belyaev_a_e_konakova_r_v_red_karbid_kremniya_tehnologiya_svo

114 ǮȑȓȓȐ Ǽ.Ǯ., ǯȓșȭȓȐ Ǯ.dz., ǯȜșȠȜȐȓȤ ǻ.ǿ., ǸȖȟȓșȓȐ ǰ.ǿ., ǸȜțȎȘȜȐȎ Ǿ.ǰ. Ȗ ȒȞ.

ȠȞȜȓȞȎȕȞȡȦȓțȖȓ. ǵțȎȥȖȠȓșȪțȡȬ ȥȎȟȠȪ ȎȞȚȎȠȡȞȩ (ȠȖȑȓșȪ, ȒȓȞȔȎȠȓșȪ ȕȎȠȞȎȐȘȖ) ȚȜȔțȜȖȟȝȜșȪȕȜȐȎȠȪȒșȭȝȞȜȐȓȒȓțȖȭȠȜșȪȘȜȜȒțȜȑȜȝȞȜȤȓȟȟȎ. ǾȓȦȓțȖȓȚ ȝȞȜȏșȓȚȩ, ȐȜȕȚȜȔțȜ, ȭȐșȭȓȠȟȭ ȖȟȝȜșȪȕȜȐȎțȖȓ ȚȓȠȜȒȎ ȏȓȕ ȘȜțȠȓȗțȓȞțȜȗ ȔȖȒȘȜȟȠțȜȗ ȫȝȖȠȎȘȟȖȖ, ȝȞȖ ȘȜȠȜȞȜȚ ȔȖȒȘȎȭ ȢȎȕȎ țȓ ȖȚȓȓȠ ȘȜțȠȎȘȠȎ ȟ ȘȎȘȖȚ-șȖȏȜ ȠȖȑșȓȚ. ǽȞȜȤȓȟȟ ȝȞȜȐȜȒȖȠȟȭ Ȑ ȟȞȓȒȓ ȑȓșȖȭ. ǸȞȓȚțȖȗ țȎȑȞȓȐȎȬȠ ȒȜ 1000°ǿ, ȫȠȜ ȟȠȎȞȠȜȐȩȗ ȞȎȕȜȑȞȓȐ Ȓșȭ ȒȜȟȠȖȔȓțȖȭȚȓȠȎșșȖȥȓȟȘȜȗȝȞȜȐȜȒȖȚȜȟȠȖ. ǵȎȠȓȚȐȚȎȑțȖȠțȜȚȝȜșȓSi ȝȞȖȐȜȒȭȠȐȜȐȕȐȓȦȓțțȜȓȟȜȟȠȜȭțȖȓȖȞȎȟȝșȎȐșȭȬȠ. ǰȞȎȟȝșȎȐșȓțțȜȚ ȘȞȓȚțȖȖȟȜȕȒȎȬȠțȎȟȩȧȓțțȩȗȞȎȟȠȐȜȞȡȑșȓȞȜȒȎȖȝȞȜȐȜȒȭȠȫȝȖȠȎȘȟȖȬ ȝȞȖȠȓȚȝȓȞȎȠȡȞȓ1550 1700°ǿ. ȀȎȘȖȚȜȏȞȎȕȜȚ, ȝȜșȡȥȎșȖȒȜȟȠȎȠȜȥțȜ ȟȜȐȓȞȦȓțțȩȓ Ȟ-n ȝȓȞȓȣȜȒȩ, ȖȕșȡȥȎȬȧȖȓ Ȑ ȟȖțȓ-ȢȖȜșȓȠȜȐȜȗ ȜȏșȎȟȠȖ ȟȝȓȘȠȞȎ [8 12].

ǾȎțțȖȓȞȎȏȜȠȩȝȜȔȖȒȘȜȟȠțȜȗȫȝȖȠȎȘȟȖȖȝȞȜȐȜȒȖșȖȟȪȐȜȟțȜȐțȜȚ c ȤȓșȪȬȞȎȕȞȎȏȜȠȘȖȠȓȣțȜșȜȑȖȖȟȐȓȠȜȒȖȜȒȜȐȒșȭȟȖțȓȗȜȏșȎȟȠȖȟȝȓȘȠȞȎ. ǽȜȫȠȜȚȡ ȡȞȜȐȓțȪ ȠȓȣțȜșȜȑȖȖ ȚȜȔțȜ ȏȩșȜ ȜȤȓțȖȠȪ ȝȜ ȐȓșȖȥȖțȓ ȘȐȎțȠȜȐȜȑȜ ȐȩȣȜȒȎ ȠȎȘȖȣ ȟȐȓȠȜȒȖȜȒȜȐ. ǰ ȠȎȏșȖȤȓ 6.1 ȝȞȓȒȟȠȎȐșȓțȩ ȟȞȎȐțȖȠȓșȪțȩȓ ȣȎȞȎȘȠȓȞȖȟȠȖȘȖ ȝȜ ȞȓȕȡșȪȠȎȠȎȚ ȞȭȒȎ ȞȎȏȜȠ.

ǴȖȒȘȜȟȠțȎȭ ȫȝȖȠȎȘȟȖȭ Ȗȕ ȞȎȟȝșȎȐȎ Si + C ȣȎȞȎȘȠȓȞȖȕȡȓȠȟȭ țȖȕȘȖȚȖ ȟȘȜȞȜȟȠȭȚȖ ȘȞȖȟȠȎșșȖȕȎȤȖȖ Ȗȕ-ȕȎ țȖȕȘȜȗ ȞȎȟȠȐȜȞȖȚȜȟȠȖ ȡȑșȓȞȜȒȎ Ȑ ȘȞȓȚțȖȖ. ȁȐȓșȖȥȓțȖȭ ȞȎȟȠȐȜȞȖȚȜȟȠȖ ȚȜȔțȜ ȒȜȏȖȠȪȟȭ, ȓȟșȖȐȞȎȟȝșȎȐȘȞȓȚțȖȭȐȐȜȒȖȠȪȞȭȒȚȓȠȎșșȜȐFe, Ni, Co, Zr ȖȞȓȒȘȜȕȓȚȓșȪțȩȓ ȚȓȠȎșșȩ (ǾǵǺ). ǰ ȞȎȏȜȠȓ [14] ȖȟȟșȓȒȜȐȎșȖ ȐșȖȭțȖȓ ȒȜȏȎȐȜȘTi ȖGe ȐȞȎȟȝșȎȐȘȞȓȚțȖȭȝȞȖȐȩȞȎȧȖȐȎțȖȖȘȞȖȟȠȎșșȜȐ SiC. Ti ȡȐȓșȖȥȖȐȎȓȠ ȜȏȞȎȕȜȐȎțȖȓ ȝȞȓȤȖȝȖȠȎȠȜȐ 6ǻ, Ȏ ȑȓȞȚȎțȖȗ – 6ǻ Ȗ 4ǻ. ǼȒțȎȘȜ ȝȜ ȟȞȎȐțȓțȖȬ ȟ ȞȜȟȠȜȚ Ȑ ȥȖȟȠȜȚ ȘȞȓȚțȖȖ ȟȘȜȞȜȟȠȪ ȞȜȟȠȎ Ȑ ȞȎȟȝșȎȐȓ Si – 30 ȎȠȚ% Ti ȐȜȕȞȎȟȠȎȓȠ Ȑ 5 ȞȎȕ.

ǽȞȖȚȓțȓțȖȓ ǾǵǺ ȝȜȕȐȜșȭȓȠ ȟțȖȕȖȠȪ ȠȓȚȝȓȞȎȠȡȞȡ ȝȞȜȤȓȟȟȎ ȘȞȖȟȠȎșșȖȕȎȤȖȖȘȎȞȏȖȒȎȘȞȓȚțȖȭȒȜ1500°ǿ. ǿȤȓșȪȬȒȎșȪțȓȗȦȓȑȜ ȡȐȓșȖȥȓțȖȭ ȞȎȟȠȐȜȞȖȚȜȟȠȖ ȡȑșȓȞȜȒȎ ȝȞȓȒșȎȑȎȓȠȟȭ ȖȟȝȜșȪȕȜȐȎȠȪ ȠȞȜȗțȩȓȞȎȟȠȐȜȞȩSi-Ti-C [15 17]. ǮȐȠȜȞȩ[17] ȝȞȜȐȓșȖȞȎȟȥȓȠȠȞȜȗțȜȗ ȢȎȕȜȐȜȗ ȒȖȎȑȞȎȚȚȩ ȟ ȝȜȚȜȧȪȬ ȚȓȠȜȒȎ CALPHAD (Calculation of Phase Diagrams), ȞȖȟ. 6.2. ǽȞȖ ȫȠȜȚ ȖȟȝȜșȪȕȜȐȎșȖȟȪ ȠȓȞȚȜȒȖțȎ- ȚȖȥȓȟȘȖȓȝȎȞȎȚȓȠȞȩȒșȭSi-C, Si-X ȖX-C ȖȣȜȞȜȦȜȖȕȐȓȟȠțȩȓ ȏȖțȎȞ-

ǾȖȟ. 6.2. ǾȎȟȠȐȜȞȖȚȜȟȠȪȡȑșȓȞȜȒȎ C ȝȞȖȠȓȚȝȓȞȎȠȡȞȓȞȜȟȠȎȘȎȘȢȡțȘȤȖȭȟȜȟȠȎȐȎȞȎȟȠȐȜȞȎ. ǾȎȟȥȓȠȝȜ ȝȞȜȑȞȎȚȚȓ CALPHAD [17]

116 ǮȑȓȓȐ Ǽ.Ǯ., ǯȓșȭȓȐ Ǯ.dz., ǯȜșȠȜȐȓȤ ǻ.ǿ., ǸȖȟȓșȓȐ ǰ.ǿ., ǸȜțȎȘȜȐȎ Ǿ.ǰ. Ȗ ȒȞ.

