȎ[165]. ǶȟȟșȓȒȜȐȎțȖȭȝȜȝȞȖȚȓțȓțȖȬȘȎȞȏȖȒȎȘȞȓȚțȖȭȐ

ȚȓȒȖȤȖțȓ ȐȜȜȏȧȓ, Ȗ Ȑ ȥȎȟȠțȜȟȠȖ Ȑ ǺȋǺǿ, țȎȣȜȒȭȠȟȭ țȎ țȎȥȎșȪțȜȗ ȟȠȎȒȖȖ. ǻȓȞȎȕȞȎȏȜȠȎțȩȟȠȎțȒȎȞȠȩȒșȭSiC ȏȖȜȚȎȠȓȞȖȎșȜȐ, ȝȜșȡȥȓțțȩȣ ȟ ȖȟȝȜșȪȕȜȐȎțȖȓȚ ȞȎȕșȖȥțȩȣ ȠȓȣțȜșȜȑȖȗ – ȐȩȟȜȘȜȥȎȟȠȜȠțȩȚ țȎȝȩșȓțȖȓȚ, ȞȓȎȘȤȖȜțțȩȚ ȟȐȭȕȩȐȎțȖȓȚ Ȗ Ƞ. Ȓ. ǻȓȠ ȚȓȠȜȒȖȘ ȝȜ ȝȞȓȒȐȎȞȖȠȓșȪțȜȗ ȝȜȒȑȜȠȜȐȘȓ SiC ȏȖȜȚȎȠȓȞȖȎșȜȐ: ȟȠȓȞȖșȖȕȎȤȖȖ, ȡȝȎȘȜȐȘȓ, ȣȞȎțȓțȖȬ Ȗ Ƞ. Ȓ. ǰ ȞȭȒȓ ȞȎȏȜȠ ȝȞȜȐȓȒȓțȩ ȖȟȟșȓȒȜȐȎțȖȭ ȐȜȕȚȜȔțȜȟȠȖ ȝȞȖȚȓțȓțȖȭ ȘȎȞȏȖȒȘȞȓȚțȖȓȐȩȣ ȝȜȒșȜȔȓȘ Ȓșȭ ȖȕȑȜȠȜȐșȓțȖȭ ȏȖȜȟȓțȟȜȞȜȐ [168–174]. ȁȟȠȎțȜȐșȓțȜ, ȥȠȜ ȟ ȠȜȥȘȖ ȕȞȓțȖȭ țȎȒȓȔțȜȟȠȖ ȏȖȜȚȓȒȖȤȖțȟȘȖȣ ȖȟȟșȓȒȜȐȎțȖȗ ȘȎȞȏȖȒ ȘȞȓȚțȖȭ ȝȞȓȐȜȟȣȜȒȖȠ ȘȞȓȚțȖȗ.

282 ǮȑȓȓȐ Ǽ.Ǯ., ǯȓșȭȓȐ Ǯ.dz., ǯȜșȠȜȐȓȤ ǻ.ǿ., ǸȖȟȓșȓȐ ǰ.ǿ., ǸȜțȎȘȜȐȎ Ǿ.ǰ. Ȗ ȒȞ

ǹȖȠȓȞȎȠȡȞȎ

1.DZțȓȟȖț DZ.DZ. ǸȎȞȏȖȒȜȘȞȓȚțȖȓȐȩȓ ȚȎȠȓȞȖȎșȩ. – Ǻ.: ǺȓȠȎșșȡȞ-

ȑȖȭ, 1977. – 216 c.

2.Congress U.S. OfÀce of Technology Assessment, New Structural Materials Technologies: Opportunities for the Use of Advanced Ceramics and Composites – A Technical Memorandum, OTA- TM-E-32 (Washington, DC: U.S. Government Printing OfÀce, September 1986).

3.Handbook of Ceramic Composites / Edited by Narottam P. – Bansal, NASA Glenn Research Center, USA Kluwer Academic Publishers 2005.

4.ǽȞȜȚȩȦșȓțțȜȓ ȝȞȖȚȓțȓțȖȓ ȘȎȞȏȖȒȎ ȘȞȓȚțȖȭ Ȑ ȍȝȜțȖȖ // Ceramic Industries Jornal. – 1982. – 91, N1033. – P. 3511. ǺȎ-

ȠȓȞȖȎșȩ ȢȖȞȚ «ȀȜȟȖȏȎ ǸȓȞȎȚȖȘȎ ǸȜ ǹȀDz» Ȗ « ǶȟȘȞȎ ǶțȒȎȟȠȞȖ ǸȜ ǹȀDz», ȍȝȜțȖȭ, ȚȎȗ 1982.

5.Composite materials handbook. – Department of Defense USA, June 2002. – P. 245.

