Статьи на перевод PVDF_P(VDF-TrFE) / Corona-poled piezoelectric polymer layers of P(VDF-TrFE) for micromachined silicon microphones

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Corona-poled piezoelectric polymer layers of P(VDF/TrFE) for micromachined silicon

microphones

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1995 J. Micromech. Microeng. 5 106

(http://iopscience.iop.org/0960-1317/5/2/012)

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