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P.210–218.

300 ǮȑȓȓȐ Ǽ.Ǯ., ǯȓșȭȓȐ Ǯ.dz., ǯȜșȠȜȐȓȤ ǻ.ǿ., ǸȖȟȓșȓȐ ǰ.ǿ., ǸȜțȎȘȜȐȎ Ǿ.ǰ. Ȗ ȒȞ.

ǾȖȟ. 2.1. ǿȝȓȘȠȞȎșȪțȎȭȕȎȐȖȟȖȚȜȟȠȪ ȘȜȫȢȢȖȤȖȓțȠȜȐ ȝȜȑșȜȧȓțȖȭ (ǂ), ȜȠȞȎȔȓțȖȭ(R) ȖȝȞȜȝȡȟȘȎțȖȭ (T) SiO2: 1 – ȝȜȑșȜȧȓțȖȭ; 2 – ȝȞȜȝȡȟȘȎțȖȭ; 3 – ȜȠȞȎȔȓțȖȭ. ǸȞȖȐȩȓ 1, 3 ȝȜȟȠȞȜȓțȩ ȝȜ ȒȎțțȩȚ [18], ȘȞȖȐȎȭ 2 – ȝȜ ȒȎț-

țȩȚ [14]

ȑȒȓ R1 Ȗ R2 – ȘȜȫȢȢȖȤȖȓțȠȩ ȜȠȞȎȔȓțȖȭ ȜȠ ȑȞȎțȖȤ SiO2 –ȝȜșȡȝȞȜ- ȐȜȒțȖȘ Ȗ SiO2 – ȐȜȕȒȡȣ ȟȜȜȠȐȓȠȟȠȐȓțțȜ, %= 2nd1cos K ï ȞȎȕțȜȟȠȪ ȣȜȒȎșȡȥȓȗ; n – ȝȜȘȎȕȎȠȓșȪȝȞȓșȜȚșȓțȖȭȜȘȟȖȒțȜȗȝșȓțȘȖ, K – ȡȑȜș ȝȎȒȓțȖȭ șȡȥȎ Ȗ d1 – ȠȜșȧȖțȎ ȜȘȖȟșȎ, Po – ȐȓșȖȥȖțȎ ȝȎȒȎȬȧȓȑȜ ȖȕșȡȥȓțȖȭ.

ǿȝȓȘȠȞȎșȪțȩȓ ȣȎȞȎȘȠȓȞȖȟȠȖȘȖ ȝșȓțȜȘȒȐȡȜȘȖȟȖȘȞȓȚțȖȭȝȞȖȐȓȒȓțȩ țȎ ȞȖȟ. 2.1. ǸȎȘ ȐȖȒțȜ Ȗȕ ȞȖȟ. 2.1, șȜȘȎșȪțȜȓ ȝȜȑșȜȧȓțȖȓ ȒșȭSiO2 țȎȏșȬȒȎȓȠȟȭȐȘȜȞȜȠȘȜȐȜșțȜȐȜȗȖȒșȖțțȜȐȜșțȜȐȜȗȜȏșȎȟȠȖ ȖȕșȡȥȓțȖȭ. ǽȜȫȠȜȚȡ ȝȞȖ ȜȏȞȎȏȜȠȘȓ ȝȜșȡȝȞȜȐȜȒțȖȘȜȐȩȣ ȟȠȞȡȘȠȡȞ, ȟȜȒȓȞȔȎȧȖȣ șȜȘȎșȪțȩȓ ȒȖȫșȓȘȠȞȖȥȓȟȘȖȓ ȝșȓțȘȖ țȎ ȝȜȐȓȞȣțȜȟȠȖ ȝșȎȟȠȖț, țȓȜȏȣȜȒȖȚȜ ȡȥȖȠȩȐȎȠȪ ȟșȜȔțȩȗ ȣȎȞȎȘȠȓȞ ȝȜȑșȜȧȓțȖȭ, ȝȞȜȝȡȟȘȎțȖȭ Ȗ ȜȠȞȎȔȓțȖȭ ȝșȓțȜȘ ȒȐȡȜȘȖȟȖ ȘȞȓȚțȖȭ.

