belyaev_a_e_konakova_r_v_red_karbid_kremniya_tehnologiya_svo
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402 ǮȑȓȓȐ Ǽ.Ǯ., ǯȓșȭȓȐ Ǯ.dz., ǯȜșȠȜȐȓȤ ǻ.ǿ., ǸȖȟȓșȓȐ ǰ.ǿ., ǸȜțȎȘȜȐȎ Ǿ.ǰ. Ȗ ȒȞ.
ȀȎȏșȖȤȎ 2.3. ǽȎȞȎȚȓȠȞ ȞȓȦȓȠȘȖ, ȝȜȞȜȑȜȐȎȭ ȫțȓȞȑȖȭ ȒȓȢȓȘȠȜȜȏȞȎȕȜȐȎțȖȭ Ed (ȞȎȟȥȓȠ Ȗ ȫȘȟȝȓȞȖȚȓțȠ) Ȗ ȫțȓȞȑȖȭ ȟȐȭȕȖ (ȞȎȟȥȓȠ Ȗ ȫȘȟȝȓȞȖȚȓțȠ) Ȓșȭ țȓȘȜȠȜȞȩȣ ȝȜșȡȝȞȜȐȜȒțȖȘȜȐ [5, 6, 19 21]
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[16]), ȫǰ |
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Si |
5.4282 |
12.8 |
13 20 |
4.64 |
4.64 |
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InP |
5.8687 |
9.15 |
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3.48 |
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GaAs |
5.6434 |
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8–20 |
3.52 |
3.26 |
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GaP |
5.4505 |
12.64 |
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3.56 |
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6H-SiC |
3.0806 |
153 |
20 35, 97 |
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6.34 |
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4H-SiC |
3.076 |
153 |
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6.34 |
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4.3596 |
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54 90, |
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106 |
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GaN |
3.1988 |
131 |
35 75 |
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4.48 |
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AlN |
3.1115 |
146 |
50 |
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5.76 |
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C |
3.5668 |
80 |
60 80 |
7.36 |
7.36 |
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InN |
3.548 |
82 |
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3.86 |
ǮțȎșȖȕ ȫȘȟȝȓȞȖȚȓțȠȎșȪțȩȣ ȒȎțțȩȣ ȝȜ ȞȎȕȞȎȏȜȠȘȓ Ȗ ȖȟȟșȓȒȜȐȎțȖȬ ȘȜțȠȎȘȠȜȐ Ș SiC ȕȎ ȝȜȟșȓȒțȖȓ 10 15 șȓȠ ȝȜȘȎȕȩȐȎȓȠ, ȥȠȜ țȓȟȚȜȠȞȭ țȎ ȐȜȕȞȎȟȠȎȬȧȖȗ ȖțȠȓȞȓȟ Ș ȘȜțȠȎȘȠțȩȚ ȟȖȟȠȓȚȎȚ Ȓșȭ ȫȘȟȠȞȓȚȎșȪțȜȗ ȫșȓȘȠȞȜțȖȘȖ, Ș țȎȟȠȜȭȧȓȚȡ ȐȞȓȚȓțȖ, ȘȎȘ Ȗ Ȓșȭ ȘȜțȠȎȘȠȜȐ Ș Si Ȗ GaAs ȝȞȖȏȜȞȎȚ, ȝȜ-ȝȞȓȔțȓȚȡ ȜȟȠȎȓȠȟȭ țȓȞȓȦȓțțȩȚ ȞȭȒ ȢȖȕȖȘȜ-ȠȓȣțȜșȜȑȖȥȓȟȘȖȣ ȕȎȒȎȥ, ȐȎȔțȓȗȦȖȚȖ Ȗȕ ȘȜȠȜȞȩȣ ȭȐșȭȬȠȟȭ:
–ȒȓȠȎșȪțȜȓ ȖȟȟșȓȒȜȐȎțȖȓ ȝȞȖȞȜȒȩ ȝȓȞȓȣȜȒțȜȑȜ ȟșȜȭ;
–ȞȎȕȞȎȏȜȠȘȎ ȟȝȜȟȜȏȜȐ ȟȠȎȏȖșȖȕȎȤȖȖ ȝȓȞȓȣȜȒțȜȑȜ ȟșȜȭ;
–ȞȎȕȞȎȏȜȠȘȎ ȡȝȞȎȐșȭȓȚȜȗ ȠȓȣțȜșȜȑȖȖ ȟȜȕȒȎțȖȭ ȘȜțȠȎȘȠȜȐ
ȟȘȜțȠȞȜșȖȞȡȓȚȜȗ ȐȓșȖȥȖțȜȗ ȐȩȟȜȠȩ ȏȎȞȪȓȞȎ KB, ȐȩȟȜȘȜȗ ȠȓȞȚȜ- Ȗ ȞȎȒȖȎȤȖȜțțȜȗ ȟȠȜȗȘȜȟȠȪȬ, ȜȏȓȟȝȓȥȖȐȎȬȧȓȗ țȎȒȓȔțȜȟȠȪ ȝȞȖȏȜȞȜȐ ȫȘȟȠȞȓȚȎșȪțȜȗ ȫșȓȘȠȞȜțȖȘȖ.
ȅȎȟȠȪ III, DZșȎȐȎ 2 |
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ǼȠȚȓȠȖȚ, ȥȠȜ ȕȎ ȝȜȟșȓȒțȖȓ ȑȜȒȩ ȟȡȧȓȟȠȐȓțțȜ ȖȕȚȓțȖșȖȟȪ Ȑ șȡȥȦȡȬ ȟȠȜȞȜțȡ ȘȎȘ ȠȓȣțȖȘȎ ȢȖȕȖȥȓȟȘȜȑȜ ȫȘȟȝȓȞȖȚȓțȠȎ (ȝȜȭȐȖșȖȟȪ ȝȜșțȜȟȠȪȬ ȎȐȠȜȚȎȠȖȕȖȞȜȐȎțțȩȓ ȘȜȚȝșȓȘȟȩ Ȓșȭ ȫșȓȘȠȞȜȢȖȕȖȥȓȟȘȖȣ, ȜȝȠȖȥȓȟȘȖȣ, ȟȠȞȡȘȠȡȞțȩȣ Ȗ ȎțȎșȖȠȖȥȓȟȘȖȣ ȖȕȚȓȞȓțȖȗ), ȠȎȘ Ȗ ȠȓȣțȜșȜȑȖȥȓȟȘȜȓ ȜȟțȎȧȓțȖȓ ȖȟȟșȓȒȜȐȎȠȓșȪȟȘȖȣ ȤȓțȠȞȜȐ Ȗ ȝȜșȡȝȞȜȐȜȒțȖȘȜȐȜȑȜȝȞȜȖȕȐȜȒȟȠȐȎ[17, 18]. ǽȜȫȠȜȚȡȝȞȖȚȓțȖȠȓșȪțȜ ȘȘȎȞȏȖȒȡȘȞȓȚțȖȭȟȠȎșȖȞȓȎșȪțȩȚȖȞȎȕȚȓȞțȩȓȜȏȞȎȏȜȠȘȖȝȜȐȓȞȣțȜȟȠȖ, ȐȜȕȚȜȔțȜȟȠȖ ȐȎȘȡȡȚțȩȣȠȓȣțȜșȜȑȖȗțȎțȓȟȓțȖȭ ȘȜțȠȎȘȠțȩȣ ȟșȜȓȐ ȚȓȠȎșșȜȐ țȎ SiC, Ȑ ȠȜȚ ȥȖȟșȓ țȎȝȩșȓțȖȓ ȣȖȚȖȥȓȟȘȖȣ ȟȜȓȒȖțȓțȖȗ (ȟȖșȖȤȖȒȜȐ, țȖȠȞȖȒȜȐ, ȘȎȞȏȖȒȜȐ, ȏȜȞȖȒȜȐ, ȐȜșȪȢȞȎȚȖȒȜȐ ȠȡȑȜȝșȎȐȘȖȣ ȚȓȠȎșșȜȐ), ȜȟȡȧȓȟȠȐșȭȓȚȜȓ ȚȓȠȜȒȜȚ ȚȎȑțȓȠȞȜțțȜȑȜ țȎȝȩșȓțȖȭ.
