belyaev_a_e_konakova_r_v_red_karbid_kremniya_tehnologiya_svo

190 ǮȑȓȓȐ Ǽ.Ǯ., ǯȓșȭȓȐ Ǯ.dz., ǯȜșȠȜȐȓȤ ǻ.ǿ., ǸȖȟȓșȓȐ ǰ.ǿ., ǸȜțȎȘȜȐȎ Ǿ.ǰ. Ȗ ȒȞ.

ȀȎȏșȖȤȎ 8.6. ǽȎȞȎȚȓȠȞȩ ȘȜȫȢȢȖȤȖȓțȠȜȐ ȒȖȢȢȡȕȖȖ ȎȠȜȚȜȐ Ȑ 6H-SiC [261]

* – ǸȞȖȟȠȎșș Ȟ-ȠȖȝȎ, ȜȏȨȓȚțȩȗ ȡȥȎȟȠȜȘ

țȩȗȟșȜȗ. ǽȞȖȒȖȢȢȡȕȖȖȎșȬȚȖțȖȭȖȏȓȞȖșȖȭȫȠȜȠȟșȜȗȜȘȎȕȩȐȎȓȠȟȭ ȘȜȚȝȓțȟȖȞȜȐȎțțȩȚ ȟ n- (ȖțȜȑȒȎ ȟ Ȟ-) ȠȖȝȜȚ ȝȞȜȐȜȒȖȚȜȟȠȖ;

x ȫȢȢȓȘȠȖȐțȩȗȘȜȫȢȢȖȤȖȓțȠȒȖȢȢȡȕȖȖȟȡȧȓȟȠȐȓțțȜȕȎȐȖȟȖȠ ȜȠ ȡȟșȜȐȖȗ, ȞȓȎșȖȕȡȓȚȩȣ țȎ ȝȜȐȓȞȣțȜȟȠȖ ȜȠȔȖȑȎȓȚȜȑȜ ȘȞȖȟȠȎșșȎ:

192 ǮȑȓȓȐ Ǽ.Ǯ., ǯȓșȭȓȐ Ǯ.dz., ǯȜșȠȜȐȓȤ ǻ.ǿ., ǸȖȟȓșȓȐ ǰ.ǿ., ǸȜțȎȘȜȐȎ Ǿ.ǰ. Ȗ ȒȞ.

ǾȖȟ. 8.23. ȀȓȚȝȓȞȎȠȡȞțȎȭ ȕȎȐȖȟȖȚȜȟȠȪ ȘȜȫȢȢȖȤȖȓțȠȎ ȒȖȢȢȡȕȖȖ

ȢȜȟȢȜȞȎ Ȑ SiC: 1 – p-SiC șȓȑȖȞȜ-

ȐȎțțȩȗ Al (5.0¸1020 ȟȚ 3); 2 – n-SiC

șȓȑȖȞȜȐȎțțȩȗN (3.0¸1018 ȟȚ 3)

ȝȞȖ 2500°ǿ) [261, 270, 273]. ǰ ȞȓȕȡșȪȠȎȠȓ, ȚȜțȜȘȞȖȟȠȎșșȩ SiC, șȓȑȖȞȜȐȎțțȩȓ ȢȜȟȢȜȞȜȚ, ȟȜȒȓȞȔȎȠ ȢȜțȜȐȡȬ ȝȞȖȚȓȟȪ – ȎȕȜȠ, ȟ ȠȎȘȜȗ Ȕȓ ȘȜțȤȓțȠȞȎȤȖȓȗ. ǸȞȜȚȓ ȠȜȑȜ, Ȑ ȝȞȖȟȡȠȟȠȐȖȖ ȢȜȟȢȜȞȎ ȕȎȚȓȠțȜ ȐȜȕȞȎȟȠȎȓȠ ȟȘȜȞȜȟȠȪ ȖȟȝȎȞȓțȖȭ SiC, ȥȠȜ ȝȞȖȐȜȒȖȠ Ș țȎȞȡȦȓțȖȬ ȟȠȓȣȖȜȚȓȠȞȖȖ Ȗ ȡȟșȜȔțȓțȖȬ ȐȩȟȜȘȜȠȓȚȝȓȞȎȠȡȞțȩȣ ȫȘȟȝȓȞȖȚȓțȠȜȐ.

ǰ ȞȎȏȜȠȓ [271] Ȓșȭ ȖȟȟșȓȒȜȐȎțȖȭ ȒȖȢȢȡȕȖȖ Ǿ Ȑ ȝȜȒșȜȔȘȎȣ SiC ȝȞȜȐȜȒȖșȜȟȪȠȞȎțȟȚȡȠȎȤȖȜțțȜȓșȓȑȖȞȜȐȎțȖȓȐȩȟȜȘȜȫțȓȞȑȓȠȖȥȓȟȘȖȚȖ B-ȥȎȟȠȖȤȎȚȖ ȟ ȝȜȟșȓȒȡȬȧȖȚ ȐȩȟȜȘȜȠȓȚȝȓȞȎȠȡȞțȩȚ ȜȠȔȖȑȜȚ Ȗ ȖȟȟșȓȒȜȐȎțȖȓȚ ȜȟȠȎȠȜȥțȜȗ C-ȎȘȠȖȐțȜȟȠȖ ȜȏȞȎȕȤȜȐ ȝȞȖ ȝȜȟșȜȗțȜȚ ȟȠȞȎȐșȖȐȎțȖȖ ȟșȜȓȐ. ȁȟȠȎțȜȐșȓțȜ, ȥȠȜ ȕȎȚȓȠțȩȓ ȖȕȚȓțȓțȖȭ ȘȜțȤȓțȠȞȎȤȖȜțțȜȑȜ ȝȞȜȢȖșȭ ȢȜȟȢȜȞȎ ȕȎ ȟȥȓȠ ȒȖȢȢȡȕȖȖ ȝȜȭȐșȭȬȠȟȭ ȝȞȖȠȓȚȝȓȞȎȠȡȞȎȣȐȩȦȓ2400°ǿ. ȀȓȚȝȓȞȎȠȡȞțȎȭȕȎȐȖȟȖȚȜȟȠȪȘȜȫȢȢȖȤȖȓțȠȎ ȒȖȢȢȡȕȖȖ ȢȜȟȢȜȞȎ Ȓșȭ n-6H-SiC șȓȑȖȞȜȐȎțțȜȑȜ ȎȕȜȠȜȚ ȚȜȔȓȠ ȏȩȠȪ ȎȝȝȞȜȘȟȖȚȖȞȜȐȎțȎ ȡȞȎȐțȓțȖȓȚ:

