Твердотельная электроника.-2

.

(

«VARIety CAPacitance»)

,

.

p n

.

(

),

,

.

–

.

:

K

Cmax

.

(11.12)

Cmin

С

,

Сmin.

:

C

0S

,

(11.13)

d

, 0 -

,

;

d -

,

S -

-

.

C

C

Cinv

,

(11.14)

Cinv

min

C

Cinv -

.

C

s 0S

.

(11.15)

inv

W

W

(11.2),

4 s 0k T

Nd

W

ln

.

(11.16)

q

2N

ni

d

(11.13)

SiO2 .

:

SiO2

3.8 .

,

(11.13).

0S

3.8 8.85 10

14

1.5 10

2

50.4 10 11 504

C

5

.

d

10

W

(11.16),

4 11.7

8.85 10

14 1.38 10 23 300

1.4 1015

4 s 0k T

Nd

W

ln

2.56 10

38

ln

q

Nd

ni

1.4 10

1.4

10

1715

10 12 ln 105

4.8 10 10 5 ln 10

10 5

55.1

3.58

0.74

7.44

10 5

.

C

s 0S

11.7 8.85

10

14 1.5 10

2

155.3

10 11

inv

W

7.44 10 5

7.44

209

209 10 12

.

-

C

C

Cinv

504 209

105336

147

.

Cinv

504 209

min

C

713

,

:

З

2.

-

S 8.4 10 3 2 ,

,

d 0.1

SiO2

Si3N4

,

Сmin 155 .

.

Ф

СM IN

Cinv

C

С

C

Cinv

.

(11.17)

min

C

Cinv

.

C1 ( SiO2 )

C2

( Si3N4 )

,

1

2

C С

0

С

d d

1

S

С1

С2

d1 d2

1 2 0S

1

2

1

2

1 2

1

2

.

(11.18)

1 2 0S

d1

d2

d1

d2

d1d2

1 2 0S

1d2

d1d2

1d2

2d1

2d1

d1, d2 -

; 1,

2 -

.

(11.17)

С

C

Cmin

.

(11.19)

inv

C

Cmin

(11.23)

:

,

N( 0 )

104 n .

d

i

(11.23)

N(1) .

d

(11.23)

N ( 2 )

. .

,

d

,

j

,

( j

1)

-

.

10%, . .

N( j ) N( j 1)

0.1 .

d

d

(11.24)

N( j )

d

,

(11.23)

(2-3)

.

(11.23).

C

(11.17)

S

3.8 5.5

8.85 10 14

8.4 10 3

1 2 0

1d2

2d1

(3.8 0.05 5.5 0.05) 10 4

.

1554

10 17

3342 10 13

334 10 12

334

10 4

0.465

С

C

Cmin

334 155

51770

289 .

Cmin

334 155

inv

C

179

A

4k T C

2

4 1.38 10 23 300 83521 10 24

inv

2.56 10 38 11.7 8.85 10 14 70.56 10 6

q

2

s 0

S2

1382

3 .

103

1013

73.9 1013

18.7 103

N(1)

d

( 0 )

1.4 1014

N(1)

A ln

Nd

7.4 1014 ln

7.4 1014

4 ln 10

d

n

10

i

1.4 10

7.4 1014 4

2.3

6.8 1015 .

,

(11.24)

.

d

(1)

15

n

6.8

10

N( 2 )

A ln

Nd

7.4

1014 ln

10

7.4 1014 ln 4.9 105

10

i

1.4

15

7.4 1014 ln 4.9 5 2.3 7.4 1014 1.6 11.5 9.7 10 .

(11.24)

.

d

( 2 )

15

n

10

N( 3 )

A ln

Nd

7.4 1014 ln

9.7

10

7.4 1014 ln 6.9

105

10

i

1.4

3 .

15

7.4 1014 ln 6.9 5 2.3 7.4 1014 1.85 11.5 9.9 10

.

,

1.0 1016

3 .

-

,

n

-

N 1.4 1013

3

d

S 7.5 10 3 2 ,

,

d 0.1

Si3N4 ,

- 0.5 .

.

N

(

)

Q0 ,

(11.6)

N

Q0

C

V 0

С

V 0

.

(11.25)

q

q

q

Ф

(11.25)

Ec

Eg (

,

)

Ф

EF

Nd

EF Eg EF

Eg

Ei k T ln

ni

.

Ei k T ln

Nd

ni