2.1. ȁȒȓșȪțȜȓ ȝȓȞȓȣȜȒțȜȓ ȘȜțȠȎȘȠțȜȓ ȟȜȝȞȜȠȖȐșȓțȖȓ
ǽȜȒȜȚȖȥȓȟȘȖȚȖȘȜțȠȎȘȠȎȚȖȝȜțȖȚȎȬȠȘȜțȠȎȘȠȩȚȓȠȎșș–ȝȜșȡ- ȝȞȜȐȜȒțȖȘ ȟ ȟȖȚȚȓȠȞȖȥțȜȗ șȖțȓȗțȜȗ ȐȜșȪȠȎȚȝȓȞțȜȗ ȣȎȞȎȘȠȓȞȖȟȠȖȘȜȗ(ǰǮȃ) ȖȝȞȓțȓȏȞȓȔȖȚȜȚȎșȩȚȟȜȝȞȜȠȖȐșȓțȖȓȚȝȜȟȞȎȐțȓțȖȬ ȟ ȜȏȨȓȚțȩȚ ȟȜȝȞȜȠȖȐșȓțȖȓȚ ȝȜșȡȝȞȜȐȜȒțȖȘȎ Ȗ ȟȜȝȞȜȠȖȐșȓțȖȓȚ ȞȎȟȠȓȘȎțȖȭ. ǽȞȖ ȫȠȜȚ Ȑ ȖȒȓȎșȪțȜȚ ȟșȡȥȎȓ Ȓșȭ ȝȜșȡȝȞȜȐȜȒțȖȘȎ ȝ-ȠȖȝȎ ȚȓȠȎșș ȢȜȞȚȖȞȡȓȠ ȜȚȖȥȓȟȘȖȗ ȘȜțȠȎȘȠ, ȓȟșȖ ȞȎȏȜȠȎ ȐȩȣȜȒȎ ȫșȓȘȠȞȜțȜȐ Ȗȕ ȚȓȠȎșșȎ ȚȓțȪȦȓ, ȥȓȚ ȞȎȏȜȠȎ ȐȩȣȜȒȎ ȫșȓȘȠȞȜțȜȐ Ȗȕ ȝȜșȡȝȞȜȐȜȒțȖȘȎ. ǻȎȝȞȎȘȠȖȘȓ, ȜȒțȎȘȜ, ȫȠȜȡȟșȜȐȖȓȐȩȝȜșțȭȓȠȟȭ șȖȦȪ Ȓșȭ țȓȏȜșȪȦȜȑȜ ȥȖȟșȎ ȝȎȞ ȚȓȠȎșș–ȝȜșȡȝȞȜȐȜȒțȖȘ. ǰ ȟȖșȡ țȎșȖȥȖȭȝȜȐȓȞȣțȜȟȠțȩȣ ȟȜȟȠȜȭțȖȗțȎȑȞȎțȖȤȓȞȎȕȒȓșȎȚȓȠȎșș–ȝȜ- șȡȝȞȜȐȜȒțȖȘ Ȗ ȕȎȘȞȓȝșȓțȖȭ ȖȚȖ ȡȞȜȐțȭ ȂȓȞȚȖ Ȓșȭ ȏȜșȪȦȖțȟȠȐȎ ȝȎȞ ȚȓȠȎșș–ȝȜșȡȝȞȜȐȜȒțȖȘ țȎ ȑȞȎțȖȤȓ ȞȎȕȒȓșȎ ȢȜȞȚȖȞȡȓȠȟȭ ȏȎȞȪȓȞ ȆȜȠȠȘȖ [22 25].
ǼȟțȜȐțȩȚȝȎȞȎȚȓȠȞȜȚ, ȣȎȞȎȘȠȓȞȖȕȡȬȧȖȚȜȚȖȥȓȟȘȖȗȘȜțȠȎȘȠ, Ȑ ȠȜȚ ȥȖȟșȓ ȢȜȞȚȖȞȡȓȚȩȗ ȏȎȞȪȓȞȜȚ ȆȜȠȠȘȖ, ȭȐșȭȓȠȟȭ ȡȒȓșȪțȜȓ ȝȓȞȓȣȜȒțȜȓ ȘȜțȠȎȘȠțȜȓ ȟȜȝȞȜȠȖȐșȓțȖȓ RC, ȜȝȞȓȒȓșȭȓȚȜȓ ȘȎȘ
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– ȠȓȞȚȜȫșȓȘȠȞȜțțȜȗ ȫȚȖȟȟȖȓȗ (Ȁȋȋ);
404ǮȑȓȓȐ Ǽ.Ǯ., ǯȓșȭȓȐ Ǯ.dz., ǯȜșȠȜȐȓȤ ǻ.ǿ., ǸȖȟȓșȓȐ ǰ.ǿ., ǸȜțȎȘȜȐȎ Ǿ.ǰ. Ȗ ȒȞ.
–ȠȓȞȚȜȝȜșȓȐȜȗ ȫȚȖȟȟȖȓȗ (Ȁǽȋ);
–ȝȜșȓȐȜȗ ȫȚȖȟȟȖȓȗ (ǽȋ).
ǰ ȘȜțȠȎȘȠȎȣ ȚȓȠȎșș-n-SiC ȟ țȖȕȘȖȚ ȡȞȜȐțȓȚ șȓȑȖȞȜȐȎțȖȭ ȝȜ-
șȡȝȞȜȐȜȒțȖȘȎ (ND ȒȜ 1017 ȟȚ 3) Ȑ ȠȜȘȜȝȓȞȓțȜȟȓ ȝȞȓȜȏșȎȒȎȓȠ Ȁȋȋ, |
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ȢȜȞȚȖȞȜȐȎțȖȖȚȎșȜȗȐȩȟȜȠȩȏȎȞȪȓȞȎ. ȀȎȘ, ȒșȭȘȜțȠȎȘȠȎW-n-6H-SiC c ND x1017 ȟȚ 3 Ȑ [23] ȏȩșȜ ȝȜșȡȥȓțȜ RC x10 2 ǼȚ¸ȟȚ2. ǰ ȝȞȓȒȝȜ-
șȜȔȓțȖȖ ȠȓȞȚȜȫșȓȘȠȞȜțțȜȑȜ ȚȓȣȎțȖȕȚȎ ȠȜȘȜȝȓȞȓțȜȟȎ Ȑ ȫȠȜȚ ȘȜțȠȎȘȠȓȚȜȔțȜȞȎȟȟȥȖȠȎȠȪ ȐȩȟȜȠȡȏȎȞȪȓȞȎȆȜȠȠȘȖ, ȜȏȓȟȝȓȥȖȐȎȬȧȓȑȜ
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ǼȚ¸ȟȚ2. DzȓȗȟȠȐȖȠȓșȪțȜ, ȐȫȠȜȚȟșȡȥȎȓȣȎȞȎȘȠȓȞȖȟȠȖȥȓȟȘȎȭ |
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ȫțȓȞȑȖȭȠȡțțȓșȖȞȜȐȎțȖȭE00 ȟȡȧȓȟȠȐȓțțȜȚȓțȪȦȓȠȓȝșȜȐȜȗȫțȓȞȑȖȖ |
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кг ¸9.66¸8.85 |
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ȅȎȟȠȪ III, DZșȎȐȎ 2 |
405 |
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ȕȒȓȟȪ mn = 0.71m0 – ȫȢȢȓȘȠȖȐțȎȭ ȚȎȟȟȎ ȫșȓȘȠȞȜțȎ Ȑ n-6H-SiC, m0– ȚȎȟȟȎȝȜȘȜȭȫșȓȘȠȞȜțȎ, Fs = 9.66F0 – ȒȖȫșȓȘȠȞȖȥȓȟȘȎȭ ȝȞȜțȖȤȎ- ȓȚȜȟȠȪn-6H-SiC [26], F0 – ȒȖȫșȓȘȠȞȖȥȓȟȘȎȭȝȞȜțȖȤȎȓȚȜȟȠȪȐȎȘȡȡȚȎ, ȠȜȑȒȎ
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×ln10 2Ом¸см2 ¸1.6¸10 19 k ¸194¸A ¸см 2K 2 ¸300K x (2.4) |
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Dzșȭ ȘȜțȠȎȘȠȎ Ni Si-n-6H-SiC c N |
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ȟȠȎȐșȭșȜ3¸10 |
ǼȚ¸ȟȚ [24], ȐȩȟȜȠȎȏȎȞȪȓȞȎȆȜȠȠȘȖ, ȞȎȟȟȥȖȠȎțțȎȭ |
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ȝȜ ȢȜȞȚȡșȓ (2.4), ȜȘȎȕȎșȎȟȪ ȞȎȐțȜȗ 0.38 ǰ.