DP = 1.3¸1010 exp 11.6эВ¬­­­

kT ®

ǰ ȜȏȞȎȕȤȎȣ, șȓȑȖȞȜȐȎțțȩȣ ȎșȬȚȖțȖȓȚ, ȘȜȫȢȢȖȤȖȓțȠ ȒȖȢȢȡȕȖȖ ȢȜȟȢȜȞȎ ȐȩȦȓ, ȘȎȘ ȟșȓȒȡȓȠ Ȗȕ ȒȎțțȩȣ, ȝȞȓȒȟȠȎȐșȓțțȩȣ țȎ ȞȖȟ. 8.23. ǻȎȜȟțȜȐȎțȖȖȝȞȜȐȓȒȓțțȜȑȜȎțȎșȖȕȎ, ȜȠȚȓȥȎȓȠȟȭ, ȥȠȜȢȜȟȢȜȞȖȎȕȜȠȕȎȚȓȧȎȬȠ Ȑ ȞȓȦȓȠȘȓ SiC ȡȑșȓȞȜȒ Ȗ ȚȖȑȞȖȞȡȬȠ ȝȜ ȐȎȘȎțȟȖȭȚ ȡȑșȓȞȜȒȎ.

8.5.3.7. DzȖȢȢȡȕȖȭ ȏȓȞȖșșȖȭ Ȑ ȘȎȞȏȖȒȓ ȘȞȓȚțȖȭ

ǾȓȕȡșȪȠȎȠȩ ȖȟȟșȓȒȜȐȎțȖȭ ȒȖȢȢȡȕȖȖ ȏȓȞȖșșȖȭ Ȑ SiC ȝȞȓȒȟȠȎȐ-

șȓțȩ Ȑ ȞȎȏȜȠȎȣ [24, 282, 302].

dzȧȓȐȞȎțțȖȣȖȟȟșȓȒȜȐȎțȖȭȣ[282] ȜȠȚȓȥȎȓȠȟȭ, ȥȠȜȜȟȜȏȓțțȜȟȠȪȬ ȏȓȞȖșșȖȭ ȭȐșȭȓȠȟȭ ȠȜ, ȥȠȜ Ȝț ȕȎȚȓȧȎȓȠ Ȑ ȞȓȦȓȠȘȓ SiC Ȗ ȘȞȓȚțȖȗ Ȗ

ǾȖȟ. 8.24. ǾȎȟȝȞȓȒȓșȓțȖȓ ȏȓȞȖșșȖȭ Ȑ 6H-SiC ȝȜȟșȓ ȒȖȢȢȡȕȖȖ ȝȞȖ ȞȎȕșȖȥțȩȣ ȠȓȚȝȓȞȎȠȡȞȎȣ (ȐȞȓȚȭ ȒȖȢȢȡȕȖȖ 30 ȚȖț.)

Ȁ°ǿ: 1 – 2200, 2 – 2100, 3 – 2000, 4 – 1800

ȡȑșȓȞȜȒ, ȝȞȖȫȠȜȚȢȜȞȚȖȞȡȓȠȒȐȎȫșȓȘȠȞȖȥȓȟȘȖȎȘȠȖȐțȩȣȕȎȞȭȒȜȐȩȣ ȟȜȟȠȜȭțȖȭ. ǰ ȫȠȜȗ ȞȎȏȜȠȓ, ȖȟȝȜșȪȕȡȭ ȚȓȠȜȒ p-n ȝȓȞȓȣȜȒȎ, ȝȜșȡȥȓțȩ ȘȜțȤȓțȠȞȎȤȖȜțțȩȓ ȝȞȜȢȖșȖ ȏȓȞȖșșȖȭ Ȑ 6H-SiC ȝȞȖ ȞȎȕșȖȥțȩȣ ȞȓȔȖȚȎȣ ȒȖȢȢȡȕȖȖ, ȝȞȓȒȟȠȎȐșȓțțȩȓ țȎ ȞȖȟ. 8.24.

ǼȠȚȓȥȎȓȠȟȭ țȎșȖȥȖȓ țȎ ȘȜțȤȓțȠȞȎȤȖȜțțȩȣ ȝȞȜȢȖșȭȣ ȝȞȖȝȜȐȓȞȣțȜȟȠțȜȑȜȖȜȏȨȓȚțȜȑȜȡȥȎȟȠȘȜȐ. ǽȞȓȒȝȜșȎȑȎȓȠȟȭ, ȥȠȜȚȓȣȎțȖȕȚ ȢȜȞȚȖȞȜȐȎțȖȭȜȏȨȓȚțȩȣȡȥȎȟȠȘȜȐțȎȘȜțȤȓțȠȞȎȤȖȜțțȩȣȞȎȟȝȞȓȒȓșȓțȖȭȣ ȏȓȞȖșșȖȭ, ȏȜȞȎ Ȗ ȟȎȚȜȒȖȢȢȡțȒȖȞȡȬȧȓȑȜ ȡȑșȓȞȜȒȎ ȟȐȭȕȎț ȟ ȚȖȑȞȎȤȖȓȗ ȎȠȜȚȜȐ ȝȜ ȡȑșȓȞȜȒțȩȚ ȐȎȘȎțȟȖȭȚ. ǼȒțȎȘȜ, ȐȐȖȒȡ ȐȩȟȜȘȜȗ ȒȖȢȢȡȕȖȜțțȜȗ ȝȜȒȐȖȔțȜȟȠȖ ȏȓȞȖșșȖȭ ȎȐȠȜȞȩ [24, 302] ȐȩȟȘȎȕȎșȖ ȝȞȓȒȝȜșȜȔȓțȖȓ, ȥȠȜ ȏȓȞȖșșȖȗ ȚȜȔȓȠ ȒȖȢȢȡțȒȖȞȜȐȎȠȪ ȝȜ ȚȓȔȒȜȡȕșȖȭȚ Ȗ ȝȞȜȭȐșȭȠȪ ȒȜțȜȞțȩȓ ȟȐȜȗȟȠȐȎ. ǽȞȜȐȓȒȓțțȩȓ ȫȘȟȝȓȞȖȚȓțȠȎșȪțȩȓȖȟȟșȓȒȜȐȎțȖȭȝȜȒȠȐȓȞȒȖșȖȫȠȜȝȞȓȒȝȜșȜȔȓțȖȓ

ȖȝȜȕȐȜșȖșȖ ȟȒȓșȎȠȪ ȐȩȐȜȒȩ:

