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Физика полупроводников и нанотехнологий. Учебно-методическое пособие

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     
  
   
«   »
... 

..
 
Учебно-методическое пособие
$!
$!/-&0 1#/2 !/(3""40 (,"&5/-&0 2"&3!/&((
2017
1
.5((/+ 6# !7"&8 ! -%&#""#-&' ()*/-#1# /#3( $
 688.518.3 (075.8)  32.965+73 22
Ланге П.К. 22 Физика полупроводников и нанотехнологий: 259"#-$(# . 6#/#9& /
П.К. Ланге. – $!: $!. 1#/. (,". 2"-(, 2017. – 88 /.
6&/"4 $(# &5/-& !-#$" %&& 6# 346#)""&8 6!-(&5/-&, !9#( 6# &/%&6)&" «&'&- 6#)26!#3# "&-#3 & ""#(,"#)#1&0». .!&3# +(/+ 6!&­$!4 &//) 2$4, /,$, #6! )" 6#!+ #- 346#)""&+ !9#(.
.#/#9& 6! "'"5"# )+ 9-)3!#3 #5"#0 & '#5"#0 #!$ #925"&+ 6# "6!3)"&8 12.03.01 «.!&9#!#/(!#"&», & $#:( 94(* &/6#)*'#3"# 6!& &'25"&& &/%&6)&"4 «&'&- 6#)26!#3# "&-#3 & ""#(,"#)#1&0»,  (-: !21&, -2!/#3, /3+'""4, / 6#)26!#3# "&-#3#0 ;)-(!#"&-#0.
 688.518.3 (075.8)  32.965+73
22
© ... "1, 2017 © $!/-&0 1#/2 !/(3""40 (,"&5/-&0 2"&3!/&((, 2017
2
ПРЕДИСЛОВИЕ
"#(,"#)#1&+ – #9)/(* 6!&-) "#0 "2-& & (,"&-&, '"&$­8<+/+ &'25"&$ /3#0/(3 #9=-(#3 & !'!9#(-#0 2/(!#0/(3 !'$­!#3 6#!+ - ""#$(! (10-9 $(!). "#(,"#)#1&+ -5/(3""# #(­)&5(/+ #( (! &%&#""4, &":"!"4, &/%&6)&", &9# " (-&, $/7(9, 6!&345"4, $-!#/-#6&5/-& (,"#)#1&& #9!<"&+ / $(!&0 '5/(28 " &$8( /$4/),  $&-!#/-#6&5/-& +3)"&+, 6!"9!:&()*"# /)94 " 6!&345"4, $/7(9,, /("#3+(/+ "$"#1# '"5&()*": /3#0/(3 & 3'&$# 0/(3&+ #( )*"4, (#­$#3 & $#)-2), -3"(#34 ;-(4.
"#(,"#)#1&+ "4" ",# &(/+ 3 "5)*"#0 /( && !'3&(&+, 6#/-#)*-2 #/"#3"4 #(-!4(&+, 6! /-'43$4 3 ;(#0 #9)/(&, 3/ < " / )"4. $ " $" 6!#3 ""4 &//) #3"&+ 2: /05/ 8( 6!-(&5/-& !'2)*((4.  6!&$""& 6! #34, "25"4, &//) #3"&0 ""#(,"#)#1&8 #("#/+( - 34/#-&$ (,"#)#1&+$.
