
Седьмой семестр, вечерка, Мовнин и Шануренко / Плазменная электроника / Плазменные процессы и технологии
.pdf
!" #$% & ' ( ) * % !" ( %+
« »
. .
1
,# ) %
!"-. ( ) !% / %# . ( % %
2008
533.9(075.8)22.333 73
|
22 |
|
|
|
. . |
22 |
. . 1: / |
|
|
. . . – : ! "-# - |
|
|
# , 2008. – 141 . |
|
|
ISBN 5-98298-268-7 |
|
|
$ # " % |
|
|
& , '* # - |
|
|
. ! + ( ) " # |
|
|
#, |
+ " # + # . ; |
< "- # " #, ' " - = # + " % # , + "# " < , # % # < # .
# ! # % # <- % # ' «> # " ,» " " " # # 651000 «?" & » < 140303 «@ # %».
533.9(075.8)22.333 73
&- ,# " '* % % %
! < % A CD ; E
. .
ISBN 5-98298-268-7 |
© . ., 2008 |
|
© % % # , 2008 |
|
© D& . ! " < # |
|
# , 2008 |
2
$$F FE!F............................................................................................................... |
|
|
4 |
1. G H>DJ!>! FC !F ;DKFCCL............................................................ |
6 |
||
1.1. & # .......................................... |
6 |
||
1.2. < # " # .................... |
17 |
||
1.3. '* ............................................................................ |
20 |
||
1.4. C < ............................................................................................................ |
|
|
26 |
2. H G ;D D$ G H>DJ!>! FC D D C!E FH .............. |
43 |
||
2.1. E , ........................................... |
43 |
||
2.2. H |
# " % & % ................................................................................ |
46 |
|
2.3. H |
+ " % & %................................................................................. |
55 |
|
2.4. H |
# % & %................................................................................. |
64 |
|
2.5. " .......................................................................... |
66 |
||
$ " .............................................................................................. |
69 |
||
3. ; H FGFE!F ! D FH$;FM!$ E!F ;D D$ |
|
||
G H>DJ!>! FC !J ;DKFCCD$ ....................................................... |
71 |
||
3.1. ; " – ............................................................................. |
71 |
||
3.2. ; " – ............................................................................. |
85 |
||
3.3. > * + '* % " ........................................... |
90 |
||
$ " .............................................................................................. |
92 |
||
4. G H>DJ!>! FC !F FJEDGD !!..................................................... |
94 |
||
4.1. |
< ............................................................. |
94 |
|
4.2. |
+ " < ..................................................................... |
115 |
|
4.3. |
# " < .................................................................... |
119 |
|
$ " ............................................................................................ |
138 |
||
C !CD G! F; ;L.................................................................................... |
140 |
3
|
! |
|
" # % # % , " + * % # # |
# # " A , + < < +- |
|
, |
+ % < # +" . |
; ' ' # ' . C- < % (# <' # % # %) # < #,A " , " < A # " %. %= %% ' # - % # A " . -% " # # = 13 000 , "# – 8 000 .
" # % A # " , -# # % * A # " %- # # # * # , # # # < , . " # + < " # < #
% # # # |
A " < |
# # # # " # " # , |
+ < - |
< # * # , " " #. $ # % " "
& # % #, < = '* # + . E , # + # # # % - , # % A A # < # " A ' #, < +" # <" #. O # # # " %. C- " < % , -A %, + # # .
C *<' + < " # -" , " # < # # %=< ( , # " # ) # % # ,< # , + % , % " , < , '* # % - # " <' ( "<, ' %).
! < # % #-" %, ' :
* # # # # ;
# = ;
4
# # " # " # # # # # ;
# # " #.
; # # %, +< " # # " # " - % " = < # : # " " #, -+ " #, " #, " # #, -# ( #, & #, - %, A " " .). Q # = % , # , ,# # %. <= # # - ' " % % # -# " = , % % , " " # + < < # A < # . -< # = <, # " <, % <,# #, = "" # % # .
$ * # " & # #- ' # = % < # ' - % " " # " & ( & # = , & , # "-), " # " # " -" #.
D < A % # " # # -& # # A < # - % . # -# # ' # < , # * # &- # - % # # . O # # <' ' " % " % - % .
5

1.1." #$% & '" ()*+ ) ,$+ ' *% *-
$ + " < "# : # # # # # [1, 2] ( . 1).
. 1.
$ # & # ( – -
# # * # ( < ) – " # " % # ) # #- # , # # ' "<, ".
# , ( ) – < % ' % - % , # + =< " # % - , < " " # " % & –# % ( ).
$ < , " # " %- # , , " " # " # % & – + " %
(M) # " % ( ). H" < " # & # # * #'* " # # ". E , # -- # " " ( ) % # -
6
( ), A , + -% # + " , #%. C * # ' # :
– + " < ( –M);
– # " # * # ( – );
– + " < – # " # * # ( –M– ).