țȩȓ ȢȎȕȜȐȩȓ ȒȖȎȑȞȎȚȚȩ. ǽȞȖ ȖȟȝȜșȪȕȜȐȎțȖȖ ȠȞȜȗțȩȣ ȞȎȟȠȐȜȞȜȐ ȟȘȜȞȜȟȠȪ ȞȜȟȠȎ ȐȜȕȞȎȟȠȎȓȠ ȒȜ 12 ȚȘȚ/ȥȎȟ. Dzșȭ ȟȞȎȐțȓțȖȭ ȟȘȜȞȜȟȠȪ ȞȜȟȠȎ Ȗȕ ȞȎȟȝșȎȐȎ ȘȞȓȚțȖȭ țȓ ȝȞȓȐȩȦȎȓȠ 2 ȚȘȚ/ȥȎȟ.

ǰ ȞȎȏȜȠȓ [18] Ȓșȭ ȐȩȞȎȧȖȐȎțȖȭ ȚȜțȜȘȞȖȟȠȎșșȜȐ ȝȞȓȒșȎȑȎȓȠȟȭ ȖȟȝȜșȪȕȜȐȎȠȪ ȚȓȠȜȒ ȡȟȘȜȞȓțțȜȑȜ ȐȞȎȧȓțȖȭ (accelerated crucible rotation technique ACRT). ǶȟȝȜșȪȕȡȓȠȟȭ ȠȞȜȗțȜȗ ȞȎȟȠȐȜȞ Si-Ti-C. ǽȜȟșȓ ȞȎȟȝșȎȐșȓțȖȭ ȟȚȓȟȖ Si0.77-Ti0.23 Ȗ ȒȜȟȠȖȔȓțȖȭ ȠȓȚȝȓȞȎȠȡȞȩ 1600 1760°ǿ ȕȎȠȞȎȐȜȥțȩȗ ȘȞȖȟȠȎșș ȝȜȑȞȡȔȎȬȠ Ȑ ȠȖȑȓșȪ. ǼȏȜȞȡȒȜȐȎțȖȓ ȜȏȓȟȝȓȥȖȐȎȓȠ ȐȟȠȞȓȥțȜȓ ȐȞȎȧȓțȖȓ ȠȖȑșȭ Ȗ ȕȎȠȞȎȐȘȖ ȟ ȝȓȞȖȜȒȖȥȓȟȘȖȚ ȖȕȚȓțȓțȖȓȚ țȎȝȞȎȐșȓțȖȭ ȐȞȎȧȓțȖȭ. ǿȘȜȞȜȟȠȪ ȞȜȟȠȎ ȘȞȖȟȠȎșșȜȐ ȝȞȓȐȩȦȎȓȠ 200 ȚȘȚ/ȥȎȟ Ȗ Ȑ ȘȞȖȟȠȎșșȎȣ ȜȠȟȡȠȟȠȐȡȬȠ ȝȜȟȠȜȞȜțțȖȓ ȐȘșȬȥȓțȖȭ.

ǼȒțȖȚȖȕȐȎȞȖȎțȠȜȐȚȓȠȜȒȎȘȞȖȟȠȎșșȖȕȎȤȖȖȖȕȞȎȟȠȐȜȞȜȐ–ȞȎȟ- ȝșȎȐȜȐȭȐșȭȓȠȟȭȚȓȠȜȒȝșȎȐȎȬȧȓȗȕȜțȩ[19 26], ȞȖȟ. 6.3Ȏ. dzȑȜȟȡȠȪ ȕȎȘșȬȥȎȓȠȟȭ ȐȟșȓȒȡȬȧȓȚ: ȚȓȔȒȡȒȐȡȚȭȘȞȖȟȠȎșșȎȚȖȝȜȚȓȧȎȓȠȟȭ ȢȜșȪȑȎ Ȗȕ ǾǵǺ ȠȜșȧȖțȜȗ 50 100 ȚȘȚ. ǰ ȘȎȥȓȟȠȐȓ ȝȜȒșȜȔȓȘ ȖȟȝȜșȪȕȡȬȠȟȭ ȟȞȎȐțȖȠȓșȪțȜ ȠȜșȟȠȩȓ ȘȞȖȟȠȎșșȩ ȏȜșȪȦȜȗ ȝșȜȧȎȒȖ. ǿȫțȒȐȖȥ ȝȜȚȓȧȎȓȠȟȭ Ȑ ȠȓȝșȜȐȜȓ ȝȜșȓ ȟ ȏȜșȪȦȖȚ ȑȞȎȒȖȓțȠȜȚ ȠȓȚȝȓȞȎȠȡȞȩ. ǿȘȜȞȜȟȠȪ ȝȓȞȓȘȞȖȟȠȎșșȖȕȎȤȖȖ ȝȞȖ Ȁ= 1800 2000°ǿ ȟȜȟȠȎȐșȭȓȠ100 300 ȚȘȚ/ȥȎȟ. ǽȞȜȤȓȟȟȝȞȜȐȜȒȖȠȟȭȐȎȠȚȜȟȢȓȞȓȑȓșȖȭ ȝȞȖ ȒȎȐșȓțȖȖ 1.5 2 ȎȠȚ. ǰ ȘȎȥȓȟȠȐȓ ȞȎȟȠȐȜȞȖȠȓșȓȗ ȖȟȝȜșȪȕȡȬȠȟȭ ȒȖȟȝȞȜȕȖȗ, ȑȎȒȜșȖțȖȗ, ȠȡșșȖȗ Ȗ ȠȓȞȏȖȗ. ǰ ȞȎȏȜȠȓ [27] ȝȞȓȒșȜȔȓ-

țȜ ȖȟȝȜșȪȕȜȐȎȠȪ ȚȓȠȜȒ ȝșȎȐȎȬȧȓȗ ȕȜțȩ Ȓșȭ ȝȜșȡȥȓțȖȭ ȘȞȖȟȠȎșșȜȐ 3C-SiC, Ȓșȭ ȫȠȜȑȜ ȚȓȔȒȡ ȟȠȓȞȔțȭȚȖ Ȗȕ ȝȜșȖȘȞȖȟȠȎșșȖȥȓȟȘȜȑȜ ȘȎȞȏȖȒȎ ȘȞȓȚțȖȭ Ȑ ȘȎȥȓȟȠȐȓ ȞȎȟȠȐȜȞȖȠȓșȭ ȝȜȚȓȧȎșȖ ȘȞȓȚțȖȗ, ȞȖȟ. 6.3ȏ. ǰ ȒȎșȪțȓȗȦȓȚ ȏȩșȜ ȝȞȓȒșȜȔȓțȜ Ȑ ȘȎȥȓȟȠȐȓ ȖȟȠȜȥțȖȘȎ Ȗ ȕȎȠȞȎȐȘȖ ȖȟȝȜșȪȕȜȐȎȠȪ ȚȜțȜȘȞȖȟȠȎșșȩ ȘȎȞȏȖȒȎ ȘȞȓȚțȖȭ. ǰ ȞȓȕȡșȪȠȎȠȓ ȝȜșȡȥȓțȩ ȘȞȖȟȠȎșșȩ ȘȡȏȖȥȓȟȘȜȑȜ SiC, ȝȞȖ ȫȠȜȚ ȟȘȜȞȜȟȠȪ ȞȜȟȠȎ ȟȜȟȠȎȐșȭșȎ 150 ȚȘȚ/ȥȎȟ.