6.ȂȖȞȚȎ Silicon Carbide Products, Inc. ǿȆǮ, http://www. scprobond.com/scprobondr.html

7.Kennedy P., Parkinson K. Reaction bonded silicon carbide artefacts. – US Patent No: 4,536,449, Aug. 20, 1985.

8.Shuaib M., Davies T.J. Wear behaviour of a REFEL SiC contain-

ing Áuorides up to 900°C // Wear. – April 2001. – 249, (1–2). –

P. 20–30.

9.Mahdavinejad R., Mehraban M., Mahdavinejad D. The behaviour of REFEL SiC under electrodischarge machining, Proc. Ins.Mechan.Engineers, B // J.Eng.Manufacture. – 2006. – 220, N10. – P. 1635–1646.

10.Chang-Bin Lim, Takayoshi Iseki. Strength variations of reac- tion-sintered SiC heterogeneously containing Àne-grained C- SiC // J. Mat. Sc. – 1988. – 23, N9. – P. 3248–3253.

11.http://www.hitech-ceramics.com/materials/silicon-carbide.php

12.DzȜȏȞȜȐȜșȪȟȘȖȗ Ǯ.DZ. ȆșȖȘȓȞțȜȓ șȖȠȪȓ. – Ǻ.: ǺȓȠȎșșȡȞȑȖȭ, 1977. – 282 c.

13.http://www.crystar.com/

14.ǵșȜȏȖț DZ.ǽ. ȂȜȞȚȖȞȜȐȎțȖȓ ȖȕȒȓșȖȗ Ȗȕ ȝȜȞȜȦȘȜȐ ȠȐȓȞȒȩȣ ȟȝșȎȐȜȐ. – Ǻ.: ǺȓȠȎșșȡȞȑȖȭ, 1980. – 224 c.

15.Greulich-Weber S., Marsmann H. From nanosize Silica Spheres to three-dimensional Colloidal Crystals, in Ordered Porous Nanostructures and Applications // Nanoscale Science and Technology Series / ed. R. Wehrspohn. – New York: Kluwer Academic Plenum Publischer, 2005.

16.Wen Zhang, Hongjie Wang, Zhihao Jin. Gel casting and properties of porous silicon carbide/silicon nitride composite ceramics // Materials Letters. – 2005. – 59. – P. 250–256.

17.Liedtke V., Huertas Olivares I., Langer M., Haruvy Y.F. Sol–gel- based carbon/silicon carbide // J. Eur. Ceram. Soc. – 2007. – 27. –

P.1267–1272.

18.Nardone V.C., Strife J.R. Analysis of the creep behavior of silicon carbide whisker reinforced 2 124 Al (T4) // Metall. Trans.

A.– 1987. – 18A (1). P. 109–114.

19.Mishra R.S., Mukherjee A.K. On superplasticity in silicon carbide reinforced aluminum composites // Ser. Metall. MȎter. – 1991. – 25 (2). – P. 271–275.

20.Ma Zongyi et al. Abrasive wear of discontinuous SiC reinforced aluminum alloy composites // Wear. – 1991. – 148 (2). – P. 287–293.

21.Billman E.R., Mehrotra K., Shuster A.F., Beeghly C.W. Machining with Al, O, Siǿ-whisker cutting tools // Am. Ceram. Soȟ. Bull. – 1988. – 67 (6). – P. 1016–1019.

22.Yust C.S., Leitnaker J.M., Devore C.E. Wear of an aluminasilicon carbide whisker composite // Wear. – 1988. – 122 (2). –

P.151–164.

23.Wei G.C., Becher P.F. Development of SiC-whisker-reinforced ceramics // Am. Ceram. Soc. Bull. – 1985. – 64. – P. 298–304.

284 ǮȑȓȓȐ Ǽ.Ǯ., ǯȓșȭȓȐ Ǯ.dz., ǯȜșȠȜȐȓȤ ǻ.ǿ., ǸȖȟȓșȓȐ ǰ.ǿ., ǸȜțȎȘȜȐȎ Ǿ.ǰ. Ȗ ȒȞ

24.Shalek P.D., Petrovic J.J., Hurley G.F., Gac F.D. Hot pressed SiC whisker/Si3N4 matrix composites // Am. Ceram. Soc. Bull. – 1986. – 65. – P. 351–356.

25.Lundberg R., Kahlman L., Pompe R., Carlsson R., Warren R. SiC-whisker-reinforced Si3N4 composites // Am. Ceram. Soc. Bull. – 1987. – 66. – P. 330–333.

26.Janeway P.A., ART: reinforcing tomorrow technology // Ceram Ind. – 1992. – 138(4). – P. 42–44.