C + < % <', "-. D" <= # & # < , # # -" " ' , #
:
< ( ) + " (M) # " ( ) " #;
+ " < (M) + " (M), # " ( ) -( ) " #;
# " < ( ) " # # # " ( ), + "
(M) ( ) .
D , # #< # # & , * '- * " # # " % # , # -' .
% " =< # ,< , " # " % # " # - . ! # # #:
1. '* % # <' # (;), "- * A " ' '* -" # " % # .
$ A % - # # * , " # # A - " % , , " & & :
N2(;) + D2(;) 2ND( )
# # " " # # A # # " " % :
H2(;) + CmHn(;) C2H2( ) + H2( ); H2(;) + CmHn(;) C2H4( ) + H2( ).
$ + * # A # ' -# , = '* " -# * " # .
7
2. '* % # ( ;).
A % <, , " '* : N2( ;) + CmHn( ) ECN( ) + C2E2( );
D2( ;) + EC1( ) C12( ) + E2O( );
E2( ;) + SiCl4( ) SiHCl3( ) + HCI( );
E2( ;) + CmEnC1r( ) C2E2( ) + HCI( ).
H" < '* % < , <. A # # + # "" = # '* " .
3. '* % # =< ( ), - :
E2( ) + CE4( ) E2( ) + C2F4( );
E2( ) + CE4( ) E2( ) + C2E2( ).
A " A " ' , - = # ' '* " # # -. = # "X # ' +-# , . . < +"# # < " #. J '- * % # , " # + "#-< # # # ' . O < # ," & " # % # , " -
# < # '* .
$ < # " < < # " ( – ), + " ( –M) ( – ) " .
– '+ , # # , & # # * %.
+ , * # # % , "-, # # ' "<, " # - # % [1–4]. H < % = % " #" (IV) +# :
N2( ) + ZrSiO4( ) ZrO2( ) + SiO2( ). |
- |
" ' " (IV) |
|
( " ): |
|
N2( ) + MnSiO3( ) MnO( ) + SiO2( ). |
- |
C'" + # |
|
: |
|
N2( ) + (MgxFeyNiz)3·Si2O5(DE)4( ) |
|
3[ (MgO) + (FeO) + z(NiO)] + 2SiO2( ) + 2E2( ). |
|
8 |
|
+ <& " # # ' # " % - " # <& :
N2( ) + MoS2( ) Mo( ) + S2( );
N2( ) + WS2( ) W( ) + S2( ).
> + " # ' +-% " " # # # '* A # # # " = %[1, 3, 4]. % "# ' < " < #, , :
$" ( ) + l(NO3)3( ) 12O3( ) + ND2( ); $" ( ) + MgSO4( ) MgO( ) + SO3( ).
% % " # -+ ' + " " % = % [3, 4]. O '# + , , , A " " .
, +" # , # # +" # # # % # " " % :
CE4( ;) + Fe2O3( ) Fe( ) + E2O( ) + CO2( );
E2( ;) + CE4( ;) + Fe2O3( ) Fe( ) + E2( ).
O # % # + " , . . # ' " " % # -, " ' " # " # [6].
' <, , # <& , " ," . '* + E2, CD, CE4 < # - # < # , :
N2( ) + E2( ;) + NiO( ) Ni( ) + E2O( ) + N2( );
N2( ) + CO( ;) + NiO( ) Ni( ) + CO2( ) + N2( ); N2( ) + CE4( ;) + NiO( ) Ni( ) + E2O( ) + CO2( ) + N2( ).
% # # < + < # " – - " ( # # ). ; # '# # < '* . ;# # ' " A- # # " #
>mDn( ) + C( ) Me( ) + CD( ) + Q.
9
' , % " # -
" # [4, 5]. " # " " '
# # . + # # = -# A % " # % # " A " , # # % " # - # " .
# " & " # # " & <'* % + < , - , , :
" # #:
N2( ;) + Me( ) MeN( );
" # #:
CE4( ;) + SiO2( ) SiC( ) + 2E2D( ) + CO2( );
" # #:
O2( ;) + 1( ) 12O3( ).
$+ + , :
# % " < :
N2( ;) + C D( ) + C( ) CaCN2( ) + CD2( );
" :
N2( ;) + Ti( ) + C( ) TimCnNr( );
+ " " % :
N2( ) + NiO( ) + Fe2O3( ) NiFe2O4( ) + N2( );
N2( ) + CuO( ) + 12D3( ) Cu 12D4( ).
D ' " # ' , # # " # # # =< & # # * -# * # [1]. E , % # # " = % % & -12D3 ' #-' & -12D3 ( "). = - < ' :
" " & # # % -
" % , # " .;
" = # % # " # (- = # # #, " #, + " #)." # -
= . ; # # % # , + # # " %- # # < % , # " # .
10