ȁȟȠȎțȜȐșȓțȜ, ȥȠȜ ȝȞȖ ȔȖȒȘȜȟȠțȜȗ ȫȝȖȠȎȘȟȖȖ ȝȞȜȖȟȣȜȒȖȠ ȕȎșȓȥȖȐȎțȖȓ ȠȎȘȖȣ ȣȎȞȎȘȠȓȞțȩȣ Ȓșȭ SiC ȒȓȢȓȘȠȜȐ, ȘȎȘ ȚȖȘȞȜȠȞȡȏȘȖ. ǻȎȏșȬȒȓțȖȭ ȝȜȘȎȕȩȐȎȬȠ, ȥȠȜ ȘȎțȎș ȚȖȘȞȜȠȞȡȏȘȖ, ȝȞȜȣȜȒȭȧȖȗ ȥȓȞȓȕ ȝȜȒșȜȔȘȡ, țȓȝȞȓȞȩȐțȜ ȡȚȓțȪȦȎȓȠȟȭ ȐȜ ȐȞȓȚȭ ȝȞȜȐȓȒȓțȖȭ ȔȖȒȘȜȢȎȕțȜȗȫȝȖȠȎȘȟȖȖ. ǰȘȜțȤȓȘȜțȤȜȐȚȖȘȞȜȠȞȡȏȘȎȕȎȘȞȩȐȎȓȠȟȭ ȢȜȞȚȖȞȡȭȣȜșȚȖȘțȎȝȜȐȓȞȣțȜȟȠȖȫȝȖȠȎȘȟȖȎșȪțȜȑȜȟșȜȭ. ǺȓȠȜȒ LPE ȝȜȟȞȎȐțȓțȖȬ ȟCVD ȝȜȕȐȜșȭȓȠ șȡȥȦȓȡȝȞȎȐșȭȠȪ ȟȠȡȝȓțȥȎȠȩȚ ȞȜȟȠȜȚ Ȗ ȘȜțȠȞȜșȖȞȜȐȎȠȪ ȜȏȞȎȕȜȐȎțȖȓ ȝȜșȖȠȖȝȜȐ [28].

118 ǮȑȓȓȐ Ǽ.Ǯ., ǯȓșȭȓȐ Ǯ.dz., ǯȜșȠȜȐȓȤ ǻ.ǿ., ǸȖȟȓșȓȐ ǰ.ǿ., ǸȜțȎȘȜȐȎ Ǿ.ǰ. Ȗ ȒȞ.

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8.DzȚȖȠȞȖȓȐ ǰ.Ǯ., ǶȐȎțȜȐ ǽ.Ǯ., ǸȜȞȘȖț Ƕ.ǰ., ǺȜȞȜȕȓțȘȜ ȍ.ǰ., ǶȜțȜȐ Ƕ.ǰ., ǿȖȒȜȞȜȐȎ Ȁ.Ǯ., ǿȠȞȓșȪȥȡȘ Ǯ.Ǻ., ȅȓșțȜȘȜȐ ǰ.dz. ǸȎȞȏȖȒȘȞȓȚțȖȓȐȩȓ ȟȠȞȡȘȠȡȞȩ, ȝȜșȡȥȓțțȩȓ ȔȖȒȘȜȟȠțȜȗ ȫȝȖ-

ȠȎȘȟȖȓȗ // ǽȖȟȪȚȎ Ȑ ǴȀȂ. – 1985. – 11, Ɋ4. – C. 238–241.

9.DzȚȖȠȞȖȓȐ ǰ.Ǯ., ǶȐȎțȜȐ ǽ.Ǯ., ǺȜȞȜȕȓțȘȜ ȍ.ǰ., ǽȜȝȜȐ Ƕ.ǰ. ǸȎȞȏȖȒȘȞȓȚțȖȓȐȩȓ ȟȠȞȡȘȠȡȞȩ, ȝȜșȡȥȓțțȩȓ ȔȖȒȘȜȟȠțȜȗ ȫȝȖ-

ȠȎȘȟȖȓȗ // ǽȖȟȪȚȎ Ȑ ǴȀȂ. – 1985. – 11, Ɋ4. – C. 246–248.

10.DzȚȖȠȞȖȓȐ ǰ.Ǯ., ǽȜȝȜȐ Ƕ.ǰ., ȅȓșțȜȘȜȐ ǰ.dz. ǽȜșȡȥȓțȖȓ ȟȠȞȡȘȠȡȞ SiC Ȗȕ ȔȖȒȘȜȗ ȢȎȕȩ ȐȜ ȐȕȐȓȦȓțțȜȚ ȟȜȟȠȜȭțȖȖ // ǽȞȜȤȓȟȟȩ ȞȜȟȠȎ ȝȜșȡȝȞȜȐȜȒțȖȘȜȐȩȣ ȘȞȖȟȠȎșșȜȐ Ȗ ȝșȓțȜȘ. – ǻȜȐȜȟȖ-

ȏȖȞȟȘ: ǻȎȡȘȎ, 1988. – C. 74–81.

11.DzȚȖȠȞȖȓȐ ǰ.Ǯ., ȅȓȞȓțȘȜȐ Ǯ.dz. ǹȓȑȖȞȜȐȎțȖȓ ȘȎȞȏȖȒȎ ȘȞȓȚțȖȭ ȎȕȜȠȜȚ ȝȞȖ ȏȓȟȘȜțȠȓȗțȓȞțȜȗ ȔȖȒȘȜȟȠțȜȗ ȫȝȖȠȎȘȟȖȖ // ǽȖȟȪ-

ȚȎ Ȑ ǴȀȂ. – 1991. – 17, Ɋ4. – C. 43–46.

12.DzȚȖȠȞȖȓȐ ǰ.Ǯ., ǸȜȑȎț ǹ.Ǻ., ǺȜȞȜȕȓțȘȜ ȍ.ǰ., ǽȜȝȜȐ Ƕ.ǰ., ǾȜȒȘȖț ǰ.ǿ., ȅȓșțȜȘȜȐ ǰ.dz. ǶțȒȖȘȎȠȜȞȩ ȟ ȟȖțȖȚ ȟȐȓȥȓțȖȓȚ țȎ ȜȟțȜȐȓ ȘȎȞȏȖȒȎ ȘȞȓȚțȖȭ, ȐȩȞȎȧȓțțȜȑȜ ȏȓȟȘȜțȠȓȗțȓȞțȜȗ ȔȖȒȘȜȟȠțȜȗ ȫȝȖȠȎȘȟȖȓȗ // ǽȖȟȪȚȎ Ȑ ǴȀȂ. – 1986. – 12, Ɋ7. –

C.385–388.

13.Knippenberg M.F., Verspui G. The preparation of large single crystals of SiC polytypes by precipitation from solutions // Philips Res. Reports. – 1966. – 21. – P. 113.

14.Syvaryari M., Yakimova R., Ivanov I. G., Janzen E. Growth of 4H-SiC from liquid phase // Mater. Sci. Eng. – 1997. – B 46. –

P.329–332.

15.Tanaka R., Seki K., Komiyama S., Ujihara T., Takeda Y. Solution growth of SiC crystals in Si-Ti and Si-Ge-Ti solvents // Mater.Sci.Forum. – 2009. – 615–617. – P. 59–62.

16.Kusunoki K., Munetoh S., Kamei K., Hasebe M., Ujihara T., Nakajima K. Solution Growth of Self-Standing 6H-SiC Single Crystal Using Metal Solven // Mater. Sci. Forum. – 2004. – 457– 460. – P. 123–126.

17.Nobuyoshi Yashiro, Kazuhiko Kusunoki, Kazuhito Kamei, Mitsuhiro Hasebe, Toru Ujihara, Kazuo Nakajima. Growth of SiC Single Crystal from Si-C-(Co, Fe) Ternary Solution // Mater. Sci. Forum. – 2006. – 527–529. – P. 115–118.

18.Kusunoki K., Kamei K., Okada N., Yashiro N., Yauchi A., Ujihara T., Nakajima K. Solution Growth of SiC Crystal with High Growth Rate Using Accelerated Crucible Rotation Technique // Mater. Sci. Forum. – 2006. – 527–529. – P. 119–122.

122 ǮȑȓȓȐ Ǽ.Ǯ., ǯȓșȭȓȐ Ǯ.dz., ǯȜșȠȜȐȓȤ ǻ.ǿ., ǸȖȟȓșȓȐ ǰ.ǿ., ǸȜțȎȘȜȐȎ Ǿ.ǰ. Ȗ ȒȞ.

