Deposition of Diamond-Like Nitride and Carbide Coatings pra-0096

Full Title Technology of Deposition of Diamond-Like Nitride and Carbide Coatings onto Previously Ion-Implantation Modified Surfaces and the Installation for its Realization Tech Area / Field

• PHY-SSP: Physics / Solid State Physics

• MAN-MCH: Manufacturing Technology / Machinery and Tools

• MAT-SYN: Materials / Materials Synthesis and Processing

Brief Description of Technology It was shown experimentally that preliminary ion implantation improved service properties of strengthening coatings due to substrate hardening and adhesion improvement, especially for dielectrics. Deposition of Diamond-Like Carbon (DLC) Coating on a preliminary modified substrate can produce an effect that would be much greater than a mere sum of effects from both treatments. For instance, the 3-micrometers thick DLC coating improves the service life of taps by 3 to 5 times. The same coating deposited onto preliminary ion-treated taps yielded a 12- to 14-fold increase in their service life compared with standard taps. There was shown in laboratory and industry applications that TiN adhesion to the substrate is much better if the implantation and deposition are carried out in a single vacuum cycle.

There exists no equipment yet for industry applications permitting the combination of ion implantation treatment and coating deposition in a single vacuum technological cycle. One of the main reasons is the absence of simple and reliable ion beam sources capable of operating for long periods in technological installations for coating deposition, and in conditions of increased gas pressure and the presence of a reactive environment gas media.

We have developed a new type of ion source based on the cold cathode discharge. The source generates powerful ion beams with a large cross-section. If the project is carried out in full, we can develop and produce equipment for reliable serially produced units of DLC, nitrides and carbides deposition and original ion implantation. Research of cover structure, composition and properties is also intended.

Legal Aspects United States Patent No. 5,569,976: "Ion Emitter based on Cold Cathode Discharge,” N. V. Gavrilov, S. P. Nikulin; Russian Federation Patent No. 2,045,102: "Plasma Ion Emitter", N. V. Gavrilov, S. P. Nikulin

Special Facilities in Use and Their Specifications The installation is suitable for scientific, technological and industrial applications. Duration of the technological cycle is about four to six hours. The number of samples on 54 planetary rotatable holders is up to 150. Sample size is up to 200200200 millimeters. A cold cathode discharge in crossed electrical and magnetic fields is used in the ion source. The source generates beams of argon, nitrogen, oxygen and other gas ions with a cross-section of more than 100 cm², a beam current of up to 50 mA and ion energy up to 50 keV.

Scientific Papers I. Sh. Trakhtenberg, S. A. Plotnikov, O. M. Bakunin, S. G. Yakovleva, A. A. Nechaev, S. D. Gorpinchenko, L. G. Korshunov, N. V. Gavrilov, V. N. Mizgulin, "The effect of additional treatment on tribological properties of -C coatings on metals," Diamond and Related Materials, V.7, pp. 1020-1024 (1995).

S. D. Gorpinchenko, I. Sh. Trakhtenberg, O. M. Bakunin, S. A. Plotnikov, A. A. Nechaev, V. N. Mizgulin, N. V. Gavrilov, "Breakdown of -C coatings on ion-implantation modified metal alloys with a jet of abrasive particles," Diamond and Related Materials, V. 3, pp.779-782 (1994).