ǻȎ ȞȖȟ. 2.2 ȝȜȘȎȕȎțȎ ȕȎȐȖȟȖȚȜȟȠȪ ȘȜȫȢȢȖȤȖȓțȠȎ ȝȞȜȝȡȟȘȎțȖȭ ȟȠȞȡȘȠȡȞȩ SiO2-Si ȜȠ ȜȠțȜȦȓțȖȭ ȠȜșȧȖțȩ SiO2 Ș ȒșȖțȓ ȐȜșțȩ. ǽȎȞȎȚȓȠȞȩ Ȓșȭ ȞȎȟȥȓȠȎ ȐȓșȖȥȖțȩ d1/M ȏȩșȖ ȐȩȏȞȎțȩ ȟȜȑșȎȟ-

ǾȖȟ. 2.2. ǵȎȐȖȟȖȚȜȟȠȪ ȘȜȫȢȢȖȤȖȓțȠȎȝȞȜȝȡȟȘȎțȖȭSiO2 ȜȠ ȜȠțȜȦȓțȖȭ d1/M [19]

ǾȖȟ. 2.3. ǵȎȐȖȟȖȚȜȟȠȪ ȝȞȖȐȓȒȓțțȜȑȜȖțȠȓȑȞȎșȪțȜȑȜ ȘȜȫȢȢȖȤȖȓțȠȎ ȝȞȜȝȡȟȘȎțȖȭ ȟȠȞȡȘȠȡȞȩ SiO2–Si ȜȠ ȠȜșȧȖțȩ ȟșȜȭ ȒȖȜȘȟȖȒȎȝȞȖȜȏșȡȥȓțȖȖȟ șȖȤȓȐȜȗ ȟȠȜȞȜțȩ ȟȠȞȡȘȠȡȞȩ [19]

țȜ [14]: n1 = 1.45; R1 = 0.443 Ȗ R2 = 0.185. ǾȓȕȡșȪȠȎȠȩ, ȝȞȖȐȓȒȓțțȩȓ țȎ ȞȖȟ. 2.2, ȝȜȘȎȕȩȐȎȬȠ, ȥȠȜ ȝșȓțȘȎ ȒȖȫșȓȘȠȞȖȘȎ ȝȞȖ ǯȀǼ ȚȜȔȓȠ ȟșȡȔȖȠȪ ȝȞȜȟȐȓȠșȭȬȧȖȚ ȝȜȘȞȩȠȖȓȚ. ǿșȓȒȜȐȎȠȓșȪțȜ, ȡȥȎȟȠȘȖ ȝȜșȡȝȞȜȐȜȒțȖȘȎ ȟ ȞȎȕțȜȗ ȠȜșȧȖțȜȗ ȝșȓțȘȖ ȒȖȫșȓȘȠȞȖȘȎ ȏȡȒȡȠ ȜȠȔȖȑȎȠȪȟȭ ȝȜ-ȞȎȕțȜȚȡ. ǼȟȜȏȓțțȜ ȫȠȜȠ ȫȢȢȓȘȠ ȏȡȒȓȠ ȕȎȚȓȠȓț ȝȞȖ țȓȏȜșȪȦȖȣ ȒșȖȠȓșȪțȜȟȠȭȣ ȜȏșȡȥȓțȖȭ. ȋȠȖ ȜȟȜȏȓțțȜȟȠȖ ȝȜȑșȜȧȓțȖȭ Ȗ ȝȞȜȝȡȟȘȎțȖȭ ȝșȓțȜȘ SiO2 țȓȜȏȣȜȒȖȚȜ ȡȥȖȠȩȐȎȠȪ ȝȞȖ ȐȩȏȜȞȓ ȜȝȠȖȚȎșȪțȩȣ ȞȓȔȖȚȜȐ ȜȏȞȎȏȜȠȘȖ ȝȜșȡȝȞȜȐȜȒțȖȘȜȐȩȣ ȟȠȞȡȘȠȡȞ, ȖȟȝȜșȪȕȡȓȚȩȣ Ȓșȭ ȖțȠȓȑȞȎșȪțȩȣ ȟȣȓȚ [14–17].