ȧȖțȜȗ 0.1 1.2 ȚȘȚ ȜȟȎȔȒȎșȖ țȎ Si (001) ȝȜȒșȜȔȘȖ Ȑ ȎȠȚȜȟȢȓȞȓ Ar ȝȞȖ ȒȎȐșȓțȖȖ 0.65 ǽȎ ȝȞȖ ȠȓȚȝȓȞȎȠȡȞȎȣ 20 Ȗ 250°ǿ. ǶȕȜȠȓȞȚȖȥȓȟȘȖȗ ȜȠȔȖȑ ȝȞȖ ȠȓȚȝȓȞȎȠȡȞȎȣ _800 1000°ǿ ȝȞȜȐȜȒȖșȟȭ Ȑ ȐȎȘȡȡȚȓ. DzșȖȠȓșȪțȜȟȠȪ ȜȠȔȖȑȎ ȐȎȞȪȖȞȜȐȎșȖ Ȑ ȝȞȓȒȓșȎȣ 0.1 20 ȥȎȟ. ǿȐȓȔȓȝȞȖȑȜȠȜȐșȓțțȩȓ ȝșȓțȘȖ ȏȩșȖ ȎȚȜȞȢțȩȚȖ. ǽȞȖ ȠȓȚȝȓȞȎȠȡȞȎȣ ȜȠȔȖȑȎ ȝȞȓȐȩȦȎȬȧȖȣ 1000°ǿ ȝȞȜȖȟȣȜȒȖșȎ ȘȞȖȟȠȎșșȖȕȎȤȖȭ B-SiC. ǸȞȖȟȠȎșșȖȕȎȤȖȭ țȜȟȖșȎ ȑȜȚȜȑȓțțȩȗ ȣȎȞȎȘȠȓȞ Ȗ țȓ ȕȎȐȖȟȓșȎ ȜȠ ȠȜșȧȖțȩȝșȓțȜȘȖȠȓȚȝȓȞȎȠȡȞȩȝȜȒșȜȔȓȘȝȞȖ ȜȟȎȔȒȓțȖȖ. ǾȎȕȚȓȞ ȕȓȞȓț ȟȜȟȠȎȐșȭș 30 țȚ, Ȏ ȫțȓȞȑȖȭ ȘȞȖȟȠȎșșȖȕȎȤȖȖ – 5.0 ȫǰ.

ǸȎȠȜȒțȜȓ ȞȎȟȝȩșȓțȖȓ. ǽȞȖ ȘȎȠȜȒțȜȚ ȞȎȟȝȩșȓțȖȖ ȚȓȔȒȡ ȘȎȠȜȒȜȚ Ȗ ȎțȜȒȜȚ ȝȜȒȒȓȞȔȖȐȎȓȠȟȭ ȝȜȟȠȜȭțțȜȓ țȎȝȞȭȔȓțȖȓ ȐțȓȟȘȜșȪȘȜ Ƞȩȟȭȥ ȐȜșȪȠ. ǸȎȠȜȒ ȒȓșȎȬȠ Ȗȕ ȞȎȟȝȩșȭȓȚȜȑȜ ȐȓȧȓȟȠȐȎ, Ȏ ȎțȜȒȜȚ ȟșȡȔȖȠ ȝȜȒșȜȔȘȎ. ǿȖȟȠȓȚȡ ȕȎȝȜșțȭȬȠ ȎȞȑȜțȜȚ ȝȞȖ ȒȎȐșȓțȖȭȣ 10 1 10 2 ȀȜȞȞ. ǶȜțȩ ȎȞȑȜțȎ, ȜȏȞȎȕȡȬȧȖȓȟȭ Ȑ ȑȎȕȓ, ȏȜȚȏȎȞȒȖȞȡȬȠ ȘȎȠȜȒ Ȗ ȐȩȏȖȐȎȬȠ ȥȎȟȠȖȤȩ ȐȓȧȓȟȠȐȎ, ȘȜȠȜȞȩȓ ȒȐȖȔȡȠȟȭ Ș ȝȜȒșȜȔȘȓ Ȗ ȜȏȞȎȕȡȬȠ ȝșȓțȘȡ.

ȋțȓȞȑȖȭ ȥȎȟȠȖȤ ȜȝȞȓȒȓșȭȓȠȟȭ ȐȓșȖȥȖțȜȗ ȡȟȘȜȞȭȬȧȓȑȜ țȎȝȞȭȔȓțȖȭ, ȒȎȐșȓțȖȓȚ Ar Ȗ ȕȎȐȖȟȖȠ ȜȠ țȎȝȞȭȔȓțȖȭ ȟȚȓȧȓțȖȭ VȟȚ, ȝȜȒȎȐȎȓȚȜȑȜ țȎ ȝȜȒșȜȔȘȡ. ȋȠȖ ȝȎȞȎȚȓȠȞȩȝȜȕȐȜșȭȬȠȡȝȞȎȐșȭȠȪ ȝȞȜȤȓȟȟȜȚ ȜȟȎȔȒȓțȖȭ Ȗ ȟȐȜȗȟȠȐȎȚȖ ȝșȓțȘȖ. ȀȓȚȝȓȞȎȠȡȞȡ ȝȜȒșȜȔȘȖ ȘȜțȠȞȜșȖȞȡȬȠ ȟ ȝȜȚȜȧȪȬ ȒȜȝȜșțȖȠȓșȪțȜȑȜțȎȑȞȓȐȎȠȓșȭ/ȜȣșȎȒȖȠȓșȭ. ȀȖȝȖȥțȩȓȝȎȞȎȚȓȠȞȩ:

PAr= (10 1 10 2) ȀȜȞȞ, ȡȟȘȜȞȭȬȧȓȓ țȎȝȞȭȔȓțȖȓ V= (2 5) Șǰ,

(ȞȖȟ. 7.1a).

ǽȞȖ ȚȓȠȜȒȓ ȞȓȎȘȠȖȐțȜȑȜ ȞȎȟ-

ȝȩșȓțȖȭ Ȑ ȐȎȘȡȡȚțȡȬ ȟȖȟȠȓȚȡ ǾȖȟ. 7.1. ǽȞȖțȤȖȝȖȎșȪțȩȓ ȟȣȓȚȩ

ȐȐȜȒȭȠ ȞȓȎȑȓțȠțȩȗ ȑȎȕ. Ǽț ȟȜ- ȡȟȠȎțȜȐȜȘ Ȓșȭ: (Ȏ) – ȘȎȠȜȒțȜȑȜ ȞȎȟ- ȓȒȖțȭȓȠȟȭ ȟ ȥȎȟȠȖȤȎȚȖ ȘȎȠȜȒȎ, ȝȩșȓțȖȭ, (ȏ) – ȚȜșȓȘȡșȭȞțȜ-șȡȥȓȐȜȗ

ȠȎȘ ȥȠȜ țȎ ȝȜȒșȜȔȘȓ ȜȟȎȔȒȎȓȠȟȭ ȫȝȖȠȎȘȟȖȖ

ȟșȜȗ ȟȜȓȒȖțȓțȖȭ ȐȓȧȓȟȠȐȎ ȘȎȠȜȒȎ ȟ ȞȓȎȑȓțȠțȩȚ ȑȎȕȜȚ. ȀȞȓȏȡȓȚȜȓ țȎȝȞȭȔȓțȖȓ ȟȜȟȠȎȐșȭȓȠ țȓȟȘȜșȪȘȜ ȘȖșȜȐȜșȪȠ, Ȏ ȒȎȐșȓțȖȓ ȑȎȕȎ ȜȠ 10 1 ȒȜ 10 3 ȀȜȞȞ. ǽȞȖ ȖȟȝȜșȪȕȜȐȎțȖȖ țȓȟȘȜșȪȘȖȣ ȘȎȠȜȒȜȐ ȚȜȔțȜ ȝȜșȡȥȎȠȪ ȚțȜȑȜȘȜȚȝȜțȓțȠțȩȓ ȝșȓțȘȖ.