ǰȟȜȜȠȐȓȠȟȠȐȖȖȟȞȓȕȡșȪȠȎȠȎȚȖȞȎȏȜȠȩ[25], ȒșȭțȓȐȩȞȜȔȒȓțțȜȑȜ ȝȜșȡȝȞȜȐȜȒțȖȘȎ ȝ-ȠȖȝȎ ȚȜȔțȜ ȞȎȟȟȥȖȠȎȠȪ ȚȖțȖȚȎșȪțȜȓ ȡȒȓșȪțȜȓ ȝȓȞȓȣȜȒțȜȓ ȟȜȝȞȜȠȖȐșȓțȖȓ ȘȜțȠȎȘȠȎ ȚȓȠȎșș–ȝȜșȡȝȞȜȐȜȒțȖȘ ȝȜ ȢȜȞȚȡșȓ:
R |
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ȑȒȓ µ = EC kT lnNC/ND – ȡȞȜȐȓțȪ ȂȓȞȚȖ Ȓșȭ țȓȐȩȞȜȔȒȓțțȜ-
ȑȜ ȝȜșȡȝȞȜȐȜȒțȖȘȎ; NC – ȝșȜȠțȜȟȠȪ ȟȜȟȠȜȭțȖȗ Ȑ ȕȜțȓ ȝȞȜȐȜȒȖȚȜȟȠȖ; ND – ȘȜțȤȓțȠȞȎȤȖȭ țȓȟȘȜȚȝȓțȟȖȞȜȐȎțțȩȣ ȒȜțȜȞȜȐ.
ǾȎȟȟȥȖȠȎȓȚ RC min Ȓșȭ ȘȜțȠȎȘȠȎ W-n-6H-SiC c ND = 1017 ȟȚ 3. ǽșȜȠțȜȟȠȪ ȟȜȟȠȜȭțȖȗ Ȑ ȕȜțȓ ȝȞȜȐȜȒȖȚȜȟȠȖ Ȓșȭ n-6H-SiC ȜȝȞȓȒȓ-
șȭȓȠȟȭ ȘȎȘ NC = 2M(2QmnkT/h2)3/2 !4.82¸1015 M(mn/m0)3/2T3/2 ! !1.73¸1016¸T3/2 (ȟȚ 3) [26], ȑȒȓmn=0.71m0 – ȫȢȢȓȘȠȖȐțȎȭȚȎȟȟȎȫșȓȘȠ-
ȞȜțȎȐn-6H-SiC; m0=9.1¸10 31 Șȑ – ȚȎȟȟȎȝȜȘȜȭȫșȓȘȠȞȜțȎ; M=6 – ȥȖȟșȜ ȫȘȐȖȐȎșȓțȠțȩȣ ȚȖțȖȚȡȚȜȐ Ȑ ȕȜțȓ ȝȞȜȐȜȒȖȚȜȟȠȖ n-6H-SiC.
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406ǮȑȓȓȐ Ǽ.Ǯ., ǯȓșȭȓȐ Ǯ.dz., ǯȜșȠȜȐȓȤ ǻ.ǿ., ǸȖȟȓșȓȐ ǰ.ǿ., ǸȜțȎȘȜȐȎ Ǿ.ǰ. Ȗ ȒȞ.
ǰȜȚȖȥȓȟȘȖȣ ȘȜțȠȎȘȠȎȣ Ș ȘȎȞȏȖȒȡ ȘȞȓȚțȖȭ n-ȠȖȝȎ ȝȜȒȜȏțȩȓ
ȐȓșȖȥȖțȩ RC ȟȜȑșȎȟțȜ ȖȚȓȬȧȖȚȟȭ Ȑ șȖȠȓȞȎȠȡȞȓ ȫȘȟȝȓȞȖȚȓțȠȎșȪțȩȚ ȒȎțțȩȚ ȝȜșȡȥȓțȩ ȠȜșȪȘȜ țȎ ȜȏȞȎȕȤȎȣ ȟ ȐȩȟȜȘȖȚ ȡȞȜȐțȓȚ șȓȑȖȞȜȐȎțȖȭ.
ǺȖțȖȚȎșȪțȜȓȡȒȓșȪțȜȓȝȓȞȓȣȜȒțȜȓȘȜțȠȎȘȠțȜȓȟȜȝȞȜȠȖȐșȓțȖȓ ȜȚȖȥȓȟȘȖȣȘȜțȠȎȘȠȜȐȟȎțȠȖȕȎȝȜȞțȩȚ ȟșȜȓȚȒșȭȠȜȘȜȐȥȓȞȓȕȝȜȐȓȞȣțȜȟȠțȩȓ ȡȞȜȐțȖ Ȑ ȟȜȜȠȐȓȠȟȠȐȖȖ ȟ [27] ȜȝȞȓȒȓșȭȓȠȟȭ ȝȜ ȢȜȞȚȡșȓ:
RC min = |
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ȑȒȓNi – ȘȜțȤȓțȠȞȎȤȖȭȝȜȐȓȞȣțȜȟȠțȩȣ ȡȞȜȐțȓȗȐȘȜțȠȎȘȠȓȚȓȠȎșș– ȝȜșȡȝȞȜȐȜȒțȖȘ; Cn – ȟȓȥȓțȖȓȕȎȣȐȎȠȎȫșȓȘȠȞȜțȎȕȜțȩȝȞȜȐȜȒȖȚȜȟȠȖ ȝȜșȡȝȞȜȐȜȒțȖȘȎ ȝȜȐȓȞȣțȜȟȠțȩȚ ȡȞȜȐțȓȚ; +n – ȟȞȓȒțȭȭ ȠȓȝșȜȐȎȭ ȟȘȜȞȜȟȠȪ ȫșȓȘȠȞȜțȜȐ Ȑ ȝȜșȡȝȞȜȐȜȒțȖȘȓ, ȞȎȐțȎȭ Ȓșȭ n-6H-SiC
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=33.12¸1021 кг ¸м2/c2 ¬1/ 2 x1.28¸105 м/c x1.28¸107 см/c20.06¸10 31 кг ®
ǼȤȓțȘȎ ȐȓșȖȥȖțȩ RC min Ȓșȭ ȘȜțȠȎȘȠȎ Ni-n-6H-SiC Ȑ ȟșȡȥȎȓ |
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ȜȏȚȓțȎȡȞȜȐțȓȗȟȚȓȠȎșșȜȚȘȜȑȒȎN = 1017 ȟȚ 3; + |
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Ni x1013 ȟȚ 2 Ȗ Cn x10 15 ȟȚ2, ȒȎȓȠD |
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ǺȖțȖȚȎșȪțȜȓȡȒȓșȪțȜȓȝȓȞȓȣȜȒțȜȓȘȜțȠȎȘȠțȜȓȟȜȝȞȜȠȖȐșȓțȖȓ ȜȚȖȥȓȟȘȖȣȘȜțȠȎȘȠȜȐȒșȭȘȜțȠȎȘȠȎȚȓȠȎșș-ȝȜșȡȝȞȜȐȜȒțȖȘȟȕȎȝȜȞ- țȩȚ ȖȕȑȖȏȜȚ ȕȜț, ȝȜȒȥȖțȭȬȧȓȑȜȟȭ ȒȖȜȒțȜȗ ȠȓȜȞȖȖ ȟ ȡȥȓȠȜȚ ȠȜȘȎ ȥȓȞȓȕ ȝȜȐȓȞȣțȜȟȠțȩȓ ȡȞȜȐțȖ, ȜȝȞȓȒȓșȭȓȠȟȭ ȝȜ ȢȜȞȚȡșȓ [27]:
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ǿȞȎȐțȓțȖȓ ȡȞȎȐțȓțȖȭ (2.6) ȟ (2.7) ȝȜȘȎȕȩȐȎȓȠ, ȥȠȜ RCmin Ȓșȭ ȜȚȖȥȓȟȘȜȑȜȘȜțȠȎȘȠȎȟȎțȠȖȕȎȝȜȞțȩȚ ȟșȜȓȚȟȡȥȓȠȜȚȠȜȘȎȥȓȞȓȕȝȜȐȓȞȣțȜȟȠțȩȓ ȡȞȜȐțȖ ȝȞȖ ȝȞȜȥȖȣ ȞȎȐțȩȣ ȡȟșȜȐȖȭȣ ȏȡȒȓȠ ȚȓțȪȦȖȚ,
ȅȎȟȠȪ III, DZșȎȐȎ 2 |
407 |
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ȥȓȚ RCmin ȜȚȖȥȓȟȘȜȑȜ ȘȜțȠȎȘȠȎ ȟ ȕȎȝȜȞțȩȚ ȖȕȑȖȏȜȚ ȕȜț ȟ ȡȥȓȠȜȚ ȠȜȘȎ ȥȓȞȓȕ ȝȜȐȓȞȣțȜȟȠțȩȓ ȡȞȜȐțȖ.