ǽȜȟȘȜșȪȘȡ ȝȞȖ ǯȀǼ ȝȜșȡȝȞȜȐȜȒțȖȘȜȐȩȣ ȟȠȞȡȘȠȡȞ Ȑ ȕȎȐȖȟȖȚȜȟȠȖ ȜȠ ȠȖȝȎ ȖȟȠȜȥțȖȘȎ ȖȕșȡȥȓțȖȭ ȖȟȝȜșȪȕȡȓȠȟȭ ȒȖȎȝȎȕȜț ȒșȖț ȐȜșț ȜȠ ȐȎȘȡȡȚțȜȑȜ ȡșȪȠȞȎȢȖȜșȓȠȎ ȒȜ ȒȎșȪțȓȑȜ ǶǸ-ȖȕșȡȥȓțȖȭ, ȠȜ

ȐȞȓȎșȪțȩȣȟȠȞȡȘȠȡȞȎȣǸǺǼǽǯǶǿȝȞȖȖȟȝȜșȪȕȡȓȚȩȣȝșȓțȘȎȣ SiO2 ȠȜșȧȖțȜȗ0.05–1.0 ȚȘȚțȓȜȏȣȜȒȖȚȜȡȥȖȠȩȐȎȠȪȜȝȠȖȥȓȟȘȖȓȣȎȞȎȘȠȓ-

ȞȖȟȠȖȘȖȝșȓțȜȘSiO2 ȖȖȣȐșȖȭțȖȓțȎȞȎȟȝȞȓȒȓșȓțȖȓȠȓȚȝȓȞȎȠȡȞțȩȣ ȝȜșȓȗ Ȑ ȟȠȞȡȘȠȡȞȎȣ.

ǻȎ ȞȖȟ. 2.3 Ȗ 2.4 ȝȜȘȎȕȎțȜ ȖȕȚȓțȓțȖȓ ȝȞȖȐȓȒȓțțȩȣ ȘȜȫȢȢȖ-

ȤȖȓțȠȜȐ ȝȞȜȝȡȟȘȎțȖȭ Ȗ ȜȠȞȎȔȓțȖȭ ȟȠȞȡȘȠȡȞȩ SiO2–Si ȜȠ ȠȜșȧȖțȩ ȟșȜȭ SiO2, ȞȎȟȟȥȖȠȎțțȩȣ ȟȜȑșȎȟțȜ [19]. ȃȜȒ ȘȞȖȐȩȣ ȝȜȘȎȕȩȐȎȓȠ, ȥȠȜ

ȐȕȎȐȖȟȖȚȜȟȠȖȜȠȠȜșȧȖțȩSiO2 ȘȜȫȢȢȖȤȖȓțȠȩȜȠȞȎȔȓțȖȭȖȝȞȜȝȡȟȘȎțȖȭ ȚȜȑȡȠ ȡȐȓșȖȥȖȐȎȠȪȟȭ ȖșȖ ȡȚȓțȪȦȎȠȪȟȭ ȝȞȖ ȘȞȎȠțȜȟȠȖ ȠȜșȧȖțȩ ȝșȓțȘȖ M/4 ȖșȖ M/2. ȋȠȜȠ ȫȢȢȓȘȠ ȜȟȜȏȓțțȜ ȕȎȚȓȠȓț Ȑ ȟșȡȥȎȓ ȠȜțȘȖȣȜȘȟȖȒțȩȣȝșȓțȜȘȖȦȖȞȜȘȜȖȟȝȜșȪȕȡȓȠȟȭȐȜȝȠȜȫșȓȘȠȞȜțȖȘȓ Ȗ ȟȜșțȓȥțȜȗ ȫțȓȞȑȓȠȖȘȓ [20, 22].

ǮțȎșȜȑȖȥțȩȓȕȎȐȖȟȖȚȜȟȠȖțȎȏșȬȒȎȬȠȟȭȖȒșȭȘȎȞȏȖȒȎȘȞȓȚțȖȭ

ȟȝșȓțȘȜȗ SiO2. ǻȎ ȞȖȟ. 2.5. ȝȜȘȎȕȎțȎ ȕȎȐȖȟȖȚȜȟȠȪ ȖțȠȓȑȞȎșȪțȜȑȜ

302 ǮȑȓȓȐ Ǽ.Ǯ., ǯȓșȭȓȐ Ǯ.dz., ǯȜșȠȜȐȓȤ ǻ.ǿ., ǸȖȟȓșȓȐ ǰ.ǿ., ǸȜțȎȘȜȐȎ Ǿ.ǰ. Ȗ ȒȞ.

