In a second embodiment of the first aspect of the invention,

at least two liquids (and no gas) are supplied. The first liquid may be a non-wetting liquid with respect to the substrate and the second liquid may be a wetting liquid with respect to the substrate. The term wetting liquid as used in this specification means a liquid that partly remains on the surface of the sub­ strate when an external force, such as centrifugal force or gravity, is applied to the substrate. A contact angle between the wetting liquid and the substrate may be less than 5 degrees, and preferably less than 3 degrees.

The wetting liquid may be supplied prior to the non-wet­ ting liquid, meaning that a point of impingement of the wet­ ting liquid is closer to the outer edge of the substrate as compared with the point of impingement of the non-wetting liquid. Preferably, the wetting liquid is supplied in order to obtain a complete wetting of the substrate. Wetting may be understood as completely covering (or substantially cover­ ing) the substrate so that there are no regions on the substrate where the liquid pulls together and forms droplets. To aid in wetting, a surfactant may be included in the wetting liquid. The non-wetting liquid may be the same as the non-wetting liquid disclosed in the first embodiment of the first aspect of the invention. When rotating the substrate, the wetting liquid may be supplied closer to an edge of the substrate relative to the supplying of the non-wetting liquid.

In a third embodiment of the first aspect of the invention, at least three liquids (and no gas) are supplied. The first liquid may be a first wetting liquid, the second liquid may be ultra pure water, and the third liquid may be a second wetting liquid. The ultra pure water may be supplied between the first and second wetting liquids.

In a second aspect of the invention, a method of removing

a liquid from at least a portion of one surface of a substrate is

BRIEF DESCRIPTION OF THE DRAWINGS

Presently preferred embodiments are described below in conjunction with the appended drawing figures, wherein like

5 reference numerals refer to like elements in the various fig­

ures, and wherein:

FIG. 1 is a side view of a tool used for removing a liquid from a substrate, according to an exemplary embodiment;

FIG. 2a is a top view of a substrate in which liquid is

10 removed, according to an exemplary embodiment;

FIG. 2b is a side view of a substrate in which liquid is removed, according to an exemplary embodiment;

FIG. 3 is a side view of a chamber containing the tool depicted in FIG. 1, according to an exemplary embodiment;

15 FIG. 4 is a side view of a tool that includes a megasonic energy generator for removing a liquid from a substrate, according to an exemplary embodiment;

FIG. 5 is a top view of a tool used for removing a liquid from a substrate, according to an exemplary embodiment;

20 FIG. 6 is a side view of a tool used for removing a liquid from both a top and a bottom of a substrate, according to an exemplary embodiment;

FIG. 7 is a side view of another tool used for removing a

liquid from a substrate, according to another exemplary

25 embodiment;

FIG. 8 is a side view of another tool used for removing a liquid from a substrate, according to another exemplary embodiment;

FIG. 9 is a table summarizing examples of some embodi­

30 ments disclosed in the present application;

FIG. 10 is a side view of another tool used for removing a liquid from a substrate, according to another exemplary embodiment;

FIG. 11 is a table summarizing some experimental test

35 setups using the tool of FIG. 10;

FIG. 12 is a table summarizing some additional experimen­

tal test setups using the tool of FIG. 10; and

FIG. 13 is a graph providing experimental test results obtained after using the tool of FIG. 10.

provided. The method comprises subjecting the substrate to a 40

rotary movement, supplying liquid to at least a part of said surface of said substrate, and supplying a gaseous substance to at least a section of said surface of said substrate, supplying a gaseous substance being performed, at least a part of the

DETAILED DESCRIPTION

FIG. 1 depicts a side view of a tool 100 used for removing a liquid from a substrate 104. The tool 100 is substantially

time, simultaneously with supplying a liquid, wherein the

supplying of a liquid and the supplying of a gaseous substance cooperatively remove liquid from at least a portion of one surface of a substrate.