.!& !9#( / (-&$& $)4$& !'$!$& 6!#+3)+8(­/+ -3"(#34 ;-(4 & ;-(4 $:$#)-2)+!"4, 3'&$# 0/(3&0, (-& -- "- !-)*/#34 3'&$# 0/(3&+. "#(,"#)#1&+ &, 3 #/#9""#/(&, $#)-2)+!"+ (,"#)#1&+ – "#34 #9)/(&, $)# &//)­ #3""4. '3&(& /#3!$""#0 ;)-(!#"&-& & >( 6# 62(& 2$"*­7"&+ !'$!#3 2/(!#0/(3.  "-# -)//&5/-& $(# 4 6!#&'3# ­/(3 6# ,# +( - /3#$2 /(/(3""#$2 ;-#"#$&5/-#$2 & (,"#)#1&­5/-#$2 9!*!2, -#1  !'$! 2/(!#0/(3 2$"*7(/+ " " $"#1#, '(# ;-#"#$&5/-& '(!(4 3#'!/(8( ;-/6#""%&)*"#. "#(,­"#)#1&+ – /) 28<&0 )#1&5/-&0 71 !'3&(&+ ;)-(!#"&-& & !21&, "2-#>$-&, 6!#&'3# /(3.
3
ВВЕДЕНИЕ
#3!$""+ (" "%&+ - $&"&(8!&'%&& 6#-'), 5(# 3<­/(3# $#:( &$(* /#3!7""# "#34 /3#0/(3, /)& 3'+(* #5"* $­)"*-28 5/(&%2 ;(#1# 3</(3. /(&%4, !'$!$& #( 1 # 1000 ""#$(!#3, #945"# "'438( ""#5/(&%$&. -, "6!&$!, #-')#/*, 5(# ""#5/(&%4 "-#(#!4, $(!&)#3 &$8( #5"* ,#­!#7& -()&(&5/-& &  /#!9%&#""4 /3#0/(3. !21& $(!&)4 6#-'438( 2 &3&()*"4 #6(&5/-& /3#0/(3, "6!&$! /3!,(#"-
-& 6)"-& #!1"&5/-&, $(!&)#3 6!&$"+8( )+ 6!#&'3# ­/(3 /#)"5"4, 9(!0. -& 9(!&, ,#(* & #9) 8( /!3"&()*­"# "&'-#0 -3"(#3#0 ;-(&3"#/(*8, '(# 9#) 734 & $#12( 94(* $,"&5/-& 1&9-&$&.  (/+ #9&(*/+ 3'&$# 0/(3&+ &/-2/­/(3""4, ""#5/(&% / 6!&!# "4$& #9=-($& ""#!'$!#3 – 9)-$&, "2-)&"#34$& -&/)#($& & !. <()*"# #5&<""4 "­"#5/(&%4 $#12( /$#34/(!&3(*/+ 3 #6! )""4 /(!2-(2!4. -
-+ /(!2-(2! /# !:&( /(!#1# 26#!+ #5""4 ""#5/(&%4 & (-: '5/(28 6!#+3)+( "#945"4 /3#0/(3. "#(,"#)#1&+ 3# 3/ 9#)*70 /(6"& &/6#)*'2(/+ 6!& &'1#(#3)"&& 6#)26!#3# "&-#34, 6!&9#!#3 & /(!2-(2!, # "-# &, /3#0/(3 3 9#)*7&"/(3 /)253 3/*$ /,# "4 /# /3#0/(3$& &/-!("4, 6#)26!#3# "&-#34, -#$­6#""(#3.  /3+'& / ;(&$ 6!& #/3#"&& -2!/ «&'&- 6#)26!#3# "&-
-#3 & ""#(,"#)#1&0» %)/##9!'"# &'25&(* /3#0/(3 /#3!$""4, 6#)26!#3# "&-#34, -#$6#""(#3 / &/6#)*'#3"&$ -#$6*8(!"4, (,"#)#1&0, (-&, -- Multisim, Mathcad, Workbench.
4
РАЗДЕЛ № 1
exp 1
+
Практическое занятие № 1
ИЗУЧЕНИЕ СВОЙСТВ ПОЛУПРОВОДНИКОВ.
ЗОННЫЕ СТРУКТУРЫ
Задание 1.1. .#/(!#&(* 3 ! -(#! MATHCAD 1!&- 2"-%&&
!$&-&!- [1]
f E
( )
=
E E
−
F
kT
6!& 2!#3" !$& EF = 5 ;-3; 2 ;-3; k = 10-3; 6!& ($6!(2!, Т = 10, 100, 300, 600 .
$6#!(&!#3(* 1!&- 3 Microsoft Word (97). .!&$! 6#/(!#"&+
6!&3 " " !&/. 1.1.
1
T 300:= EF 5:=
k 0.001:=
f E( )
:=
 