ǾȖȟ. 2.4. ǵȎȐȖȟȖȚȜȟȠȪȝȞȖȐȓȒȓțțȜȑȜȖțȠȓȑȞȎșȪțȜȑȜȘȜȫȢȢȖȤȖȓțȠȎ ȜȠȞȎȔȓțȖȭ ȑȞȎțȖȤȩ ȞȎȕȒȓșȎ

SiO2–Si ȜȠ ȠȜșȧȖțȩ SiO2 [19]

ȘȜȫȢȢȖȤȖȓțȠȎ ȜȠȞȎȔȓțȖȭ ȟȠȞȡȘȠȡȞȩ SiO2–SiC ȜȠ ȠȜșȧȖțȩ SiO2, ȝȜșȡȥȓțțȎȭ ȟ ȡȥȓȠȜȚ ȜȝȠȖȥȓȟȘȖȣ ȣȎȞȎȘȠȓȞȖȟȠȖȘ SiC [21].

ǼȒțȜȞȜȒțȜȟȠȪ ȞȎȟȝȞȓȒȓșȓțȖȭ ȠȓȚȝȓȞȎȠȡȞȩ ȝȜ ȝȜȐȓȞȣțȜȟȠȖ ȝșȎȟȠȖț Ȑ ȝȞȜȤȓȟȟȓ ȖȚȝȡșȪȟțȜȗ ȜȏȞȎȏȜȠȘȖ ȭȐșȭȓȠȟȭ ȐȎȔțȓȗȦȖȚ ȢȎȘȠȜȞȜȚ ȤȓșȓȟȜȜȏȞȎȕțȜȟȠȖ ȖȟȝȜșȪȕȜȐȎțȖȭ ȏȩȟȠȞȜȗ ȠȓȞȚȖȥȓȟȘȜȗ ȜȏȞȎȏȜȠȘȖ Ȑ ȠȓȣțȜșȜȑȖȖ ȖȕȑȜȠȜȐșȓțȖȭ ǶǺǿ. ǰ ȡȟȠȎțȜȐȘȎȣ ǯȀǼ ȫȠȜ ȒȜȟȠȖȑȎȓȠȟȭ ȕȎ ȟȥȓȠ ȟȜȐȓȞȦȓțȟȠȐȜȐȎțȖȭ ȘȜțȟȠȞȡȘȤȖȖ țȎȑȞȓȐȎȠȓșȪțȜȗ ȘȎȚȓȞȩ. ǼȒțȎȘȜ, ȒȎȔȓ Ȑ ȟșȡȥȎȓ ȜȒțȜȞȜȒțȜȑȜ ȜȏșȡȥȓțȖȭ ȝȜȐȓȞȣțȜȟȠȖ ȝșȎȟȠȖț ȟȐȓȠȜȐȩȚȖȝȜȠȜȘȎȚȖ, Ȗȕ-ȕȎșȜȘȎșȪțȩȣ ȜȏșȎȟȠȓȗ, ȜȏșȎȒȎȬȧȖȣ ȞȎȕșȖȥțȩȚȖ ȜȝȠȖȥȓȟȘȖȚȖ Ȗ ȠȓȝșȜȢȖȕȖȥȓȟȘȖȚȖ ȣȎȞȎȘȠȓȞȖȟȠȖȘȎȚȖ, Ȑ ȝșȎȟȠȖțȓ ȚȜȑȡȠ ȐȜȕțȖȘȎȠȪ ȕțȎȥȖȠȓșȪțȩȓ ȠȓȚȝȓȞȎȠȡȞțȩȓ ȑȞȎȒȖȓțȠȩ, ȘȜȠȜȞȩȓ Ȑ ȟȐȜȬ ȜȥȓȞȓȒȪ ȐȩȕȩȐȎȬȠ ȖȕȏȩȠȜȥțȩȓ ȚȓȣȎțȖȥȓȟȘȖȓ țȎȝȞȭȔȓțȖȭ. ǾȓșȎȘȟȎȤȖȭ ȚȓȣȎțȖȥȓȟȘȖȣ țȎȝȞȭȔȓțȖȗȚȜȔȓȠȝȞȖȐȓȟȠȖȘȜȏȞȎȕȜȐȎțȖȬșȖțȓȗțȩȣȖȠȜȥȓȥțȩȣ

ǾȖȟ. 2.5. ǵȎȐȖȟȖȚȜȟȠȪ ȖțȠȓȑȞȎșȪțȜȑȜȘȜȫȢȢȖȤȖȓțȠȎȜȠȞȎȔȓ- țȖȭȟȠȞȡȘȠȡȞȩSiO2–SiC ȜȠȠȜșȧȖ-

țȩ SiO2 [21]