27.Schoenung J.M. The economics of silicon carbide whisker fabrication // Ceram. Eng. Sci. Proc. – 1991. – 12. – P. 1943–1951.

28.Shiushichi K., Elichi Y., Yasuhiro T., Yuuichi A. A discussion of the chemical mixing process for in sity praporation of silicon carbide whiskers in silicon nitride powder // J. Mat. Res. – 1988. –3, N3. – P. 538–544.

29.Katoh Y., Snead L.L., Henager C.H.,Jr., Hasegawa A., Kohyama A., Riccardi B., Hegeman H. Current status and critical issues for development of SiC composites for fusion applications, //

J.Nucl. Mat. – 2007. – 367–370, Part 1. – P. 659–671.

30.Evans A.G., Weber C. Creep damage in SiC/SiC composites // Mat. Sci. Eng. – 1996. – A 208. – P. 1–6.

31.Langlais F. Chemical vapor inÀltration processing of ceramic matrix composites / Ed. R. Warren // Carbon/Carbon, Cement, and Ceramic Matrix composites; / Ed. A. Kelly and C. Zweben // Comprehensive Composite Materials. – Amsterdam: Elsevier, 2000. – 4. – P. 611–644.

32.Naslain R., Langlais F. CVD-processing of ceramic-ceramic composite materials // Mat. Sci. Res., 1986. – 20. – P. 145–164.

33.Naslain R. CVI composites. In Ceramic-Matrix Composites / Ed.

R.Warren. – New York: Chapman and Hall, 1992. – P. 199–244.

34.Muhlratzer A. Design of gradient-CVI derived CMC components // Indus. Ceram., 1996. – 16. – P. 111–117.

35.Schulte-Fischedick J., Zern A., Mayer J., Ruhle M., Frie M., Krenkel W., Kochendorfer R. The morphology of silicon carbide in C/C-SiC composites // Mat. Sci. Eng. A. – 2002. – 332. –

P.146–152.

36.Newkirk M.S., Urquhart A.W., Zwicker H.R., Breval E. Formation of Lanxide™ Ceramic Composite Materials // J. Mat. Res. – 1986. – 1 (1). – P. 81–89.

37.Schiroky G.H., Fareed A.S., Sonuparlak B., Lee C.T., Sorenson B. Fabrication and Properties of FiberReinforced Ceramic Composites Made by Directed Metal Oxidation / Ed. S.R. Levine Jr. // Flight-Vehicle Materials, Structures and Dynamics – Assessment and Future Directions. – New York: ASME, 1992. – 3. –

P.151–163.

38.Tiegs T.N., Weaver S.C. Whisker and Platelet Synthesis Processes // Carbide, Nitride and Boride Materials Synthesis and Processing. – New York: Chapman and Hall, 1997. – P. 411–432.

39.Becher P.F., Wei G.C. Toughening Behavior in SiC-Whisker- Reinforced Alumina // J. Am.Ceram. Soc. – 1984. – 67 (12). –

P.C267–C269.

40.Katoh Y., Kotani M., Kishimoto H., Yang W., Kohyama A. Properties and radiation effects in high-temperature pyrolyzed PIPSiC/SiC // J. Nuc. Mat. – 2001. – 289, Issues 1–2. – P. 42–47.

41.Yajima S. Silicon carbide Àbres: Handbook of Composites / Ed.

W.W. Watt, B.V. Perov. Amsterdam: North-Holland, 1985. –

1.– P. 201–237.

42.Ichikawa H. Advances in SiC Àbers for high temperature applications // Advances in Science and Technology. – 2006. – 50. – P. 17–23.

43.Wang L., Wada H., Allard L.F. Synthesis and characterization of SiC whiskers // J. Mat. Res. – 1992. – 7. – P. 148–163.

44.Seo W.-S., Koumoto K. Stacking faults in ǃ-SiC formed during carbothermal reduction of SiO2 // J. Am. Ceram. Soc. –1996. –

79.– P. 1777–1782.

286 ǮȑȓȓȐ Ǽ.Ǯ., ǯȓșȭȓȐ Ǯ.dz., ǯȜșȠȜȐȓȤ ǻ.ǿ., ǸȖȟȓșȓȐ ǰ.ǿ., ǸȜțȎȘȜȐȎ Ǿ.ǰ. Ȗ ȒȞ

45.Nutt S.R. Microstructural and growth model for rice-hull derived SiC whiskers // J. Am. Ceram. Soc. – 1988. – 71. – P. 149–156.

46.Knowels K.M., Ravichandran M.V. Structure analysis of inclusions in C-silicon carbide whiskers grown from rice hulls // J.Am. Ceram. Soc. – 1997. – 80. – P. 1165–1173.