ǽȞȖ ȞȎȟȝȩșȓțȖȖ ȟ ȑȓȠȠȓȞȖȞȜȐȎțȖȓȚ, ȝȞȓȔȒȓ ȥȓȚ țȎȥȖțȎȓȠȟȭ ȜȏȞȎȕȜȐȎțȖȓ ȝșȓțȘȖ ȕȎ ȟȥȓȠ ȘȎȠȜȒțȜȑȜ ȞȎȟȝȩșȓțȖȭ, Ȗȕ ȑȎȕȎ ȕȎ ȟȥȓȠ ȞȓȎȘȠȖȐțȜȑȜ ȞȎȟȝȩșȓțȖȭ ȡȒȎșȭȬȠȟȭ (ȑȓȠȠȓȞȖȞȡȬȠȟȭ) ȣȖȚȖȥȓȟȘȖ ȎȘȠȖȐțȩȓȟȜȟȠȎȐșȭȬȧȖȓ. ȋȠȜȠȚȓȠȜȒȒȎȓȠȝșȓțȘȖȐȩȟȜȘȜȗȥȖȟȠȜȠȩ. ǰȠȖȝȖȥțȜȗȡȟȠȎțȜȐȘȓȒșȭțȎȝȩșȓțȖȭȟȑȓȠȠȓȞȖȞȜȐȎțȖȓȚȐȟȖȟȠȓȚȓ ȘȞȜȚȓ ȜȏȩȥțȜȗ ȝȜȒșȜȔȘȖ, ȎțȜȒȎ, ȖȚȓȓȠȟȭ ȐȠȜȞȜȗ ȎțȜȒ. ȋȠȜȠ ȎțȜȒ ȖȚȓȓȠ ȢȜȞȚȡ ȫȘȞȎțȎ, ȜȘȞȡȔȎȬȧȓȑȜ ȘȎȠȜȒ Ȗ ȝȜȒșȜȔȘȡ. ǿțȎȥȎșȎ ȝȜȒșȜȔȘȡ ȕȎȘȞȩȐȎȬȠ ȕȎȟșȜțȘȜȗ, ȥȠȜȏȩ ȝȞȓȒȜȠȐȞȎȠȖȠȪ ȜȟȎȔȒȓțȖȓ ȝșȓțȘȖ, Ȗ Ȑȟȓ ȣȖȚȖȥȓȟȘȖ ȎȘȠȖȐțȩȓ ȑȎȕȩ ȐțȡȠȞȖ ȫȘȞȎțȎ ȡȒȎșȭȬȠ ȕȎ ȟȥȓȠ ȝȜȑșȜȧȓțȖȭ Ȑ ȚȓȠȎșșȓ, ȞȎȟȝȩșȓțțȜȚ Ȗȕ ȘȎȠȜȒȎ Ȗ ȜȟȓȐȦȓȚ țȎȟȠȓțȘȎȣ ȘȎȚȓȞȩ. ǰȞȓȕȡșȪȠȎȠȓ ȫȠȜȑȜȒȎȐșȓțȖȓ ȣȖȚȖȥȓȟȘȖ ȎȘȠȖȐțȩȣ ȑȎȕȜȐ ȚȜȔțȜ ȡȚȓțȪȦȖȠȪ ȒȜ 10 10 ȀȜȞȞ. ǽȜȟșȓ ȑȓȠȠȓȞȖȞȜȐȎțȖȭ ȕȎȟșȜțȘȡ ȜȠȐȜȒȭȠ Ȗ ȘȎȠȜȒ ȞȎȟȝȩșȭȬȠ țȎ ȝȜȒșȜȔȘȡ.

ǺȎȑțȓȠȞȜțțȜȓȞȎȟȝȩșȓțȖȓȜȠșȖȥȎȓȠȟȭȝȞȖȚȓțȓțȖȓȚȚȎȑțȖȠțȜȑȜȝȜșȭ. DzșȭȟȜȕȒȎțȖȭȡȟȘȜȞȭȬȧȓȑȜȝȜșȭȚȜȔȓȠȖȟȝȜșȪȕȜȐȎȠȪȟȭȘȎȘ ȝȜȟȠȜȭțțȜȓ, ȠȎȘȖȐȩȟȜȘȜȥȎȟȠȜȠțȜȓ țȎȝȞȭȔȓțȖȓ. ǰȞȭȒȓȞȎȏȜȠȏȩșȖ ȝȜșȡȥȓțȩȖȖȟȟșȓȒȜȐȎțȩȠȜțȘȖȓȝșȓțȘȖSiC [4 10]. ȀȎȘ Ȑ ȞȎȏȜȠȓ [8] ȞȓȎȘȠȖȐțȜȓȚȎȑțȓȠȞȜțțȜȓȞȎȟȝȩșȓțȖȓȖȟȝȜșȪȕȜȐȎșȖȒșȭȝȜșȡȥȓțȖȭ ȎȚȜȞȢțȩȣȑȖȒȞȜȑȓțȖȕȖȞȜȐȎțțȩȣB-SiC:H ȝșȓțȜȘ. ǰ ȘȎȥȓȟȠȐȓȞȎȏȜȥȓȑȜȑȎȕȎȖȟȝȜșȪȕȜȐȎșȎȟȪȟȚȓȟȪ Ar (60%)+ CH4 (40%). ǽȓȞȓȒțȎȝȩșȓțȖȓȚ ȞȎȏȜȥȖȗ ȜȏȨȓȚ ȜȠȘȎȥȖȐȎșȟȭ ȒȜ 2¸10 7 ȀȜȞȞ. ǽȜȒȜȑȞȓȐ ȝȜȒșȜȔȘȖ ȜȟȡȧȓȟȠȐșȭșȟȭȑȎșȜȑȓțțȩȚȖșȎȚȝȎȚȖȒȜ ȠȓȚȝȓȞȎȠȡȞȩ200°ǿ. ǵȎȠȓȚ ȘȎȚȓȞȎțȎȝȜșțȭșȎȟȪȟȚȓȟȪȬȎȞȑȜțȎ-ȚȓȠȎțȎȝȞȖ5¸10 2 ȀȜȞȞ. ǽȓȞȓȒ ȜȟȎȔȒȓțȖȓȚȝșȓțȘȖȝȞȜȐȜȒȖșȎȟȪȝșȎȕȚȓțțȎȭȜȥȖȟȠȘȖȚȖȦȓțȖȐȠȓȥȓțȖȖ5 ȚȖț. ǻȎȝȞȭȔȓțȖȓȖȠȜȘȞȎȕȞȭȒȎȟȜȟȠȎȐșȭșȖ250 ǰȖ200 ȚA ȟȜȜȠȐȓȠȟȠȐȓțțȜ. ǽșȓțȘȖȎȚȜȞȢțȜȑȜȑȖȒȞȜȑȓțȖȕȖȞȜȐȎțțȜȑȜȘȎȞȏȖȒȎ ȘȞȓȚțȖȭȜȟȎȔȒȎșȖȟȪȟȝȜȚȜȧȪȬȞȎȟȝȩșȓțȖȭȚȜțȜȘȞȖȟȠȎșșȖȥȓȟȘȜȗ ȘȞȓȚțȖȓȐȜȗȚȖȦȓțȖ(ȒȖȎȚȓȠȞ 4 ȟȚ) ȚȎȑțȓȠȞȜțȜȚȝȜȟȠȜȭțțȜȑȜȠȜȘȎ Ȑ ȎȠȚȜȟȢȓȞȓ ȑȎȕȜȐȜȗ ȟȚȓȟȖ Ar(60%)/ CH4(40%). DzȎțțȎȭ ȠȓȣțȜșȜȑȖȭ ȝȜȕȐȜșȭȓȠ ȜȟȎȔȒȎȠȪ ȝșȓțȘȖȝȞȖțȖȕȘȖȣȠȓȚȝȓȞȎȠȡȞȎȣ ȖțȓȖȟȝȜșȪȕȡȓȠ ȣȖȚȖȥȓȟȘȖ ȎȑȞȓȟȟȖȐțȩȓ ȘȞȓȚțȖȗȟȜȒȓȞȔȎȧȖȓ ȑȎȕȩ.

124 ǮȑȓȓȐ Ǽ.Ǯ., ǯȓșȭȓȐ Ǯ.dz., ǯȜșȠȜȐȓȤ ǻ.ǿ., ǸȖȟȓșȓȐ ǰ.ǿ., ǸȜțȎȘȜȐȎ Ǿ.ǰ. Ȗ ȒȞ.