•ƊƭțȓȭȐșȭȓȠȟȭȎȚȢȜȠȓȞțȜȗȝȞȖȚȓȟȪȬȐSiC. ǰn-SiC, ȖșȖȐ țȓșȓȑȖȞȜȐȎțțȜȚ ȚȎȠȓȞȖȎșȓ, Ȝț ȐȓȒȓȠ ȟȓȏȭ ȘȎȘ ȎȘȤȓȝȠȜȞ, Ȏ Ȑ ȟȖșȪțȜșȓȑȖȞȜȐȎțțȜȚ p-SiC ȭȐșȭȓȠȟȭ ȘȜȚȝȓțȟȖȞȡȬȧȓȗ ȚȓȔȒȜȡȕȓșȪțȜȗ ȒȜțȜȞțȜȗ ȝȞȖȚȓȟȪȬ;

•țȎșȖȥȖȓȚȓȔȒȜȡȕȓșȪțȜȑȜƊƭ(ȟȕȎȞȭȒȜȚ+ 2) ȭȐșȭȓȠȟȭȝȞȖȥȖțȜȗȎțȜȚȎșȪțȜȐȩȟȜȘȜȑȜȘȜȫȢȢȖȤȖȓțȠȎȒȖȢȢȡȕȖȖƊƭȐSiC (ȜȟȜȏȓțțȜ Ȑ ȜȏȞȎȕȤȎȣ Ȟ-ȠȖȝȎ).

ȋȘȟȝȓȞȖȚȓțȠȎșȪțȜȓȝȜȒȠȐȓȞȔȒȓțȖȓȝȞȖȟȡȠȟȠȐȖȭȚȓȔȒȜȡȕȓșȪțȜȑȜȏȓȞȖșșȖȭȐSiC ȝȜșȡȥȓțȜȐȞȎȏȜȠȓ[282]. ǽȞȖȐȓȒȓțțȩȓțȎȞȖȟ. 8.25 ȕȎȐȖȟȖȚȜȟȠȖ ȘȜțȤȓțȠȞȎȤȖȖ ȏȓȞȖșșȖȭ Ȑ 6H-SiC ȝȜȘȎȕȩȐȎȬȠ, ȥȠȜ ȘȜțȤȓțȠȞȎȤȖȭ ȚȓȔȒȜȡȕȓșȪțȜȑȜ Ɗƭ (ȘȜȠȜȞȩȗ ȝȞȜȭȐșȭȓȠ ȒȜțȜȞțȩȓ ȟȐȜȗȟȠȐȎ) ȟȖșȪțȜ ȕȎȐȖȟȖȠ ȜȠ ȡȞȜȐțȭ șȓȑȖȞȜȐȎțȖȭ ȎȘȤȓȝȠȜȞțȩȚȖ ȝȞȖȚȓȟȭȚȖ Ȗ ȝȞȓȐȩȦȎȓȠ ȡȞȜȐȓțȪ ȞȎȟȠȐȜȞȖȚȜȟȠȖ ȎȘȤȓȝȠȜȞțȜȑȜ Ɗƭ.

194 ǮȑȓȓȐ Ǽ.Ǯ., ǯȓșȭȓȐ Ǯ.dz., ǯȜșȠȜȐȓȤ ǻ.ǿ., ǸȖȟȓșȓȐ ǰ.ǿ., ǸȜțȎȘȜȐȎ Ǿ.ǰ. Ȗ ȒȞ.

ǾȖȟ. 8.25. ǵȎȐȖȟȖȚȜȟȠȖȘȜțȤȓțȠȞȎȤȖȖ ȏȓȞȖșșȖȭ Ȑ 6H-SiC ȜȠ

ȠȓȚȝȓȞȎȠȡȞȩ: 1 – ȒȜțȜȞțȜȑȜ Ɗƭ

Ȑ p-6H-SiC (2¸1020 ȟȚ 3); 2 – ȎȘ-

ȤȓȝȠȜȞțȜȑȜ Ɗƭ Ȑ țȓșȓȑȖȞȜȐȎț-

țȜȚ 6H-SiC

ǿȜȑșȎȟțȜ [261], Ȑ ȝȞȖȝȜȐȓȞȣțȜȟȠțȜȗ ȜȏșȎȟȠȖ SiC ȒȖȢȢȡȕȖȭ ȝȞȜȣȜȒȖȠ ȝȜ ȐȎȘȎțȟȖȭȚ ȡȑșȓȞȜȒȎ, Ȏ Ȑ ȜȏȨȓȚțȜȗ – ȝȜ ȚȓȔȒȜȡȕșȖȭȚ,

ȐȐȖȒȓ ȒȐȡȣȕȎȞȭȒțȩȣ ȖȜțȜȐ Ɗƭ+2.