Dzșȭ ȐȩȞȜȔȒȓțțȜȑȜ ȝȜșȡȝȞȜȐȜȒțȖȘȎ n-ȠȖȝȎ ȚȖțȖȚȎșȪțȜȓ ȡȒȓșȪțȜȓȝȓȞȓȣȜȒțȜȓȘȜțȠȎȘȠțȜȓȟȜȝȞȜȠȖȐșȓțȖȓțȓȐȩȝȞȭȚșȭȬȧȓȑȜ
ȘȜțȠȎȘȠȎ ȞȎȟȟȥȖȠȩȐȎȓȠȟȭ ȝȜ ȢȜȞȚȡșȓ [25] |
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ȑȒȓ B – ȝȎȞȎȚȓȠȞ țȓȝȎȞȎȏȜșȖȥțȜȟȠȖ ȕȜțȩ ȝȞȜȐȜȒȖȚȜȟȠȖ, ȞȎȟ-
ȟȥȖȠȩȐȎȓȚȩȗ ȟ ȡȥȓȠȜȚ ȜȟȜȏȓțțȜȟȠȓȗ ȕȜțȩ ȝȞȜȐȜȒȖȚȜȟȠȖ ȝȜșȡȝȞȜȐȜȒțȖȘȎ, µ – ȡȞȜȐȓțȪ ȂȓȞȚȖ ȐȩȞȜȔȒȓțțȜȑȜ ȝȜșȡȝȞȜȐȜȒțȖȘȎ;
A |
= A |
mn |
= A 1 + 2B%E |
) |
– ȝȜȟȠȜȭțțȎȭ ǾȖȥȎȞȒȟȜțȎ ȟ ȡȥȓȠȜȚ |
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țȓȝȎȞȎȏȜșȖȥțȜȟȠȖȕȜțȩȝȞȜȐȜȒȖȚȜȟȠȖ; A0 – ȝȜȟȠȜȭțțȎȭǾȖȥȎȞȒȟȜțȎ Ȑ ȟȐȜȏȜȒțȜȚȝȞȜȟȠȞȎțȟȠȐȓ, A – ȫȢȢȓȘȠȖȐțȎȭȝȜȟȠȜȭțțȎȭǾȖȥȎȞȒȟȜ-
țȎ, mn = mn (1 + 2B%E) – ȫȢȢȓȘȠȖȐțȎȭȚȎȟȟȎȫșȓȘȠȞȜțȎȟ ȫțȓȞȑȖȓȗ
țȎȐȓșȖȥȖțȡ%E ȐȩȦȓȕȜțȩȝȞȜȐȜȒȖȚȜȟȠȖ, mn – ȫȢȢȓȘȠȖȐțȎȭȚȎȟȟȎ Ȑ ȚȖțȖȚȡȚȓ ȕȜțȩ ȝȞȜȐȜȒȖȚȜȟȠȖ ȝȜșȡȝȞȜȐȜȒțȖȘȎ. Dzșȭ ȐȩȞȜȔȒȓțțȩȣ ȝȜșȡȝȞȜȐȜȒțȖȘȜȐ ȫȢȢȓȘȠȖȐțȎȭ ȚȎȟȟȎ ȏȜșȪȦȖțȟȠȐȎ ȫȚȖȠȖȞȡȓȚȩȣ ȫșȓȘȠȞȜțȜȐ ȜȠșȖȥȎȓȠȟȭ ȜȠ ȫȢȢȓȘȠȖȐțȜȗ ȚȎȟȟȩ Ȑ ȚȖțȖȚȡȚȓ ȕȜțȩȝȞȜȐȜȒȖȚȜȟȠȖ, ȠȎȘȘȎȘȡȞȜȐȓțȪȂȓȞȚȖțȎȣȜȒȖȠȟȭȐȩȟȜȘȜȐȕȜțȓ ȝȞȜȐȜȒȖȚȜȟȠȖ Ȗ ȫȢȢȓȘȠȖȐțȎȭ ȚȎȟȟȎ țȎ ȡȞȜȐțȓ ȂȓȞȚȖ ȡȐȓșȖȥȓțȎ ȐȟșȓȒȟȠȐȖȓ țȓȝȎȞȎȏȜșȖȥțȜȟȠȖ ȕȜțȩ. ȋȠȜ ȜȏȟȠȜȭȠȓșȪȟȠȐȜ ȖȕȚȓțȭȓȠ ȝȜȟȠȜȭțțȡȬ ǾȖȥȎȞȒȟȜțȎ Ȓșȭ ȠȎȘȖȣ țȜȟȖȠȓșȓȗ.
ǼȠȚȓȠȖȚ ȠȎȘȔȓ, ȥȠȜ Ȓșȭ ȜȚȖȥȓȟȘȜȑȜ ȘȜțȠȎȘȠȎ ȟ ȎțȠȖȕȎȝȜȞțȩȚ ȟșȜȓȚ ȝȞȖ țȎȒȏȎȞȪȓȞțȜȚ ȠȜȘȜȝȓȞȓțȜȟȓ Ȑ ȘȜțȠȎȘȠȓ, Ȑ ȝȞȓȒȝȜșȜȔȓțȖȖ, ȥȠȜȝȞȜȕȞȎȥțȜȟȠȪȏȎȞȪȓȞȎ~n = 1, ȐȓșȖȥȖțȎRCmin ȜȝȞȓȒȓșȭȓȠȟȭ ȘȎȘ [27]
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DzșȭȘȜțȤȓțȠȞȎȤȖȖșȓȑȖȞȡȬȧȓȗȝȞȖȚȓȟȖȐn-6H-SiC _1017 ȟȚ 3 |
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ȐȓșȖȥȖțȎ RCmin Ȓșȭ ȘȜțȠȎȘȠȎ ȟ ȎțȠȖȕȎȝȜȞțȩȚ ȟșȜȓȚ ȟȜȟȠȎȐȖȠ |
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RC min = |
4 ¸1.38¸10 23 дж ¸K 1 ¸3¸102 K |
x 5¸10 7 Ом¸см2 |
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(1.6¸10 19 k )2 ¸1017 см 3 ¸1.28¸107 см/c ¸1 |
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408 ǮȑȓȓȐ Ǽ.Ǯ., ǯȓșȭȓȐ Ǯ.dz., ǯȜșȠȜȐȓȤ ǻ.ǿ., ǸȖȟȓșȓȐ ǰ.ǿ., ǸȜțȎȘȜȐȎ Ǿ.ǰ. Ȗ ȒȞ.