7.2. ǺȜșȓȘȡșȭȞțȜ-șȡȥȓȐȎȭ ȫȝȖȠȎȘȟȖȭ

ǺȜșȓȘȡșȭȞțȎȭ șȡȥȓȐȎȭ ȫȝȖȠȎȘȟȖȭ ȜȟȡȧȓȟȠȐșȭȓȠȟȭ ȝȡȠȓȚ ȐȕȎ-

ȖȚȜȒȓȗȟȠȐȖȭ ȚȜșȓȘȡșȭȞțȩȣ ȖșȖ ȎȠȜȚțȩȣ ȝȡȥȘȜȐ țȎ ȝȜȐȓȞȣțȜȟȠȖ ȘȞȖȟȠȎșșȖȥȓȟȘȜȗ ȝȜȒșȜȔȘȖ. ǻȎ ȞȖȟ. 7.1ȏ ȝȞȓȒȟȠȎȐșȓțȎ ȠȖȝȖȥțȎȭ ȟȣȓȚȎ ȟȖȟȠȓȚȩ Ǻǹȋ [11]. ǶȟȠȜȥțȖȘȖ ȝȎȞȜȐ ȡȟȠȎțȜȐșȓțȩ Ȑ ȭȥȓȗȘȎȣ ȖȟȝȎȞȓțȖȭȠȎȘ, ȥȠȜȏȩȜȏȓȟȝȓȥȖȐȎȠȪ țȓȜȏȣȜȒȖȚȜȓȡȑșȜȐȜȓȞȎȟȝȞȓȒȓșȓțȖȓ ȎȠȜȚȜȐ ȖșȖ ȚȜșȓȘȡș Ȑ ȝȡȥȘȓ. ǽȜȒșȜȔȘȡ țȎȑȞȓȐȎȬȠ ȒȜ ȠȞȓȏȡȓȚȜȗ ȠȓȚȝȓȞȎȠȡȞȩ Ȗ ȝȞȖ țȓȜȏȣȜȒȖȚȜȟȠȖ ȐȞȎȧȎȬȠ Ȓșȭ ȝȜȐȩȦȓțȖȭ ȜȒțȜȞȜȒțȜȟȠȖȞȜȟȠȎ. ȁȟșȜȐȖȓȚȒșȭȝȞȜȐȓȒȓțȖȭǺǹȋȭȐșȭȓȠȟȭȒșȖțȎ ȟȐȜȏȜȒțȜȑȜ ȝȞȜȏȓȑȎ, ȘȜȠȜȞȎȭ ȒȜșȔțȎ ȝȞȓȐȩȦȎȠȪ ȑȓȜȚȓȠȞȖȥȓȟȘȖȓ ȞȎȕȚȓȞȩ ȞȓȎȘȠȜȞȎ. ȀȎȘȖȚ ȜȏȞȎȕȜȚ, Ȓșȭ Ǻǹȋ ȠȞȓȏȡȓȠȟȭ ȟȐȓȞȣȐȩȟȜȘȖȗ ȐȎȘȡȡȚ Ǿ< 10 11 ȀȜȞȞ. Dzșȭ ȜȏȓȟȝȓȥȓțȖȭ ȐȩȟȜȘȜȑȜ ȐȎȘȡȡȚȎ Ȗ ȚȖțȖȚȖȕȎȤȖȖ ȟșȡȥȎȗțȩȣ ȝȜȠȜȘȜȐ ȎȠȜȚȜȐ Ȗ ȚȜșȓȘȡș ȟȜ ȟȠȓțȜȘ ȘȎȚȓȞȩ ȖȟȝȜșȪȕȡȬȠ ȘȞȖȜȑȓțțȜȓ ȫȘȞȎțȖȞȜȐȎțȖȓ ȐȜȘȞȡȑ ȝȜȒșȜȔȘȖ. ǺȓȠȜȒȩ Ǻǹȋ Ȑ ȐȎȘȡȡȚȓ ȞȎȕșȖȥȎȬȠ ȝȜ ȟȝȜȟȜȏȡ ȑȓțȓȞȎȤȖȖ ȝȎȞȎ Ȗ ȐȓȧȓȟȠȐȎ. CȠȎȤȖȜțȎȞțȩȗȝȜȠȜȘȝȎȞȎȝȜșȡȥȎȬȠȚȓȠȜȒȜȚȟȡȏșȖȚȎȤȖȖ ȎȠȜȚȜȐȖȖȣȘȜȚȝșȓȘȟȜȐ, ȖȟȝȜșȪȕȡȬȠȎȠȜȚȎȞțȜ-ȥȖȟȠȩȓȝȜȐȓȞȣțȜȟȠȖ ȘȞȖȟȠȎșșȖȥȓȟȘȜȑȜȘȞȓȚțȖȭ, ȝȜȒȜȑȞȓȐȎȓȚȜȑȜȠȜȘȜȚȒȜ1300 1390°ǿ. ǽȞȖȚȓțȭȓȠȟȭ, ȠȎȘȔȓ, ȖȟȝȎȞȓțȖȓ Ȗȕ ȠȖȑșȓȗ ȫșȓȘȠȞȜțțȩȚ ȝȡȥȘȜȚ.

ǰȟȖȟȠȓȚȎȣǺǹȋȒșȭȡȝȞȎȐșȓțȖȭȝȡȥȘȎȚȖȚȜșȓȘȡșțȓȜȏȣȜȒȖȚȜ ȜȟȡȧȓȟȠȐșȭȠȪ ȝȜȟȠȜȭțțȩȗ ȘȜțȠȞȜșȪ ȟȜȟȠȎȐȎ Ȗ șȓȑȖȞȜȐȎțȖȭ ȐȩȞȎȧȖȐȎȓȚȜȗ ȝșȓțȘȖ. Dzșȭ ȞȓȑȡșȖȞȜȐȎțȖȭ ȝȜȠȜȘȎȚȖ Ȗ ȠȓȚȝȓȞȎȠȡȞȜȗ ȖȟȠȜȥțȖȘȜȐȖȟȝȜșȪȕȡȬȠȟȭȕȎȠȐȜȞȩțȎȖȟȠȜȥțȖȘȎȣȝȎȞȜȐȟȐȞȓȚȓțȓȚ ȟȞȎȏȎȠȩȐȎțȖȭ ȝȜȞȭȒȘȎ 0.1 ȟȓȘ. Dzșȭ ȘȜțȠȞȜșȭ ȝȞȖȚȓțȭȓȠȟȭ ȚȓȠȜȒ ȜȠȞȎȔȎȠȓșȪțȜȗ ȒȖȢȞȎȘȤȖȖ ȫșȓȘȠȞȜțȜȐ ȐȩȟȜȘȖȣ ȫțȓȞȑȖȗ RHEED (Reflection High Energy Electron Diffraction). ǼȟȤȖșșȭȤȖȖ ȟȖȑțȎ-

șȎ RHEED ȠȜȥțȜ ȜȠțȜȟȭȠȟȭ Ș ȐȞȓȚȓțȖ ȞȜȟȠȎ ȚȜțȜȟșȜȭ, Ȏ ȘȎȞȠȖțȎ ȒȖȢȞȎȘȤȖȖ ȝȜȘȎȕȩȐȎȓȠ ȟȜȟȠȜȭțȖȓ ȝȜȐȓȞȣțȜȟȠȖ.

ǺȓȠȜȒȩǺǹȋȝȜȕȐȜșȭȬȠȟȜȐȚȓȟȠȖȠȪțȎȞȎȧȖȐȎțȖȓȝșȓțȘȖȟ ȘȜțȠȞȜșȓȚȥȖȟȠȜȠȩȝȜȐȓȞȣțȜȟȠȖȐȜȐȞȓȚȭȞȜȟȠȎȟȠȞȡȘȠȡȞȩ, ȜȟȡȧȓȟȠȐșȭ- ȓȚȩȚǼȔȓ-ȫșȓȘȠȞȜțțȜȗ ȟȝȓȘȠȞȜȟȘȜȝȖȓȗ. ǸȜțȠȞȜșȪ ȟȜȟȠȎȐȎȑȎȕȜȐȜȗ ȟȞȓȒȩ ȜȟȡȧȓȟȠȐșȭȓȠȟȭ ȟ ȝȜȚȜȧȪȬ ȚȎȟȟȟȝȓȘȠȞȜȚȓȠȞȖȖ.

ǽȓȞȟȝȓȘȠȖȐțȜȗ ȭȐșȭȓȠȟȭ ȞȓȎȘȠȖȐțȎȭ Ǻǹȋ, ȜȟțȜȐȎțțȎȭ țȎ ȞȓȎȘȤȖȖȚȓȔȒȡȚȜșȓȘȡșȭȞțȩȚȖȝȡȥȘȎȚȖȘȞȓȚțȖȭȖȡȑșȓȞȜȒȎȖȚȜșȓȘȡșȭȞțȩȚȝȜȠȜȘȜȚȣȖȚȖȥȓȟȘȖȎȘȠȖȐțȩȣȑȎȕȜȐțȎȑȜȞȭȥȡȬȝȜȒșȜȔȘȡ Ȑ ȡȟșȜȐȖȭȣ ȐȩȟȜȘȜȑȜ ȐȎȘȡȡȚȎ.

ǺȓȠȜȒ Ǻǹȋ ȖȟȝȜșȪȕȡȓȠȟȭ Ȓșȭ ȑȜȚȜ Ȗ ȑȓȠȓȞȜȫȝȖȠȎȘȟȖȖ ȝșȓțȜȘ ȘȎȞȏȖȒȎȘȞȓȚțȖȭ[12 16]. ǺȜțȜȘȞȖȟȠȎșșȖȥȓȟȘȖȓȝșȓțȘȖ3C-SiC(111) ȐȩȞȎȧȖȐȎșȖțȎ6H-SiC(0001) ȝȜȒșȜȔȘȎȣ. ȀȓȚȝȓȞȎȠȡȞȎȞȜȟȠȎȟȜȟȠȎȐșȭșȎ 1000 Ȗ 1500°C. ǿȘȜȞȜȟȠȪ ȞȜȟȠȎ ȜȝȞȓȒȓșȭșȎȟȪ ȠȓȚȝȓȞȎȠȡȞȜȗ. ǽȞȖȠȓȚȝȓȞȎȠȡȞȎȣȚȓțȪȦȖȣ1350°C ȜȏȞȎȕȜȐȩȐȎșȖȟȪȠȜșȪȘȜȝșȓțȘȖ 3C-SiC(111). ǽȞȖ ȑȜȚȜȫȝȖȠȎȘȟȖȖ ȝșȓțȜȘ 6H-SiC(0001) ȟ ȒȜȏȎȐșȓțȖȓȚ H2 țȎ ȐȖȤȖțȎșȪțȩȣ ȝȜȒșȜȔȘȎȣ 6H-SiC(0001) ȝȞȜȭȐșȭșȟȭ ȚȓȣȎțȖȕȚ ȟȠȡȝȓțȥȎȠȜȑȜ ȞȜȟȠȎ. ǽșȓțȘȖ ȟȜȒȓȞȔȎșȖ ȒȓȢȓȘȠȩ ȡȝȎȘȜȐȘȖ, ȒȐȜȗțȖȘȖ Ȗ DPBs.