8.5.4.DzȖȢȢȡȕȖȜțțȜȓ șȓȑȖȞȜȐȎțȖȓ șȜȘȎșȪțȩȣ ȜȏșȎȟȠȓȗ Ȑ ȘȎȞȏȖȒȓ ȘȞȓȚțȖȭ

ǰ ȞȎȏȜȠȎȣ [24, 301] ȜȠȚȓȥȎȓȠȟȭ, ȥȠȜ ȟȜȕȒȎțȖȓ șȓȑȖȞȜȐȎțțȩȣ șȜȘȎșȪțȩȣ ȜȏșȎȟȠȓȗ ȟȐȭȕȎțȜ ȟ ȠȞȡȒțȜȟȠȪȬ ȢȜȞȚȖȞȜȐȎțȖȭ ȕȎȧȖȠțȜȗ ȚȎȟȘȖ. ǰȝȓȞȐȡȬȜȥȓȞȓȒȪȫȠȜȟȐȭȕȎțȜȟȠȓȚ, ȥȠȜȕȎȧȖȠțȎȭȚȎȟȘȎȒȜșȔțȎȐȩȝȜșțȭȠȪȟȐȜȖȢȡțȘȤȖȖȐȠȓȚȝȓȞȎȠȡȞțȜȚȒȖȎȝȎȕȜțȓȒȖȢȢȡȕȖȖ ȝȞȖȚȓȟȓȗȐSiC (1800 2500)°ǿ. ǸȞȜȚȓȠȜȑȜ, ȒȜșȔțȎ ȏȩȠȪ ȜȏȓȟȝȓȥȓțȎ ȠȓȣțȜșȜȑȖȥțȜȟȠȪ ȓȓ ȝȜșȡȥȓțȖȭ Ȗ ȡȒȎșȓțȖȭ. Dzșȭ ȫȠȜȑȜ ȡȒȜȏȓț ȡȑșȓȞȜȒ, ȢȜȞȚȖȞȡȓȚȩȗ ȝȡȠȓȚ ȜȠȔȖȑȎ ȜȞȑȎțȖȥȓȟȘȜȑȜ ȢȜȠȜȞȓȕȖȟȠȎ. ǰ ȞȎȏȜȠȓ [303] ȖȟȝȜșȪȕȜȐȎșȟȭ ȔȖȒȘȖȗ ȢȜȠȜȞȓȕȖȟȠ Ȃǽ-383, țȎțȜȟȖȚȩȗ ȚȓȠȜȒȜȚȤȓțȠȞȖȢȡȑȖȞȜȐȎțȖȭțȎȜȏȞȎȕȤȩȘȎȞȏȖȒȎȘȞȓȚțȖȭ, ȘȜȠȜȞȩȓ ȝȜȟșȓ ȢȜȠȜșȖȠȜȑȞȎȢȖȖ ȝȜȚȓȧȎșȖȟȪ Ȑ ȐȎȘȡȡȚțȡȬ ȘȎȚȓȞȡ ȟ ȒȎȐșȓțȖȓȚ 5¸10 4 ȚȚ ȞȠ.ȟȠ., țȎȑȞȓȐȎșȖȟȪ ȒȜ ȠȓȚȝȓȞȎȠȡȞȩ 450°ǿ ȟȜ ȟȘȜȞȜȟȠȪȬ 10°ǿ/ȟ Ȗ ȐȩȒȓȞȔȖȐȎșȖȟȪ ȝȞȖ ȫȠȜȗ ȠȓȚȝȓȞȎȠȡȞȓ Ȑ ȠȓȥȓțȖȓ 10 ȚȖț. ǰ ȞȓȕȡșȪȠȎȠȓ ȝșȓțȘȎ ȢȜȠȜȞȓȕȖȟȠȎ ȝȞȓȐȞȎȧȎșȎȟȪ Ȑ ȝșȜȠțȡȬ ȎȚȜȞȢțȡȬ ȝșȓțȘȡ ȡȑșȓȞȜȒȎ ȟ ȠȜȝȜșȜȑȖȥȓȟȘȖȚ ȞȖȟȡțȘȜȚ Ȑ ȠȜȥțȜȟȠȖ ȝȜȐȠȜȞȭȬȧȖȚ ȞȖȟȡțȜȘ ȢȜȠȜȞȓȕȖȟȠȎ ȝȜȟșȓ ȢȜȠȜșȖȠȜȑȞȎȢȖȖ.

ǿȖȟȝȜșȪȕȜȐȎțȖȓȚȠȎȘȜȗȚȎȟȘȖȒȖȢȢȡȕȖȭȜȟȡȧȓȟȠȐșȭșȎȟȪȐ ȑȞȎȢȖȠȜȐȜȚ ȘȜțȠȓȗțȓȞȓ ȟ ȫșȓȚȓțȠȎȞțȩȚ ȏȜȞȜȚ ȝȞȖ țȎȑȞȓȐȓ ȓȑȜ ȫșȓȘȠȞȜțțȩȚ șȡȥȜȚ ȒȜ ȠȓȚȝȓȞȎȠȡȞȩ 1600°ǿ Ȑ ȠȓȥȓțȖȓ 18 ȚȖț. ǽȞȖ ȫȠȜȚ ȑșȡȏȖțȎ ȕȎșȓȑȎțȖȭ șȓȑȖȞȜȐȎțțȩȣ ȟșȜȓȐ ȟȜȟȠȎȐȖșȎ 1.3 ȚȘȚ. ȁȒȎșȓțȖȓ ȡȑșȓȞȜȒțȜȗ ȚȎȟȘȖ ȝȞȜȐȜȒȖșȜȟȪ ȜȘȖȟșȓțȖȓȚ țȎ ȐȜȕȒȡȣȓ

ȝȞȖ ȠȓȚȝȓȞȎȠȡȞȓȝȜȞȭȒȘȎ600°ǿ. ǸȜțȠȞȜșȪȠȜȝȜșȜȑȖȖ, ȝȞȜȐȓȒȓțțȩȗ

ȟȝȜȚȜȧȪȬ ȡșȪȠȞȎȢȖȜșȓȠȜȐȜȗ ȕȎȟȐȓȠȘȖ, ȝȜȘȎȕȎș țȎșȖȥȖȓ șȬȚȖțȓȟȤȖȞȡȬȧȖȣșȜȘȎșȪțȩȣȜȏșȎȟȠȓȗȐȚȓȟȠȎȣȜȠȟȡȠȟȠȐȖȭ ȡȑșȓȞȜȒțȜȗ ȚȎȟȘȖ ȐȜ ȐȞȓȚȭ ȒȖȢȢȡȕȖȖ.

ǽșȎțȎȞțȩȓ 4H-SiC Ȗ6H-SiC p-n ȒȖȜȒȩ ȟȖȟȝȜșȪȕȜȐȎțȖȓȚ șȜȘȎșȪțȜȗ ȒȖȢȢȡȕȖȖ ȏȜȞȎ, ȏȩșȖ ȖȕȑȜȠȜȐșȓțȩ ȎȐȠȜȞȎȚȖ ȞȎȏȜȠ [285 288]. ǰ ȫȘȟȝȓȞȖȚȓțȠȎȣȖȟȝȜșȪȕȜȐȎșȖȟȪȝȜȒșȜȔȘȖn-6H-SiC Ȗn-4H-SiC (Cree)