ȒȓȢȓȘȠȜȐ [23–25]. dzȟșȖ ȘȜțȤȓțȠȞȎȤȖȬ ȠȜȥȓȥțȩȣ ȒȓȢȓȘȠȜȐ ȚȜȔțȜ ȝȞȖȜȝȞȓȒȓșȓțțȩȣȡȟșȜȐȖȭȣȟțȖȕȖȠȪ, ȠȜșȖțȓȗțȩȓȒȓȢȓȘȠȩ, ȐȥȎȟȠțȜȟȠȖ ȒȖȟșȜȘȎȤȖȖ, ȜȏșȎȒȎȬȠ ȐȩȟȜȘȜȗ ȡȟȠȜȗȥȖȐȜȟȠȪȬ. ǰ ȞȓȕȡșȪȠȎȠȓ ȫȠȜ ȚȜȔȓȠ ȜȘȎȕȎȠȪ ȟȡȧȓȟȠȐȓțțȜȓ ȐșȖȭțȖȓ țȎ ȝȎȞȎȚȓȠȞȩ Ȗ ȐȩȣȜȒ ȑȜȒțȩȣ ǶǺǿ. ǽȜȫȠȜȚȡ ȝȞȖ ȖȟȝȜșȪȕȜȐȎțȖȖ ǯȀǼ Ȑ ȠȓȣțȜșȜȑȖȖ ȖȕȑȜȠȜȐșȓțȖȭ ǶǺǿ țȓȜȏȣȜȒȖȚȜ ȜȟȡȧȓȟȠȐșȭȠȪ ȠȧȎȠȓșȪțȩȗ ȘȜțȠȞȜșȪ Ȗ ȐȩȏȜȞ ȞȓȔȖȚȜȐ ȜȏȞȎȏȜȠȘȖ, țȓ ȒȜȝȡȟȘȎȬȧȖȣ ȜȏȞȎȕȜȐȎțȖȭ ȒȖȟșȜ-

ȘȎȤȖȗ [26, 27].

ǽȞȖ ȒșȖȠȓșȪțȜȟȠȖ ȠȓȞȚȜȜȏȞȎȏȜȠȘȖ 101 102 ȟ ȞȓȎșȖȕȡȓȠȟȭ ȞȓȔȖȚ ȠȓȝșȜȐȜȑȜ ȏȎșȎțȟȎ. ǰ ȫȠȜȚ ȟșȡȥȎȓ ȚȜȔțȜ ȝȞȓțȓȏȞȓȥȪ ȑȞȎȒȖȓțȠȜȚ ȠȓȚȝȓȞȎȠȡȞȩ ȝȜ ȠȜșȧȖțȓ ȝșȎȟȠȖțȩ [3, 5]. ǸȞȜȚȓ ȠȜȑȜ, ȞȎȕȚȓȞȩ ȜȏșȎȟȠȓȗ ȟ ȞȎȕșȖȥțȩȚȖ ȜȝȠȖȥȓȟȘȖȚȖ Ȗ ȠȓȝșȜȢȖȕȖȥȓȟȘȖȚȖ ȣȎȞȎȘȠȓȞȖȟȠȖȘȎȚȖ Ȑ ȞȓȎșȪțȩȣ ȟȠȞȡȘȠȡȞȎȣ ȕțȎȥȖȠȓșȪțȜ ȚȓțȪȦȓ ȒșȖțȩ ȠȓȝșȜȐȜȗ ȒȖȢȢȡȕȖȖ. ȋȠȜ ȝȜȕȐȜșȭȓȠ ȐȩȒȓșȖȠȪ ȚȎȘȞȜȜȏșȎȟȠȖ ȟ ȡȟȞȓȒțȓțțȩȚȖ ȜȝȠȖȥȓȟȘȖȚȖ ȝȎȞȎȚȓȠȞȎȚȖ. ȀȜȑȒȎ ȠȜȝȜșȜȑȖȬ ȚȜȔțȜ ȝȞȓȒȟȠȎȐȖȠȪȐ ȐȖȒȓȟȠȞȡȘȠȡȞȩ, ȟȜȟȠȜȭȧȓȗȖȕȒȐȡȣȜȏșȎȟȠȓȗȟȞȎȕșȖȥțȩȚȖȝȜȑșȜȧȎȬȧȖȚȖ, ȜȠȞȎȔȎȬȧȖȚȖȖȫȚȖȟȟȖȜțțȩȚȖȣȎȞȎȘȠȓȞȖȟȠȖȘȎȚȖ [27, 28]. ȅȖȟșȓțțȎȭ ȚȜȒȓșȪȞȎȟȝȞȓȒȓșȓțȖȭ ȠȓȚȝȓȞȎȠȡȞțȩȣ ȝȜșȓȗ Ȑ ȟȖșȡ ȝȓȞȖȜȒȖȥțȜȟȠȖ ȠȜȝȜșȜȑȖȥȓȟȘȜȑȜ ȞȖȟȡțȘȎ ȚȜȔȓȠ ȏȩȠȪ ȟȐȓȒȓțȎȘ ȚȜȒȓșȖȘȐȎȒȞȎȠȎ. ȂȞȎȑȚȓțȠȠȜȝȜșȜȑȖȖ, ȐȩȒȓșȓțțȩȗȒșȭ ȞȎȟȥȓȠȜȐ, Ȗ ȟȓȥȓțȖȓ ȟȠȞȡȘȠȡȞȩ ȝȜȘȎȕȎțȩ țȎ ȞȖȟ. 2.6 (ȜȏșȎȟȠȪ Ǯ1 ȝȜȘȞȩȠȎ ȚȜșȖȏȒȓțȜȚ, Ǯ2 – ȒȐȡȜȘȖȟȪȬ ȘȞȓȚțȖȭ, ȜȏȞȎȠțȎȭ ȟȠȜȞȜțȎ

