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LOCOS –step 7
Form Metal 1 Traces
•Deposit photoresist
•Pattern photoresist
–*METAL1 Mask
•Etch metal
n+ 
p+ 
n+ 
n+ 
p+ 
n
metal over poly outside of cross section
LOCOS FabricationIllustration |
Prof.A. Mason |
Page 42 |
LOCOS –step 7
Form Metal 1 Traces
•Deposit photoresist
•Pattern photoresist
–*METAL1 Mask
•Etch metal
•Remove photoresist
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LOCOS FabricationIllustration |
Prof.A. Mason |
Page 43 |
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LOCOS –step 8 |
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VIA mask |
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Form Vias to Metal1 |
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Deposit oxide |
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Planerize oxide |
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Deposit photoresist |
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VIA mask
LOCOS FabricationIllustration |
Prof.A. Mason |
Page 44 |
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LOCOS –step 8 |
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VIA mask |
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Form Vias to Metal1 |
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Deposit oxide |
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Planerize |
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Deposit photoresist |
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•Pattern photoresist
–*VIA Mask
VIA mask
LOCOS FabricationIllustration |
Prof.A. Mason |
Page 45 |
Form Vias to Metal1
•Deposit oxide
•Planerize
•Deposit photoresist
•Pattern photoresist
–*VIA Mask
•Etch oxide
•Remove photoresist
LOCOS –step 8
n+ |
p+ |
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p+ |
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LOCOS FabricationIllustration |
Prof.A. Mason |
Page 46 |
Form Vias to Metal1
•Deposit oxide
•Planerize
•Deposit photoresist
•Pattern photoresist
–*VIA Mask
•Etch oxide
•Remove photoresist
•Deposit Metal2
LOCOS –step 8
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LOCOS FabricationIllustration |
Prof.A. Mason |
Page 47 |
LOCOS –step 9
METAL2 mask
Form Metal2 Traces
• Deposit photoresist
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p+ |
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METAL2 mask
LOCOS FabricationIllustration |
Prof.A. Mason |
Page 48 |
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METAL2LOCOS –step 9 |
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mask |
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Form Metal2 Traces |
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Deposit photoresist |
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Pattern photoresist |
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– *METAL2 Mask |
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METAL2 mask
LOCOS FabricationIllustration |
Prof.A. Mason |
Page 49 |
LOCOS –step 9
Form Metal2 Traces
•Deposit photoresist
•Pattern photoresist
–*METAL2 Mask
•Etch metal
n+ |
p+ |
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p+ |
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LOCOS FabricationIllustration |
Prof.A. Mason |
Page 50 |
LOCOS –step 9
Form Metal2 Traces
•Deposit photoresist
•Pattern photoresist
–*METAL2 Mask
•Etch metal
•Remove photoresist
n+ |
p+ |
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p+ |
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LOCOS FabricationIllustration |
Prof.A. Mason |
Page 51 |