ȟȫȝȖȠȎȘȟȖȎșȪțȩȚȖ ȟșȜȭȚȖ, șȓȑȖȞȜȐȎțțȩȓ ȎȕȜȠȜȚ ȟ ȘȜțȤȓțȠȞȎȤȖȓȗ 4.1¸1015 ȟȚ 3. ǽȜȟșȓ ȠȧȎȠȓșȪțȜȗ ȜȥȖȟȠȘȖ ȟ ȤȓșȪȬ ȡȒȎșȓțȖȭ ȜȞȑȎțȖȥȓȟȘȖȣ ȕȎȑȞȭȕțȓțȖȗ Ȗ ȎȒȟȜȞȏȖȞȜȐȎțțȩȣ ȎȠȜȚȜȐ ȚȓȠȎșșȜȐ, țȎ ȝȜȐȓȞȣțȜȟȠȪ țȎțȜȟȖșȟȭ ȝșȜȠțȩȗ ȟșȜȗ ȢȜȠȜȞȓȕȖȟȠȎ Ȗ ȖȟȝȜșȪȕȡȭ ȟȠȎțȒȎȞȠțȡȬȢȜȠȜșȖȠȜȑȞȎȢȖȬ, ȢȜȞȚȖȞȜȐȎșȟȭțȓȜȏȣȜȒȖȚȩȗȞȖȟȡțȜȘ. ǰ ȘȎȥȓȟȠȐȓ ȕȎȧȖȠțȜȗ ȚȎȟȘȖ ȝȞȖ ȒȖȢȢȡȕȖȖ ȏȜȞȎ, ȖȟȝȜșȪȕȜȐȎșȖȟȪ ȝȜșȖȘȞȖȟȠȎșșȖȥȓȟȘȖȓȝșȓțȘȖ, ȢȜȞȚȖȞȡȓȚȩȓȐȣȜȒȓȐȎȘȡȡȚțȜȑȜȜȠȔȖȑȎ ȢȜȠȜȞȓȕȖȟȠȎ. Dzșȭ ȝȞȓȒȜȠȐȞȎȧȓțȖȭ ȟȡȏșȖȚȎȤȖȜțțȜȑȜ ȠȞȎȐșȓțȖȭ, țȎ ȝȜȐȓȞȣțȜȟȠȪ ȟȠȞȡȘȠȡȞȩ ȒȜȝȜșțȖȠȓșȪțȜ țȎțȜȟȖșȟȭ ȡșȪȠȞȎȠȜțȘȖȗ ȟșȜȗ ȢȜȠȜȞȓȕȖȟȠȎ.

ǰȘȎȥȓȟȠȐȓ ȖȟȠȜȥțȖȘȎ ȒȖȢȢȡȕȎțȠȎ ȖȟȝȜșȪȕȜȐȎșȎȟȪ ȟȚȓȟȪ ȏȜȞȎ Ȗ ȝȜȞȜȦȘȎȘȎȞȏȖȒȎȘȞȓȚțȖȭ. DzȖȢȢȡȕȖȭȝȞȜȐȜȒȖșȎȟȪȝȞȖȠȓȚȝȓȞȎȠȡȞȓ 2000°ǿ Ȑ ȠȓȥȓțȖȓ 10 ȚȖțȡȠ, Ȑ ȎȠȚȜȟȢȓȞȓ ȎȞȑȜțȎ ȝȞȖ ȖțȒȡȘȤȖȜțțȜȚ țȎȑȞȓȐȓ ȒȖȢȢȡȕȎțȠȎ Ȑ ȘȐȎȞȤȓȐȜȚ ȘȜțȠȓȗțȓȞȓ. ǽȜȟșȓ ȒȖȢȢȡȕȖȖ ȑȞȎȢȖȠȜȐȎȭ ȚȎȟȘȎ ȡȒȎșȭșȎȟȪ ȠȞȎȐșȓțȖȓȚ Ȑ ȝșȎȕȚȓ ȘȖȟșȜȞȜȒȎ. Dzșȭ ȟȞȎȐțȓțȖȭ ȜȒțȜȐȞȓȚȓțțȜ ȏȩșȎ ȝȞȜșȓȑȖȞȜȐȎțȎ ȝȜȒșȜȔȘȎ SiC ȏȓȕ ȕȎȧȖȠțȜȗ ȚȎȟȘȖ.

ǾȖȟ. 8.26. ǺȜȞȢȜșȜȑȖȭ ȝȜȐȓȞȣțȜȟȠȖ ȝȜȒșȜȔȘȖ SiC ȝȜȟșȓ ȒȖȢȢȡȕȖȖ ȏȜȞȎ ȟ ȕȎȧȖȠțȜȗ ȝșȓțȘȜȗ (Ȏ) Ȗ ȏȓȕ ȕȎȧȖȠțȜȗ ȝșȓțȘȖ (ȏ)

196 ǮȑȓȓȐ Ǽ.Ǯ., ǯȓșȭȓȐ Ǯ.dz., ǯȜșȠȜȐȓȤ ǻ.ǿ., ǸȖȟȓșȓȐ ǰ.ǿ., ǸȜțȎȘȜȐȎ Ǿ.ǰ. Ȗ ȒȞ.

ǽȜȟșȓȝȞȜȐȓȒȓțȖȭȒȖȢȢȡȕȖȖȖȟȟșȓȒȜȐȎșȎȟȪȚȜȞȢȜșȜȑȖȭȝȜȐȓȞȣ- țȜȟȠȖȝȜȒșȜȔȘȖȚȓȠȜȒȜȚȎȠȜȚțȜ-ȟȖșȜȐȜȗȚȖȘȞȜȟȘȜȝȖȖ. ǻȎȞȖȟ. 8.26 ȝȞȓȒȟȠȎȐșȓțȩ ǮǿǺ ȖȕȜȏȞȎȔȓțȖȭ ȝȜȐȓȞȣțȜȟȠȖ ȝȜȒșȜȔȘȖ SiC ȝȜȟșȓ ȒȖȢȢȡȕȖȖ ȏȜȞȎ ȟ ȕȎȧȖȠțȜȗ ȝșȓțȘȜȗ (ȞȖȟ. 8.26Ȏ) Ȗ ȏȓȕ ȕȎȧȖȠțȜȗ ȝșȓțȘȖ(ȞȖȟ. 8.26ȏ) țȎȝșȜȧȎȒȘȓȞȎȕȚȓȞȜȚ5×5 ȚȘȚ2. ǻȎȝȜȐȓȞȣțȜȟȠȖ ȜȏȞȎȕȤȜȐ SiC ȏȓȕ ȒȜȝȜșțȖȠȓșȪțȜȗ ȕȎȧȖȠțȜȗ ȚȎȟȘȖ ȝȜȭȐșȭȬȠȟȭ ȞȓȑȡșȭȞțȩȓȏȜȞȜȕȒȩȖȡȐȓșȖȥȖȐȎȓȠȟȭȦȓȞȜȣȜȐȎȠȜȟȠȪ(ȏȜșȓȓ20 țȚ). ȆȓȞȜȣȜȐȎȠȜȟȠȪ ȝȜȐȓȞȣțȜȟȠȖ ȜȏȞȎȕȤȜȐ ȟ ȒȜȝȜșțȖȠȓșȪțȜȗ ȕȎȧȖȠțȜȗ ȚȎȟȘȜȗ Ȑ ȠȓȥȓțȖȓ ȒȖȢȢȡȕȖȖ țȓ ȖȕȚȓțȭșȎȟȪ (1.5 țȚ).