ǾȖȟ. 2.6. ȂȞȎȑȚȓțȠ ȠȜȝȜșȜȑȖȖ (Ȏ) Ȗ ȟȓȥȓțȖȓ ȟȠȞȡȘȠȡȞȩ (ȏ): 1 – ȚȜșȖȏȒȓț; 2 – ȒȐȡȜȘȖȟȪ ȘȞȓȚțȖȭ; 3 – ȘȞȓȚțȖȗ [26]

304 ǮȑȓȓȐ Ǽ.Ǯ., ǯȓșȭȓȐ Ǯ.dz., ǯȜșȠȜȐȓȤ ǻ.ǿ., ǸȖȟȓșȓȐ ǰ.ǿ., ǸȜțȎȘȜȐȎ Ǿ.ǰ. Ȗ ȒȞ.

ȝșȎȟȠȖțȩ – ȥȖȟȠȩȗ ȘȞȓȚțȖȗ). ǿȠȓȝȓțȪ ȕȎȝȜșțȓțȖȭ ȟȠȞȡȘȠȡȞȩ ȚȜșȖȏȒȓțȜȚ ȜȝȞȓȒȓșȭșȎȟȪ ȟȜȜȠțȜȦȓțȖȓȚ ȝșȜȧȎȒȓȗ A1 Ȗ A2.

ǾȎȟȝȞȓȒȓșȓțȖȓ ȠȓȚȝȓȞȎȠȡȞȩ Ȑ ȠȎȘȜȗ ȟȠȞȡȘȠȡȞȓ ȚȜȔȓȠ ȏȩȠȪ țȎȗȒȓțȜ Ȗȕ ȡȞȎȐțȓțȖȭ ȠȓȝșȜȝȞȜȐȜȒțȜȟȠȖ [26]

ȑȒȓ S, c(Ȁ), K(T) – ȝșȜȠțȜȟȠȪ, ȠȓȝșȜȓȚȘȜȟȠȪ Ȗ ȘȜȫȢȢȖȤȖȓțȠ ȠȓȝșȜȝȞȜȐȜȒțȜȟȠȖ ȟȜȜȠȐȓȠȟȠȐȓțțȜ; ȠȓȚȝȓȞȎȠȡȞȎ Ȁ ȭȐșȭȓȠȟȭ ȢȡțȘȤȖȓȗ ȘȜȜȞȒȖțȎȠ ȣ, ȡȖ ȐȞȓȚȓțȖ t. ȂȡțȘȤȖȖ DZ(ȣ,ȡ,Ȁ) Ȗ ǽ(ȣ,ȡ,Ȁ) ȜȝȖȟȩȐȎȬȠ ȠȓȝșȜȐȜȗ ȖȟȠȜȥțȖȘ Ȗ ȠȓȝșȜȐȩȓ ȝȜȠȓȞȖ ȟ ȝȜȐȓȞȣțȜȟȠȖ ȟȠȞȡȘȠȡȞȩ.