ǽȞȖ ȝȞȓȜȏșȎȒȎțȖȖ Ȑ ȠȜȘȜȝȓȞȓțȜȟȓ ȝȜșȓȐȜȗ ȫȚȖȟȟȖȖ ȡȒȓșȪțȜȓ ȝȓȞȓȣȜȒțȜȓȟȜȝȞȜȠȖȐșȓțȖȓȘȜțȠȎȘȠȎ, ȘȎȘȝȜȘȎȕȎțȜȐ[28, 29], ȚȜȔțȜ
ȞȎȟȟȥȖȠȎȠȪ ȝȜ ȢȜȞȚȡșȓ: |
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ȁȞȎȐțȓțȖȓ (2.10) ȖȟȝȜșȪȕȡȓȠȟȭ ȝȞȖ ȐȩȝȜșțȓțȖȖ ȡȟșȜȐȖȭ [28]: |
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1 bkT > kT |
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Ƕȕ (2.10) ȐȖȒțȜ, ȥȠȜ RC ȝȞȖ ȝȞȓȜȏșȎȒȎțȖȖ Ȑ ȠȜȘȜȝȓȞȓțȜȟȓ |
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ǽȋ ȫȘȟȝȜțȓțȤȖȎșȪțȜ ȕȎȐȖȟȖȠ ȜȠ KB |
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ND . ǰ ȡȞȎȐțȓțȖȖ (2.10) |
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– ȣȎȞȎȘȠȓȞȖȟȠȖȥȓȟȘȎȭȫțȓȞȑȖȭ, ȘȜȠȜȞȎȭȜȝȞȓȒȓșȭȓȠȐȓȞȜȭȠțȜȟȠȪ |
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ȠȡțțȓșȖȞȜȐȎțȖȭ Ȗ ȕȎȐȖȟȖȠ ȜȠ ȘȜțȤȓțȠȞȎȤȖȖ șȓȑȖȞȡȬȧȓȗ ȝȞȖȚȓȟȖ |
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Ȑ ȝȜșȡȝȞȜȐȜȒțȖȘȓ. ǽȞȖ ȫȠȜȚ ȝȞȖ ȐȩȝȜșțȓțȖȖ ȡȟșȜȐȖȭ kT/E00 |
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ȒȜȚȖțȖȞȡȓȠ Ȑ ȠȜȘȜȝȓȞȓțȜȟȓ Ȁȋȋ. dzȟșȖ kT/E00 |
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ȠȜȘȜȝȓȞȓțȜȟȎ Ȑ ȘȜțȠȎȘȠȓ ȜȝȞȓȒȓșȭȓȠȟȭ ǽȋ. ǰ ȟșȡȥȎȓ kT/E00 _1 |
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ȠȜȘȜȝȓȞȓțȜȟ Ȑ ȘȜțȠȎȘȠȓ ȜȝȞȓȒȓșȭȓȠȟȭ Ȁǽȋ, Ȏ RC ȞȎȟȟȥȖȠȩȐȎȓȠȟȭ |
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ȝȜ ȢȜȞȚȡșȓ [28] |
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ȅȎȟȠȪ III, DZșȎȐȎ 2 |
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ȜȝȞȓȒȓșȭȬȧȓȑȜȝȞȓȒȓșȘȜțȤȓțȠȞȎȤȖȖȝȞȖȚȓȟȖ, țȖȔȓȘȜȠȜȞȜȑȜȐ ȠȜȘȜȝȓȞȓțȜȟȓ ȒȜȚȖțȖȞȡȓȠ Ȁȋȋ.
ǻȎȞȭȒȡ ȟ ȞȎȟȥȓȠȎȚȖ RC ȝȜ ȢȜȞȚȡșȎȚ (2.10) Ȗ (2.13) Ȓșȭ ȜȚȖȥȓȟȘȖȣȘȜțȠȎȘȠȜȐȟȚȓȣȎțȖȕȚȎȚȖȠȜȘȜȝȓȞȓțȜȟȎ, ȜȟȡȧȓȟȠȐșȭȓȚȩȚȀǽȋ Ȗ ǽȋ, Ȑ [30] ȝȜȘȎȕȎțȜ, ȥȠȜ
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ǽȜȟȘȜșȪȘȡ ȘȜȫȢȢȖȤȖȓțȠȩ CȀǽȋ |
Ȗ Cǽȋ ȟșȎȏȜ ȕȎȐȖȟȭȠ ȜȠ ȘȜț- |
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ȤȓțȠȞȎȤȖȖșȓȑȖȞȡȬȧȓȗȝȞȖȚȓȟȖȐȝȜșȡȝȞȜȐȜȒțȖȘȓȖȏșȖȕȘȖȝȜ Ȑȓ- |
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șȖȥȖțȓ, ȎȐȠȜȞȩ [30] ȕȎȚȓțȖșȖ Ȗȣ ȜȒțȖȚ, ȡȟȞȓȒțȓțțȩȚ ȘȜȫȢȢȖȤȖȓțȠȜȚ C , ȞȎȐțȩȚ
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ȑȒȓ CТПЭ Ȗ CПЭ – ȘȜȫȢȢȖȤȖȓțȠȩ, ȡȟȞȓȒțȓțțȩȓȝȜȟȜȜȠȐȓȠȟȠȐȡȬȧȖȚ ȒȖȎȝȎȕȜțȎȚ ȘȜțȤȓțȠȞȎȤȖȗ, Ȏ m Ȗ n – ȘȜșȖȥȓȟȠȐȜ ȠȜȥȓȘ, Ȑ ȘȜȠȜȞȩȣ ȜȝȞȓȒȓșȭșȖȟȪȐȓșȖȥȖțȩCȀǽȋȖCǽȋ. ǿȡȥȓȠȜȚ(2.20) ȡȞȎȐțȓțȖȓ (2.16) ȚȜȔțȜ ȕȎȝȖȟȎȠȪ Ȑ ȐȖȒȓ
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ǮțȎșȜȑȖȥțȜȓ ȡȞȎȐțȓțȖȓ ȟ ȕȎȚȓțȜȗ E0 Ȑ (2.21) țȎ E00 ȚȜȔțȜ ȕȎȝȖȟȎȠȪ Ȓșȭ ȞȎȟȥȓȠȎ RC ȘȜțȠȎȘȠȎ, Ȑ ȘȜȠȜȞȜȚ ȠȜȘȜȝȓȞȓțȜȟ ȜȟȡȧȓȟȠȐșȭȓȠȟȭ ǽȋ.
ǾȎȟȥȓȠȩRC ȝȜȢȜȞȚȡșȓ(2.21), ȝȞȜȐȓȒȓțțȩȓȎȐȠȜȞȎȚȖ[30] Ȓșȭ Si Ȗ Ȑ [31] Ȓșȭ SiC, ȝȜȘȎȕȩȐȎȬȠ, ȥȠȜ ȒȖȎȝȎȕȜțȩ ȘȜțȤȓțȠȞȎȤȖȗ, Ȑ ȘȜȠȜȞȩȣ ȝȞȓȜȏșȎȒȎȬȠ ȠȓȞȚȜȫșȓȘȠȞȜțțȎȭ, ȠȓȞȚȜȝȜșȓȐȎȭ Ȗ ȝȜșȓȐȎȭ ȫȚȖȟȟȖȖ Ȑ ȫȠȖȣ ȚȎȠȓȞȖȎșȎȣ ȏșȖȕȘȖ ȝȜ ȐȓșȖȥȖțȎȚ.
410ǮȑȓȓȐ Ǽ.Ǯ., ǯȓșȭȓȐ Ǯ.dz., ǯȜșȠȜȐȓȤ ǻ.ǿ., ǸȖȟȓșȓȐ ǰ.ǿ., ǸȜțȎȘȜȐȎ Ǿ.ǰ. Ȗ ȒȞ.