8.6. ǵȎȘșȬȥȓțȖȓ

dzȟșȖ ȟȜȝȜȟȠȎȐȖȠȪ ȫțȓȞȑȓȠȖȥȓȟȘȜȓ ȝȜșȜȔȓțȖȓ ȡȞȜȐțȓȗ Ȑ țȖȔțȓȗ ȝȜșȜȐȖțȓȕȎȝȞȓȧȓțțȜȗȕȜțȩ4ǻȖ6ǻ-SiC (ȠȎȏșȖȤȩ8.1 8.3), ȠȜȚȜȔțȜ ȕȎȚȓȠȖȠȪ, ȥȠȜ ȏȜșȪȦȖțȟȠȐȜ ȡȞȜȐțȓȗ țȎȣȜȒȖȠȟȭ ȐțȡȠȞȖ ȒȐȡȣ ȒȜȟȠȎȠȜȥțȜ ȡȕȘȖȣ ȝȜșȜȟ Ȑ ȕȎȝȞȓȧȓțțȜȗ ȕȜțȓ: Ev +0.5 0.6 ȫǰ (i-ȝȜșȜȟȎ) Ȗ Ev+0.2 0.3 ȫǰ(L-ȝȜșȜȟȎ). ǰțȡȠȞȖȝȓȞȐȜȗȝȜșȜȟȩțȎȣȜȒȖȠȟȭD-ȤȓțȠȞ, i-ȤȓțȠȞȖȡȞȜȐȓțȪȟȘȎțȒȖȭ; ȐțȡȠȞȖȐȠȜȞȜȗ – ȑșȡȏȜȘȖȗȎșȬȚȖțȖȗ, ȡȞȜȐȓțȪȑȎșșȖȭ, L-ȤȓțȠȞ. ȁȞȜȐȓțȪȏȜȞȎȠȎȘȔȓțȎȣȜȒȖȠȟȭȐțȡȠȞȖ(4ǻ) ȖșȖ ȐȏșȖȕȖ ȑȞȎțȖȤȩ (6ǻ) L-ȝȜșȜȟȩ. ǰ ȐȓȞȣțȓȗ ȝȜșȜȐȖțȓ ȕȎȝȞȓȧȓțțȜȗ ȕȜțȩ 4ǻ Ȗ 6ǻ-SiC ȡȞȜȐțȖ ȞȎȟȝȞȓȒȓșȓțȩ ȒȜȟȠȎȠȜȥțȜ ȞȎȐțȜȚȓȞțȜ Ȗ ȘȎȘȖȣ-șȖȏȜȝȜșȜȟ, ȟȜȐȝȎȒȎȬȧȖȣȒșȭȜȏȜȖȣȝȜșȖȠȖȝȜȐ, ȐȩȒȓșȖȠȪțȓȐȜȕȚȜȔțȜ. ǽȜȟȘȜșȪȘȡȝȎȞȎȚȓȠȞȩȜȒțȜȠȖȝțȩȣȤȓțȠȞȜȐ, ȜȏȞȎȕȡȬȧȖȣȟȭ

ȐțȖȔțȓȗ ȝȜșȜȐȖțȓ ȕȎȝȞȓȧȓțțȜȗ ȕȜțȩ ȞȎȕșȖȥțȩȣ ȝȜșȖȠȖȝȜȐ SiC ȏșȖȕȘȖ, ȠȜțȎșȖȥȖȓȝȜȒȜȏțȩȣȝȜșȜȟȚȜȔțȜȝȞȓȒȝȜșȜȔȖȠȪȖȐ ȒȞȡȑȖȣ ȝȜșȖȠȖȝȎȣȘȎȞȏȖȒȎȘȞȓȚțȖȭ. ǰ ȝȜșȪȕȡȫȠȜȑȜȑȜȐȜȞȖȠȟȣȜȒȟȠȐȜȣȎȞȎȘȠȓȞȖȟȠȖȘȖȝȞȜȝȜȞȤȖȜțȎșȪțȜȓȦȖȞȖțȓȕȎȝȞȓȧȓțțȜȗȕȜțȩȟȚȓȧȓțȖȓ ȚȎȘȟȖȚȡȚȜȐȜȟțȜȐțȩȣȝȜșȜȟȋǹȐȞȎȕșȖȥțȩȣȝȜșȖȠȖȝȎȣSiC (ȞȖȟ. 8.5). ǼȏȞȎȕȜȐȎțȖȓ ȠȎȘȖȣ ȝȜșȜȟ ȐțȡȠȞȖ ȕȎȝȞȓȧȓțțȩȣ ȕȜț ȞȎȕșȖȥțȩȣ ȝȜșȖȠȖȝȜȐ SiC ȟȐȖȒȓȠȓșȪȟȠȐȡȓȠ Ȝ țȎșȖȥȖȖ ȤȓțȠȞȜȐ, ȣȎȞȎȘȠȓȞțȩȣ Ȓșȭ SiC Ȑ ȤȓșȜȚ Ȗ ȟȐȭȕȎțțȩȣ ȟ ȐȎșȓțȠțȜȗ ȕȜțȜȗ, ȟȠȞȡȘȠȡȞȎ ȘȜȠȜȞȜȗ

ȐȞȎȕșȖȥțȩȣ ȝȜșȖȠȖȝȎȣ ȏșȖȕȘȎ. ǺȜȔțȜ ȠȎȘȔȓ ȝȞȓȒȝȜșȜȔȖȠȪ, ȥȠȜ ȘȎȔȒȎȭȝȜșȜȟȎȟȐȭȕȎțȎȟțȓȘȖȚ«ȏȎȕȜȐȩȚ», ȟȜȟȠȜȭȧȖȗȖȕȟȜȏȟȠȐȓțțȩȣ ȒȓȢȓȘȠȜȐ, ȤȓțȠȞȜȚ(ȐȝȓȞȐȜȚȟșȡȥȎȓȫȠȜi-ȤȓțȠȞ, ȐȜȐȠȜȞȜȚ – L-ȤȓțȠȞ), ȘȜȠȜȞȩȗ ȚȜȔȓȠ ȐȕȎȖȚȜȒȓȗȟȠȐȜȐȎȠȪ ȟ ȎȠȜȚȎȚȖ ȐȐȜȒȖȚȜȗ ȝȞȖȚȓȟȖ ȟ ȜȏȞȎȕȜȐȎțȖȓȚ ȒȞȡȑȖȣ ȤȓțȠȞȜȐ ȟ ȏșȖȕȘȖȚȖ ȝȎȞȎȚȓȠȞȎȚȖ.