47.Milevski J.V., Gag F.D, Petrovic J.J., Skaggs S.R. Growth of beta-silicon carbide whiskers by the VLS process // J. Mat. Sci. – 1985. – 20. – P. 1160–1166.

48.Wang H., Berta Y., Fischman G.S. Microstructure of silicon carbide whiskers synthesized by carbothermal reduction of silicon nitride // J. Am. Ceram. Soc. – 1992. – 75. – P. 1080–1084.

49.Jong R.D., McCauley R.A. Growth of twinned C-silicon carbide whiskers by the vapor-liquid-solid process // J. Am. Ceram. Soc. – 1987. – 70. – P. C338–C341.

50.Choi H.J., Lee J.G. Continuous synthesis of silicon carbide whiskers // J. Mat. Sci. – 1995. – 30. – P. 1982–1986.

51.Wu Y.J., Qin W., Yang Z.X., Wu J.S., Zhang Y.F. Preparation of high-quality C-SiC nanowhiskers by using carbon Àbres as carbon source // J. Mat. Sci. – 2004. – 39. – P. 5563–5565.

52.Jian Wei, Ke-Zhi Li, He-Jun Li, Qian-Gang Fu, Lei Zhang. Review. Growth and morphology of one-dimensional SiC nanostructures without catalyst assistant // Mat. Chem. Phys. – 2006. – 95. – P. 140–144.

53.Wu Y.J., Wu J.S., Qin W., Xu D., Yang Z.X., Zhang Y.F. Syn-

thesis of C-SiC nanowhiskers by high temperature evaporation of solid reactants // Mat. Lett. – 2004. – 58, Issues 17–18. –

P. 2295–2298.

54.Feng-Lei Wang, Li-Ying Zhang, Ya-Fei Zhang. SiC Nanowires Synthesized by Rapidly Heating a Mixture of SiO and ArcDischarge Plasma Pretreated Carbon Black // Nanoscale Res. Lett. –2009. – 4. – P. 153–156.

55.Jin-Seok Lee, Yun-Ki Byeuna, Sang-Hoon Lee, Sung-Churl Choi. In situ growth of SiC nanowires by carbothermal reduction us-

ing a mixture of low-purity SiO2 and carbon // J. Alloys and Compounds. – 2008. – 456. –P. 257–263.

56.Maddocks A.R., Harris A.T. Biotemplated synthesis of novel porous SiC // Mat. Lett. – 2009. – 63. – P. 748–750.

57.Greil P. Biomorphous ceramics from lignocellulosics // J. Eur. Ceram. Soc. – 2001. – 21. – P. 105–118.

58.Sieber H., Hoffmann C., Kaindl A., Greil P. Biomorphic cellular ceramics // Adv. Eng. Mat. – 2000. – 2 (3). – P. 105–109.

59.Klingner R., Sell J., Zimmermann T., Herzog A., Vogt U., Graule T., Thurner P., Beckmann F., Muller B. Wood-Derived

Porous Ceramics via InÀltration of SiO2-Sol and Carbothermal Reduction // Holzforschung. – 2003. – 57. – P. 440–446.

60.Jun-Min Qian, Ji-Ping Wang, Zhi-Hao Jin. Preparation and properties of porous microcellular SiC ceramics by reactive inÀltration of Si vapor into carbonized basswood // Mat Chem. Phys. – 2003. – 82. – P. 648–653.

61.Qing Wang, Guo-Qiang Jin, Dong-Hua Wang, Xiang-Yun Guoa, Biomorphic porous silicon carbide prepared from carbonized millet // Mat. Sci. Eng. – 2007. – A 459. – P. 1–6.

62.Esposito L., Sciti D., Piancastelli A., Bellosi A. Microstructure and properties of porous C-SiC templated from soft woods // J. Eur. Ceram. Soci. – 24. – P. 533–540.

63.Greil P., Lifka T., Kaindl A. Biomorphic cellular silicon carbide ceramics from wood: prossessing and microstructure // J. Eur. Ceram. Soc. – 1998. – 18. – P. 1961–1973.

64.Yanxiang Wang, Shouhong Tan, Dongliang Jiang. The effect of porous carbon preform and the inÀltration process on the properties of reaction-formed SiC // Carbon. – 2004. – 42. – P. 1833–1839.

65.Zollfrank C., Sieber H. Microstructure and phase morphology of wood derived biomorphous SiSiC-ceramics // J. Eur. Ceram. Soc. – 2004. – 24. – P. 495–506.

66.Vogli E., Sieber H., Greil P. Biomorphic SiC-ceramics prepared by Si-vapor phase inÀltration of wood // J. Eur. Ceram. Soc. – 2002. – 22. – P. 2663–2668.

67.Sieber H., Vogli E., Greil P. Biomorphic SiC-ceramic manufac-