2.2.ǺȓȠȜȒȩ ȖȕȚȓȞȓțȖȭ RC
2.2.1. ǺȓȠȜȒ ǸȜȘȟȎ-ǿȠȞȓȘȎ
ȁȒȓșȪțȜȓ(ȝȞȖȐȓȒȓțțȜȓ) ȝȓȞȓȣȜȒțȜȓȘȜțȠȎȘȠțȜȓȟȜȝȞȜȠȖȐșȓțȖȓ Ȑ ȕȎȐȖȟȖȚȜȟȠȖ ȜȠ ȠȖȝȎ ȜȏȞȎȕȤȜȐ (ȜȏȨȓȚțȩȓ ȖșȖ ȝșȎțȎȞțȩȓ) ȖȕȚȓȞȭȓȠȟȭ țȓȟȘȜșȪȘȖȚȖ ȚȓȠȜȒȎȚȖ [32]. Dzșȭ ȖȕȚȓȞȓțȖȭ RC ȜȚȖȥȓȟȘȖȣ ȘȜțȠȎȘȠȜȐ Ș ȜȏȨȓȚțȩȚ ȚȜțȜȘȞȖȟȠȎșșȎȚ ȝȜșȡȝȞȜȐȜȒțȖȘȎ ȥȎȧȓ ȐȟȓȑȜ ȝȞȖȚȓțȭȬȠ ȚȓȠȜȒ ǸȜȘȟȎ-ǿȠȞȓȘȎ [33]. ǻȎ ȞȖȟ. 2.1 ȝȞȖȐȓȒȓțȎ ȘȜțȢȖȑȡȞȎȤȖȭ ȜȏȞȎȕȤȎ Ȓșȭ ȖȕȚȓȞȓțȖȭ RC. ǰ ȫȠȜȚ ȟșȡȥȎȓ ȝȜșțȜȓ ȟȜȝȞȜȠȖȐșȓțȖȓ R ȚȓȔȒȡ ȐȓȞȣțȖȚ ȘȜțȠȎȘȠȜȚ Ȗ țȖȔțȖȚ ȜȝȞȓȒȓșȭȓȠȟȭ ȘȎȘ
R= R1 + R2, |
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ȑȒȓR1 =RC/Qr2 – ȘȜțȠȎȘȠțȜȓȟȜȝȞȜȠȖȐșȓțȖȓ, R2 SF(r/t)/r – ȜȏȨȓȚțȜȓȟȜȝȞȜȠȖȐșȓțȖȓ ȜȏȞȎȕȤȎ, t – ȠȜșȧȖțȎȎȘȠȖȐțȜȑȜȟșȜȭ, r – ȞȎȒȖȡȟ ȐȓȞȣțȓȑȜ ȘȜțȠȎȘȠȎ, S – ȡȒȓșȪțȜȓ ȟȜȝȞȜȠȖȐșȓțȖȓ ȎȘȠȖȐțȜȑȜ ȟșȜȭ; F(r/t) xarctg(2t/r)/Q – ȢȡțȘȤȖȭ, ȡȥȖȠȩȐȎȬȧȎȭ ȘȜțȢȖȑȡȞȎȤȖȬ șȖțȖȗ ȠȜȘȎ Ȑ ȎȘȠȖȐțȜȚ ȟșȜȓ.
Dzșȭ ȜȝȞȓȒȓșȓțȖȭ RC Ȗ ȝȜȝȞȎȐȘȖ țȎ ȟȜȝȞȜȠȖȐșȓțȖȓ ȟȜȓȒȖțȖȠȓșȪțȩȣ ȝȞȜȐȜȒȜȐ ȖȕȚȓȞȭȬȠ R ȐȓȞȣțȖȣ ȘȜțȠȎȘȠȜȐ ȟ ȞȎȕșȖȥțȜȗ ȝșȜȧȎȒȪȬ Ȗ ȟȠȞȜȭȠ ȕȎȐȖȟȖȚȜȟȠȪ (R R2) = f(1/r). ǺȓȠȜȒ ȝȜȕȐȜșȭȓȠ ȖȕȚȓȞȭȠȪ RC ȝȜȞȭȒȘȎ 10 6 ǼȚ¸ȟȚ2 ȟ ȠȜȥțȜȟȠȪȬ țȓ ȣȡȔȓ 25%.
ǾȖȟ. 2.1. ǸȜțȢȖȑȡȞȎȤȖȭ ȜȏȞȎȕȤȎ Ȓșȭ ȜȝȞȓȒȓșȓțȖȭ ȘȜțȠȎȘȠțȜȑȜ ȟȜȝȞȜȠȖȐșȓțȖȭ ȚȓȠȜȒȜȚ ǸȜȘȟȎ-ǿȠȞȫȘȎ [32, 33]
ȅȎȟȠȪ III, DZșȎȐȎ 2 |
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2.2.2. ǺȓȠȜȒ ȒșȖțțȜȗ șȖțȖȖ
ǼȚȖȥȓȟȘȖȓȘȜțȠȎȘȠȩ ȝșȎțȎȞțȜȗ ȘȜțȟȠȞȡȘȤȖȖ ȘȠȜțȘȜȟșȜȗțȩȚ ȝȜșȡȝȞȜȐȜȒțȖȘȜȐȩȚ ȟȠȞȡȘȠȡȞȎȚ, Ȑ ȜȟțȜȐțȜȚ, ȖȕȚȓȞȭȬȠ ȚȓȠȜȒȜȚ ȒșȖțțȜȗ șȖțȖȖ – transmission line method – (TLM) [34]. ǰ țȎȟȠȜ-
ȭȧȓȓ ȐȞȓȚȭ ȟȡȧȓȟȠȐȡȓȠ țȓȟȘȜșȪȘȜ ȚȜȒȖȢȖȘȎȤȖȗ ȫȠȜȑȜ ȚȓȠȜȒȎ, ȝȞȖȚȓțȭȓȚȜȑȜ Ȓșȭ ȖȕȚȓȞȓțȖȭ ȡȒȓșȪțȜȑȜ ȟȜȝȞȜȠȖȐșȓțȖȭ ȜȚȖȥȓȟȘȖȣ ȘȜțȠȎȘȠȜȐ ȘȎȘ ȝșȎțȎȞțȩȣ, ȠȎȘ Ȗ ȐȓȞȠȖȘȎșȪțȩȣ ȘȜțȟȠȞȡȘȤȖȗ. ǼȒȖț Ȗȕ ȐȎȞȖȎțȠȜȐ ȘȜțȢȖȑȡȞȎȤȖȖ ȜȏȞȎȕȤȎ Ȓșȭ ȖȕȚȓȞȓțȖȭ RC ȚȓȠȜȒȜȚ TLM ȝȞȖȐȓȒȓț țȎ ȞȖȟ. 2.2Ȏ. ǿȜȝȞȜȠȖȐșȓțȖȓ R ȚȓȔȒȡ ȒȐȡȚȭ ȟȜȟȓȒțȖȚȖȘȜțȠȎȘȠȎȚȖȠȜșȧȖțȜȗW, ȞȎȟȟȠȜȭțȖȓȚȓȔȒȡȘȜȠȜȞȩȚȖ L ȜȝȞȓȒȓșȭȓȠȟȭ ȘȎȘ
R= RǽL/W+ 2RC + R2 , |
(2.23) |
ǾȖȟ. 2.2. ǼȝȞȓȒȓșȓțȖȓ ȘȜțȠȎȘȠțȜȑȜ Ȗ ȝȜȐȓȞȣțȜȟȠțȜȑȜ ȟȜȝȞȜȠȖȐșȓțȖȗ Rǽ ȟ ȖȟȝȜșȪȕȜȐȎțȖȓȚ ȖȕȚȓȞȓțȖȗ ȝȜ ȚȜȒȓșȖ ȝȓȞȓȒȎȬȧȓȗ șȖțȖȖ: Ȏ – ȀǹǺ ȟȠȞȡȘȠȡȞȎ; ȏ – ȕȎȐȖȟȖȚȜȟȠȪ ȟȜȝȞȜȠȖȐșȓțȖȭ ȜȠ ȞȎȟȟȠȜȭțȖȭ ȚȓȔȒȡ ȘȜțȠȎȘȠȎ-
ȚȖ [34]
412 ǮȑȓȓȐ Ǽ.Ǯ., ǯȓșȭȓȐ Ǯ.dz., ǯȜșȠȜȐȓȤ ǻ.ǿ., ǸȖȟȓșȓȐ ǰ.ǿ., ǸȜțȎȘȜȐȎ Ǿ.ǰ. Ȗ ȒȞ.