ǸȎȘȜȗȔȓȟȜȏȟȠȐȓțțȩȗȒȓȢȓȘȠȚȜȔȓȠȏȩȠȪȜȟțȜȐțȩȚȫșȓȚȓțȠȜȚ ȝȞȖ ȢȜȞȚȖȞȜȐȎțȖȖ ȒȓȢȓȘȠțȩȣ ȘȜȚȝșȓȘȟȜȐ, ȜȏȞȎȕȡȬȧȖȣ DZȁ Ȑ SiC?

ǾȖȟ. 8.27. ǵȎȐȖȟȖȚȜȟȠȪ ȘȜțȤȓțȠȞȎȤȖȖ ȡȑșȓȞȜȒțȩȣ ( NVC ) Ȗ ȘȞȓȚ-

țȓȐȩȣ ( NVSi ) ȐȎȘȎțȟȖȗ [223] Ȗ ȟȞȓȒțȭȭ ȘȜțȤȓțȠȞȎȤȖȭ ȑșȡȏȜȘȖȣ ȡȞȜȐțȓȗ (i-, L-, D-ȤȓțȠȞȜȐ) Ȑ ǿȋ ȫȝȖȠȎȘȟȖȎșȪțȩȣ ȟșȜȭȣ Ȑ ȕȎȐȖȟȖȚȜȟȠȖȜȠȟȠȓȝȓțȖȑȓȘȟȎȑȜțȎșȪțȜȟȠȖ ȝȜșȖȠȖȝȎ SiC [221]

ǻȎ ȞȖȟ. 8.27 ȝȞȓȒȟȠȎȐșȓțȎ ȟȞȓȒțȭȭ ȘȜțȤȓțȠȞȎȤȖȭ 3-ȣ ȟȜȏȟȠȐȓțțȩȣ ȒȓȢȓȘȠȜȐ (i-, D- Ȗ L-ȤȓțȠȞȜȐ) Ȑ ȫȝȖȠȎȘȟȖȎșȪțȩȣ ȟșȜȭȣ 6ǻ Ȗ 4ǻ-SiC, ȝȜșȡȥȓțțȩȣȟȡȏșȖȚȎȤȖȜțțȜȗȫȝȖȠȎȘȟȖȓȗ[223]. ǸȎȘȐȖȒțȜȖȕȞȖȟȡțȘȎ, ȖȚȓȓȠȟȭ ȒȜȟȠȎȠȜȥțȜ ȣȜȞȜȦȎȭ ȘȜȞȞȓșȭȤȖȭ ȚȓȔȒȡ ȡȚȓțȪȦȓțȖȓȚ ȘȜțȤȓțȠȞȎȤȖȖ ȡȑșȓȞȜȒțȩȣ ȐȎȘȎțȟȖȗ (VC) ȟ ȡȐȓșȖȥȓțȖȓȚ ȝȞȜȤȓțȠȎ ȑȓȘȟȎȑȜțȎșȪțȜȟȠȖȝȜșȖȠȖȝȎȖȡȚȓțȪȦȓțȖȓȚȘȜțȤȓțȠȞȎȤȖȖȒȎțțȩȣ ȤȓțȠȞȜȐ.

ǰȝȜșȪȕȡ ȠȜȑȜ, ȥȠȜ ȜȟțȜȐțȩȚ ȘȜȚȝșȓȘȟȜȜȏȞȎȕȡȬȧȖȚ ȒȓȢȓȘȠȜȚ

ȐSiC ȭȐșȭȓȠȟȭ ȐȎȘȎțȟȖȭ ȡȑșȓȞȜȒȎ, ȑȜȐȜȞȭȠ Ȗ ȒȎțțȩȓ ȞȎȕșȖȥțȩȣ

ȎȐȠȜȞȜȐ, ȘȜȠȜȞȩȓ ȝȞȓȒȝȜșȎȑȎșȖ ȡȥȎȟȠȖȓ VC Ȑ ȜȏȞȎȕȜȐȎțȖȖ ȞȎȕșȖȥțȩȣ ȤȓțȠȞȜȐ, Ȏ ȠȎȘȔȓ ȟșȖȭțȖȓ ȜȠȒȓșȪțȩȣ ȐȎȘȎțȟȖȗ Ȑ ȡȟȠȜȗȥȖȐȩȓ ȘșȎȟȠȓȞȩ [172, 173]. ǼȠȚȓȠȖȚ, ȥȠȜ ȞȭȒ ȝȞȖȚȓȟȓȗ (Sc, B, Al) ȖȟȝȜșȪȕȡȓȚȩȣ ȝȞȖ ȑȓȠȓȞȜȫȝȖȠȎȘȟȖȖ SiC [212], ȜȏȞȎȕȡȓȠ DZȄ țȎȣȜȒȭȧȖȓȟȭ ȐțȡȠȞȖȜȠȚȓȥȓțțȩȣȐȩȦȓL- Ȗi-ȝȜșȜȟ. ǽȞȓȒșȜȔȓțțȡȬȐ[212] ȚȜȒȓșȪ ȑȓȠȓȞȜȝȜșȖȠȖȝțȜȗȫȝȖȠȎȘȟȖȖ(ȟȚȝ.ȝ. 8.3), ȚȜȔțȜȠȎȘȔȓȞȎȟȟȚȎȠȞȖȐȎȠȪ ȘȎȘ ȠȜ, ȥȠȜ ȘȎȔȒȜȚȡ Ȗȕ ȝȜșȖȠȖȝȜȐ SiC ȟȜȜȠȐȓȠȟȠȐȡȓȠ ȞȎȐțȜȐȓȟțȎȭ ȘȜțȤȓțȠȞȎȤȖȭ ȒȓȢȓȘȠȜȐ (ȐȎȘȎțȟȖȗ ȡȑșȓȞȜȒȎ), ȝȞȖ ȖȕȚȓțȓțȖȖ ȘȜȠȜȞȜȗ ȕȎ ȟȥȓȠ ȒȜȏȎȐșȓțȖȭ ȝȞȖȚȓȟȓȗ ȑȓțȓȞȖȞȡȬȧȖȣ ȖȕȏȩȠȜȥțȩȓ ȒȓȢȓȘȠȩ, șȖȏȜ țȎȜȏȜȞȜȠ ȟȐȭȕȩȐȎȬȧȖȣ ȐȎȘȎțȟȖȖ Ȑ ȘȜȚȝșȓȘȟȩ, ȐȜȕȚȜȔțȎȑȓȠȓȞȜȫȝȖȠȎȘȟȖȭȝșȓțȜȘȝȜșȖȠȖȝȜȐȖȚȓȬȧȖȣ, ȝȜȟȞȎȐțȓțȖȬ

ȟȝȜȒșȜȔȘȜȗ, ȚȓțȪȦȡȬ șȖȏȜ ȏȜșȪȦȡȬ ȟȠȓȝȓțȪ ȑȓȘȟȎȑȜțȎșȪțȜȟȠȖ, ȟȜȜȠȐȓȠȟȠȐȓțțȜ.

