файлы от неё / Impl
.DOCИмплантация примесей в Si
|
B |
Al |
Ga |
P |
As |
Sb |
||||||
E, кэВ |
Rp, A |
ΔRp, A |
Rp, A |
ΔRp, A |
Rp, A |
ΔRp, A |
Rp, A |
ΔRp, A |
Rp, A |
ΔRp, A |
Rp, A |
ΔRp, A |
1 |
44 |
36 |
35 |
20 |
35 |
19 |
39 |
19 |
36 |
14 |
39 |
12 |
3 |
105 |
74 |
67 |
38 |
64 |
25 |
65 |
35 |
64 |
24 |
71 |
21 |
5 |
166 |
106 |
94 |
52 |
84 |
33 |
89 |
48 |
85 |
32 |
92 |
28 |
10 |
326 |
177 |
158 |
83 |
125 |
48 |
146 |
75 |
125 |
47 |
133 |
40 |
20 |
651 |
291 |
287 |
139 |
190 |
72 |
258 |
123 |
189 |
70 |
194 |
58 |
30 |
972 |
382 |
419 |
191 |
248 |
94 |
371 |
169 |
245 |
90 |
244 |
73 |
40 |
1285 |
456 |
557 |
242 |
304 |
114 |
489 |
214 |
298 |
109 |
289 |
86 |
50 |
1588 |
519 |
697 |
291 |
359 |
133 |
609 |
257 |
350 |
127 |
330 |
98 |
60 |
1880 |
573 |
840 |
337 |
413 |
152 |
731 |
300 |
402 |
145 |
370 |
110 |
70 |
2164 |
620 |
985 |
382 |
468 |
171 |
855 |
340 |
454 |
163 |
408 |
121 |
80 |
2438 |
662 |
1132 |
426 |
522 |
190 |
982 |
380 |
505 |
180 |
445 |
132 |
100 |
2964 |
733 |
1427 |
507 |
632 |
227 |
1238 |
457 |
608 |
214 |
517 |
153 |
120 |
3463 |
792 |
1725 |
583 |
743 |
263 |
1498 |
529 |
712 |
248 |
588 |
174 |
140 |
3938 |
842 |
2024 |
654 |
856 |
299 |
1761 |
597 |
817 |
281 |
658 |
194 |
160 |
4394 |
886 |
2321 |
720 |
912 |
317 |
2024 |
661 |
993 |
314 |
728 |
214 |
180 |
4832 |
923 |
2616 |
782 |
969 |
334 |
2288 |
723 |
1030 |
347 |
797 |
234 |
200 |
5254 |
957 |
2910 |
839 |
1084 |
369 |
2552 |
781 |
1138 |
379 |
866 |
252 |
220 |
5664 |
987 |
3291 |
894 |
1200 |
404 |
2814 |
836 |
1247 |
411 |
935 |
273 |
240 |
6061 |
1015 |
3489 |
945 |
1318 |
438 |
3076 |
888 |
1357 |
443 |
1005 |
292 |
260 |
6448 |
1040 |
3774 |
993 |
1436 |
472 |
3336 |
938 |
1468 |
474 |
1074 |
311 |
280 |
6825 |
1063 |
4056 |
1039 |
1556 |
505 |
3595 |
986 |
1580 |
506 |
1143 |
330 |
300 |
7194 |
1084 |
4335 |
1082 |
1676 |
538 |
3851 |
1032 |
1692 |
536 |
1213 |
349 |
350 |
8081 |
1131 |
5018 |
1181 |
1797 |
571 |
4485 |
1137 |
1977 |
612 |
1388 |
397 |
400 |
8928 |
1171 |
5682 |
1268 |
2414 |
728 |
5106 |
1232 |
2266 |
685 |
1565 |
444 |
500 |
10528 |
1236 |
6956 |
1417 |
3043 |
875 |
6309 |
1396 |
2853 |
826 |
1923 |
536 |
600 |
12031 |
1289 |
8163 |
1539 |
3680 |
1012 |
7461 |
1534 |
3448 |
959 |
2287 |
626 |
700 |
13463 |
1332 |
9312 |
1641 |
4319 |
1142 |
8567 |
1651 |
4048 |
1089 |
2657 |
715 |
800 |
14840 |
1369 |
10409 |
1728 |
4960 |
1263 |
9631 |
1752 |
4650 |
1203 |
3032 |
802 |
900 |
16174 |
1402 |
11460 |
1804 |
5599 |
1376 |
10655 |
1841 |
5253 |
1315 |
3412 |
888 |
1000 |
17472 |
1429 |
12470 |
1871 |
6235 |
1483 |
11643 |
1920 |
5854 |
1421 |
3795 |
971 |