ǾȖȟ. 2.3. ȂȞȎȑȚȓțȠ ȦȎȏșȜțȎ ȟ ȞȎȒȖȎșȪțȜȗ ȟȖȚȚȓȠȞȖȓȗ Ȓșȭ ȜȝȞȓȒȓșȓțȖȭȝȓȞȓȣȜȒțȜȑȜȟȜȝȞȜȠȖȐșȓțȖȭȜȚȖȥȓȟȘȖȣȘȜțȠȎȘȠȜȐ: 1 – ȘȜțȠȎȘȠțȜȓ ȝȜȘȞȩȠȖȓ; r1 Ȗ r2 – ȞȎȒȖȡȟȩ ȘȜțȠȎȘȠțȩȣ ȝșȜȧȎȒȜȘ [35]
ȑȒȓ Rǽ – ȝȜȐȓȞȣțȜȟȠțȜȓ ȟȜȝȞȜȠȖȐșȓțȖȓ ȎȘȠȖȐțȜȑȜ ȟșȜȭ ȚȓȔȒȡ ȘȜțȠȎȘȠȎȚȖ; R2 – ȟȜȝȞȜȠȖȐșȓțȖȓ ȟȜȓȒȖțȖȠȓșȪțȩȣ ȝȞȜȐȜȒȜȐ, ȜȝȞȓȒȓșȭȓȚȜȓ ȝȞȖ ȝȞȖȟȜȓȒȖțȓțȖȖ ȒȐȡȣ ȝȞȜȐȜȒȜȐ Ș ȜȒțȜȗ ȘȜțȠȎȘȠțȜȗ ȝșȜȧȎȒȘȓ. RC ȜȝȞȓȒȓșȭȓȠȟȭ ȝȜȜȠȟȓȥȘȓțȎȜȟȖȜȞȒȖțȎȠȝȞȭȚȜȗR= f(L), Rǽ ȜȝȞȓȒȓșȭȓȠȟȭȝȜțȎȘșȜțȡȫȠȜȗȝȞȭȚȜȗ(ȞȖȟ. 2.2ȏ). ǿ ȡȥȓȠȜȚȞȭȒȎ
ȀȎȏșȖȤȎ 2.4. ǰȓșȖȥȖțȩ ȡȒȓșȪțȜȑȜ ȝȓȞȓȣȜȒțȜȑȜ ȟȜȝȞȜȠȖȐșȓțȖȭ ȜȚȖȥȓȟȘȖȣ ȘȜțȠȎȘȠȜȐ țȎ ȜȟțȜȐȓ țȖȘȓșȭ, ȖȕȑȜȠȜȐșȓțțȩȣ țȎ ǿ ȑȞȎțȖ ȝȜȒșȜȔȓȘ n-6H- SiC, ȞȎȟȟȥȖȠȎțțȩȓ ȟ ȖȟȝȜșȪȕȜȐȎțȖȓȚ ȞȎȕșȖȥțȩȣ ȚȓȠȜȒȖȘ [35]
ǺȓȠȜȒ ȞȎȟȥȓȠȎ ȐȓșȖȥȖțȩ |
ǵțȎȥȓțȖȭ RC (ǼȚ¸ȟȚ2), ȟȜȜȠȐȓȠȟȠȐȡȬȧȖȓ |
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ȡȒȓșȪțȜȑȜ ȘȜțȠȎȘȠțȜȑȜ |
ȠȓȚȝȓȞȎȠȡȞȓ ȜȠȔȖȑȎ |
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ȟȜȝȞȜȠȖȐșȓțȖȭ |
Ȁ= 800°ǿ |
Ȁ= 1000°ǿ |
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ǺȓȠȜȒȩ țȎ |
1 |
1.6¸10 4 |
9.0¸10 5 |
1.2¸10 4 |
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1.1¸10 4 |
4.0¸10 5 |
1.1¸10 4 |
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ȜȟțȜȐȓ TLM |
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3 |
1.1¸10 4 |
3.9¸10 5 |
1.1¸10 4 |
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ȅȖȟșȓțțȩȗ |
4 |
8.3¸10 4 |
2.5¸10 5 |
8.6¸10 5 |
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ȞȎȟȥȓȠ |
5 |
1.0¸10 4 |
3.6¸10 5 |
9.5¸10 5 |
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ǽȞȖȚȓȥȎțȖȓ: 1 – ȝȜ șȖțȓȗțȜȗ ȎȝȝȞȜȘȟȖȚȎȤȖȖ ȕȎȐȖȟȖȚȜȟȠȖ ȟȜȝȞȜȠȖȐșȓțȖȭ ȚȓȔȒȡ ȘȜțȠȎȘȠțȩȚȖ ȝșȜȧȎȒȘȎȚȖ R ȜȠ ln(r1 / r2) ȝȞȖ r1 = const, r1 Ȗ r2 – ȐțȓȦțȖȗ Ȗ ȐțȡȠȞȓțțȖȗ ȞȎȒȖȡȟȩ ȘȜțȠȎȘȠțȩȣ ȝșȜȧȎȒȜȘ (ȟȚ. ȞȖȟ. 2.3); 2 – ȝȜ șȖțȓȗțȜȗȕȎȐȖȟȖȚȜȟȠȖR ȜȠ r1 2 ȝȞȖln(r1 /r2)=const; 3 – ȖȕȕȎȐȖȟȖȚȜȟȠȖ R ȜȠ r1 2 ȟȡȥȓȠȜȚȚȖțȖȚȖȕȎȤȖȖȢȡțȘȤȖȖțȓȐȭȕȘȖ; 4, 5 – ȝȜȞȓȕȡșȪȠȎȠȎȚ ȥȖȟșȓțțȜȑȜȞȎȟȥȓȠȎR ȏȓȕȖȟȡȥȓȠȜȚȎțȖȕȜȠȞȜȝȖȖȟȜȝȞȜȠȖȐșȓțȖȭȝȜȒșȜȔȘȖ ȟ ȝȜȟșȓȒȡȬȧȓȗ ȚȖțȖȚȖȕȎȤȖȓȗ ȢȡțȘȤȖȖ țȓȐȭȕȘȖ ȟȜȜȠȐȓȠȟȠȐȓțțȜ
ȅȎȟȠȪ III, DZșȎȐȎ 2 |
413 |
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ȢȎȘȠȜȞȜȐ, ȐșȖȭȬȧȖȣ țȎ ȝȜȑȞȓȦțȜȟȠȪ ȖȕȚȓȞȓțȖȗ RC, ȚȓȠȜȒ TLM ȝȜȕȐȜșȭȓȠ ȖȕȚȓȞȭȠȪ RC ȝȜȞȭȒȘȎ 10 6 ÷ 10 5 ǼȚ¸ȟȚ2 ȟ ȠȜȥțȜȟȠȪȬ țȓ ȣȡȔȓ 15÷ 20% [35].
ǰȜȕȚȜȔțȜȟȠȖ TLM ȚȓȠȜȒȎ ȖȕȚȓȞȓțȖȭ RC țȎȑșȭȒțȜ ȝȞȜȒȓȚȜțȟȠȞȖȞȜȐȎțȩ Ȑ ȞȎȏȜȠȓ [35], ȎȐȠȜȞȩ ȘȜȠȜȞȜȗ ȝȞȓȒșȜȔȖșȖ ȞȎȒȖȎșȪțȡȬ ȑȓȜȚȓȠȞȖȬ ȘȜțȠȎȘȠțȩȣ ȝșȜȧȎȒȜȘ (ȞȖȟ. 2.3) Ȗ ȎȝȞȜȏȖȞȜȐȎșȖ ȓȓ țȎ ȜȚȖȥȓȟȘȖȣ ȘȜțȠȎȘȠȎȣ, ȖȕȑȜȠȜȐșȓțțȩȣ țȎ ȜȟțȜȐȓ țȖȘȓșȓȐȜȗ Țȓ- ȠȎșșȖȕȎȤȖȖȘȟȖșȪțȜșȓȑȖȞȜȐȎțțȩȚȝȜȒșȜȔȘȎȚn-6H-SiC ȟȘȜțȤȓțȠȞȎȤȖȓȗțȓȟȘȜȚȝȓțȟȖȞȜȐȎțțȩȣȒȜțȜȞȜȐ_3÷5¸1018 ȟȚ 3. ǾȓȕȡșȪȠȎȠȩ ȖȕȚȓȞȓțȖȗ RC ȟȞȎȐțȖȐȎșȖȟȪ ȟ ȥȖȟșȓțțȩȚ ȞȎȟȥȓȠȜȚ RC. ǰ ȠȎȏș. 2.4 ȝȞȖȐȓȒȓțȩ ȐȓșȖȥȖțȩ RC, ȝȜșȡȥȓțțȩȓ Ȗȕ ȖȕȚȓȞȓțȖȗ ȚȓȠȜȒȜȚ TLM Ȗ ȥȖȟșȓțțȩȚ ȞȎȟȥȓȠȜȚ.
ǽȜȑȞȓȦțȜȟȠȪ ȖȕȚȓȞȓțȖȭ RC, ȜȝȞȓȒȓșȭȓȚȎȭ ȝȜ ȐȓșȖȥȖțȓ ȞȎȕȏȞȜȟȎ ȫȘȟȝȓȞȖȚȓțȠȎșȪțȩȣ ȒȎțțȩȣ ȝȜ ȝșȜȧȎȒȖ ȝȜ ȒȎțțȩȚ [35], țȓ ȝȞȓȐȩȦȎșȖ 15 20%.