ȀȎȘ ȘȎȘ ȝȜȟșȓ ȜȏșȡȥȓțȖȭ Ȗ ȖȚȝșȎțȠȎȤȖȖ țȎȏșȬȒȎșȜȟȪ ȡȐȓșȖȥȓțȖȓȘȜțȤȓțȠȞȎȤȖȗ L- Ȗi-ȤȓțȠȞȜȐ[52, 134, 151] (Ƞ. ȓ. ȝȞȜȖȟȣȜȒȖșȜ ȖȕȚȓțȓțȖȓȞȎȐțȜȐȓȟțȜȗȘȜțȤȓțȠȞȎȤȖȖȐȎȘȎțȟȖȗ) ȠȜȚȜȔțȜȝȞȓȒȝȜșȜȔȖȠȪ[132, 23], ȥȠȜȝȜȒȐȜȕȒȓȗȟȠȐȖȓȚȜȏșȡȥȓțȖȭȖșȖȖȚȝșȎțȠȎȤȖȖ (șȖȏȜ ȒȞȡȑȖȣ ȠȓȣțȜșȜȑȖȥȓȟȘȖȣ ȝȞȖȥȖț) ȐȜȕȚȜȔțȎ ȠȞȎțȟȢȜȞȚȎȤȖȭ

198 ǮȑȓȓȐ Ǽ.Ǯ., ǯȓșȭȓȐ Ǯ.dz., ǯȜșȠȜȐȓȤ ǻ.ǿ., ǸȖȟȓșȓȐ ǰ.ǿ., ǸȜțȎȘȜȐȎ Ǿ.ǰ. Ȗ ȒȞ.

ȝȜșȖȠȖȝȎ ȡȔȓ ȐȩȞȎȧȓțțȩȣ ȫȝȖȠȎȘȟȖȎșȪțȩȣ ȟȠȞȡȘȠȡȞ. DzȎțțȜȓ ȝȞȓȒȝȜșȜȔȓțȖȓ ȟȜȑșȎȟȡȓȠȟȭ ȟ ȞȓȕȡșȪȠȎȠȎȚȖ ȞȎȏȜȠȩ [224] ȝȜȟȐȭȧȓțțȜȗ ȖȟȟșȓȒȜȐȎțȖȬ ȒȓȑȞȎȒȎȤȖȖ 6H-SiC ȟȖțȖȣ ȟȐȓȠȜȒȖȜȒȜȐ ȝȜȒ ȐȜȕȒȓȗȟȠȐȖȓȚ ȝȞȭȚȜȑȜȠȜȘȎ, ȑȒȓȏȩșȜȜȏțȎȞȡȔȓțȜ, ȥȠȜȐȒȓȑȞȎȒȖȞȜȐȎȐȦȖȣ ȟȠȞȡȘȠȡȞȎȣ ȝȜȭȐȖșȖȟȪ ȐȘșȬȥȓțȖȭ ȝȜșȖȠȖȝȎ 3ǿ.

ȀȎȘȖȚ ȜȏȞȎȕȜȚ, ȝȞȖȐȓȒȓțțȩȗ ȎțȎșȖȕ șȖȠȓȞȎȠȡȞțȩȣ ȖȟȠȜȥțȖȘȜȐ ȝȜȘȎȕȩȐȎȓȠ ȕțȎȥȖȠȓșȪțȜȓ ȐșȖȭțȖȓ, ȘȜȠȜȞȜȓ ȟȜȏȟȠȐȓțțȩȓ ȒȓȢȓȘȠȩ ȘȞȖȟȠȎșșȖȥȓȟȘȜȗ ȞȓȦȓȠȘȖ SiC ȜȘȎȕȩȐȎȬȠ ȘȎȘ țȎ ȢȜȞȚȖȞȜȐȎțȖȓ ȑșȡȏȜȘȖȣ ȤȓțȠȞȜȐ (Ȗ, ȟȜȜȠȐȓȠȟȠȐȓțțȜ, țȎ ȝȞȜȤȓȟȟȩ ȖȕșȡȥȎȠȓșȪțȜȗ Ȗ ȏȓȕȖȕșȡȥȎȠȓșȪțȜȗ ȞȓȘȜȚȏȖțȎȤȖȖ) ȠȎȘ Ȗ țȎ ȟȐȜȗȟȠȐȎ ȟȎȚȖȣ ȫȝȖȠȎȘȟȖȎșȪțȩȣȟșȜȓȐ – ȡȞȜȐȓțȪȖȣșȓȑȖȞȜȐȎțȖȭȖȝȜșȖȠȖȝțȡȬȜȒțȜȞȜȒțȜȟȠȪ. DzȓȠȎșȪțȜȓȖȟȟșȓȒȜȐȎțȖȓȢȎȘȠȜȞȜȐ, ȜȝȞȓȒȓșȭȬȧȖȣȝȞȜȤȓȟȟȩȜȏȞȎȕȜȐȎțȖȭȒȓȢȓȘȠȜȐȖȖȣȐȕȎȖȚȜȒȓȗȟȠȐȖȭȒȞȡȑȟȒȞȡȑȜȚȖȎȠȜȚȎȚȖȝȞȖȚȓȟȓȗ, ȝȜȕȐȜșȖȠ ȟȡȧȓȟȠȐȓțțȜ ȡșȡȥȦȖȠȪ ȝȎȞȎȚȓȠȞȩ ȝȞȖȏȜȞȜȐ țȎ ȜȟțȜȐȓ SiC Ȗ ȝȜȕȐȜșȖȠ ȘȎȞȏȖȒȡ ȘȞȓȚțȖȭ țȎȞȭȒȡ ȟ Si Ȗ GaAs ȕȎțȭȠȪ ȜȒțȜ Ȗȕ ȤȓțȠȞȎșȪțȩȣ ȚȓȟȠ Ȑ ȟȜȐȞȓȚȓțțȜȗ ȝȜșȡȝȞȜȐȜȒțȖȘȜȐȜȗ ȫșȓȘȠȞȜțȖȘȓ.

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