DZȞȎțȖȥțȩȓ Ȗ țȎȥȎșȪțȩȓ ȡȟșȜȐȖȭ ȕȎȝȖȟȩȐȎȬȠȟȭ Ȑ ȐȖȒȓ

ȑȒȓ T0 – ȠȓȚȝȓȞȎȠȡȞȎ ȜȘȞȡȔȎȬȧȓȗ ȟȞȓȒȩ, n – ȐȓȘȠȜȞ țȜȞȚȎșȖ Ș ȑȞȎțȖȤȓ ȜȏșȎȟȠȖ.

ǼȟȜȏȓțțȜȟȠȪȬțȎȑȞȓȐȎȘȞȓȚțȖȓȐȩȣȟȠȞȡȘȠȡȞ, ȥȎȟȠȖȥțȜȝȜȘȞȩȠȩȣ ȟșȜȓȚ SiƖ2, ȭȐșȭȓȠȟȭ ȕȎȐȖȟȖȚȜȟȠȪ ȖțȠȓȑȞȎșȪțȜȑȜ ȘȜȫȢȢȖȤȖȓțȠȎ ȝȞȜȝȡȟȘȎțȖȭ ȟșȜȭ ȒȖȜȘȟȖȒȎ ȜȠ ȠȜșȧȖțȩ. ȋȠȜ ȝȞȖȐȜȒȖȠ Ș ȠȜȚȡ, ȥȠȜ, ȣȜȠȭ ȝȜȑșȜȧȓțȖȓȖȕșȡȥȓțȖȭȐȟșȜȓSiƖ2 ȝȞȓțȓȏȞȓȔȖȚȜȚȎșȜ, ȖțȠȓȑȞȎșȪțȩȗ ȘȜȫȢȢȖȤȖȓțȠȝȜȑșȜȧȓțȖȭȘȞȓȚțȖȭ, ȝȜȘȞȩȠȜȑȜȟșȜȓȚSiƖ2, ȐȩȦȓ, ȥȓȚ ȝȞȖ ȜȠȟȡȠȟȠȐȖȖ ȝȜȘȞȩȠȖȭ. ǸȞȜȚȓ ȠȜȑȜ, ȖțȠȓȑȞȎșȪțȩȗ ȘȜȫȢȢȖȤȖȓțȠ ȝȞȜȝȡȟȘȎțȖȭ ȟșȜȭ SiO2 ȕȎȐȖȟȖȠ ȜȠ ȠȜșȧȖțȩ ȝșȓțȘȖ Ȗ ȖȚȓȓȠ ȐȝșȜȠȪ ȒȜ ȠȜșȧȖțȩ 2 ȚȘȚ ȜȝȞȓȒȓșȓțțȡȬ ȝȓȞȖȜȒȖȥțȜȟȠȪ ȞȎȟȝȜșȜȔȓțȖȭ ȚȎȘȟȖȚȡȚȜȐȝȞȜȝȡȟȘȎțȖȭȖȕșȡȥȓțȖȭ. ȋȠȜțȓȜȏȣȜȒȖȚȜȡȥȖȠȩȐȎȠȪȝȞȖ ȞȎȟȥȓȠȓ ȖțȠȓȑȞȎșȪțȜȑȜ ȘȜȫȢȢȖȤȖȓțȠȎ ȝȜȑșȜȧȓțȖȭ ȟȠȞȡȘȠȡȞȩ SiƖ2–Si

M2

¨ I(M)dM

M1

ȑȒȓ h – ȠȜșȧȖțȎ ȝșȎȟȠȖț; df – ȠȜșȧȖțȎ ȒȖȫșȓȘȠȞȖȘȎ; Ns – ȘȜțȤȓțȠȞȎȤȖȭ ȝȞȖȚȓȟȖ Ȑ ȝȜȒșȜȔȘȓ; R – ȘȜȫȢȢȖȤȖȓțȠ ȜȠȞȎȔȓțȖȭ ȘȞȓȚțȖȓȐȜȗ ȝȜȒșȜȔȘȖ; Ȁi – ȝȞȖȐȓȒȓțțȩȗ ȖțȠȓȑȞȎșȪțȩȗ ȘȜȫȢȢȖȤȖȓțȠ ȝȞȜȝȡȟȘȎțȖȭ SiO2; I(M) – ȟȝȓȘȠȞ ȖȟȠȜȥțȖȘȎ ȖȕșȡȥȓțȖȭ.