ǰȞȎȏȜȠȓ[17] ȝȜȘȎȕȎțȎȐȜȕȚȜȔțȜȟȠȪȐȩȞȎȧȖȐȎțȖȭȜȒțȜȚȓȞțȩȣ SiC ȟȠȞȡȘȠȡȞțȎSi(111) ȝȜȒșȜȔȘȎȣ. ǾȎȟȚȜȠȞȓțȩȞȎȕșȖȥțȩȓȎȟȝȓȘȠȩ ȝȞȖȑȜȠȜȐșȓțȖȭ țȎ ȜȟțȜȐȓ ȘȎȞȏȖȒȎ ȘȞȓȚțȖȭ ȒȐȡȚȓȞțȩȣ (Quantum well), ȜȒțȜȚȓȞțȩȣ (Quantum wire, Quantum rod) ȟȠȞȡȘȠȡȞ Ȗ ȘȐȎț-

ȠȜȐȩȣ ȠȜȥȓȘ (Quantum dot).

126 ǮȑȓȓȐ Ǽ.Ǯ., ǯȓșȭȓȐ Ǯ.dz., ǯȜșȠȜȐȓȤ ǻ.ǿ., ǸȖȟȓșȓȐ ǰ.ǿ., ǸȜțȎȘȜȐȎ Ǿ.ǰ. Ȗ ȒȞ.

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DZșȎȐȎ 8 ǽȎȞȎȚȓȠȞȩ Ȗ ȟȐȜȗȟȠȐȎ ȝȞȖȚȓȟȓȗ

ȖȒȓȢȓȘȠȜȐ Ȑ ȘȎȞȏȖȒȓ ȘȞȓȚțȖȭ

8.1.ǰȐȓȒȓțȖȓ

ǵțȎȥȖȠȓșȪțȩȓ ȡȟȝȓȣȖ Ȑ ȞȎȕȐȖȠȖȖ ȠȓȣțȜșȜȑȖȖ SiC ȕȎ ȝȜȟșȓȒțȖȓ 10 15 șȓȠ ȝȜȕȐȜșȖșȖ Ș țȎȟȠȜȭȧȓȚȡ ȐȞȓȚȓțȖ ȞȎȕȞȎȏȜȠȎȠȪ țȎ ȜȟțȜȐȓ SiC ȝȞȎȘȠȖȥȓȟȘȖ Ȑȟȓ ȜȟțȜȐțȩȓ ȠȖȝȩ ȝȜșȡȝȞȜȐȜȒțȖȘȜȐȩȣ ȝȞȖȏȜȞȜȐ, Ȑ ȠȜȚ ȥȖȟșȓ Ȗ ȝȓȞȐȩȓ ȖțȠȓȑȞȎșȪțȩȓ ȟȣȓȚȩ.

ǶȕȐȓȟȠțȜ, ȥȠȜȑșȡȏȜȘȖȓȤȓțȠȞȩ(DZȄ) ȜȝȞȓȒȓșȭȬȠȚțȜȑȖȓȐȎȔțȓȗȦȖȓȝȎȞȎȚȓȠȞȩȝȜșȡȝȞȜȐȜȒțȖȘȜȐȩȣȝȞȖȏȜȞȜȐ. DZȄȐȜȏȨȓȚȓȝȜșȡȝȞȜȐȜȒțȖȘȎȜȘȎȕȩȐȎȬȠȐșȖȭțȖȓțȎȐȞȓȚȭȔȖȕțȖȖȒȖȢȢȡȕȖȜțțȡȬȒșȖțȡ țȓȜȟțȜȐțȩȣțȜȟȖȠȓșȓȗȕȎȞȭȒȎ, Ș.ȝ.Ȓ. ȟȐȓȠȜȒȖȜȒȜȐȖȢȜȠȜȝȞȖȓȚțȖȘȜȐ, ȘȜȫȢȢȖȤȖȓțȠȡȟȖșȓțȖȭȠȞȎțȕȖȟȠȜȞȜȐ, țȎȐȓșȖȥȖțȡȖȠȓȚȝȓȞȎȠȡȞțȩȗ ȘȜȫȢȢȖȤȖȓțȠ țȎȝȞȭȔȓțȖȭ ȝȞȜȏȜȭ p-n ȟȠȞȡȘȠȡȞ. ǽȜȟȘȜșȪȘȡ Ȑ țȎȟȠȜȭȧȓȓȐȞȓȚȭȕȎȞȎțȓȓțȓȐȜȕȚȜȔțȜȠȓȜȞȓȠȖȥȓȟȘȖȝȞȓȒȟȘȎȕȎȠȪȕțȎȥȓțȖȭ ȜȟțȜȐțȩȣ ȝȎȞȎȚȓȠȞȜȐ ȝȞȖȚȓȟțȩȣ Ȗ ȒȓȢȓȘȠțȩȣ ȤȓțȠȞȜȐ Ȑ țȜȐȜȚ ȝȜșȡȝȞȜȐȜȒțȖȘȜȐȜȚ ȚȎȠȓȞȖȎșȓ, ȠȜ ȑșȎȐțȩȚ ȖȟȠȜȥțȖȘȜȚ ȖțȢȜȞȚȎȤȖȖ Ȝ DZȄ ȭȐșȭȬȠȟȭ ȫȘȟȝȓȞȖȚȓțȠȎșȪțȩȓ ȚȓȠȜȒȩ.

ǼȥȓȐȖȒțȜ, ȥȠȜ Ȓșȭ ȒȎșȪțȓȗȦȓȑȜ ȞȎȕȐȖȠȖȭ ȠȓȣțȜșȜȑȖȖ SiC Ȗ ȟȜȕȒȎțȖȭ țȜȐȩȣ ȝȞȖȏȜȞȜȐ, ȟ ȜȒțȜȗ ȟȠȜȞȜțȩ țȓȜȏȣȜȒȖȚȜ ȖȟȟșȓȒȜȐȎȠȪ ȝȎȞȎȚȓȠȞȩ DZȄ Ȑ ȫȝȖȠȎȘȟȖȎșȪțȩȣ ȟșȜȭȣ Ȗ Ȟ-n ȝȓȞȓȣȜȒȎȣ, ȝȜșȡȥȓțțȩȣ ȝȜ ȞȎȕșȖȥțȩȚ ȠȓȣțȜșȜȑȖȭȚ. ǿ ȒȞȡȑȜȗ ȟȠȜȞȜțȩ, ȖȟȟșȓȒȜȐȎțȖȓ ȝȎȞȎȚȓȠȞȜȐ ȡȔȓ ȟȜȕȒȎțțȩȣ ȝȞȖȏȜȞȜȐ ȚȜȔȓȠ ȒȎȠȪ ȒȜȝȜșțȖȠȓșȪțȡȬ ȖțȢȜȞȚȎȤȖȬȜȟȐȜȗȟȠȐȎȣȖȚȓȬȧȖȣȟȭȐțȖȣDZȄ. ǸȞȜȚȓȠȜȑȜ, ȞȎȕșȖȥțȩȓ ȚȓȠȜȒȩ ȐȩȞȎȧȖȐȎțȖȭ ȫȝȖȠȎȘȟȖȎșȪțȩȣ ȟșȜȓȐ Ȗ ȟȜȕȒȎțȖȭ Ȟ-n ȟȠȞȡȘȠȡȞȝȞȖȐȜȒȭȠȘȜȏȞȎȕȜȐȎțȖȬȞȎȕșȖȥțȩȣDZȄȐȜȏȨȓȚȓȝȜșȡȝȞȜȐȜȒțȖȘȎ Ȗ țȎ ȓȑȜ ȝȜȐȓȞȣțȜȟȠȖ, ȘȜȠȜȞȩȓ Ȑ ȟȐȜȬ ȜȥȓȞȓȒȪ ȜȘȎȕȩȐȎȬȠ ȐșȖȭțȖȓ țȎ ȣȎȞȎȘȠȓȞȖȟȠȖȘȖ ȟȜȕȒȎȐȎȓȚȩȣ ȝȞȖȏȜȞȜȐ. ȀȎȘȖȚ ȜȏȞȎȕȜȚ, ȥȓȞȓȕ ȖȟȟșȓȒȜȐȎțȖȭ ȝȎȞȎȚȓȠȞȜȐ Ȗ ȞȎȟȝȞȓȒȓșȓțȖȗ DZȄ ȚȜȔțȜ

ȜȝȞȓȒȓșȖȠȪ ȜȝȠȖȚȎșȪțȡȬ ȘȜȚȏȖțȎȤȖȬ ȠȓȣțȜșȜȑȖȥȓȟȘȖȣ ȚȓȠȜȒȜȐ Ȓșȭ ȟȜȕȒȎțȖȭ ȒȎțțȜȑȜ ȠȖȝȎ ȝȞȖȏȜȞȎ ȟ șȡȥȦȖȚ ȟȜȥȓȠȎțȖȓȚ ȞȎȏȜȥȖȣ ȣȎȞȎȘȠȓȞȖȟȠȖȘ.