2.2.3. ȅȓȠȩȞȓȣȠȜȥȓȥțȩȗ ȚȓȠȜȒ
Dzșȭ ȖȕȚȓȞȓțȖȭ RC ȜȚȖȥȓȟȘȖȣ ȘȜțȠȎȘȠȜȐ Ș ȝșȎțȎȞțȩȚ ȟȠȞȡȘȠȡȞȎȚ ȖȟȝȜșȪȕȡȬȠ, țȎȞȭȒȡ ȟ ȚȓȠȜȒȜȚ TLM ȥȓȠȩȞȓȣȠȜȥȓȥțȩȗ ȚȓȠȜȒ [36, 37]. ǻȎ ȞȖȟ. 2.4 ȝȞȖȐȓȒȓțȎ ȘȜțȢȖȑȡȞȎȤȖȭ ȜȏȞȎȕȤȎ Ȓșȭ ȖȕȚȓȞȓțȖȭ RC ȥȓȠȩȞȓȣȠȜȥȓȥțȩȚ ȚȓȠȜȒȜȚ, Ȓșȭ ȘȜȠȜȞȜȗ ȝȞȖ ȐȩȝȜșțȓțȖȖ ȡȟșȜȐȖȭ Sr2 < RCt, ȑȒȓ r – ȞȎȒȖȡȟ ȘȜțȠȎȘȠȎ, t – ȠȜșȧȖțȎ ȎȘȠȖȐțȜȑȜ ȟșȜȭ, S – ȓȑȜ ȡȒȓșȪțȜȓ ȟȜȝȞȜȠȖȐșȓțȖȓ, ȐȓșȖȥȖțȎ RC ȜȝȞȓȒȓșȭȓȠȟȭ ȝȜ ȢȜȞȚȡșȓ [37]
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ǾȖȟ. 2.4. ǸȜțȢȖȑȡȞȎȤȖȭ ȜȏȞȎȕȤȎ Ȓșȭ ȖȕȚȓȞȓțȖȭ ȝȞȖȐȓȒȓțțȜȑȜ ȘȜțȠȎȘȠțȜȑȜȟȜȝȞȜȠȖȐșȓțȖȭȥȓȠȩȞȓȣȠȜȥȓȥțȩȚ ȚȓȠȜȒȜȚ [32]
420 |
ǮȑȓȓȐ Ǽ.Ǯ., ǯȓșȭȓȐ Ǯ.dz., ǯȜșȠȜȐȓȤ ǻ.ǿ., ǸȖȟȓșȓȐ ǰ.ǿ., ǸȜțȎȘȜȐȎ Ǿ.ǰ. Ȗ ȒȞ. |
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ȅȎȟȠȪ III, DZșȎȐȎ 2 |
421 |
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ǾȖȟ. 2.10. ǽȜȐȓȞȣțȜȟȠȪ ȝșȓțȘȖ Ni (Ȏ, Ȑ) Ȗ ȒțȎ ǼȔȓ-ȘȞȎȠȓȞȎ (ȏ, ȑ) ȟȠȞȡȘ- |
ǾȖȟ. 2.11. ǽȜȐȓȞȣțȜȟȠȪ ȝșȓțȘȖ Ni (Ȏ, Ȑ) ȖȒțȎ ǼȔȓ-ȘȞȎȠȓȞȎ (ȏ, ȑ) ȟȠȞȡȘȠȡȞȩ |
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Ni-n-21R-SiC (0001) ȝȜȟșȓ ǯȀǼ ȒȜ ȠȓȚȝȓȞȎȠȡȞ: a, ȏ – 750°ǿ; Ȑ, ȑ – 900°ǿ [41] |
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ȠȡȞȩ Ni-n-21R-SiC (0001): a, ȏ – ȒȜ ǯȀǼ; Ȑ, ȑ – ȝȜȟșȓ ǯȀǼ ȒȜ ȠȓȚȝȓȞȎȠȡ- |
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Ȟȩ 450 °ǿ [41] |
ȀȎȏșȖȤȎ 2.5. ǰșȖȭțȖȓ ȠȓȚȝȓȞȎȠȡȞȩ ǯȀǼ țȎ ȐȓșȖȥȖțȡ RC ȜȚȖȥȓȟȘȖȣ |
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ȠȓȞȚȜȣȖȚȖȥȓȟȘȖȣ ȢȎȘȠȜȞȜȐ, ȜȏȡȟșȜȐșȖȐȎȬȧȖȣ ȖțȠȓțȟȖȐțȜȓ ȟȖșȖ- |
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ȘȜțȠȎȘȠȜȐ Ni-n-21R(6H)SiC [54] |
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ȤȖȒȜȜȏȞȎȕȜȐȎțȖȓ. ǽȞȖ ȏȜșȓȓ ȐȩȟȜȘȖȣ ȠȓȚȝȓȞȎȠȡȞȎȣ țȎȏșȬȒȎȓȚȩȓ |
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ȖȕȚȓțȓțȖȭȐȜȏșȎȟȠȖȘȜțȠȎȘȠȎȟȐȭȕȎțȩȟȘȜțȐȓȞȟȖȓȗțȓȟȠȎȏȖșȪțȩȣ |
ȀȓȚȝȓȞȎȠȡȞȎ |
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ȟȖșȖȤȖȒțȩȣ ȢȎȕ, ȐȜȕțȖȘȎȬȧȖȣ ȝȞȖ ȚȓțȪȦȖȣ ȠȓȚȝȓȞȎȠȡȞȎȣ ǯȀǼ, |
ȜȠȔȖȑȎ, °ǿ |
21R-SiC(0001) |
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Ȑ ȏȜșȓȓ ȟȠȎȏȖșȪțȩȓ, ȥȠȜ ȘȜȞȞȓșȖȞȡȓȠ ȟ ȞȓȕȡșȪȠȎȠȎȚȖ ȞȓțȠȑȓțȜȒȖȢ- |
21R-SiC(0001) |
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ȖȟȣȜȒțȩȗ |
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ǻȎ ȞȖȟ. 2.10 Ȗ 2.11 ȝȞȓȒȟȠȎȐșȓțȩ ǮǿǺ-ȖȕȜȏȞȎȔȓțȖȭ ȝȜȐȓȞ- |
450 |
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ȣțȜȟȠȖ ȝșȓțȘȖ Ni Ȗ ȒțȎ ǼȔȓ-ȘȞȎȠȓȞȎ ȝȜȟșȓ ǯȀǼ ȝȞȖ ȞȎȕșȖȥțȩȣ |
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600 |
4¸10 2 |
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ȠȓȚȝȓȞȎȠȡȞȎȣ. ǿȜȑșȎȟțȜ ȝȜșȡȥȓțțȩȚ ȒȎțțȩȚ, ȝȞȖ ǯȀǼ ȒȜ 750°ǿ |
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750 |
5¸10 4 |
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ȞȓșȪȓȢ ȒțȎ ȘȞȎȠȓȞȎ ȜȝȞȓȒȓșȭȓȠȟȭ ȟȜȟȠȜȭțȖȓȚ ȖȟȣȜȒțȜȗ ȝȜȐȓȞȣ- |
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țȜȟȠȖ SiC. ǽȞȖ ȠȓȚȝȓȞȎȠȡȞȎȣ .750°ǿ țȎ ȞȎțȓȓ ȑșȎȒȘȖȣ ȡȥȎȟȠȘȎȣ |
900 |
3.6¸10 |
4 |
3.9¸10 |
4 |
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ȒțȎ ȘȞȎȠȓȞȎ ȝȜȭȐșȭȓȠȟȭ ȕȓȞțȖȟȠȜȟȠȪ. ǰȩȟȜȠȎ ȕȓȞȓț ȡȐȓșȖȥȖȐȎȓȠȟȭ |
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1000 |
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3.2¸10 4 |
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1.9¸10 4 |
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ȟ ȞȜȟȠȜȚ ȠȓȚȝȓȞȎȠȡȞȩ (ȜȠ 4 țȚ ȝȞȖ 750°ǿ ȒȜ 70 țȚ ȝȞȖ 1100°ǿ). Ƕȟ- |
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1100 |
3.8¸10 4 |
1.7¸10 4 |
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ȣȜȒȭȖȕȞȎȕșȖȥțȜȗȟȘȜȞȜȟȠȖȠȞȎȐșȓțȖȭNi, SiC ȖȟȖșȖȤȖȒȜȐ, ȒȎțțȩȣ |
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