ǾȓȦȓțȖȓȡȞȎȐțȓțȖȭ(2.4) ȝȜȘȎȕȩȐȎȓȠ, ȥȠȜȒșȭȘȞȓȚțȖȓȐȩȣȝșȎȟȠȖț ȠȜșȧȖțȜȗ 400 ȚȘȚ ȟ ȡȒȓșȪțȩȚ ȟȜȝȞȜȠȖȐșȓțȖȓȚ 20 ǼȚ¸ȟȚ Ȗ ȠȜșȧȖțȜȗȝșȓțȘȖSiƖ2 0.65 ȚȘȚȟȡȥȓȠȜȚȟȝȓȘȠȞȎȖȕșȡȥȓțȖȭȑȎșȜȑȓțțȩȣ șȎȚȝ țȎȏșȬȒȎȓȠȟȭ ȞȓȕȘȜȓ ȐȜȕȞȎȟȠȎțȖȓ Ǯt, ȝȞȖ ȠȓȚȝȓȞȎȠȡȞȎȣ ȏȜșȓȓ 700 K. ȋȠȜȟȐȭȕȎțȜȟțȎȥȎșȜȚȖțȠȓțȟȖȐțȜȑȜȝȜȑșȜȧȓțȖȭȟȐȓȠȎ ȟȐȜȏȜȒțȩȚȖ țȜȟȖȠȓșȭȚȖ ȕȎȞȭȒȎ.

ȀȓȝșȜȐȩȓ ȖȟȠȜȥțȖȘȖ Ȓșȭ ȜȏșȎȟȠȓȗ A1 Ȗ A2 (ȞȖȟ. 2.5) ȚȜȔțȜ ȕȎȝȖȟȎȠȪ Ȑ ȐȖȒȓ

ȑȒȓ Ǿ – ȝșȜȠțȜȟȠȪ ȚȜȧțȜȟȠȖ ȖȟȠȜȥțȖȘȎ ȖȕșȡȥȓțȖȭ; R1 – ȘȜȫȢȢȖȤȖȓțȠ ȜȠȞȎȔȓțȖȭ ȚȜșȖȏȒȓțȎ; Ǯt(Ȁ) – ȖțȠȓȑȞȎșȪțȩȗ ȘȜȫȢȢȖȤȖȓțȠ ȝȜȑșȜȧȓțȖȭ ȟȠȞȡȘȠȡȞȩ SiƖ2-Si.

ȁȞȎȐțȓțȖȭ ȠȓȝșȜȜȠȒȎȥȖ Ȑ ȜȏșȎȟȠȭȣ A1 Ȗ A2 ȟ ȡȥȓȠȜȚ ȞȎȒȖȎȤȖȜțțȩȣ ȝȜȠȓȞȪ Ȗ ȘȜțȐȓȘȠȖȐțȜȑȜ ȠȓȝșȜȜȏȚȓțȎ ȟ ȜȘȞȡȔȎȬȧȓȗ ȟȞȓȒȜȗ ȖȚȓȬȠ ȐȖȒ

ǽșȜȠțȜȟȠȪ Si ȝȞȖ T= 300 K S= 2.32 ȑ/ȟȚ3.

ǻȎȞȖȟ. 2.7ȎȝȞȓȒȟȠȎȐșȓțȩȞȎȟȥȓȠțȩȓȕȎȐȖȟȖȚȜȟȠȖȠȓȚȝȓȞȎȠȡȞȩ Ȑ ȠȜȥȘȓ D Ȗ ȞȎȕțȜȟȠȖ ȠȓȚȝȓȞȎȠȡȞ ȚȓȔȒȡ ȠȜȥȘȎȚȖ B Ȗ D ȜȠ ȐȞȓȚȓțȖ ȝȞȖ ȜȏșȡȥȓțȖȖ șȖȤȓȐȜȗ ȟȠȜȞȜțȩ ȟȠȞȡȘȠȡȞȩ Mo-SiO2-Si. ǻȎ ȞȖȟ. 2.7ȏ ȝȜȘȎȕȎțȜ ȞȎȟȝȞȓȒȓșȓțȖȓ ȠȓȚȝȓȞȎȠȡȞȩ Ȑ ȠȜȥȘȓ D Ȗ ȞȎȕțȜȟȠȖ ȠȓȚȝȓȞȎȠȡȞ ȚȓȔȒȡ ȠȜȥȘȎȚȖ B Ȗ D ȝȞȖ ȜȏșȡȥȓțȖȖ ȜȏȞȎȠțȜȗ ȟȠȜȞȜțȩ