exp
1
E EF−
k T⋅
1+
1
f E( )
0.5
0
0 2 4 6 8 10
E
Рис 1.1. !&- 2"-%&& !$&-&!-
5
.#/(!#&(* 1!&-& 2"-%&0 f(E) 6!& EF = 5 ;-3; 6!& ($6!(2-
1
= −
!, Т = 10, 100, 300, 600  " # "#$ 6)" /6)#7"#0 )&"&0, 62"-­(&!"#0 & 7(!&,-62"-(&!"#0 )&"&+$&.
Задание 1.2. .#/(!#&(* 3 ! -(#! MATHCAD 1!&- 3#)*(-
$6!"#0 ,!-(!&/(&-& p-n 6!,# 
U
k
ϕ
I I e
0
T
3 &6'#" I0 = 0…1 , 6!& φТ = 25 $, I0 = 20 ".
.#/(!#&(* 1!&-& ,!-(!&/(&-& 6!& k = 1; k = 2; k = 4. .!&$! ,!-(!&/(&-& 6!&3 " " !&/. 1.2.
U
k 2:=
φT 0.025:= I0 10 10
0.05I U( )
0
0 0.2 0.4 0.6 0.8 1
Рис. 1.2. !&- 2"-%&& ,!-(!&/(&-& p-n 6!,# 
⋅:= I U( ) I0 e
9−
U
k φT⋅
⋅:=
1−
1#, ""/(& #/& -##! &"( & 1! 2&!#3-2.
,!-(!&/(&-& p-n 6!,# . .!&$! ,!-(!&/(&-& 6!&3 " " !&/. 1.3.
$6#!(&!#3(* 1!&- 3 Microsoft Word (97), !'1!266&!#3(*
Задание 1.3. .#/(!#&(* 3 ! -(#! MATHCAD #9!("28 3(3*
6
T
I
ϕ
;
kT
q
U
I U( ) I0 e
1.10
9.10
8.10
7.10
6.10
I U( )−
5.10
4.10
3.10
2.10
1.10
7 8
8
8 8 8 8 8 8
8
0
0 2 4 6 8 10
k φT⋅
⋅:=
1−
U−
Рис. 1.3. !&- 2"-%&& #9!("#0 ,!-(!&/(&-& p-n 6!,# 
$6#!(&!#3(* 1!&- 3 Microsoft Word (97), !'1!266&!#3(*
1#, ""/(& #/& -##! &"( & 1! 2&!#3-2.
Практическое занятие № 2
ИЗУЧЕНИЕ СВОЙСТВ P-N ПЕРЕХОДА.
ХАРАКТЕРИСТИКИ P-N ПЕРЕХОДОВ
Задание 2.1. .#/(!#&(* 3 ! -(#! MATHCAD '3&/&$#/(* /#-
6!#(&3)"&+ p-n 6!,#  [2] #( (#- 5!' "1#.
/,# "4 ""4:
ϕ
r
=
, φ = 25 $ 6!& Т = 20 °;
=
T
k = 1,38?10
-23
:/);
q = 1,6?10
-19
).
.!&$! 1!&- '3&/&$#/(& 6!&3 " " !&/. 2.1.
7
φT 0.025:= I 0.1 0.2, 10..( ):= r I( )
q N
⋅ ⋅ ⋅
0.05r I( )
0
0 2 4 6 8 10
φT
:=
I
I
Рис. 2.1. 3&/&$#/(* /#6!#(&3)"&+ p-n 6!,#  #( (#- 5!' "1#
.#/(!#&(* 1!&-& r(I) 6!& Т = +40; +20; 0;-20 °.
$6#!(&!#3(* 1!&- 3 Microsoft Word (97), !'1!266&!#3(*
1#, ""/(& #/& -##! &"( & 1! 2&!#3-2.
Задание 2.2. .#/(!#&(* 3 ! -(#! MATHCAD '3&/&$#/(* 9- !*!"#0 $-#/(& p-n 6!,#  #( #9!("#1# "6!+:"&+. @( '3&/&­$#/(* #6! )+(/+ 34!:"&$ [3]
0,5
ϕ
ε
U
+
0
,
C
=
1  N – -#"%"(!%&+ 6!&$/&;
NA – -#"%"(!%&+ -%6(#!"#0 6!&$/&;
ND – -#"%"(!%&+ #"#!"#0 6!&$/&;
φ
= kT/q – ($6!(2!"40 6#("%&);
0
k = 1,38?10
ε = 9?10
-23
:/); q = 1,6?10
-14
– &;)-(!&5/-+ 6!#"&%$#/(*.
)+ 1!$"&+ N
= 1016c$-3; ND = 1019c$-3.
A
-19
8
);
.!&$! 6#/(!#"&+ (-#0 ,!-(!&/(&-& 6!&3 " " !&/. 2.2.
14
NA 10
16
:= ND 10
U 1 1.1, 10..:=
0.5 ε⋅ q⋅ NA⋅
C U( )
C U( )
1.10
8.10
6.10
4.10
:=
8
9
9
9
19
:= q 1.6 10
⋅:= ε 9 10
U
19−
−
⋅:=
2.10
9
0 2 4 6 8 10
U
Рис. 2.2. .!&$! 6#/(!#"&+ 1!&- '3&/&$#/(& $-#/(&
p-n 6!,#  #( #9!("#1# "6!+:"&+
.#/(!#&(* 1!&-& (U) )+ NA = 1014; 1016; 1018.
$6#!(&!#3(* 1!&- 3 Microsoft Word (97), !'1!266&!#3(*
1#, ""/(& #/& -##! &"( & 1! 2&!#3-2.
Практическое занятие № 3
АНАЛИЗ ХАРАКТЕРИСТИК ДИОДНЫХ ЦЕПЕЙ.
ИЗУЧЕНИЕ МЕТОДОВ ИССЛЕДОВАНИЯ ДИОДНЫХ ЦЕПЕЙ
Задание 3.1. 6! )&(* (#!(&5/-& "6!+:"& U
3 ' "-

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Задание 3.2.  ! -(#! Multisim /#9!(* ' ""40 3!&"(
/,$4 (!&/. 3.1-3.10). '$!&(* "6!+:"& U
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!3"&(* &'$!"-
"# '"5"& /# '"5"&$, 345&/)""4$ (#!(&5/-&.
9
U
R 1-
R 4-
U1 20
R 2- R 1-
R
40
R
R
VD1
VD2
VD3
U 15
R4 2-
R3 2-
R2 1-
R1 1-
U
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Рис. 3.1. !&"( 1
U1 20
U
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Рис. 3.2. !&"( 2
U1
Рис. 3.3. !&"( 3
10
U
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