ǰ ȒȎțțȜȗ ȑșȎȐȓ ȜȏȜȏȧȓțȩ ȖȚȓȬȧȖȓȟȭ Ȑ țȎȟȠȜȭȧȓȓ ȐȞȓȚȭ ȒȎțțȩȓ ȝȜ ȝȎȞȎȚȓȠȞȎȚ DZȄ Ȑ 6H Ȗ 4H SiC Ȗ ȝȞȖȐȓȒȓț ȎțȎșȖȕ Ȗȣ ȟȐȜȗȟȠȐ ȟȠȜȥȘȖȕȞȓțȖȭȐȜȕȚȜȔțȜȑȜȐșȖȭțȖȭțȎȣȎȞȎȘȠȓȞȖȟȠȖȘȖȞȎȕȞȎȏȎȠȩȐȎȓȚȩȣ țȎ ȜȟțȜȐȓ ȘȎȞȏȖȒȎ ȘȞȓȚțȖȭ ȝȞȖȏȜȞțȩȣ ȟȠȞȡȘȠȡȞ.

8.2. ǽȎȞȎȚȓȠȞȩ ȑșȡȏȜȘȖȣ ȤȓțȠȞȜȐ Ȑ SiC

8.2.1. ǼȟțȜȐțȩȓ șȓȑȖȞȡȬȧȖȓ ȝȞȖȚȓȟȖ Ȑ SiC

ǾȎȕȞȓȦȓțțȩȓ ȟȜȟȠȜȭțȖȭ ȐȕȎȝȞȓȧȓțțȜȗ ȕȜțȓȝȜșȡȝȞȜȐȜȒțȖȘȜȐ ȠȞȎȒȖȤȖȜțțȜ ȞȎȕȒȓșȭȬȠȟȭ țȎ «ȚȓșȘȖȓ» Ȗ «ȑșȡȏȜȘȖȓ». DzȓșȓțȖȓ ȫȠȜ ȐȓȟȪȚȎ ȡȟșȜȐțȜ Ȗ ȜȏȩȥțȜ «ȚȓșȘȖȚȖ» ȟȥȖȠȎȬȠ ȡȞȜȐțȖ ȟ ȫțȓȞȑȖȓȗ ȖȜțȖȕȎȤȖȖEi < 0.1 ȫǰ, a «ȑșȡȏȜȘȖȚȖ» – ȟEi < 0.1 ȫǰ[1]. DzșȭȘȎȞȏȖȒȎ ȘȞȓȚțȖȭ ȫȠȜ ȒȓșȓțȖȓ ȭȐșȭȓȠȟȭ ȓȧȓ ȏȜșȓȓ ȡȟșȜȐțȩȚ, ȠȎȘ ȘȎȘ ȒȎȔȓ ȜȟțȜȐțȩȓ ȒȜțȜȞțȩȓ Ȗ ȎȘȤȓȝȠȜȞțȩȓ ȡȞȜȐțȖ ȖȚȓȬȠ ȫțȓȞȑȖȖ ȖȜțȖȕȎȤȖȖ Ei .0.1 ȫǰ. ȀȎȘȖȚ ȜȏȞȎȕȜȚ, ȟȠȞȜȑȜ ȑȜȐȜȞȭ, Ȑ ȘȎȞȏȖȒȓ ȘȞȓȚțȖȭ Ȑȟȓ ȖȟȟșȓȒȜȐȎȐȦȖȓȟȭ ȡȞȜȐțȖ ȭȐșȭȬȠȟȭ ȑșȡȏȜȘȖȚȖ. ǼȒțȎȘȜ Ȑ ȒȎșȪțȓȗȦȓȚ Țȩ ȏȡȒȓȚ ȡȞȜȐțȖ, ȜȝȞȓȒȓșȭȬȧȖȓ ȟȜȝȞȜȠȖȐșȓțȖȓ ȏȎȕȜȐȩȣ ȜȏșȎȟȠȓȗ, țȎȕȩȐȎȠȪ ȚȓșȘȖȚȖ ȝȜ ȜȠțȜȦȓțȖȬ Ș ȏȜșȓȓ ȑșȡȏȜȘȖȚ, țȓ ȒȎȬȧȖȚ ȕȎȚȓȠțȜȑȜ ȐȘșȎȒȎ Ȑ ȐȓșȖȥȖțȡ ȘȜțȤȓțȠȞȎȤȖȖ ȜȟțȜȐțȩȣ țȜȟȖȠȓșȓȗ ȕȎȞȭȒȎ.

8.2.1.1. ǮȕȜȠ

ǿȝȓȤȖȎșȪțȜ țȓ șȓȑȖȞȜȐȎțțȩȓ ȟșȜȖ SiC ȖȚȓȬȠ n-ȝȞȜȐȜȒȖȚȜȟȠȖ. ȋȠȜ ȜȏȨȭȟțȭȓȠȟȭ țȓȘȜțȠȞȜșȖȞȡȓȚȩȚ șȓȑȖȞȜȐȎțȖȓȚ ȞȎȟȠȡȧȓȑȜ ȟșȜȭ ȎȕȜȠȜȚ. ǸȞȜȚȓ ȠȜȑȜ, ȎȕȜȠ ȜȏșȎȒȎȓȠ ȒȜȟȠȎȠȜȥțȜ ȐȩȟȜȘȜȗ ȞȎȟȠȐȜȞȖȚȜȟȠȪȬȐSiC (>1021 ȟȚ 3) [2] ȖțȎȖȚȓțȪȦȓȗȫțȓȞȑȖȓȗȖȜțȖȕȎȤȖȖȖȕȐȟȓȣ ȝȞȖȚȓȟțȩȣ ȒȜțȜȞțȩȣ ȡȞȜȐțȓȗ. ǿ ȝȜȚȜȧȪȬ ȖȚȝșȎțȠȎȤȖȖ ȖȜțȜȐ N ȠȎȘȔȓ ȐȜȕȚȜȔțȜ ȝȜșȡȥȓțȖȓ ȠȜțȘȖȣ ȟȖșȪțȜ șȓȑȖȞȜȐȎțțȩȣ ȟșȜȓȐ SiC Ȓșȭ ȢȜȞȚȖȞȜȐȎțȖȭ ȜȚȖȥȓȟȘȖȣ ȘȜțȠȎȘȠȜȐ [3, 4]. ǻȎ ȫțȓȞȑȓȠȖȥȓȟȘȜȚ ȝȜșȜȔȓțȖȖ DZȁ, ȟȐȭȕȎțțȩȣ ȟ ȎȠȜȚȎȚȖ ȎȕȜȠȎ, țȎȖȏȜșȓȓ ȭȞȘȜ ȝȞȜȭȐȖșȜȟȪ țȎșȖȥȖȓ țȓȫȘȐȖȐȎșȓțȠțȩȣ ȝȜșȜȔȓțȖȗ Ȑ ȞȓȦȓȠȘȓ SiC [5 8]. ǰȜ ȐȟȓȣȜȟțȜȐțȩȣȝȜșȖȠȖȝȎȣSiC ȜȏțȎȞȡȔȓțȩȡȞȜȐțȖȎȕȜȠȎȟȐȭȕȎțțȩȓȘȎȘ ȟ ȘȡȏȖȥȓȟȘȖȚȖ(ǿ) ȠȎȘȖȟȑȓȘȟȎȑȜțȎșȪțȩȚȖ (H) ȝȜșȜȔȓțȖȭȚȖȞȓȦȓȠȘȖ, ȝȞȖȥȓȚȜȠțȜȦȓțȖȓȘȜțȤȓțȠȞȎȤȖȗȡȞȜȐțȓȗ(NH/NC) ȟȜȜȠȐȓȠȟȠȐȡȓȠ ȜȠțȜȦȓțȖȬ ȥȖȟșȎ ȑȓȘȟȎȑȜțȎșȪțȩȣ Ȗ ȘȡȏȖȥȓȟȘȖȣ ȝȜșȜȔȓțȖȗ Ȑ ȘȞȖȟ-